CN212533114U

CN212533114U - Coating mechanism for coating AF (AF) film

Info

Publication number: CN212533114U
Application number: CN202020964665.5U
Authority: CN
Inventors: 唐光安; 李勇聪; 梁凤连; 梁金培
Original assignee: Shenzhen Xinhao Photoelectric Technology Co ltd
Current assignee: Shenzhen Xinhao Photoelectric Technology Co ltd
Priority date: 2020-05-29
Filing date: 2020-05-29
Publication date: 2021-02-12
Anticipated expiration: 2030-05-29

Abstract

The utility model relates to the technical field of vacuum coating machines, in particular to a coating mechanism for coating AF (AF) films, which comprises a conductive pill rack arranged in a vacuum coating machine and used for installing AF pills, a material rack arranged in the vacuum coating machine and used for installing a glass cover plate, a transmission device used for driving the pill rack and the material rack to rotate and a driving device used for driving the transmission device to rotate, the transmission device comprises a rotating shaft, a connecting frame, a bearing piece, a driving gear and a plurality of driven gears, the pivot rotates and locates in the vacuum coating machine, the center of link, the center that holds carrier and the center and the pivot fixed connection of driving gear, it is a plurality of the material frame is located on holding the carrier along the circumferential edge circumference interval of driving gear, every the upper and lower end of material frame rotates with link and carrier respectively and is connected, driven gear is fixed the bottom of locating the material frame and meshes with the driving gear. The utility model can improve the uniformity of the AF film plated by the vacuum coating machine.

Description

Coating mechanism for coating AF (AF) film

Technical Field

The utility model relates to a vacuum coating machine technical field, concretely relates to coating mechanism for coating AF membrane.

Background

The vacuum coating machine mainly refers to a coating device which needs to be carried out under higher vacuum degree, the coating mode specifically comprises vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like, the application is more evaporation and sputtering, the evaporation coating generally comprises heating a target material to evaporate surface components in atomic group or ion form and deposit the components on the surface of a substrate to form a film after a film forming process, the sputtering coating can be simply understood as bombarding the target material by using electrons or high-energy laser, enabling the surface components to be sputtered out in atomic group or ion form and finally deposit the components on the surface of the substrate to form the film after the film forming process.

However, the target material in the existing vacuum coating machine is fixedly arranged in the vacuum chamber, so that the density of evaporated substances evaporated from the target material at each position is different, and the thickness of the film finally deposited at each position on the surface of the substrate is inconsistent, thereby causing uneven coating.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides a coating mechanism for coating AF film, which can improve the uniformity of the AF film coated by a vacuum coating machine.

The utility model provides a technical scheme that its technical problem adopted is:

a coating mechanism for coating an AF (AF) film comprises a conductive pill frame, a material frame, a transmission device and a driving device, wherein the conductive pill frame is arranged in a vacuum coating machine and used for mounting AF pills, the material frame is arranged in the vacuum coating machine and used for mounting a glass cover plate, the transmission device is used for driving the pill frame and the material frame to rotate and driving the transmission device to rotate, the transmission device comprises a rotating shaft, a connecting frame, a bearing piece, a driving gear and a plurality of driven gears, the rotating shaft is rotatably arranged in the vacuum coating machine, the center of the connecting frame, the center of the bearing piece and the center of the driving gear are fixedly connected with the rotating shaft, the material frames are arranged on the bearing piece at intervals along the circumferential edge of the driving gear, the upper end and the lower end of each material frame are respectively rotatably connected with the connecting frame and the bearing piece, the driven gears are fixedly arranged at the, the conductive pill rack is fixedly arranged on the driving gear and is connected with a power supply.

The surface of each material frame is coated with a bearing film, one surface of each bearing film, far away from the material frame, is pasted with a double-sided tape, and the double-sided tape is used for pasting a protective film on the surface of the glass cover plate.

The upper end of the material frame is rotatably connected with the connecting frame through a first connecting rod, the lower end of the material frame is rotatably connected with the bearing piece through a second connecting rod, the driven gear is fixedly arranged on the second connecting rod, the material frame comprises an upper cover plate fixedly connected with the first connecting rod, a lower cover plate fixedly connected with the second connecting rod and a plurality of supporting panels fixedly arranged between the upper cover plate and the lower cover plate, the supporting panels are enclosed to form a prism, and the bearing film is coated on the surfaces of the supporting panels.

Wherein, the bearing film is a plastic film.

The conductive pill rack comprises two conductive support columns fixedly connected with a driving gear and a first bearing assembly arranged between the two conductive support columns, the first bearing assembly comprises two conductive connecting rods respectively connected with the two conductive support columns, two conductive belts with one ends respectively connected with the two conductive connecting rods and a conductive pill tray arranged between the two conductive belts and used for placing AF pills, one end, far away from the conductive support columns, of the conductive connecting rod is provided with a conductive positioning cover, the conductive positioning cover is rotatably connected with a first locking screw rod, the first locking screw rod is in threaded connection with the end of the conductive connecting rod, and the conductive belt is clamped between the conductive positioning cover and the conductive connecting rods.

The electric conduction support column is a rectangular column, the electric conduction connecting rod comprises a clamping portion and a supporting portion, the clamping portion is used for being connected with the electric conduction support column in a clamping mode, one end of the supporting portion is connected with the first locking screw in a threaded mode, the clamping portion comprises a connecting section connected with the supporting portion and two clamping sections respectively fixedly connected with two end portions of the connecting section, the clamping sections are respectively used for clamping two opposite side portions of the electric conduction support column, and the cross section of the clamping portion is in a U shape.

The conductive pill rack further comprises a second bearing component and a second locking screw rod, the second bearing component is arranged on the conductive support column and is far away from one side of the first bearing component, the second locking screw rod is used for fixing the first bearing component and the second bearing component, the structure of the second bearing component is identical to that of the first bearing component and is symmetrically arranged, two clamping sections of the clamping portion are provided with locking holes in threaded connection with the second locking screw rod, and the second locking screw rod sequentially penetrates through the locking holes of the clamping sections of the two clamping portions to enable the two clamping portions to be fixedly connected.

The conductive columns are provided with a plurality of groups of first bearing assemblies and a plurality of groups of second bearing assemblies at equal intervals from bottom to top, and the plurality of groups of first bearing assemblies correspond to the plurality of groups of second bearing assemblies one to one.

Wherein the conductive pill tray is in clamping fit with the AF pill.

The utility model has the advantages that:

the utility model is provided with the driving device and the transmission device, when coating, the material frame can move to each position inside the vacuum coating machine along with the rotation of the bearing piece and simultaneously performs autorotation movement, and the glass cover plate arranged on the material frame moves along with the material frame, thereby avoiding the problem that the thickness of the coating film on the surface of the glass cover plate positioned at different positions is inconsistent because the glass cover plate is always positioned at one position during coating, which is beneficial to improving the coating uniformity of the vacuum coating machine, on the other hand, the conductive pill frame rotates under the driving of the driving gear, the conductive pill frame can drive the AF pill to move in the rotating process, so that the ions or atomic groups generated by the AF pill can be distributed at each position in the vacuum coating machine, further, the density of the ions or atomic groups distributed at each position in the vacuum coating machine is more uniform, and the AF film on the surface of the coated glass cover plate is, the coating uniformity of the vacuum coating machine is improved.

Drawings

The present invention will be further explained with reference to the drawings and examples.

Fig. 1 is a schematic overall structure diagram of an embodiment of the present invention;

fig. 2 is a schematic structural view of a transmission device according to an embodiment of the present invention;

fig. 3 is a front view of an embodiment of the present invention;

fig. 4 is a front view of a conductive pill rack in accordance with an embodiment of the present invention;

fig. 5 is a side view of a conductive pill rack in accordance with an embodiment of the present invention;

fig. 6 is a schematic structural diagram of the conductive connecting rod according to the embodiment of the present invention.

Description of reference numerals: 1. a protection box; 2. a conductive pill rack; 21. a conductive pillar; 22. a first load bearing assembly; 23. a conductive connecting rod; 231. a clamping part; 2311. a connecting section; 2312. a clamping section; 232. a support portion; 24. a conductive tape; 25. a conductive pill tray; 26. a conductive positioning cover; 27. a first locking screw; 28. a second load bearing assembly; 29. a second locking screw; 3. a material rack; 31. a carrier film; 32. double-sided adhesive tape; 33. a first connecting rod; 34. a second connecting rod; 35. an upper cover plate; 36. a lower cover plate; 37. a support panel; 4. a transmission device; 41. a rotating shaft; 42. a connecting frame; 43. a carrier; 44. a driving gear; 45. a driven gear.

Detailed Description

The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and other embodiments obtained by those skilled in the art without inventive labor based on the embodiments of the present invention all belong to the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. The utility model discloses each technical feature in the creation can the interactive combination under the prerequisite that does not contradict conflict each other.

A coating mechanism for coating an AF film comprises a conductive pill rack 2 arranged in a vacuum coating machine and used for installing AF pills, a plurality of material racks 3 arranged in the vacuum coating machine and used for installing glass cover plates, a transmission device 4 used for driving the pill racks and the material racks 3 to rotate and a driving device used for driving the transmission device 4 to rotate, wherein the transmission device 4 comprises a rotating shaft 41, a connecting rack 42, a bearing piece 43, a driving gear 44 and a plurality of driven gears 45, the rotating shaft 41 is rotatably arranged in the vacuum coating machine, the center of the connecting rack 42, the center of the bearing piece 43 and the center of the driving gear 44 are fixedly connected with the rotating shaft 41, the plurality of material racks 3 are arranged on the bearing piece 43 at intervals along the circumferential edge of the driving gear 44, and the upper end and the lower end of each material rack 3 are respectively and rotatably connected with the connecting rack 42 and the bearing piece 43, the driven gear 45 is fixedly arranged at the bottom of the material frame 3 and is meshed with the driving gear 44, the driving bearing part 43 is driven to rotate by the driving device, specifically, the driving device is a motor (not shown in the figure), the conductive pill frame 2 is fixedly arranged on the driving gear 44, and the conductive pill frame 2 is connected with a power supply (not shown in the figure).

During coating, the driving device drives the carrier 43 to rotate, so as to drive the rotating shaft 41, the connecting frame 42, the driving gear 44, the conductive pill rack 2 and the plurality of material racks 3 arranged on the carrier 43 to synchronously rotate, and the driving gear 44 is engaged with the driven gear 45, so that the driving gear 44 drives the plurality of driven gears 45 to rotate when rotating, and further drives the plurality of material racks 3 to rotate.

To sum up, the utility model is provided with the driving device and the transmission device 4, when coating, the material frame 3 can move to each position inside the vacuum coating machine along with the rotation of the bearing part 43 and simultaneously do autorotation movement, and the glass cover plate arranged on the material frame 3 moves along with the material frame 3, which can avoid the problem that the surface coating thickness of the glass cover plate at different positions is inconsistent because the glass cover plate is always in one position during coating, thus being beneficial to improving the coating uniformity of the vacuum coating machine, on the other hand, the conductive pill frame 2 rotates under the driving of the driving gear 44, the conductive pill frame 2 can drive the AF pills to move in the rotating process, the ions or atomic groups generated by the AF pills can be distributed at each position inside the vacuum coating machine, and further, the density of the ions or atomic groups distributed at each position inside the vacuum coating machine is more uniform, the AF film on the surface of the coated glass cover plate is more uniform, and the coating uniformity of the vacuum coating machine is improved.

As shown in fig. 1, the surface of each material frame 3 is coated with a carrier film 31, one surface of the carrier film 31, which is far away from the material frame 3, is adhered with a double-sided tape 32, and the double-sided tape 32 is used for adhering a protective film on the surface of the glass cover plate.

In order to protect the surface of the glass cover plate and prevent the glass cover plate from being scratched in the storage or transportation process, the glass cover plates are arranged and stuck on the protective films before film coating, the protective films are stuck on two side surfaces of each glass cover plate, and the material belt with the glass cover plates is formed. When carrying out the coating film to the glass apron, need tear the protection film that glass apron waited coating film one side earlier, then paste the protection film of opposite side on the bearer membrane 31 on the material frame 3 through double-sided tape 32, make the glass apron be fixed in on the material frame 3, then carry out the coating film to the glass apron on the material frame 3 through vacuum coating machine, treat after the glass apron coating film, will plate the glass apron of membrane take off from the protection film can, compare couple and centre gripping manipulator, the utility model discloses a mode of the fixed glass apron of material frame 3 is simpler, and is difficult for making glass apron surface production mar when fixing the glass apron, more is favorable to protecting the glass apron, improves the yield, reduces subsequent manufacturing procedure. Specifically, the protective film is a plastic film with an adhesive arranged on the surface and used for adhering the glass cover plate.

As shown in fig. 1 and 3, the upper end of the material frame 3 is rotatably connected to the connecting frame 42 through the first connecting rod 33, the lower end of the material frame 3 is rotatably connected to the carrier 43 through the second connecting rod 34, the driven gear 45 is fixedly disposed on the second connecting rod 34, the material frame 3 includes an upper cover plate 35 fixedly connected to the first connecting rod 33, a lower cover plate 36 fixedly connected to the second connecting rod 34, and a plurality of support panels 37 fixedly disposed between the upper cover plate 35 and the lower cover plate 36, the plurality of support panels 37 enclose to form a prism, and the carrier film 31 covers the surfaces of the plurality of support panels 37.

Specifically, in this embodiment, the supporting panel 37 is provided with three, three the supporting panel 37 encloses to close and forms the triangular prism, the carrier film 31 adhesion is in a plurality of supporting panel 37 surfaces, and supporting panel 37's setting makes the surface area of material frame 3 bigger, makes the glass apron that can once only install a plurality of treats coating film on the material frame 3, and then makes the coating film work that vacuum coating machine can once only accomplish a plurality of glass apron, is favorable to improving coating film efficiency.

The bearing film 31 is a plastic film, the price is low, after film coating, the bearing film 31 on the material frame 3 can be directly uncovered, and before a new glass cover plate is required to be coated, the material frame 3 is coated with the new bearing film 31 and double-sided adhesive paper, so that the operation is simple, the double-sided adhesive paper can be prevented from being directly pasted on the material frame 3, the material frame 3 is protected, the surface of the material frame 3 is kept flat all the time, and the installation of the glass cover plate is facilitated.

As shown in fig. 4 and 5, the conductive pill rack 2 includes two conductive support columns 21 with lower ends fixedly connected to the driving gear 44 and a first bearing assembly 22 disposed between the two conductive support columns 21, the first bearing assembly 22 includes two conductive connecting rods 23 respectively connected to the two conductive support columns 21, two conductive bands 24 with one ends respectively connected to the two conductive connecting rods 23, and a conductive pill tray 25 disposed between the two conductive bands 24 and used for placing AF pills, a conductive positioning cover 26 is disposed at one end of the conductive connecting rod 23 away from the conductive support columns 21, a first locking screw 27 is rotatably connected to the conductive positioning cover 26, the first locking screw 27 is in threaded connection with an end of the conductive connecting rod 23, and the conductive band 24 is sandwiched between the conductive positioning cover 26 and the conductive connecting rod 23.

By arranging the above structure, when the conductive pill tray 25 needs to be replaced or maintained, only the first locking screw 27 needs to be rotated to drive the conductive positioning cover 26 to move along the direction far away from the conductive connecting rod 23, so that the conductive positioning cover 26 and the conductive connecting rod 23 do not clamp the conductive belt 24 any more, at this time, the conductive belt 24 and the conductive pill tray 25 can be taken down from the conductive pill rack 2, when the new conductive pill tray 25 is replaced, only two conductive belts 24 on two sides of the conductive pill tray 25 need to be placed between the conductive positioning cover 26 and the conductive connecting rod 23, then the first locking screw 27 is rotated to drive the conductive positioning cover 26 to move towards the end part of the conductive connecting rod 23, so that the end parts of the conductive positioning cover 26 and the conductive connecting rod 23 are mutually matched to clamp the conductive belt 24, and the installation of the conductive pill tray 25 can be completed, the utility model discloses a conductive pill dish 25 easy dismounting, the dismouting is efficient, when the impaired needs maintenance of conductive pill dish 25 or change, only need to be changed the new conductive pill dish 25 can, need not maintain and change whole pellet frame, be favorable to reducing cost of maintenance.

As shown in fig. 6, the conductive support post 21 is a rectangular column, the conductive connecting rod 23 includes a clamping portion 231 for clamping and matching with the conductive support post 21 and a supporting portion 232 having one end connected with the first locking screw 27 through a thread, the clamping portion 231 includes a connecting section 2311 connected with the supporting portion 232 and two clamping sections 2312 respectively fixedly connected with two ends of the connecting section 2311, the two clamping sections 2312 are respectively used for clamping two opposite side portions of the conductive support post 21, and the cross section of the clamping portion 231 is U-shaped.

The utility model discloses a conductive connecting rod 23 makes conductive connecting rod 23 and the cooperation of conductive pillar 21 joint through setting up joint portion 231, and then makes conductive connecting rod 23 can dismantle, more is favorable to the staff to change and maintain conductive connecting rod 23, and conductive pillar 21 is the rectangle post, makes conductive connecting rod 23's joint portion 231 and conductive pillar 21 joint cooperation back, and conductive connecting rod 23 can not rotate along conductive pillar 21, connects more stably.

As shown in fig. 5, the conductive pill rack 2 further includes a second bearing component 28 disposed on one side of the conductive support 21 away from the first bearing component 22 and a second locking screw 29 for fixing the first bearing component 22 and the second bearing component 28, the second bearing component 28 has a structure identical to that of the first bearing component 22 and is symmetrically disposed, two clamping sections 2312 of the clamping portion 231 are both provided with locking holes (not labeled in the figure) in threaded connection with the second locking screw 29, and the second locking screw 29 sequentially passes through the locking holes of the clamping sections 2312 of the two clamping portions 231 to fixedly connect the two clamping portions 231.

The utility model discloses a conductive pill frame 2 is through setting up second carrier assembly 28, make the utility model discloses a conductive pill frame 2 can place more AF pellet, and can place respectively in conductive support post 21's both sides, more be favorable to improving the degree of consistency of coating film efficiency and coating film, on the other hand, through set up the lockhole on the joint portion 231 of first carrier assembly 22 and the joint portion 231 of second carrier assembly 28 respectively, and pass the lockhole of the clamping section 2312 of two joint portions 231 in proper order through second locking screw 29, can realize locking the conductive connecting rod 23 of first carrier assembly 22 and the conductive connecting rod 23 of second carrier assembly 28 through rotating second locking screw 29, make conductive connecting rod 23 can be installed on conductive support post 21 difficult emergence displacement more steadily, more be favorable to the stability and the homogeneity to the coating film.

In order to further improve the film coating efficiency, a plurality of groups of first bearing assemblies 22 and a plurality of groups of second bearing assemblies 28 are arranged on the two conductive pillars 21 at equal intervals from bottom to top, and the plurality of groups of first bearing assemblies 22 correspond to the plurality of groups of second bearing assemblies 28 one to one.

The conductive pill tray 25 is matched with the AF pills in a clamping mode, so that the AF pills are not easy to fall out of the conductive pill tray 25.

The conductive support 21, the first carrier member 22 and the second carrier member 28 are made of copper.

Wherein, the top of the conductive support column 21 is provided with a protection box 1 for protecting the nylon conductive wire.

While the preferred embodiments of the present invention have been described, the present invention is not limited to the above embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are intended to be included within the scope of the present invention as defined by the appended claims.

Claims

1. A coating mechanism for coating an AF film is characterized in that: the device comprises a conductive pill rack arranged in a vacuum coating machine and used for installing AF pills, a material rack arranged in the vacuum coating machine and used for installing a glass cover plate, a transmission device used for driving the pill rack and the material rack to rotate and a driving device used for driving the transmission device to rotate, wherein the transmission device comprises a rotating shaft, a connecting rack, a bearing piece, a driving gear and a plurality of driven gears, the rotating shaft is rotatably arranged in the vacuum coating machine, the center of the connecting rack, the center of the bearing piece and the center of the driving gear are fixedly connected with the rotating shaft, the plurality of material racks are circumferentially arranged on the bearing piece at intervals along the circumferential edge of the driving gear, the upper end and the lower end of each material rack are respectively rotatably connected with the connecting rack and the bearing piece, the driven gears are fixedly arranged at the bottom of the material rack and are meshed with the driving gear, the driving device drives the, the conductive pill rack is connected with a power supply.

2. The coating mechanism according to claim 1, wherein: every the surface cladding of material frame has the carrier film, the carrier film is kept away from the one side of material frame and is pasted double-sided tape, double-sided tape is used for pasting the protection film on glass apron surface.

3. The coating mechanism according to claim 2, wherein: the upper end of the material frame is rotatably connected with the connecting frame through a first connecting rod, the lower end of the material frame is rotatably connected with the bearing piece through a second connecting rod, the driven gear is fixedly arranged on the second connecting rod, the material frame comprises an upper cover plate fixedly connected with the first connecting rod, a lower cover plate fixedly connected with the second connecting rod and a plurality of supporting panels fixedly arranged between the upper cover plate and the lower cover plate, the supporting panels are enclosed to form a prism, and the bearing film is coated on the surfaces of the supporting panels.

4. The coating mechanism according to claim 2, wherein: the bearing film is a plastic film.

5. The coating mechanism according to claim 1, wherein: electrically conductive pellet frame includes two electrically conductive pillars of lower extreme and driving gear fixed connection and locates the first carrier assembly between two electrically conductive pillars, first carrier assembly is including two electrically conductive connecting rods, the one end of being connected with two electrically conductive connecting rods respectively with two electrically conductive pillar connections and locating the electrically conductive pellet dish that is used for placing the AF pellet between two electrically conductive bands, the one end that electrically conductive pillar was kept away from to electrically conductive connecting rod is equipped with electrically conductive location lid, electrically conductive location is covered and is rotated and connect first locking screw, first locking screw and electrically conductive connecting rod's tip threaded connection, the electrically conductive band clamp is located between electrically conductive location lid and the electrically conductive connecting rod.

6. The coating mechanism according to claim 5, wherein: the utility model discloses a clamping device for the electric conduction support post, including the clamping device, the clamping device is used for electrically conductive support post joint complex joint portion and one end and first locking screw threaded connection's supporting part, joint portion includes the linkage segment of being connected with the supporting part and respectively with two clamping sections at linkage segment both ends fixed connection, two the clamping section is used for two relative lateral parts of centre gripping electric conduction support post respectively, the U type is personally submitted in the transversal of joint portion.

7. The coating mechanism according to claim 6, wherein: the conductive pill frame further comprises a second bearing component and a second locking screw rod, the second bearing component is arranged on the conductive support column and is far away from one side of the first bearing component, the second locking screw rod is used for fixing the first bearing component and the second bearing component, the structure of the second bearing component is identical to that of the first bearing component and is symmetrically arranged, two clamping sections of the clamping portion are provided with locking holes in threaded connection with the second locking screw rod, and the second locking screw rod sequentially penetrates through the locking holes of the clamping sections of the two clamping portions to enable the two clamping portions to be fixedly connected.

8. The coating mechanism according to claim 7, wherein: and the two conductive columns are provided with a plurality of groups of first bearing assemblies and a plurality of groups of second bearing assemblies at equal intervals from bottom to top, and the plurality of groups of first bearing assemblies and the plurality of groups of second bearing assemblies are in one-to-one correspondence.

9. The coating mechanism according to claim 5, wherein: the conductive pill tray is in clamping fit with the AF pill.