CN220202023U - Magnetron sputtering machine convenient to remove - Google Patents

Abstract

The utility model discloses a magnetron sputtering machine convenient to move, which comprises a magnetron sputtering machine and a multi-station rack rotatably arranged in the magnetron sputtering machine, wherein a plurality of mounting plates which are uniformly distributed in a circumferential manner are fixedly arranged on the side wall of the multi-station rack, and a positioning assembly for fixing a base material is arranged on the mounting plates. According to the utility model, the positioning assembly is arranged on the mounting plate, the distance between the moving plates is adjusted by moving on the guide rod in the positioning assembly, so that substrates with various specifications can be clamped, the pressing end of the clamping plate is lifted upwards, the clamping plate is turned around the rotating shaft to the side, far away from the mounting plate, of the pressing section, at the moment, the substrates are selected to be clamped and fixed by the pressing section and the mounting plate or by the horizontal sections of the clamping plates according to the types of the substrates.

Description

Magnetron sputtering machine convenient to remove

Technical Field

The utility model relates to the field of magnetron sputtering machines, in particular to a magnetron sputtering machine convenient to move.

Background

Magnetron sputtering is one of physical vapor deposition, and a general sputtering method can be used for preparing multiple materials such as metal, semiconductor, insulator and the like, and has the advantages of simple equipment, easiness in control, large coating area, strong adhesive force and the like.

At present, the magnetron sputtering machine is various in modes of fixing the base material, various positioning devices are required to be customized according to the types and specifications of the base material in a factory, the equipment input cost is high, the operation of replacing the positioning devices is time-consuming and labor-consuming, the feeding and discharging operations are inconvenient, and the coating processing efficiency is very affected.

Disclosure of Invention

The utility model aims to provide a magnetron sputtering machine convenient to move, so as to solve the problem that the positioning device for fixing a substrate of the conventional magnetron sputtering machine provided in the background art has larger defects.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a magnetron sputtering machine convenient to remove, includes the magnetron sputtering machine and rotates the multistation frame of installing in the magnetron sputtering machine, fixed mounting has a plurality of mounting panels that are the circle evenly arranged on the lateral wall of multistation frame, install the locating component that is used for fixed substrate on the mounting panel, locating component include a pair of fixed mounting in guide arm on the mounting panel lateral wall, a pair of slidable mounting has a plurality of movable plate on the guide arm, the rectangular hole has been seted up to the central point department of movable plate, the downthehole splint that are used for the centre gripping substrate that rotate through the pivot of installing of rectangular hole, splint with the movable plate passes through elastic component and connects the equipment to make a pair of splint that set up relatively contradict and accomplish the quick centre gripping to the substrate through elastic component and the both sides of substrate.

Preferably, the clamping plate and the moving plate are matched under the action of the elastic component to form an openable compression section, and the other end is a compression end.

Preferably, the elastic member is a torsion spring, and two ends of the torsion spring are respectively contacted with the moving plate and the clamping plate.

Preferably, the pressing section is of an arc-shaped structure, and one end of the pressing section extends along the horizontal direction and forms a horizontal section.

Preferably, the side wall of the compaction section is fixedly provided with an anti-slip pad.

Preferably, sliding holes are formed in the tops of two ends of the moving plate, a sliding rod is installed in the sliding holes in a sliding mode, an installation clamp is fixedly sleeved on the top of the sliding rod, and the installation clamp extends to be in clamping connection with the guide rod.

Compared with the prior art, the utility model has the beneficial effects that:

according to the utility model, the positioning assembly is arranged on the mounting plate, the distance between the moving plates is adjusted by moving on the guide rod in the positioning assembly, so that substrates with various specifications can be clamped, the pressing end of the clamping plate is lifted upwards, the clamping plate is turned around the rotating shaft to the side, far away from the mounting plate, of the pressing section, at the moment, the substrates are selected to be clamped and fixed by the pressing section and the mounting plate or by the horizontal sections of the clamping plates according to the types of the substrates.

Drawings

FIG. 1 is a schematic overall perspective view of the present utility model;

FIG. 2 is an enlarged perspective view of the mounting plate of the present utility model;

FIG. 3 is a schematic perspective view of the assembled whole structure of the moving plate, the sliding rod and the clamping plate;

fig. 4 is a schematic diagram of a split three-dimensional structure of a moving plate, a sliding rod and a clamping plate of the utility model.

In the figure: 1. a magnetron sputtering machine; 2. a mounting plate; 3. a guide rod; 4. a slide bar; 5. installing a card; 6. a moving plate; 7. a clamping plate; 8. an anti-slip pad; 9. a torsion spring; 10. a pressing end; 11. a horizontal section; 12. and (5) compacting the section.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-3, the present utility model provides a technical solution: the utility model provides a magnetron sputtering machine convenient to remove, including magnetron sputtering machine 1 with rotate the multistation frame of installing in magnetron sputtering machine 1, a plurality of liftable truckles are installed to the bottom of magnetron sputtering machine 1, make it conveniently remove, fixed mounting has a plurality of mounting panels 2 that are the circumference evenly arranged on the lateral wall of multistation frame, install the locating component that is used for fixed substrate on the mounting panel 2, locating component includes a pair of fixed mounting on mounting panel 2 lateral wall guide arm 3, sliding mounting has a plurality of movable plate 6 on a pair of guide arm 3, the slide hole has all been seted up at the top at movable plate 6 both ends, slide bar 4 is installed in the slide hole in the slide, the top of slide bar 4 is fixed to have cup jointed installation card 5, installation card 5 extends to with guide arm 3 joint, fix movable plate 6 on guide arm 3 through a pair of installation card 5, the convenient removal is according to the position of substrate specification regulation movable plate 6, the flexibility ratio is higher, the rectangular hole has been seted up through pivot rotation installation in the rectangular hole and is used for the 7 of centre gripping substrate, 7 and movable plate 6 pass through elastic component and connect the equipment, a pair of movable plate 6 and set up through elastic component and install a plurality of movable plate 6 on the mounting plate 3, the realization is convenient and fast to carry out the base material through the base material, the installation board is convenient to install the base material in the clamp plate 3, the equipment is convenient to carry out the operation in the base material, the installation space is convenient to the equipment is convenient to install the base plate to install the base material to install the base material to the base station clamp plate.

In one case of this embodiment, please refer to fig. 3 and 4, clamp plate 7 cooperates with movable plate 6 under the effect of elastic component and forms the compaction section 12 that can open and shut, the other end is pressing end 10, elastic component is torsional spring 9, the both ends of torsional spring 9 contact movable plate 6, clamp plate 7 respectively, compaction section 12 is the arc structure, the benefit of setting like this is, if need carry out the coating film to mobile phone film type optical material and handle, compare in the mode that needs paste high temperature double faced adhesive tape on mounting panel 2 at present, this application can be directly with the protection film pressfitting that has a plurality of pad pasting on mounting panel 2 through compaction section 12, go up unloading simple operation, improve the operating efficiency, the one end of compaction section 12 extends along the horizontal direction, and form horizontal segment 11, horizontal segment 11 is used for centre gripping plate substrate, the side of plate substrate supports tightly through a pair of clamp plate 7, do not cover the board and improve coating film quality, fixedly mounted slipmat 8 on the lateral wall of compaction section 12, the benefit of setting like this is, increase the frictional force that contacts with the substrate, improve centre gripping stability.

Through upwards picking up the pressing end 10 of splint 7 for splint 7 overturn around the pivot and to compress tightly one side that the mounting panel 2 was kept away from to section 12, select the substrate according to the kind of substrate this moment by compressing tightly section 12 and mounting panel 2 centre gripping fixedly or by the horizontal segment 11 of a pair of splint 7 support tightly to press from both sides fixedly, this application scope is extensive, simple operation, and the flexibility ratio is higher, is fit for using widely.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. A magnetron sputtering machine convenient to remove, its characterized in that: including magnetron sputtering machine (1) with rotate the multistation frame of installing in magnetron sputtering machine (1), fixed mounting has a plurality of mounting panels (2) that are the circle evenly arranged on the lateral wall of multistation frame, install the locating component that is used for fixed substrate on mounting panel (2), locating component include a pair of fixed mounting in guide arm (3) on mounting panel (2) lateral wall, a pair of slidable mounting has a plurality of movable plate (6) on guide arm (3), rectangular hole has been seted up in the central point department of movable plate (6), rotate through the pivot in the rectangular hole and install splint (7) that are used for the centre gripping substrate, splint (7) with movable plate (6) are through elastic component connection equipment to make a pair of splint (7) of relative setting contradict and accomplish the quick centre gripping to the substrate through elastic component and the both sides of substrate.

2. A magnetron sputtering machine convenient to move as claimed in claim 1, wherein: the clamping plate (7) and the movable plate (6) are matched under the action of an elastic component to form an openable compression section (12), and the other end is a pressing end (10).

3. A magnetron sputtering machine convenient to move as claimed in claim 1, wherein: the elastic component is torsional spring (9), the both ends of torsional spring (9) respectively with movable plate (6) splint (7) contact.

4. A magnetron sputtering machine convenient to move as claimed in claim 2, wherein: the compressing section (12) is of an arc-shaped structure, and one end of the compressing section (12) extends along the horizontal direction and forms a horizontal section (11).

5. A magnetron sputtering machine convenient to move as claimed in claim 2, wherein: and the side wall of the compaction section (12) is fixedly provided with an anti-slip pad (8).

6. A magnetron sputtering machine convenient to move as claimed in claim 1, wherein: slide holes are formed in the tops of two ends of the moving plate (6), a slide rod (4) is installed in the slide holes in a sliding mode, an installation clamp (5) is fixedly sleeved on the top of the slide rod (4), and the installation clamp (5) extends to be clamped with the guide rod (3).