CN105088169A - Application method of vacuum sputtering coated substrate clamping device - Google Patents
Application method of vacuum sputtering coated substrate clamping device Download PDFInfo
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- CN105088169A CN105088169A CN201510540934.9A CN201510540934A CN105088169A CN 105088169 A CN105088169 A CN 105088169A CN 201510540934 A CN201510540934 A CN 201510540934A CN 105088169 A CN105088169 A CN 105088169A
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- elastic card
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Abstract
The invention provides an application method of a vacuum sputtering coated substrate clamping device. According to the vacuum sputtering coated substrate clamping device, at least two beams are arranged on one side of a vertical beam; each beam is set into a cross shape; side beams are arranged on the two sides of each cross-shaped beam; two double-faced lower elastic clamps are symmetrically arranged on the upper face of the middle beam; the clamping heads of double-faced upper elastic clamps correspond to the clamping heads of the double-faced lower elastic clamps; and a single-faced substrate is arranged between single-sided upper elastic clamps and single-faced lower elastic clamps. When vacuum sputtering coating is conducted, a conveying trolley is started after the upper side of the single-faced substrate is symmetrically clamped by the two single-faced upper elastic clamps in an auxiliary manner, the vertical beam, the beams and a double-faced substrate are driven by the conveying trolley to enter a vacuum sputtering coating box so that spluttering coating can be conducted on the substrates. Single-faced or double-faced coating shares one clamping device, and universality is high; product type replacement is convenient and rapid; the substrates are rapidly assembled and disassembled by hands in a tool-free manner; the diffraction problem is solved, and low-resistance and high-grade products can be produced; and the structure is simple, machining is easy, the manufacturing cost is low, and permanent use is achieved.
Description
Technical field
The present invention relates to electronic product ITO plated film processing production equipment, especially a kind of using method of vacuum sputtering coating substrate clamping device.
Background technology
Existing ITO vacuum sputtering coating substrate clamping equipment, various informative, have inserted, have open.Open, structure is simple, and clamping substrate is convenient, highly versatile, low cost, but coated product quality is influenced, can not production high-quality product; Inserted, complex structure, clamping substrate is slightly difficult, and the matter clamping substrate convenient amount of product is guaranteed, but poor universality, often kind of product corresponding to a set of, will involve great expense; No matter inserted or open, do not accomplish the versatility of one side and double-sided coating at present, all need two suits to clamp standby; In view of the foregoing, it is inserted that ITO vacuum sputtering coating substrate clamping is equipped, complex structure, clamping substrate is slightly difficult, one side and double-sided coating need two suits to clamp standby, need to improve inserted vacuum sputtering coating substrate clamping equipment, now invent a kind of using method of vacuum sputtering coating substrate clamping device.
Summary of the invention
The object of the invention is to overcome the inserted of existing ITO vacuum sputtering coating substrate clamping equipment, complex structure, clamping substrate is slightly difficult, one side and double-sided coating need two suits to clamp standby, need to improve inserted vacuum sputtering coating substrate clamping equipment, pass through appropriate design, a kind of using method of vacuum sputtering coating substrate clamping device is provided, the crossbeam of particular design is fixed on vertical beam by connection piece, spring chuck is connected by screw on crossbeam, one side product or two-sided product, be free-handly fixed on spring chuck; One side and two-sided product, clamping equipment is compatible, and the product of different size, as long as moving beam, and retightens, and just can use; Suitable spacing between the catch that crossbeam is upper and lower and substrate, can prevent diffraction, and the efficiency of production is high.
The present invention to achieve these goals, adopt following technical scheme: a kind of using method of vacuum sputtering coating substrate clamping device, described a kind of vacuum sputtering coating substrate clamping device, be by: on two-sided substrate, two-sided lower elastic card, two-sided upper elastic card, crossbeam, vertical beam, one side, under elastic card, one side, elastic card, single substrate are formed; Vertical beam side arranges at least two crossbeams, and crossbeam is set to cross, and cross crossbeam both sides arrange curb girder respectively; Be symmetrical arranged above middle beam below two two-sided lower elastic cards, upper cross-beam and be symmetrical arranged two two-sided upper elastic cards, two-sided upper elastic card is corresponding with the dop of two-sided lower elastic card to be arranged, and arranges two-sided substrate between two-sided lower elastic card and two-sided upper elastic card; Below upper cross-beam with above middle beam, one group of two-sided upper elastic card and two-sided lower elastic card are set; Elastic card under two one sides is symmetrical arranged above the curb girder being symmetrical arranged elastic card, middle beam on two one sides below the curb girder of upper cross-beam, on one side, elastic card is corresponding with the dop of elastic card under one side is arranged, and one side arranges single substrate between elastic card under elastic card and one side; Vertical beam side arranges at least two crossbeams, and between neighbouring two crossbeams, the specification of corresponding substrate is arranged, and arranges two-sided substrate between two crossbeams; Crossbeam is set to cross, and cross crossbeam both sides arrange curb girder respectively; Between two crossbeam curb girders of the same side, single substrate is set;
When processing vacuum sputtering coating is to single substrate plated film, first single substrate is put into below the draw-in groove of elastic card under the one side of bottom end rail, single substrate is below by elastic card symmetric support under two one sides, again the draw-in groove of elastic card on the one side of top crossbeam is blocked the top of single substrate, single substrate top is by the auxiliary clamping of elastic card symmetry on two one sides.
Single substrate by elastic card clamping under elastic card on one side and one side, after between the crossbeam being fixed on upper and lower, crossbeam side; Start transport trolley, drive vertical beam and crossbeam and single substrate to enter in vacuum sputtering coating case by transport trolley, single substrate is carried out to the sputter coating of one side.
When processing vacuum sputtering coating is to two-sided substrate coating, first two-sided substrate is put into below the draw-in groove of the two-sided lower elastic card of bottom end rail, two-sided substrate is below by two two-sided lower elastic card symmetric support, the draw-in groove of the two-sided upper elastic card of top crossbeam is blocked the top of two-sided substrate, two-sided substrate top is by two auxiliary clampings of two-sided upper elastic card symmetry again; Two-sided substrate by two-sided upper elastic card and two-sided lower elastic card clamping, after between the crossbeam being fixed on upper and lower, crossbeam side; Start transport trolley, drive vertical beam and crossbeam and two-sided substrate to enter in vacuum sputtering coating case by transport trolley, two-sided sputter coating is carried out to two-sided substrate.
Beneficial effect: single or double plated film shares a set of clamping equipment, highly versatile; Change range of product, convenient and swift; Free-hand quick despatch substrate, reduces the use of manpower; Solve diffraction problems, can production low-resistance expensive goods; Structure is simple, and handling ease, low cost, forever uses.
Vertical beam of the present invention and travelling car are one, and the crossbeam of particular design is fixed on vertical beam by connection piece, and spring chuck is connected by screw on crossbeam, one side product or two-sided product, are free-handly fixed on spring chuck; One side and two-sided product, clamping equipment is compatible, and the product of different size, as long as moving beam, and retightens, and just can use; Suitable spacing between the catch that crossbeam is upper and lower and substrate, can prevent diffraction.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the invention will be further described:
Fig. 1 is, general assembly structural representation;
Fig. 2 is, side elevational cross-section structural representation;
Fig. 3 is, installs the structural representation of two-sided substrate;
Fig. 4 is, installs single substrate structural representation;
In Fig. 1,2,3,4: elastic card 7, single substrate 8 under elastic card 6, one side on two-sided substrate 1, two-sided lower elastic card 2, two-sided upper elastic card 3, crossbeam 4, vertical beam 5, one side.
Embodiment
Below in conjunction with embodiment and embodiment, the present invention is described in further detail:
Embodiment 1
Vertical beam 5 side arranges at least two crossbeams 4, and crossbeam 4 is set to cross, and cross crossbeam 4 both sides arrange curb girder respectively; Middle beam 4 is symmetrical arranged two two-sided lower elastic cards 2 above, upper cross-beam 4 is symmetrical arranged two two-sided upper elastic cards 3 below, two-sided upper elastic card 3 is corresponding with the dop of two-sided lower elastic card 2 to be arranged, and arranges two-sided substrate 1 between two-sided lower elastic card 2 and two-sided upper elastic card 3; Upper cross-beam 4 arranges one group of two-sided upper elastic card 3 and two-sided lower elastic card 2 above below with middle beam 4; Elastic card 7 under two one sides is symmetrical arranged above the curb girder being symmetrical arranged elastic card 6, middle beam 4 on two one sides below the curb girder of upper cross-beam 4, on one side, elastic card 6 is corresponding with the dop of elastic card under one side 7 is arranged, and one side arranges single substrate 8 between elastic card 7 under elastic card 6 and one side; Vertical beam 5 side arranges at least two crossbeams 4, and between neighbouring two crossbeams 4, the specification of corresponding substrate is arranged, and arranges two-sided substrate 1 between two crossbeams 4; Crossbeam 4 is set to cross, and cross crossbeam 4 both sides arrange curb girder respectively; Between two crossbeam 4 curb girders of the same side, single substrate 8 is set;
When processing vacuum sputtering coating is to single substrate 8 plated film, first single substrate 8 is put into below the draw-in groove of elastic card 7 under the one side of bottom end rail 4, single substrate 8 is below by elastic card 7 symmetric support under two one sides, again the draw-in groove of elastic card 6 on the one side of top crossbeam 4 is blocked the top of single substrate 8, single substrate 8 top is by the auxiliary clamping of elastic card 6 symmetry on two one sides.
Embodiment 2
Single substrate 8 is clamped by elastic card 7 under elastic card on one side 6 and one side, after between the crossbeam 4 being fixed on upper and lower, crossbeam 4 side; Start transport trolley, drive vertical beam 5 to enter in vacuum sputtering coating case with crossbeam 4 and single substrate 8 by transport trolley, single substrate 8 is carried out to the sputter coating of one side.
Embodiment 3
When processing vacuum sputtering coating is to two-sided substrate 1 plated film, first two-sided substrate 1 is put into below the draw-in groove of the two-sided lower elastic card 2 of bottom end rail 4, two-sided substrate 1 is below by two two-sided lower elastic card 2 symmetric support, the draw-in groove of the two-sided upper elastic card 3 of top crossbeam 4 is blocked the top of two-sided substrate 1, two-sided substrate 1 top is by two auxiliary clampings of two-sided upper elastic card 3 symmetry again; Two-sided substrate 1 is clamped by two-sided upper elastic card 3 and two-sided lower elastic card 2, after between the crossbeam 4 being fixed on upper and lower, crossbeam 4 side; Start transport trolley, drive vertical beam 5 to enter in vacuum sputtering coating case with crossbeam 4 and two-sided substrate 1 by transport trolley, two-sided sputter coating is carried out to two-sided substrate 1.
Claims (3)
1. the using method of a vacuum sputtering coating substrate clamping device, described a kind of vacuum sputtering coating substrate clamping device,, be by: on two-sided substrate (1), two-sided lower elastic card (2), two-sided upper elastic card (3), crossbeam (4), vertical beam (5), one side, under elastic card (6), one side, elastic card (7), single substrate (8) are formed; It is characterized in that: vertical beam (5) side arranges at least two crossbeams (4), and crossbeam (4) is set to cross, and cross crossbeam (4) both sides arrange curb girder respectively; Middle beam (4) is symmetrical arranged two two-sided lower elastic cards (2) above, upper cross-beam (4) is symmetrical arranged two two-sided upper elastic cards (3) below, two-sided upper elastic card (3) is corresponding with the dop of two-sided lower elastic card (2) to be arranged, and arranges two-sided substrate (1) between two-sided lower elastic card (2) and two-sided upper elastic card (3); Upper cross-beam (4) arranges one group of two-sided upper elastic card (3) and two-sided lower elastic card (2) above with middle beam (4) below; Elastic card (7) under two one sides is symmetrical arranged above the curb girder being symmetrical arranged elastic card (6) on two one sides, middle beam (4) below the curb girder of upper cross-beam (4), on one side, elastic card (6) is corresponding with the dop of elastic card under one side (7) is arranged, and one side arranges single substrate (8) between elastic card (7) under elastic card (6) and one side; Vertical beam (5) side arranges at least two crossbeams (4), and between neighbouring two crossbeams (4), the specification of corresponding substrate is arranged, and arranges two-sided substrate (1) between two crossbeams (4); Crossbeam (4) is set to cross, and cross crossbeam (4) both sides arrange curb girder respectively; Between two crossbeam (4) curb girders of the same side, single substrate (8) is set.
When processing vacuum sputtering coating is to single substrate (8) plated film, first single substrate (8) is put into below the draw-in groove of elastic card (7) under the one side of bottom end rail (4), single substrate (8) is below by elastic card (7) symmetric support under two one sides, again the draw-in groove of elastic card (6) on the one side of top crossbeam (4) is blocked the top of single substrate (8), single substrate (8) top is by the auxiliary clamping of elastic card (6) symmetry on two one sides.
2. according to the using method of a kind of vacuum sputtering coating substrate clamping device described in claim 1, it is characterized in that: single substrate (8) by elastic card (7) clamping under elastic card on one side (6) and one side, after between the crossbeam (4) being fixed on crossbeam (4) upper and lower, side; Start transport trolley, drive vertical beam (5) to enter in vacuum sputtering coating case with crossbeam (4) and single substrate (8) by transport trolley, single substrate (8) is carried out to the sputter coating of one side.
3. according to the using method of a kind of vacuum sputtering coating substrate clamping device described in claim 1, it is characterized in that: when processing vacuum sputtering coating is to two-sided substrate (1) plated film, first two-sided substrate (1) is put into below the draw-in groove of the two-sided lower elastic card (2) of bottom end rail (4), two-sided substrate (1) is below by two two-sided lower elastic card (2) symmetric support, again the draw-in groove of the two-sided upper elastic card (3) of top crossbeam (4) is blocked the top of two-sided substrate (1), two-sided substrate (1) top is by two auxiliary clampings of two-sided upper elastic card (3) symmetry, two-sided substrate (1) by two-sided upper elastic card (3) and two-sided lower elastic card (2) clamping, after between the crossbeam (4) being fixed on crossbeam (4) upper and lower, side, start transport trolley, drive vertical beam (5) to enter in vacuum sputtering coating case with crossbeam (4) and two-sided substrate (1) by transport trolley, two-sided sputter coating is carried out to two-sided substrate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510540934.9A CN105088169A (en) | 2015-08-23 | 2015-08-23 | Application method of vacuum sputtering coated substrate clamping device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510540934.9A CN105088169A (en) | 2015-08-23 | 2015-08-23 | Application method of vacuum sputtering coated substrate clamping device |
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| CN105088169A true CN105088169A (en) | 2015-11-25 |
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| CN201510540934.9A Pending CN105088169A (en) | 2015-08-23 | 2015-08-23 | Application method of vacuum sputtering coated substrate clamping device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105887036A (en) * | 2016-05-12 | 2016-08-24 | 成都西沃克真空科技有限公司 | Clamp for clamping workpieces |
| CN108315703A (en) * | 2018-02-05 | 2018-07-24 | 宁波松科磁材有限公司 | A kind of preparation method of coating system and film plating process and rare-earth magnet |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002134413A (en) * | 2000-10-24 | 2002-05-10 | Sony Corp | Clamp ring |
| CN101165206A (en) * | 2006-10-20 | 2008-04-23 | 鸿富锦精密工业（深圳）有限公司 | Substrate fixture and rotary disc for coating film and film coating machine |
| CN202576555U (en) * | 2012-05-09 | 2012-12-05 | 深圳市正星光电技术有限公司 | Multifunctional substrate rack for coating |
-
2015
- 2015-08-23 CN CN201510540934.9A patent/CN105088169A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002134413A (en) * | 2000-10-24 | 2002-05-10 | Sony Corp | Clamp ring |
| CN101165206A (en) * | 2006-10-20 | 2008-04-23 | 鸿富锦精密工业（深圳）有限公司 | Substrate fixture and rotary disc for coating film and film coating machine |
| CN202576555U (en) * | 2012-05-09 | 2012-12-05 | 深圳市正星光电技术有限公司 | Multifunctional substrate rack for coating |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105887036A (en) * | 2016-05-12 | 2016-08-24 | 成都西沃克真空科技有限公司 | Clamp for clamping workpieces |
| CN105887036B (en) * | 2016-05-12 | 2018-07-06 | 成都西沃克真空科技有限公司 | A kind of workpiece fixture |
| CN108315703A (en) * | 2018-02-05 | 2018-07-24 | 宁波松科磁材有限公司 | A kind of preparation method of coating system and film plating process and rare-earth magnet |
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Application publication date: 20151125 |
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