CN101165206A - Substrate fixture and rotary disc for coating film and film coating machine - Google Patents
Substrate fixture and rotary disc for coating film and film coating machine Download PDFInfo
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- CN101165206A CN101165206A CNA2006100632115A CN200610063211A CN101165206A CN 101165206 A CN101165206 A CN 101165206A CN A2006100632115 A CNA2006100632115 A CN A2006100632115A CN 200610063211 A CN200610063211 A CN 200610063211A CN 101165206 A CN101165206 A CN 101165206A
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- substrate fixture
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- rotating disk
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Abstract
The substrate fixture for filming apparatus includes one frame, two holding units set oppositely and sliding in the frame, and elastic connecting units between the frame and each of the holding units. Two holding units have substrate holding parts in the opposite surfaces; and the elastic connecting units have elastic force acted onto the holding units for holding the substrate. When the fixture is in use, the substrate is held between the holding parts under the action of the elastic force. The substrate fixture is suitable for substrates of different sizes. The present invention has also a rotary disk and a filming machine provided with the substrate fixture.
Description
Technical field
The present invention relates to coating technique, particularly a kind of plated film with substrate fixture, plated film with rotating disk and coating equipment.
Background technology
Current, many Industrial products surface all is coated with function film, to improve the various performances of product surface.Plate one deck anti-reflective film as surface,, reduce the energy waste of incident light by eyeglass to reduce the reflectivity of lens surface at optical mirror slip.And for example plate one deck filter coating, can filter the light of a certain predetermined band, make various spectral filters on some filter element surface.
Coating equipment has generally comprised a plated film rotating disk, and rotating disk is provided with anchor clamps with clamping product to be coated.During plated film, the high speed rotating rotating disk is captured the difference of thin-film material atomicity to dwindle surperficial each point to be coated, makes coating film thickness even.For the flaky product of base, for clamping securely with the substrate of rotating disk high speed rotating, adopt the anchor clamps that tightly cooperate with sizes of substrate usually, a kind of substrate fixture only is applicable to a kind of substrate of dimensions.Therefore, when sizes of substrate changes, need to change simultaneously the anchor clamps that adopted.So, not only waste man-hour (changing the time of anchor clamps), and cost of idleness (developing multiple anchor clamps to satisfy the clamping demand of difform substrate).
Summary of the invention
In view of this, be necessary to provide a kind of substrate fixture that can tightly cooperate with the substrate of different size specification.
In addition, the present invention also provides a kind of plated film rotating disk that adopts above-mentioned substrate fixture.
Further, the present invention also provides a kind of coating equipment with above-mentioned plated film with rotating disk.
A kind of substrate fixture is used for filming equipment.Described substrate fixture comprises a framework, and two are oppositely arranged and are slidingly mounted on the intravital holder of described frame, and the elastic component of described framework of a plurality of connection and holder.The opposite face of described two holders is provided with the clamping part that is used for the clamping substrate, the resilient force of described a plurality of elastic components in described two holders so that described two holders clamping substrate in opposite directions.
A kind of plated film rotating disk, it comprises that a turntable body and at least one are installed on the substrate fixture on the described turntable body.Described substrate fixture comprises a framework, and two are oppositely arranged and are slidingly mounted on the intravital holder of described frame, and the elastic component of described framework of a plurality of connection and holder.The opposite face of described two holders is provided with the clamping part that is used for the clamping substrate, the resilient force of described a plurality of elastic components in described two holders so that described two holders clamping substrate in opposite directions.
A kind of coating equipment, it comprises an encloses container, at least one plated film target and a plated film rotating disk.Described encloses container is used to provide the vacuum space, and described plated film is installed in the encloses container and with described plated film target with rotating disk and is oppositely arranged.Described substrate fixture comprises a framework, and two are oppositely arranged and are slidingly mounted on the intravital holder of described frame, and the elastic component of described framework of a plurality of connection and holder.The opposite face of described two holders is provided with the clamping part that is used for the clamping substrate, the resilient force of described a plurality of elastic components in described two holders so that described two holders clamping substrate in opposite directions.
During use, draw back described two holders, substrate is positioned between the clamping part of two holders, releasable clamps, holder tightly is held on substrate between clamping part under the resilient force of elastic component.Because anchor clamps use elastic force to carry out clamping, so applicable to the substrate of different size specification.So, substrate fixture of the present invention can tightly cooperate with the substrate of different size specification.But the plated film that adopts above-mentioned substrate fixture is with rotating disk and the coating equipment firm grip substrate with the rotating disk high speed rotating, and sizes of substrate is when changing, the substrate fixture that needn't more renew.So, can save man-hour the times of anchor clamps (change), enhance productivity, and can reduce equipment cost (developing the cost of multiple anchor clamps) with the clamping demand that satisfies difform substrate.
Description of drawings
Fig. 1 is the vertical view of the substrate fixture of preferred embodiment of the present invention;
Fig. 2 is a substrate fixture shown in Figure 1 sectional view along the II-II direction;
Fig. 3 is a substrate fixture shown in Figure 1 sectional view along the III-III direction;
Fig. 4 is the vertical view of the plated film of preferred embodiment of the present invention with rotating disk;
Fig. 5 is the plated film shown in Figure 4 sectional view of rotating disk along the V-V direction;
Fig. 6 is the structural representation of the coating equipment of preferred embodiment of the present invention.
Embodiment
See also Fig. 1 and Fig. 2, substrate fixture 100 of the present invention comprises that 10, two of frameworks are oppositely arranged and are slidingly mounted on the holder 20 in the described framework 10, and the elastic component 30 of described framework 10 of a plurality of connection and holder 20.The opposite face of described two holders 20 is provided with the clamping part 21 that is used for the clamping substrate, the resilient force of described a plurality of elastic components 30 in described two holders 20 so that described two holders 20 clamping substrate in opposite directions.
Described framework 10 is a square frame body, and its material can adopt timber, plastics or iron and steel, and the framework 10 of present embodiment adopts iron and steel to make.Described holder 20 adopts the square that matches with the shape of described framework 10, and its material also adopts timber, plastics or iron and steel, and the holder 20 of present embodiment adopts iron and steel to make.Described clamping part 21 is one to be opened in the groove of described holder 20, and during use, the substrate both sides are inserted in the groove.Certainly, clamping part also can adopt other structures, and as two projections that are convexly set in holder, the space between two projections also can hold, the clamping substrate.
Described elastic component 30 adopts spring or shell fragment, and present embodiment adopts spring.Be connected with a spring between each holder 20 and the framework 10, certainly, also can adopt more spring to connect described holder 20 and framework 10, with holding force and the stability that improves described substrate fixture 100.The material of spring adopts carbon spring steel, low Manganese Spring Steel, silicon-manganese spring steel or chrome-vanadium steel to make, and described material has high tenacity, high-ductility and long work-ing life, and the spring of present embodiment adopts carbon spring steel to make.
See also Fig. 3, described framework 10 inwalls are provided with guide runner 11, and described holder 20 is provided with sliding pin 22, and described sliding pin 22 is embedded in the described guide runner 11 so that described holder 20 is slidingly mounted in the described framework 10.Certainly, the mode of being slidingly installed of holder is not limited to previous embodiment, can adopt other the mode that is slidingly installed.Offer groove as holder, and the framework inwall is convexly equipped with protruding pin.
During use, draw back described two holders 20, substrate is positioned between the clamping part 21 of two holders 20, decontrol holder 20 then, holder 20 will tightly be clamped substrate under the effect of elastic component 30.Because described substrate fixture 100 uses elastic forces to carry out clamping, so applicable to the substrate of different size specification.So, but the substrate of substrate fixture of the present invention 100 firm grip different size specifications.
Please consult Fig. 4 and Fig. 5 again, plated film of the present invention comprises a turntable body 40 and at least one described substrate fixture 100 with rotating disk 200, and described substrate fixture 100 is installed on the described turntable body 40.
Described turntable body 40 is a rosette, and as copper coin dish, aluminium disk or iron disk, present embodiment adopts the aluminium disk.Described turntable body 40 offers at least one accepting hole 41 that matches with described substrate fixture 100, and each substrate fixture 100 rotates and is installed on a corresponding accepting hole interior 41.Described plated film also comprises the motor module 50 that at least one matches with described substrate fixture with rotating disk 200, and each motor module 50 is used for driving a corresponding substrate fixture 100 upsets.
The rosette of present embodiment offers an accepting hole 41, certainly, also can offer accepting hole 41 more, and to accommodate more substrate fixture 100, visual production needs to set.Described accepting hole 41 shapes and size satisfy condition: described substrate fixture 100 can rotate in accepting hole 41 and not bump with accepting hole 41 sidewalls.The shape of corresponding substrate fixture 100, the accepting hole 41 of present embodiment is a rectangular through-hole.Certainly, also can adopt the accepting hole of other shapes, as manhole or other regular polygon through holes, as long as accepting hole satisfies the condition of " described substrate fixture can rotate and do not bump with the accepting hole sidewall " in accepting hole.
The substrate fixture 100 of present embodiment comprises that also one is attached to the rotating shaft 60 of described framework 10, the sidewall of described accepting hole 41 offers accommodates hole 42 and plugs for described rotating shaft 60, and described substrate fixture 100 rotates by described rotating shaft 60 and is arranged in the described accepting hole 41.Present embodiment framework 10 is a rectangle framework, and it is an axis symmetric body, and described rotating shaft 60 is installed on the axis place of rectangle framework, so, can eliminate when substrate fixture 100 rotates and produce eccentric force, so that substrate fixture 100 rotations are smooth and easy, steady.
Described motor module 50 comprises that a motor 51 and that is sheathed on described rotating shaft 60 is used to drive the battery modules 52 of described motor 51.Described battery modules 52 comprises a wireless control switch 53, and described wireless control switch 53 separates setting with turntable body 40, can wireless remote sensing control the working order of battery modules 52, and then control the rollover states of substrate fixture 100.Can also adopt automatic control switch instead of wireless trip switch, the working order of battery is controlled automatically.
See also Fig. 6, coating equipment 300 of the present invention comprises an encloses container 70, at least one plated film target 80 and a described plated film rotating disk 200.Described encloses container 70 is used to provide the vacuum space, and described plated film is installed in the encloses container 70 and with described plated film target 80 with rotating disk 200 and is oppositely arranged.
During use, substrate is held on plated film with in the substrate fixture 100 of rotating disk 200, airtight then encloses container 70 is evacuated encloses container 70 so that a vacuum space to be provided, and excites plated film target 80, and makes plated film with rotating disk 200 rotations, just can carry out plated film.
Described plated film is with the benefit of the may command overturn structure of the substrate fixture 100 of rotating disk 200: this structure makes described coating equipment 300 can only take out a vacuum and finishes the coating process on two surfaces of substrate.The process flow that the tradition coating equipment carries out plated film is: the substrate of packing into, vacuumize, for first surface plated film, vacuum breaker, manually overturn substrate, heavily vacuumize, for second surface plated film, vacuum breaker, finish coating process.And the coating equipment 300 of present embodiment is after having plated a surface, utilize wireless control switch 53 or automatic control switch control motor 51 drive substrate anchor clamps 100 to carry out 180 degree upsets, can carry out the second surface filming process, its process flow is: the substrate of packing into, vacuumize, for the first surface plated film, automatically overturn substrate, for second surface plated film, vacuum breaker, finish coating process.Whole process flow only need be taken out vacuum one time, is very time-consuming and the operation of expense energy owing to vacuumize, so described plated film can be saved man-hour and production energy consumption with the may command overturn structure of the substrate fixture 100 of rotating disk 200.
But the plated film that adopts above-mentioned substrate fixture 100 is with rotating disk 200 and the coating equipment 300 firm grip substrate with the rotating disk high speed rotating, and sizes of substrate is when changing, the substrate fixture that needn't more renew.So, can save man-hour (changing the time of anchor clamps), enhance productivity.And can reduce equipment cost (developing the cost of multiple anchor clamps) with the clamping demand that satisfies difform substrate.
In addition, those skilled in the art also can do other variation in spirit of the present invention.Certainly, these all should be included in protection scope of the present invention according to the variation that the present invention makes.
Claims (10)
1. a substrate fixture is used for filming equipment, it is characterized in that: described substrate fixture comprises a framework, and two are oppositely arranged and are slidingly mounted on the intravital holder of described frame, and the elastic component of described framework of a plurality of connection and holder; The opposite face of described two holders is provided with the clamping part that is used for the clamping substrate, the resilient force of described a plurality of elastic components in described two holders so that described two holders clamping substrate in opposite directions.
2. substrate fixture as claimed in claim 1 is characterized in that: described framework inwall is provided with guide runner, and described holder is provided with sliding pin, and described sliding pin is embedded in the described guide runner so that described holder is slidingly mounted in the described framework.
3. substrate fixture as claimed in claim 1 is characterized in that: described clamping part is the projection that a groove or two that is opened in described holder is convexly set in described holder.
4. substrate fixture as claimed in claim 1 is characterized in that: described elastic component adopts spring or shell fragment.
5. plated film rotating disk, it comprises a turntable body and at least one as each described substrate fixture among the claim 1-4, described substrate fixture is installed on the described turntable body.
6. plated film rotating disk as claimed in claim 5 is characterized in that: described turntable body offers at least one accepting hole that matches with described substrate fixture, and each substrate fixture rotates and is installed in the corresponding accepting hole; Described plated film also comprises the motor module that at least one matches with described substrate fixture with rotating disk, and each motor module is used for driving corresponding substrate fixture upset.
7. plated film rotating disk as claimed in claim 6, it is characterized in that: described substrate fixture comprises that also one is attached to the rotating shaft of described framework, the sidewall of described accepting hole offers for what described rotating shaft plugged and accommodates the hole, and described substrate fixture rotates by described rotating shaft and is arranged in the described accepting hole.
8. plated film rotating disk as claimed in claim 7 is characterized in that: described motor module comprises that a motor and that is sheathed on described rotating shaft is used to drive the battery modules of described motor.
9. plated film rotating disk as claimed in claim 8 is characterized in that: described battery modules comprises a wireless control switch or automatic control switch, is used to control the working order of battery modules.
10. coating equipment, it comprises an encloses container, at least one plated film target and a plated film rotating disk as claimed in claim 5; Described encloses container is used to provide the vacuum space, and described plated film is installed in the encloses container and with described plated film target with rotating disk and is oppositely arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100632115A CN100560789C (en) | 2006-10-20 | 2006-10-20 | Plated film with substrate fixture, plated film with rotating disk and coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100632115A CN100560789C (en) | 2006-10-20 | 2006-10-20 | Plated film with substrate fixture, plated film with rotating disk and coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101165206A true CN101165206A (en) | 2008-04-23 |
| CN100560789C CN100560789C (en) | 2009-11-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100632115A Expired - Fee Related CN100560789C (en) | 2006-10-20 | 2006-10-20 | Plated film with substrate fixture, plated film with rotating disk and coating equipment |
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| CN (1) | CN100560789C (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102234783A (en) * | 2010-04-28 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | A target material pedestal and a film plating apparatus employing the target material pedestal |
| CN102234780A (en) * | 2010-04-22 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | Lens tray clamp of film coating machine |
| CN102330065A (en) * | 2011-09-22 | 2012-01-25 | 中国航天科技集团公司第五研究院第五一○研究所 | Multifunctional substrate frame for vacuum coating equipment |
| CN103132043A (en) * | 2013-03-18 | 2013-06-05 | 上海理工大学 | Substrate carrying device |
| CN101988212B (en) * | 2009-08-05 | 2013-06-05 | 鸿富锦精密工业（深圳）有限公司 | Wet coating device |
| CN103132042A (en) * | 2013-03-18 | 2013-06-05 | 上海理工大学 | Adjustable fixture |
| CN104150784A (en) * | 2014-07-15 | 2014-11-19 | 河南康平光电高科有限公司 | Sheet loading rack for glass coating machine |
| CN104213092A (en) * | 2013-05-31 | 2014-12-17 | 信利光电股份有限公司 | Clamp |
| CN104233210A (en) * | 2013-06-08 | 2014-12-24 | 深圳市联懋塑胶有限公司 | Clamp for efficient top-spraying vacuum ion plating sleeve sprayer |
| CN105088169A (en) * | 2015-08-23 | 2015-11-25 | 洛阳新兆电子有限公司 | Application method of vacuum sputtering coated substrate clamping device |
| CN105714263A (en) * | 2014-12-02 | 2016-06-29 | 中国科学院大连化学物理研究所 | Four-prism film-coating clamping method |
| CN106746709A (en) * | 2016-12-30 | 2017-05-31 | 重庆重玻节能玻璃有限公司 | Glass immersion case |
| CN106835058A (en) * | 2017-01-03 | 2017-06-13 | 中国科学院上海光学精密机械研究所 | Elastic fixture device |
| CN106893996A (en) * | 2017-04-18 | 2017-06-27 | 东旭科技集团有限公司 | The voltage biasing structure and its clamping device of vertical use in magnetron sputtering coating |
| CN107159527A (en) * | 2017-07-11 | 2017-09-15 | 南通大学 | A kind of sol evenning machine |
| CN107475677A (en) * | 2017-08-18 | 2017-12-15 | 嘉兴申宁精密科技有限公司 | A kind of device using physical gas-phase deposition sputter coating |
| CN108866493A (en) * | 2018-06-29 | 2018-11-23 | 宁波江丰电子材料股份有限公司 | A kind of installation tool and semiconductor chip production system of semiconductor target |
| WO2021142759A1 (en) * | 2020-01-14 | 2021-07-22 | 南通瑞森光学股份有限公司 | Optical glass coating fixture having fixing structure |
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| JP2002368067A (en) * | 2001-06-08 | 2002-12-20 | Tokyo Electron Ltd | Rotating substrate processing device and rotating substrate processing method |
| CN2736367Y (en) * | 2004-02-18 | 2005-10-26 | 海泰超导通讯科技（天津）有限公司 | High-temperature superconducting film double-side vaporization-coating device |
| CN100372140C (en) * | 2005-03-29 | 2008-02-27 | 清华大学 | Method for making large area uniform film or long superconducting wire and its apparatus |
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2006
- 2006-10-20 CN CNB2006100632115A patent/CN100560789C/en not_active Expired - Fee Related
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101988212B (en) * | 2009-08-05 | 2013-06-05 | 鸿富锦精密工业（深圳）有限公司 | Wet coating device |
| CN102234780A (en) * | 2010-04-22 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | Lens tray clamp of film coating machine |
| CN102234780B (en) * | 2010-04-22 | 2014-11-05 | 鸿富锦精密工业（深圳）有限公司 | Lens tray clamp of film coating machine |
| CN102234783A (en) * | 2010-04-28 | 2011-11-09 | 鸿富锦精密工业（深圳）有限公司 | A target material pedestal and a film plating apparatus employing the target material pedestal |
| CN102330065A (en) * | 2011-09-22 | 2012-01-25 | 中国航天科技集团公司第五研究院第五一○研究所 | Multifunctional substrate frame for vacuum coating equipment |
| CN103132043A (en) * | 2013-03-18 | 2013-06-05 | 上海理工大学 | Substrate carrying device |
| CN103132042A (en) * | 2013-03-18 | 2013-06-05 | 上海理工大学 | Adjustable fixture |
| CN103132042B (en) * | 2013-03-18 | 2014-12-10 | 上海理工大学 | Adjustable fixture |
| CN104213092A (en) * | 2013-05-31 | 2014-12-17 | 信利光电股份有限公司 | Clamp |
| CN104233210A (en) * | 2013-06-08 | 2014-12-24 | 深圳市联懋塑胶有限公司 | Clamp for efficient top-spraying vacuum ion plating sleeve sprayer |
| CN104150784A (en) * | 2014-07-15 | 2014-11-19 | 河南康平光电高科有限公司 | Sheet loading rack for glass coating machine |
| CN105714263A (en) * | 2014-12-02 | 2016-06-29 | 中国科学院大连化学物理研究所 | Four-prism film-coating clamping method |
| CN105714263B (en) * | 2014-12-02 | 2018-07-31 | 中国科学院大连化学物理研究所 | A kind of clamping method when four prisms plated film |
| CN105088169A (en) * | 2015-08-23 | 2015-11-25 | 洛阳新兆电子有限公司 | Application method of vacuum sputtering coated substrate clamping device |
| CN106746709A (en) * | 2016-12-30 | 2017-05-31 | 重庆重玻节能玻璃有限公司 | Glass immersion case |
| CN106746709B (en) * | 2016-12-30 | 2019-03-26 | 重庆重玻节能玻璃有限公司 | Glass immersion case |
| CN106835058A (en) * | 2017-01-03 | 2017-06-13 | 中国科学院上海光学精密机械研究所 | Elastic fixture device |
| CN106893996B (en) * | 2017-04-18 | 2019-03-15 | 东旭科技集团有限公司 | The voltage biasing structure and its clamping device of vertical use in magnetron sputtering coating |
| CN106893996A (en) * | 2017-04-18 | 2017-06-27 | 东旭科技集团有限公司 | The voltage biasing structure and its clamping device of vertical use in magnetron sputtering coating |
| CN107159527A (en) * | 2017-07-11 | 2017-09-15 | 南通大学 | A kind of sol evenning machine |
| CN107475677A (en) * | 2017-08-18 | 2017-12-15 | 嘉兴申宁精密科技有限公司 | A kind of device using physical gas-phase deposition sputter coating |
| CN108866493A (en) * | 2018-06-29 | 2018-11-23 | 宁波江丰电子材料股份有限公司 | A kind of installation tool and semiconductor chip production system of semiconductor target |
| WO2021142759A1 (en) * | 2020-01-14 | 2021-07-22 | 南通瑞森光学股份有限公司 | Optical glass coating fixture having fixing structure |
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|---|---|
| CN100560789C (en) | 2009-11-18 |
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