CN102392224A - Automatic arrangement, turn-over and collection device of vacuum magnetron sputtering workpiece - Google Patents
Automatic arrangement, turn-over and collection device of vacuum magnetron sputtering workpiece Download PDFInfo
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- CN102392224A CN102392224A CN2011103724980A CN201110372498A CN102392224A CN 102392224 A CN102392224 A CN 102392224A CN 2011103724980 A CN2011103724980 A CN 2011103724980A CN 201110372498 A CN201110372498 A CN 201110372498A CN 102392224 A CN102392224 A CN 102392224A
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Abstract
The invention relates to an automatic arrangement, turn-over and collection device of a vacuum magnetron sputtering workpiece. The device comprises a vacuum cavity, a magnetron sputtering target, and an automatic control system, and also comprises: a workpiece sputtering conveyor which is arranged under the magnetron sputtering target; a workpiece pallet, a workpiece grabbing assignment mechanism and a workpiece pallet elevating mechanism which are arranged at the front end of the workpiece sputtering conveyor; a roller turn-over ratchet which is arranged on the middle part of the workpiece sputtering conveyor; and a taped workpiece collection mechanism which is arranged on the tail end of the workpiece sputtering conveyor. A technical problem that automatic turn-over is needed to fully coat the workpiece under high temperature vacuum conditions is solved, so the device of the invention is especially suitable for completing the sputtering spraying processing of all permanent magnet type frangible product surfaces in the transmission process of the permanent magnet type frangible products, and the permanent magnet type frangible products are collected into a ring barrel by a taped lossless collection machine. The device of the invention, which has the advantages of coating quality improvement, energy consumption reduction, and processing cost reduction, allows the vacuum magnetron technology to be popularized and applied on a larger scale.
Description
Technical field
The present invention relates to the arranging continuously automatically of in high-temperature vacuum casing workpiece, turn-over, collection device, especially for automatic placement, turn-over and the collection device of vacuum magnetic-control sputtering film-coating workpiece.
Background technology
At present, fine and close quality is good, the course of processing is little to environmental influence owing to filming for the vacuum magnetic-control sputtering paint-on technique, is a kind of novel surface treatment technology of fast development.In the surface decoration of metal and non-metal workpiece, processing such as anticorrosion, wear-resisting, obtain to use; Yet,, can not use usual method to carry out the arranging continuously automatically of workpiece, turn-over and collection because magnetron sputtering processing need work under high temperature, vacuum condition; All need there be the workpiece that the omission full coat covers for all surface; At present can only be under non-vacuum condition artificial cloth, after being coated with one side and needing to remove the artificial upset of vacuum, set up the vacuum spraying another side again; Therefore working efficiency is very low, has influenced the broader applications of this technology.CN101985737A discloses a kind of solar energy heating board chip vacuum magnetic control film coating production line, and it adopts the hanging block-by-block of modular structure level to transport the single face sputter, need not turn-over, also need not can't harm collecting packing, and far apart with the technical problem that the present invention will solve.
Production efficiency for the raising vacuum magnetic-control sputtering applies cuts down finished cost, and needs disposablely in vacuum apparatus, to pack into large batch of workpiece, in processing, realizes automatic placement, upset and the collection of workpiece.Need the workpiece of aftertreatment raising fastness also need realize harmless automatically the collection for some rapid wear workpiece or coat film.
Summary of the invention
The technical problem that the present invention will solve be provide to above-mentioned prior art present situation that a kind of workpiece that can under the high-temperature vacuum condition, work is arranged continuously, turn-over, harmless collection device.The vacuum magnetic-control sputtering that said device is applied to metal or non-metal workpiece applies and other surface treatment processing.
The technical scheme that the present invention solves the problems of the technologies described above employing is: the automatic placement of vacuum magnetic-control sputtering workpiece, turn-over, collection device; It comprises vacuum cavity, magnetron sputtering target and automatic control system; Its characteristic also comprises the workpiece sputter conveyer that is located at the magnetron sputtering target below; Tray for work pieces, the grip that is located at workpiece sputter conveyer front end arrange mechanism and tray for work pieces hoisting appliance; The said grip mechanism that arranges is located at the top of tray for work pieces, and the tray for work pieces hoisting appliance is connected the below of tray for work pieces; Said workpiece sputter conveyer comprises first section workpiece conveyor and second section workpiece conveyor; Between first and second sections travelling belts, establish roll-type turn-over ratchet; Establish second section travelling belt rear end and to comprise the coil type workpiece collecting mechanism that batches worm gear, flexible band, batches worm screw, deflector roll and storage belt wheel, batch the worm gear traction storage belt wheel flexible roll coil of strip clamping of workpieces of reeling and form and collect the circle tube.
Said tray for work pieces is provided with and is used for the localized groove of workpiece, hole.Said tray for work pieces can be made by metal or non-metallic material.
Said tray for work pieces hoisting appliance comprises up-down worm gear, elevating endless screw, transmitting gear, elevating screw and power wheel, and elevating endless screw and up-down worm gear engaged transmission drive transmitting gear, and transmitting gear and screw mandrel power wheel drive screw mandrel and go up and down.
The said grip mechanism that arranges comprises electric motor driven grip machine and reciprocal travel mechanism.Said grip machine comprises that grasping worm gear, extracting worm screw, extracting screw mandrel and workpiece grabs folder, and back and forth travel mechanism comprises guide wheel and guide rail.The grip mechanism that arranges can once grasp, transport on one or more workpiece to the first identical or inequality section travelling belt.
Said sputter conveyer comprises by electric motor driven motion-work wheel; First and second sections workpiece conveyors by the motion-work wheel drive; The surface of travelling belt can be the plane as required, curl, has groove or installation component, is used for conveying workpieces and makes workpiece obtain abundant sputter processing at course of conveying.
The workpiece conveyor of said sputter conveyer adopts the metal or the non-metallic material of the objectionable impurities of can under the high-temperature vacuum condition, not volatilizing.
Said roll-type turn-over ratchet is by electric motor driven rotation roller ratchet.Establish oblique ratchet on the roller ratchet periphery, between ratchet, establish the oblique slot of taking in workpiece, first section travelling belt contacts with roll-type turn-over ratchet surface, makes workpiece can accurately fall into oblique slot separately.The slide block on mounting strap slope between second section travelling belt and roll-type turn-over ratchet, with workpiece by smoothly transfer in the oblique slot of roll-type turn-over ratchet second section belt conveyor first row specified location on.
Said coil type workpiece collecting mechanism is used to collect the sputter processed workpiece, comprises phonomoter, batches worm gear, batches worm screw, flexible band, deflector roll and storage belt wheel.Workpiece is with through dropping to flexibility from second section travelling belt end after second section sputter-coated.Said flexible band can be metal strip or nonmetal band, batches worm gear and rotates by setting program workpiece is collected between the winding and held together by rolling bag line by line.Said coil type workpiece collecting mechanism can be followed the tracks of conveyer belt speed, workpiece is arranged on flexibility is with evenly and is wound up the lopping tube, after accomplishing one batch workpiece and collecting, can shift out vacuum chamber, the taking-up workpiece.
Device of the present invention can be used for the temperature of normal temperature to 300 ℃ and as required from normal pressure to 10
-11Work under the condition of Pa high vacuum, select the various structure size, handled workpiece size can restrain tens of kilograms from less than 1, and every charging once can be handled the workpiece number and restrain thousands of kilograms.In the vacuum cavity of sealing, automatically realize the arranging continuously of workpiece, turn-over and harmless the collection according to default program.This covering device can not produce the volatile matter of harmful sputter-coated under the high-temperature vacuum condition.In advance with workpiece by certain rule tray for work pieces of packing into, tray for work pieces is pushed to the tray for work pieces hoisting appliance from loading door.The grip mechanism that arranges puts into the specified location of first section workpiece conveyor by regular grabbing workpiece, and grasping mechanism can once grasp one or several workpiece.After the upper strata grip was intact, tray for work pieces was by pitch of rule rising.Workpiece is arranged on first section workpiece conveyor by rule, and workpiece is with conveyer belt and accept sputter-coated processing, and the end that workpiece arrives first section travelling belt falls into roll-type turn-over ratchet.Said roll-type turn-over ratchet is the cylindrical roll that a surface is provided with oblique ratchet and oblique slot; Fall into the rotation realization turn-over of the workpiece of turn-over ratchet along with mechanism; Be admitted to second section workpiece conveyor behind the workpiece turn-over; Along with the sputter spray process of conveyer belt completion all surface, collected the circle tube by the harmless gathering machine of coil type.
The present invention compared with prior art is: under the high-temperature vacuum condition, realized the automatic placement of batch workpiece, transmission automatically, automatic turn-over and harmless the collection.Solved in the past in the vacuum sputtering coating equipment, workpiece needs manual work to arrange extension one by one, and once the workpiece quantity that can process of charging is considerably less, and especially those need the workpiece that all surface full coat covers to need re-sputtered, and efficient is low, energy consumption is big, cost is high.No matter be that topical application or the workpiece that comprehensively applies can be accomplished through once feeding behind employing the present invention; Device of the present invention can design as required; Make the abundant workpiece of once can packing into, this has just improved the coating working efficiency greatly, has reduced the energy that vacuum consumes; Make tooling cost be minimized, make the vacuum sputtering paint-on technique can be in wider popularization.
Description of drawings
Fig. 1 is the synoptic diagram of constructional device of the present invention.
Fig. 2 is A among Fig. 1-A sectional view, and promptly the tray for work pieces elevator grasps the machine structure iron of arranging with work.
Fig. 3 is roll-type turn-over ratchet and workpiece enlarged side view.
Fig. 4 a is a coil type workpiece collecting mechanism structure side view, and wherein Fig. 4 b is the front view of Fig. 4 a.
Embodiment
Below in conjunction with accompanying drawing the embodiment of the invention is done further detailed description.
As shown in Figure 1; Present embodiment is for being used for permanent magnet such as ferrite or neodymium iron boron surface coating flow line; Structure comprises tray for work pieces hoisting appliance 1, tray for work pieces 2, grip arrange mechanism 4, first section workpiece conveyor 5, roll-type turn-over ratchet 7, second section workpiece conveyor 8, coil type workpiece collecting mechanism 9, vacuum cavity 10, automatic control system 11, pumped vacuum systems 12.
Before workpiece is packed processing units into; Be placed on the tray for work pieces 2 by regular code in advance; This pallet 2 is placed on the special support; Open the feeding gate of vacuum cavity 10, shift onto on the tray for work pieces hoisting appliance 1 together tray for work pieces 2 and workpiece 3 and locking, workpiece 3 can stack into the capable * m of n row */layer regularly.Said workpiece 3 shapes can be the geometrical body or the anomalistic objects of rule, and weight can restrain tens of kilograms from number.Said tray for work pieces 2 can be made by metal or non-metallic material, can have groove, hole etc. to be used for the localized structure of workpiece on it.
Referring to shown in Figure 2; Said tray for work pieces hoisting appliance 1 comprises up-down worm gear 28, elevating endless screw 26, transmitting gear 27 and 29, elevating screw 25 and elevating screw power wheel 30; Elevating endless screw 26 and up-down worm gear 28 engaged transmission; Up-down worm gear 28 drives transmitting gear 27 and 29 and rotates; And by 25 up-downs of four screw mandrel power wheels of transmitting gear 27 and 29 drive left, right, front and rear, 30 drive elevating screws, tray for work pieces hoisting appliance 1 supporting workpiece pallet 2 raises or reduction by design requirements with workpiece 3.Said tray for work pieces 2 can prevent to move with hoisting appliance 1 locking.
The said grip mechanism 4 that arranges comprises grip machine 17 and horizontal reciprocal travel mechanism 18.Said grip machine 17 comprises that grasping worm screw 22, extracting worm gear 21, extracting screw mandrel 23 and workpiece grabs folder 24; Grasp worm screw 22 and the turning motion of grasping worm gear 21 engagements and be converted into to drive and grasp screw mandrel 23 and make translational motion up and down, grasp that screw mandrel 23 joining work pieces are grabbed folder 24 touching workpiece 3 and gripping workpiece 3 is tightened up in the location.Laterally back and forth travel mechanism 18 comprises guide deflection sheave 31 and guide rail 32; Guide deflection sheave 31 moves to first workpiece conveyor, 5 tops along the guide rail 32 moving belts part gripper 17 of starting building; Grasping 21 rotations of worm screw 22 counter-rotating extracting worm gears descends extracting screw mandrel 23; Workpiece is grabbed folder 24 and is unclamped workpiece and make workpiece 3 fall into 5 first rankings of first section travelling belt and put, four of each pick-and-place one rows of present embodiment.One covering device can comprise 1 or several grip mechanism that arranges, and 1 or several workpiece can once grasp, arrange.The grip mechanism 4 that arranges sets according to the requirement of sputter-coated work and grasps the speed and the rhythm of arranging, and speed and rhythm can be adjusted in certain limit by automatic control system 11.
Said first section workpiece conveyor 5 and second section workpiece conveyor 8 are by electric motor driven mechanism; The direct motor drive motion-work wheel drives workpiece conveyor conveying work pieces 3; The travelling belt of said sputter conveyer can be metal strip or nonmetal band; Material therefor can not produce the volatile matter of harmful sputter-coated under the high-temperature vacuum condition, the surface of band can be the plane, netted, groove, line or installation component arranged.Travelling belt makes workpiece obtain sputter processing in transport process.Workpiece 3 can singlely also can be arranged on the travelling belt more with arranging.Workpiece 3 is with conveyer belt, and transfer rate is regulated by automatic control system 11 and slipped into roll-type turn-over ratchet 7 after control arrives left end.
Referring to shown in Figure 3, roll-type turn-over ratchet 7 is by electric motor driven rotation roll-type ratchet.Roll-type turn-over ratchet 7 peripherys are established ratchet 15; Between ratchet, establish the oblique slot 15a that takes in workpiece; Roll-type turn-over ratchet 7 is located at the driven wheel 14 at first section workpiece conveyor, 5 ends and second section workpiece sputter travelling belt 8 top, between 13, accurately gets in the oblique slot 15a first section workpiece conveyor, 5 terminal contacts with 7 on roll-type turn-over ratchet to limit workpiece 3.Oblique slide block 16 is established in both sides at second section workpiece conveyor 8 top and roll-type turn-over ratchet 7 contact surfaces, and the appropriate inclination angle of this slider designs is slided workpiece smoothly and kept suitable spacing, accurately gets into the position, top of second section workpiece conveyor 8.
Said second section workpiece conveyor 8, its agent structure and first section workpiece conveyor 5 are basic identical, and when workpiece moved with second section workpiece conveyor 8, the one side that is reversed also obtained sputter processing in transport process.Workpiece falls into coil type workpiece gathering machine 9 after arriving the conveyer tail end.
Referring to shown in Figure 4; Said coil type workpiece collecting mechanism 9 is applicable to the harmless collecting packing of permanent magnet fragile workpiece; Comprise base 40, motor 45, batch worm gear 46, batch worm screw 44, collecting drum 41, flexibility are with 47, deflector roll 43 and storage belt wheel 42, motor 45 drives and batches worm screw 44 engagements and batch worm gear 46 and by collecting drum 41 workpiece 3 is involved in flexibility while rotating and be with 47 to strain and tie up into reel.Flexibility on the collecting drum 41 is set by automatic control system 11 sequence of control with the rhythm that 47 coiling speeds can fall into according to workpiece.The reserves of gathering machine need and the charge coupling, has collected one batch workpiece after, collecting drum 41 with collect circle and tin move on to taking-up workpiece and collecting drums outside the vacuum cavity 10 simultaneously.
Described automatic control system 11 is controlled by custom-designed microcomputer control system in real time.
Vacuum tightness in the described vacuum cavity 10 requires to regulate control by ASIC micro computer and pumped vacuum systems 12 according to processed workpiece.
Claims (10)
1. the automatic placement of vacuum magnetic-control sputtering workpiece, turn-over, collection device; It comprises vacuum cavity, magnetron sputtering target and automatic control system; Its characteristic also comprises the workpiece sputter conveyer that is located at the magnetron sputtering target below; Tray for work pieces, the grip that is located at workpiece sputter conveyer front end arrange mechanism and tray for work pieces hoisting appliance, the said grip mechanism that arranges is located at the top of tray for work pieces, and the tray for work pieces hoisting appliance is connected the below of tray for work pieces; Said workpiece sputter conveyer comprises first section workpiece conveyor and second section workpiece conveyor; Between first and second sections workpiece conveyors, establish roll-type turn-over ratchet; Establish second section workpiece conveyor rear end and to comprise the coil type workpiece collecting mechanism that batches worm gear, flexible band, batches worm screw, deflector roll and storage belt wheel, batch the worm gear traction storage belt wheel flexible roll coil of strip clamping of workpieces of reeling and form and collect the circle tube.
2. the automatic placement of vacuum magnetic-control sputtering workpiece according to claim 1, turn-over, collection device; It is characterized in that said tray for work pieces hoisting appliance (1) comprises up-down worm gear (28), elevating endless screw (26), transmitting gear (27,29), elevating screw (25) and elevating screw power wheel (30); Elevating endless screw (26) and up-down worm gear (28) engaged transmission; Up-down worm gear (28) drives transmitting gear (27 and 29) and rotates, and drives four the screw mandrel power wheels in left, right, front and rear (30) drive elevating screws (25) up-down by transmitting gear (27 and 29).
3. the automatic placement of vacuum magnetic-control sputtering workpiece according to claim 1, turn-over, collection device is characterized in that the said grip mechanism (4) that arranges comprises grip machine (17) and horizontal back and forth travel mechanism (18).
4. the automatic placement of vacuum magnetic-control sputtering workpiece according to claim 3, turn-over, collection device; It is characterized in that said grip machine (17) comprises that grasping worm screw (22), extracting worm gear (21), extracting screw mandrel (23) and workpiece grabs folder (24); Extracting worm screw (22) grasps screw mandrel (23) translational motion up and down with extracting worm gear (21) engagement revolution drive, and the workpiece that extracting screw mandrel (23) connects is grabbed folder (24) touching workpiece (3) and also tightened up gripping workpiece (3) in the location.
5. the automatic placement of vacuum magnetic-control sputtering workpiece according to claim 3, turn-over, collection device; It is characterized in that said laterally back and forth travel mechanism (18) comprises guide deflection sheave (31) and guide rail (32), guide deflection sheave (31) moves to above first section workpiece conveyor (5) along guide rail (32) the moving belt part gripper (17) of starting building.
6. the automatic placement of vacuum magnetic-control sputtering workpiece according to claim 1, turn-over, collection device; It is characterized in that said first section workpiece conveyor (5) and second section workpiece conveyor (8) drive workpiece conveyor conveying work pieces (3) by the direct motor drive motion-work wheel, and in transport process the sputter processing work.
7. the automatic placement of vacuum magnetic-control sputtering workpiece according to claim 1, turn-over, collection device; It is characterized in that said roll-type turn-over ratchet (7) periphery establishes the ratchet (15) of inclination, between said ratchet (15), establish the oblique slot (15a) of taking in workpiece (2).
8. the automatic placement of vacuum magnetic-control sputtering workpiece according to claim 1, turn-over, collection device; It is characterized in that said first section travelling belt (5) end contacts with roll-type turn-over ratchet (7) face; Limit workpiece (3) and accurately slip in the oblique slot (15a), establish the slide block (16) on band slope in the both sides of second travelling belt (8) top and roll-type turn-over ratchet (7) contact surface.
9. the automatic placement of vacuum magnetic-control sputtering workpiece according to claim 1, turn-over, collection device, it is characterized in that said coil type workpiece collecting mechanism (9) comprises base (40), motor (45), batches worm gear (46), batches worm screw (44), collecting drum (41), flexible band (47), deflector roll (43) with store up belt wheel (42).
10. the automatic placement of vacuum magnetic-control sputtering workpiece according to claim 9, turn-over, collection device is characterized in that said motor (45) drives to batch worm screw (44) engagement and batch worm gear (46) and by collecting drum (41) workpiece (3) is involved in flexible band (47) while changeing and strain the lopping tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110372498 CN102392224B (en) | 2011-11-22 | 2011-11-22 | Automatic arrangement, turn-over and collection device of vacuum magnetron sputtering workpiece |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110372498 CN102392224B (en) | 2011-11-22 | 2011-11-22 | Automatic arrangement, turn-over and collection device of vacuum magnetron sputtering workpiece |
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| Publication Number | Publication Date |
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| CN102392224A true CN102392224A (en) | 2012-03-28 |
| CN102392224B CN102392224B (en) | 2013-05-29 |
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| CN 201110372498 Active CN102392224B (en) | 2011-11-22 | 2011-11-22 | Automatic arrangement, turn-over and collection device of vacuum magnetron sputtering workpiece |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109226150A (en) * | 2018-10-22 | 2019-01-18 | 浙江荣发动力有限公司 | A kind of connection with tank cleaning equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1995444A (en) * | 2006-01-06 | 2007-07-11 | 鸿富锦精密工业（深圳）有限公司 | Rotary disk for film electroplating and film electroplating machine |
| CN201614408U (en) * | 2009-12-23 | 2010-10-27 | 田晓智 | Transition device used for one-surface and double-surface film coating mode switchover |
| CN201665437U (en) * | 2010-01-11 | 2010-12-08 | 深圳顺络电子股份有限公司 | Continuous type automatic transmission device |
| CN202323000U (en) * | 2011-11-22 | 2012-07-11 | 宁波科田磁业有限公司 | Automatic distribution, face turning and collecting device for vacuum magnetron sputtering workpieces |
-
2011
- 2011-11-22 CN CN 201110372498 patent/CN102392224B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1995444A (en) * | 2006-01-06 | 2007-07-11 | 鸿富锦精密工业（深圳）有限公司 | Rotary disk for film electroplating and film electroplating machine |
| CN201614408U (en) * | 2009-12-23 | 2010-10-27 | 田晓智 | Transition device used for one-surface and double-surface film coating mode switchover |
| CN201665437U (en) * | 2010-01-11 | 2010-12-08 | 深圳顺络电子股份有限公司 | Continuous type automatic transmission device |
| CN202323000U (en) * | 2011-11-22 | 2012-07-11 | 宁波科田磁业有限公司 | Automatic distribution, face turning and collecting device for vacuum magnetron sputtering workpieces |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109226150A (en) * | 2018-10-22 | 2019-01-18 | 浙江荣发动力有限公司 | A kind of connection with tank cleaning equipment |
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| CN102392224B (en) | 2013-05-29 |
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Address after: 315031 Cicheng Town West Gate, Jiangbei District, Ningbo City, Zhejiang Province Patentee after: Ningbo Ketian Magnetic Industry Co.,Ltd. Patentee after: NINGBO JINTIAN COPPER (GROUP) Co.,Ltd. Address before: 315034, No. 1 West Chengxi Road, Ningbo, Zhejiang Patentee before: NINGBO KETIAN MAGNET Co.,Ltd. Patentee before: NINGBO JINTIAN COPPER (GROUP) Co.,Ltd. |