CN212533113U - Vacuum coating machine - Google Patents
Vacuum coating machine Download PDFInfo
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- CN212533113U CN212533113U CN202020964469.8U CN202020964469U CN212533113U CN 212533113 U CN212533113 U CN 212533113U CN 202020964469 U CN202020964469 U CN 202020964469U CN 212533113 U CN212533113 U CN 212533113U
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Abstract
The utility model relates to the technical field of coating equipment, in particular to a vacuum coating machine, which comprises a vacuum box, a vacuumizing mechanism arranged outside the vacuum box and used for vacuumizing the vacuum box, a material rack arranged in the vacuum box, a first coating mechanism, a transmission mechanism, a driving mechanism, a second coating mechanism, a third coating mechanism and an ion source cleaning mechanism; the material rack is used for bearing a substrate to be coated; the first coating mechanism is used for coating an anti-fingerprint film on the substrate on the material frame; the transmission mechanism is used for driving the material rack and the first coating mechanism to rotate; the driving mechanism is used for driving the transmission mechanism to rotate; the second coating mechanism is used for coating a silicon film on the substrate on the material frame; the third film coating mechanism is used for coating an antibacterial film on the substrate on the material frame; the ion source cleaning mechanism is used for releasing plasma into the vacuum cavity to clean the substrate on the material rack. The vacuum coating machine of the utility model can coat various films on the substrate at the same time.
Description
Technical Field
The utility model relates to a coating equipment technical field, concretely relates to vacuum coating machine.
Background
The vacuum coating machine mainly refers to a coating device which needs to be carried out under higher vacuum degree, the coating mode specifically comprises vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like, the application is more evaporation and sputtering, the evaporation coating is generally that a target material is heated to evaporate surface components in a radical or ion form and the components are deposited on the surface of a substrate to form a film after a film forming process.
The vacuum coating machine in the prior art has single function, generally only one type of film layer can be coated on a substrate, and a plurality of devices are required to be matched to complete the coating work of the substrate during coating.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model provides a vacuum coating machine which can simultaneously coat a plurality of films on a substrate.
The utility model provides a technical scheme that its technical problem adopted is:
a vacuum coating machine comprises a vacuum box, a vacuumizing mechanism arranged outside the vacuum box and used for vacuumizing the vacuum box, a material rack arranged in the vacuum box, a first coating mechanism, a transmission mechanism, a driving mechanism, a second coating mechanism, a third coating mechanism and an ion source cleaning mechanism, wherein the material rack is arranged in the vacuum box;
the material rack is used for bearing a substrate to be coated;
the first coating mechanism is used for coating an anti-fingerprint film on the substrate on the material frame;
the transmission mechanism is used for driving the material rack and the first coating mechanism to rotate;
the driving mechanism is used for driving the transmission mechanism to rotate;
the second coating mechanism is used for coating a silicon film on the substrate on the material frame;
the third film coating mechanism is used for coating an antibacterial film on the substrate on the material frame;
the ion source cleaning mechanism is used for releasing plasma into the vacuum cavity to clean the substrate on the material rack.
The vacuum box comprises a vacuum chamber and two material chambers respectively hinged with two opposite sides of the vacuum chamber, each material chamber can be combined with the vacuum chamber to form a sealed cavity, a material frame, a first coating mechanism and a transmission mechanism are arranged in each material chamber, the driving mechanism, a second coating mechanism, a third coating mechanism and an ion source cleaning mechanism are arranged in the vacuum chamber, and when the material chambers are combined with the vacuum chamber, the driving mechanism drives the transmission mechanism to rotate.
Wherein, drive mechanism includes pivot, link, holds carrier, driving gear and a plurality of driven gear, the pivot is rotated and is located the material indoor, the center and the pivot fixed connection of the center of carrier, the carrier of link and driving gear, the material frame is provided with a plurality ofly, and is a plurality of the material frame is located on carrier along the circumferential edge circumference interval of driving gear, the upper end of material frame is rotated through first connecting rod and link and is connected, actuating mechanism is used for driving carrier and rotates, the lower extreme of material frame is passed through the second connecting rod and is connected with carrier rotation, driven gear is fixed to be located on the second connecting rod, driven gear and driving gear meshing.
The bearing part is a bearing gear, the driving mechanism comprises a driving gear arranged in the vacuum chamber and a motor used for driving the driving gear to rotate, and when the material chamber and the vacuum chamber are combined, the driving gear is meshed with the bearing gear.
The surface of each material frame is coated with a bearing film, one surface of each bearing film, far away from the material frame, is pasted with a double-sided tape, and the double-sided tape is used for pasting a protective film on the surface of the glass cover plate.
The first coating mechanism comprises a conductive pill rack for placing AF pills and a power supply electrically connected with the conductive pill rack, the conductive pill rack comprises two conductive support columns fixedly connected with a driving gear at the lower end and a plurality of first bearing assemblies arranged between the two conductive support columns from bottom to top, each first bearing assembly comprises two conductive connecting rods respectively connected with the two conductive support columns, two conductive belts with one ends respectively connected with the two conductive connecting rods and a conductive pill disk arranged between the two conductive belts and used for placing the AF pills, one end of each conductive connecting rod, far away from the conductive support columns, is provided with a conductive positioning cover, the conductive positioning cover is rotatably connected with a first locking screw, the first locking screw is in threaded connection with the end of each conductive connecting rod, and the conductive belts are clamped between the conductive positioning cover and the conductive connecting rods.
The conductive pill rack further comprises a plurality of second bearing assemblies arranged on one side, away from the first bearing assembly, of the conductive support, and the structures of the second bearing assemblies are the same as those of the first bearing assembly and are symmetrically arranged.
The vacuum chamber is internally provided with a first target material cavity, the opening of the first target material cavity is slidably provided with a first baffle plate for sealing the opening of the first target material cavity, the second coating mechanism is arranged in the first target material cavity, and the second coating mechanism comprises a silicon target and a first heater for heating the silicon target.
The vacuum chamber is internally provided with a second target material cavity, a second baffle plate used for sealing the opening of the first target material cavity is arranged at the opening of the second target material cavity in a sliding mode, and the third coating mechanism comprises a titanium-silver composite target and a second heater used for heating the titanium-silver composite target.
The ion source cleaning mechanism comprises a gas conveying device arranged outside the vacuum box and used for introducing clean gas into the cleaning cavity, and two electrodes fixedly arranged in the cleaning cavity, wherein the two electrodes are respectively electrically connected with an external high-voltage medium-frequency power supply, and an opening of the cleaning cavity is communicated with the vacuum chamber.
The utility model has the advantages that:
by adopting the structure, the vacuum coating machine can simultaneously carry out plasma surface cleaning, silicon coating, antibacterial coating and fingerprint preventing coating on the substrate to be coated, so that one vacuum coating machine can coat various types of films on the substrate, and the coating work on the substrate can be finished without the cooperation of other equipment, thereby effectively improving the working efficiency and reducing the equipment cost;
the utility model discloses a drive mechanism and actuating mechanism make coating film in-process material frame and first coating film mechanism can rotate, and then place the substrate on the material frame when making the coating film and can be rotated each position, make all substrates on the material frame all can be rotated the position that is close to first coating film mechanism, second coating film mechanism and third coating film mechanism, more be favorable to the even coating film of substrate surface.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic overall structure diagram of an embodiment of the present invention;
fig. 2 is a front view of an embodiment of the invention;
fig. 3 is a top view of a transmission mechanism according to an embodiment of the present invention;
fig. 4 is a schematic view of a connection structure between a first bearing assembly and a conductive pillar of a conductive pill rack according to an embodiment of the present invention;
fig. 5 is a schematic distribution diagram of the first bearing component and the second bearing component of the conductive pill rack according to the embodiment of the present invention on the conductive pillar;
fig. 6 is a schematic structural diagram of a conductive connecting rod according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a cleaning chamber according to an embodiment of the present invention.
Description of reference numerals: 11. a vacuum chamber; 12. a material chamber; 13. a first target material cavity; 14. a first baffle plate; 15. a second target material cavity; 17. a cleaning chamber; 2. a vacuum pumping mechanism; 3. a material rack; 31. a first connecting rod; 32. a second connecting rod; 33. a carrier film; 34. double-sided adhesive tape; 41. a conductive pill rack; 42. a conductive pillar; 43. a first load bearing assembly; 431. a conductive connecting rod; 432. a conductive tape; 433. a conductive pill tray; 434. a conductive positioning cover; 435. a first locking screw; 44. a second load bearing assembly; 51. a rotating shaft; 52. A connecting frame; 53. a carrier; 54. a driving gear; 55. a driven gear; 61. a drive gear; 71. a silicon target; 72. a first heater; 81. a titanium silver composite target; 82. a second heater; 91. an electrode; 92. a gas delivery device.
Detailed Description
The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and other embodiments obtained by those skilled in the art without inventive labor based on the embodiments of the present invention all belong to the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. The utility model discloses each technical feature in the creation can the interactive combination under the prerequisite that does not contradict conflict each other.
A vacuum coating machine is shown in figures 1-7 and comprises a vacuum box, a vacuumizing mechanism 2 arranged outside the vacuum box and used for vacuumizing the vacuum box, a material rack 3 arranged in the vacuum box, a first coating mechanism, a transmission mechanism, a driving mechanism, a second coating mechanism, a third coating mechanism and an ion source cleaning mechanism. Specifically, the vacuum pumping mechanism 2 is a vacuum pump. The material holder 3 is used for carrying a substrate to be coated. The first coating mechanism is used for coating the anti-fingerprint film on the substrate on the material frame 3. The transmission mechanism is used for driving the material rack 3 and the first coating mechanism to rotate. The driving mechanism is used for driving the transmission mechanism to rotate. The second coating mechanism is used for coating a silicon film on the substrate on the material rack 3. And the third coating mechanism is used for coating an antibacterial film on the substrate on the material frame 3. The ion source cleaning mechanism is used for releasing plasma into the vacuum cavity to clean the substrate on the material rack 3.
The utility model discloses a set up above-mentioned structure, make vacuum coating machine have the substrate of treating the coating film simultaneously and carry out plasma surface cleaning, the silicon coating film, the antibiotic membrane of plating and plate and prevent the fingerprint membrane, and through drive mechanism and actuating mechanism, make coating film in-process material frame 3 and first coating mechanism can rotate, and then place the substrate on material frame 3 during messenger's coating film and can be rotated each position, make all substrates on the material frame 3 all can be rotated and be close to first coating mechanism, the position of second coating mechanism and third coating mechanism, more be favorable to the even coating film in substrate surface.
During specific film coating, a substrate to be coated is placed on a material frame 3, then a vacuum box is vacuumized through a vacuumizing mechanism 2, then plasma is released into a vacuum cavity through an ion source cleaning mechanism to clean the surface of the substrate to be coated, then a substrate silicon film on the material frame 3 is coated through a second film coating mechanism, after the substrate silicon film is coated, an antibacterial film is coated on the substrate on the material frame 3 through a third film coating mechanism, after the antibacterial film is coated, a layer of silicon film is coated on the surface of the substrate again through the second film coating mechanism, and finally an anti-fingerprint AF film is coated on the surface of the substrate through the first film coating mechanism, so that the film coating work of the substrate is completed.
As shown in fig. 1 and 2, the vacuum box includes a vacuum chamber 11 and two material chambers 12 respectively hinged to two opposite sides of the vacuum chamber 11, each material chamber 12 can be combined with the vacuum chamber 11 to form a sealed cavity, a material rack 3, a first coating mechanism and a transmission mechanism are arranged in each material chamber 12, the driving mechanism, a second coating mechanism, a third coating mechanism and an ion source cleaning mechanism are arranged in the vacuum chamber 11, and when the material chambers 12 are combined with the vacuum chamber 11, the driving mechanism drives the transmission mechanism to rotate.
The utility model discloses a set up two and 11 lateral part articulated material rooms 12 in the real empty room, when making the substrate in one of them material room 12 carry out the coating film, the staff can be to the substrate of 3 installations of material frame in another material room 12 treating the coating film, and then after the substrate coating in last material room 12, can be at once with adorning material room 12 and real empty room 11 mergence of treating the coating film and continue the coating film work, that is to say the utility model discloses a set up two material rooms 12, carry out the coating film in turn to the substrate in two material rooms 12, compare the coating film machine of a material room 12 and a material frame 3, the utility model discloses a can save the time of installing the substrate during the coating film of coating film machine, improve coating film efficiency greatly.
As shown in fig. 1 to 3, the transmission mechanism includes a rotating shaft 51, a connecting frame 52, a carrying member 53, a driving gear 54, and a plurality of driven gears 55, the rotating shaft 51 is rotatably disposed in the material chamber 12, the center of the connecting frame 52, the center of the carrying member 53, and the center of the driving gear 54 are fixedly connected to the rotating shaft 51, the material frame 3 is provided with a plurality of material frames 3, the plurality of material frames 3 are circumferentially disposed on the carrying member 53 at intervals along the circumferential edge of the driving gear 54, the upper end of the material frame 3 is rotatably connected to the connecting frame 52 through a first connecting rod 31, the lower end of the material frame 3 is rotatably connected to the carrying member 53 through a second connecting rod 32, the driven gears 55 are fixedly disposed on the second connecting rod 32, the driven gears 55 are engaged with the driving gear 54, and the driving mechanism is configured to.
During coating, the driving carrier 53 is driven to rotate by the driving mechanism, so as to drive the rotating shaft 51, the connecting frame 52, the driving gear 54, the first coating mechanism and the plurality of material frames 3 arranged on the carrier 53 to synchronously rotate, and the driving gear 54 is meshed with the driven gear 55, so that the driving gear 54 drives the plurality of driven gears 55 to rotate when rotating, and further drives the plurality of material frames 3 to rotate.
To sum up, the utility model discloses a set up actuating mechanism and transmission, when making the coating film, material frame 3 can follow and hold the rotation of carrier 53 at vacuum coating machine internal motion to each position to do the rotation motion simultaneously, and install the glass apron on material frame 3 and follow material frame 3 motion, can avoid the glass apron to be in a position and lead to being located the inconsistent glass apron surface coating film thickness of different positions when the coating film always, be favorable to improving vacuum coating machine's coating film homogeneity.
Wherein the carrier 53 is a carrier gear, the driving mechanism includes a driving gear 61 disposed in the vacuum chamber 11 and a motor (not shown in the figure) for driving the driving gear 61 to rotate, and when the material chamber 12 and the vacuum chamber 11 are combined, the driving gear 61 and the carrier gear are engaged.
Through locating actuating mechanism on the real empty room 11, on the one hand can reduce the whole weight of material room 12, the staff of being convenient for promotes material room 12 and rotates, make material room 12 and real empty room 11 merge, on the other hand, because material room 12 and real empty room 11 merge or when opening, material room 12 all need take place the motion, if locate actuating mechanism on material room 12, actuating mechanism's motor need follow material room 12 and move, make the motor collide with outside material easily in the motion process and cause the motor impaired, consequently, be favorable to protecting the motor.
As shown in fig. 1, a carrier film 33 is coated on the surface of each material frame 3, a double-sided tape 34 is adhered to one surface, far away from the material frame 3, of the carrier film 33, and the double-sided tape 34 is used for adhering a protective film on the surface of the glass cover plate.
In order to protect the surface of the substrate, specifically, the substrate is a mobile phone glass cover plate to prevent the substrate from being scratched in the process of storage or transportation, the plurality of substrates are arranged and stuck on the protective film before film coating, and the protective films are stuck on two side surfaces of the substrate to form the material belt adhered with the plurality of substrates. When carrying out the coating film to the substrate, need tear the protection film that the coating film one side was treated to the substrate earlier, then paste the protection film of opposite side on the bearer membrane 33 on the material frame 3 through double-sided tape 34, make the glass apron be fixed in on the material frame 3, then carry out the coating film to the glass apron on the material frame 3 through vacuum coating machine, treat after the glass apron coating film, will plate the glass apron of membrane take off from the protection film can, compare couple and centre gripping manipulator, the utility model discloses a mode of the fixed glass apron of material frame 3 is simpler, and is difficult for making glass apron surface produce the mar when fixing the glass apron, more is favorable to protecting the glass apron, improves the yield, reduces subsequent manufacturing procedure. Specifically, the protection film is a plastic film with an adhesive on the surface, the bearing film 33 is a plastic film and is low in price, after coating, the bearing film 33 on the material frame 3 can be directly uncovered, and before a new glass cover plate is coated, the new bearing film 33 and double-faced adhesive paper are coated on the material frame 3, so that the operation is simple, the double-faced adhesive paper can be prevented from being directly adhered to the material frame 3, the material frame 3 is protected, the surface of the material frame 3 is kept flat all the time, and the installation of the glass cover plate is facilitated.
As shown in fig. 4-6, the first film coating mechanism includes a conductive pill rack 41 for placing AF pills and a power supply (not shown in the figure) electrically connected to the conductive pill rack 41, specifically, the AF pills are anti-fingerprint pills, the conductive pill rack 41 includes two conductive support columns 42 having lower ends fixedly connected to a driving gear 54, and a plurality of first bearing assemblies 43 disposed between the two conductive support columns 42 from bottom to top, the first bearing assemblies 43 include two conductive connecting rods 431 respectively connected to the two conductive support columns 42, two conductive strips 432 having one ends respectively connected to the two conductive connecting rods 431, and a conductive pill tray 433 disposed between the two conductive strips 432 for placing AF pills, a conductive positioning cover 434 is disposed at one end of the conductive connecting rod 431 far from the conductive support columns 42, and the conductive positioning cover 434 is rotatably connected to a first locking screw 435, the first locking screw 435 is in threaded connection with the end of the conductive connecting rod 431, and the conductive band 432 is sandwiched between the conductive positioning cover 434 and the conductive connecting rod 431.
By setting the above structure, when the conductive pill tray 433 needs to be replaced or maintained, only the first locking screw 435 needs to be rotated to move the first locking screw 435 to drive the conductive positioning cover 434 to move along the direction away from the conductive connecting rod 431, so that the conductive positioning cover 434 and the conductive connecting rod 431 do not clamp the conductive band 432 any more, at this time, the conductive band 432 and the conductive pill tray 433 can be taken down from the conductive pill rack 41, when the new conductive pill tray 433 is replaced, only two conductive bands 432 on both sides of the conductive pill tray 433 need to be placed between the conductive positioning cover 434 and the conductive connecting rod 431, then the first locking screw 435 is rotated to drive the conductive positioning cover 434 to move towards the end of the conductive connecting rod 431, so that the conductive positioning cover 434 and the end of the conductive connecting rod 431 are mutually matched to clamp the conductive band 432, and the installation of the conductive pill tray 433 can be completed, the utility model discloses a conductive pill dish 433 easy dismounting, the dismouting is efficient, when the impaired needs maintenance of conductive pill dish 433 or change, only need to be changed the new conductive pill dish 433 can, need not maintain and change whole pellet frame, be favorable to reducing cost of maintenance. Specifically, the conductive pill rack 41 is made of copper.
Specifically, when the surface of the substrate is to be plated with the AF fingerprint prevention film, the conductive pill rack 41 is powered on to generate heat by turning on the power supply electrically connected with the conductive pill rack 41, so that the AF pills placed on the conductive pill tray 433 are volatilized and plated on the substrate.
The conductive pill rack 41 further includes a plurality of second bearing assemblies 44 disposed on a side of the conductive support 42 away from the first bearing assembly 43, and the second bearing assemblies 44 have the same structure as the first bearing assembly 43 and are symmetrically disposed.
As shown in fig. 1-2, a first target chamber 13 is arranged in the vacuum chamber 11, a first baffle 14 for closing an opening of the first target chamber 13 is slidably disposed at an opening of the first target chamber 13, the second coating mechanism is disposed in the first target chamber 13, and the second coating mechanism includes a silicon target 71 and a first heater 72 for heating the silicon target 71.
When the silicon coating device is used specifically, the silicon target 71 is heated by the first heater 72, so that the silicon target 71 is heated and evaporated into small molecular substances and diffused into the vacuum chamber 11, and finally the small molecular substances are deposited on the surface of the substrate, thereby realizing the silicon coating of the surface of the substrate. The first baffle 14 is arranged, so that when the first coating mechanism and the third coating mechanism coat films, the first baffle 14 can block the opening of the first target cavity 13, and coating materials cannot diffuse into the first target cavity 13 when the first coating mechanism and the third coating mechanism coat films.
A second target material cavity 15 is arranged in the vacuum chamber 11, a second baffle (not shown in the figure) for closing an opening of the first target material cavity 13 is slidably arranged at an opening of the second target material cavity 15, and the third coating mechanism comprises a titanium-silver composite target 81 and a second heater 82 for heating the titanium-silver composite target 81.
When the titanium-silver composite film is used specifically, the titanium-silver composite target 81 is heated by the second heater 82, so that the titanium-silver composite target 81 is heated and evaporated into silver molecules and titanium molecules which are diffused into the vacuum chamber 11 and finally deposited on the surface of the substrate, and the titanium-silver composite film is plated on the surface of the substrate. The second baffle is arranged, so that when the first film coating mechanism and the second film coating mechanism are used for coating films, the second baffle can block the opening of the second target material cavity 15, and the film coating materials cannot diffuse into the second target material cavity 15 when the first film coating mechanism and the second film coating mechanism are used for coating films.
As shown in fig. 2 and 7, a cleaning chamber 17 is arranged in the vacuum chamber 11, the ion source cleaning mechanism includes a gas conveying device 92 arranged outside the vacuum box and used for introducing clean gas into the cleaning chamber 17, and two electrodes 91 fixedly arranged in the cleaning chamber 17, specifically, the two electrodes 91 are respectively positive and negative, the two electrodes 91 are respectively electrically connected with an external high-voltage intermediate-frequency power supply, and an opening of the cleaning chamber 17 is communicated with the vacuum chamber 11.
When the plasma cleaning device is used specifically, cleaning gas is introduced into the cleaning cavity 17 through the gas conveying device 92, the cleaning gas forms plasma under the action of connecting the two electrodes 91 of the high-voltage intermediate-frequency power supply, and the plasma enters the vacuum chamber 11 to clean the surface of the substrate.
Specifically, the cleaning gas is a mixture of oxygen and argon. The gas delivery device 92 includes a gas delivery pipe and a valve (not shown) disposed on the gas delivery pipe.
The working process is as follows:
when the coating machine of the utility model is used for coating the substrate, the coating machine comprises the following steps:
step one, mounting a substrate: attaching the material belt attached with a plurality of substrates to a double-sided adhesive tape 34 on a material frame 3 to fix the substrates on the material frame 3, tearing off a protective film attached to the side surface of the substrate to be coated, and combining a material chamber 12 provided with the substrates with a vacuum chamber 11 after the substrates on the material frame 3 are installed, so that the vacuum chamber 11 and the material chamber 12 form a sealed cavity;
step two, vacuumizing the vacuum chamber 11: vacuumizing the vacuum chamber 11 through the vacuumizing mechanism 2 to enable the air pressure in the vacuum chamber 11 to reach a working preset value;
step three, carrying out plasma cleaning on the substrate: starting a motor of the driving mechanism, wherein the motor drives a driving gear 61 to rotate, the driving gear 61 rotates to drive a bearing gear of the transmission device to rotate, and further drives a rotating shaft 51, a driving gear 54, a connecting frame 52, a material frame 3 and a conductive pill frame 41 to synchronously rotate, the driving gear 54 rotates to drive a driven gear 55 connected with the material frame 3 to rotate, and further the material frame 3 is driven to rotate while rotating along with the bearing gear; then, a high-voltage intermediate-frequency power supply electrically connected with the two electrodes 91 of the ion source cleaning mechanism is started, mixed gas of argon and oxygen is conveyed into the cleaning cavity 17 through a gas conveying device 92, the gas forms plasma under the action of the electrodes 91 and enters the vacuum chamber 11 to clean the surface of the substrate in the vacuum chamber 11, and after cleaning is finished, the power supplies of the two electrodes 91 are disconnected;
step four, plating a first silicon film on the substrate: sliding the first baffle plate 14 to enable the first baffle plate 14 not to block the opening of the first target material cavity 13, then starting a power supply of the first heater 72 to enable the first heater 72 to heat the silicon target 71, further enabling the silicon target 71 to be heated and evaporated into small molecular substances and to be diffused into the vacuum chamber 11, finally depositing the small molecular substances on the surface of the substrate to form a silicon film, and after the film coating is finished, closing the power supply of the first heater 72 and closing the opening of the first target material cavity 13;
step five, plating an antibacterial film on the substrate: sliding the second baffle plate to enable the second baffle plate not to block the opening of the second target material cavity 15 any more, then starting a power supply of the second heater 82 to enable the second heater 82 to heat the silver-titanium composite target, further enabling the silver-titanium composite target to be heated and evaporated into a small molecular substance and to be diffused into the vacuum chamber 11, finally depositing the small molecular substance on the surface of the substrate to form a silver-titanium composite antibacterial film, and after the film coating is finished, closing the power supply of the second heater 82 and closing the opening of the second target material cavity 15;
step six, plating a second silicon film on the substrate: repeating the step four to plate a second silicon film on the surface of the substrate;
step seven, plating an AF fingerprint prevention film on the substrate: the power supply electrically connected with the conductive pill rack 41 is turned on to electrify the conductive pill rack 41 to generate heat, so that the AF pills placed on the conductive pill tray 433 are volatilized and plated on the substrate.
And step eight, completing the film coating work of the substrate, opening the material chamber 12, taking down the substrate coated with the film layer on the material frame 3, combining the other material chamber 12 filled with the substrate to be coated with the vacuum chamber 11, and repeating the work of the step one to the step seven.
While the preferred embodiments of the present invention have been described, the present invention is not limited to the above embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are intended to be included within the scope of the present invention as defined by the appended claims.
Claims (10)
1. A vacuum coating machine is characterized in that: the device comprises a vacuum box, a vacuumizing mechanism arranged outside the vacuum box and used for vacuumizing the vacuum box, and a material rack, a first coating mechanism, a transmission mechanism, a driving mechanism, a second coating mechanism, a third coating mechanism and an ion source cleaning mechanism which are arranged in the vacuum box;
the material rack is used for bearing a substrate to be coated;
the first coating mechanism is used for coating an anti-fingerprint film on the substrate on the material frame;
the transmission mechanism is used for driving the material rack and the first coating mechanism to rotate;
the driving mechanism is used for driving the transmission mechanism to rotate;
the second coating mechanism is used for coating a silicon film on the substrate on the material frame;
the third film coating mechanism is used for coating an antibacterial film on the substrate on the material frame;
the ion source cleaning mechanism is used for releasing plasma into the vacuum cavity to clean the substrate on the material rack.
2. The vacuum coater according to claim 1, wherein: the vacuum box comprises a vacuum chamber and two material chambers respectively hinged with two opposite sides of the vacuum chamber, each material chamber can be combined with the vacuum chamber to form a sealed cavity, a material frame, a first coating mechanism and a transmission mechanism are arranged in each material chamber, the driving mechanism, a second coating mechanism, a third coating mechanism and an ion source cleaning mechanism are arranged in the vacuum chamber, and when the material chambers are combined with the vacuum chamber, the driving mechanism drives the transmission mechanism to rotate.
3. The vacuum coater according to claim 2, wherein: drive mechanism includes pivot, link, holds carrier, driving gear and a plurality of driven gear, the pivot is rotated and is located in the material chamber, the center and the pivot fixed connection of the center of carrier, the carrier of link and driving gear, the material frame is provided with a plurality ofly, and is a plurality of the material frame is located on holding the carrier along the circumferential edge circumference interval of driving gear, the upper end of material frame is rotated through first connecting rod and link and is connected, actuating mechanism is used for driving and holds carrier rotation, the lower extreme of material frame passes through the second connecting rod and holds carrier rotation and be connected, driven gear is fixed to be located on the second connecting rod, driven gear and driving gear meshing.
4. A vacuum coater as claimed in claim 3, wherein: the bearing part is a bearing gear, the driving mechanism comprises a driving gear arranged in the vacuum chamber and a motor used for driving the driving gear to rotate, and when the material chamber and the vacuum chamber are combined, the driving gear is meshed with the bearing gear.
5. A vacuum coater as claimed in claim 3, wherein: every the surface cladding of material frame has the carrier film, the carrier film is kept away from the one side of material frame and is pasted double-sided tape, double-sided tape is used for pasting the protection film on glass apron surface.
6. A vacuum coater as claimed in claim 3, wherein: first coating mechanism is including the electrically conductive pellet frame that is used for placing the AF pellet and the power of being connected with electrically conductive pellet frame electricity, electrically conductive pellet frame includes two electrically conductive pillars of lower extreme and driving gear fixed connection, from supreme a plurality of first carrier assembly of locating between two electrically conductive pillars down, first carrier assembly is including two electrically conductive connecting rods of being connected with two electrically conductive pillars respectively, two conductive bands that one end is connected with two electrically conductive connecting rods respectively and locate the electrically conductive pellet dish that is used for placing the AF pellet between two conductive bands, the one end that electrically conductive connecting rod kept away from electrically conductive pillar is equipped with electrically conductive location lid, electrically conductive location is covered and is rotated and connect first locking screw, the tip threaded connection of first locking screw and electrically conductive connecting rod, the electrically conductive band clamp is located between electrically conductive location lid and the electrically conductive connecting rod.
7. The vacuum coater according to claim 6, wherein: the conductive pill rack further comprises a plurality of second bearing assemblies arranged on one side, away from the first bearing assembly, of the conductive support, and the structures of the second bearing assemblies are the same as those of the first bearing assembly and are symmetrically arranged.
8. The vacuum coater according to claim 7, wherein: the vacuum chamber is internally provided with a first target material cavity, a first baffle plate used for sealing an opening of the first target material cavity is arranged at an opening of the first target material cavity in a sliding mode, the second coating mechanism is arranged in the first target material cavity and comprises a silicon target and a first heater used for heating the silicon target.
9. The vacuum coater according to claim 2, wherein: the vacuum chamber is internally provided with a second target material cavity, a second baffle plate used for sealing the opening of the first target material cavity is arranged at the opening of the second target material cavity in a sliding mode, and the third coating mechanism comprises a titanium-silver composite target and a second heater used for heating the titanium-silver composite target.
10. The vacuum coater according to claim 2, wherein: the ion source cleaning mechanism comprises a gas conveying device arranged outside the vacuum box and used for introducing clean gas into the cleaning cavity and two electrodes fixedly arranged in the cleaning cavity, the two electrodes are respectively electrically connected with an external high-voltage medium-frequency power supply, and an opening of the cleaning cavity is communicated with the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020964469.8U CN212533113U (en) | 2020-05-29 | 2020-05-29 | Vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020964469.8U CN212533113U (en) | 2020-05-29 | 2020-05-29 | Vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212533113U true CN212533113U (en) | 2021-02-12 |
Family
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113652665A (en) * | 2021-08-18 | 2021-11-16 | 杨智仁 | Vacuum coating system with cleaning device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113652665A (en) * | 2021-08-18 | 2021-11-16 | 杨智仁 | Vacuum coating system with cleaning device |
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