CN105714263A - Four-prism film-coating clamping method - Google Patents

Four-prism film-coating clamping method Download PDF

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Publication number
CN105714263A
CN105714263A CN201410719272.7A CN201410719272A CN105714263A CN 105714263 A CN105714263 A CN 105714263A CN 201410719272 A CN201410719272 A CN 201410719272A CN 105714263 A CN105714263 A CN 105714263A
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China
Prior art keywords
prism
angled
hole
angle
rectangle
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CN201410719272.7A
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Chinese (zh)
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CN105714263B (en
Inventor
龚选香
李刚
邓淞文
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Dalian Institute of Chemical Physics of CAS
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Dalian Institute of Chemical Physics of CAS
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Priority to CN201410719272.7A priority Critical patent/CN105714263B/en
Publication of CN105714263A publication Critical patent/CN105714263A/en
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Publication of CN105714263B publication Critical patent/CN105714263B/en
Expired - Fee Related legal-status Critical Current
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Abstract

The invention relates to an optical four-prism film-coating clamping method. The method includes three parts of a main disc, a prism and angle complementary pieces. The main disc is provided with a through hole same in shape and size with the lower surface of the prism, the inner wall surface of the through hole is provided with a convex platform for carrying the four-prism and the angle complementary pieces, the angle and the size of the angle complementary pieces are designed to keep complementary with the angle and the size of the prism, when in clamping, the prism and the angle complementary pieces are jointed, then together put into the main disc, and integrally loaded into a film coating machine planetary fixture. The method can achieve that four surfaces of the four-prism can be coated by a set of fixture (comprising one main disc and three angle complementary pieces), after the film coating, the disc four surfaces have no film material diffraction, membrane layer quality is improved, product quality is improved, and fixture cost is reduced. The method is applicable to clamping of all types of prisms when in film coating. The method is simple to use and easy in operation, saves the fixture cost, and effectively solves the clamping problem of film coating of prism oblique surfaces.

Description

A kind of clamping method during four prism plated film
Technical field
The present invention relates to the plated film clamping method of a kind of prism, be specially clamping method during a kind of four prism plated film.
Background technology
The coating process of four prisms (such as Fig. 5), usual way is as follows, after prism precision cleaning is good, puts in coating clamp, if four faces are both needed to plated film, then just need to put at least three sleeve clamps, even fixture entirety successively is put into and carried out plated film in coater.The design having the disadvantage that (1) electron gun evaporation coater is: face to be plated need to be mutually perpendicular to evaporation source.Owing to the hypotenuse angle of four prisms is excessive, it is difficult to during plated film make inclined-plane (A and C) be fixed on evaporating surface, so two inclined-plane plated films become a difficult problem;(2) common clamping device, during upper surface (B) of plating prism, coating materials can be diffracted into the inclined-plane (A and C) at two ends, directly affects the fixture tricks that film quality (3) needs many, adds production cost.
Summary of the invention
The present invention devises clamping method during a kind of four prism plated film.The method can accomplish that a sleeve clamp (master, three angled complimentary blocks) plates four faces of four prisms, and after plated film, each face is without coating materials diffraction, and clamping difficult problem when efficiently solving prism hypotenuse/facet surfaces plated film.
The present invention solves by the following technical programs: the plated film clamping method of four prisms, including master, prism, three parts of angled complimentary block, master offers a shape and size through hole identical with prism lower surface, is provided with in through-hole wall face for carrying four prisms and the boss of angled complimentary block;The angle of the angle of angled complimentary block and size design and prism and size keep complementary, and during clamping, prism splices with angled complimentary block, puts into master together, last overall loading coater planetary fixture plated film.
The method is applicable to clamping during all types prism plated film.
The method is applicable to the prism of all materials of clamping.
The effect of invention:
The method is applicable to clamping during all kinds prism plated film.The method uses simple, easy to operate, improves film quality, improves product quality, decreases fixture and puts into.And efficiently solve a difficult problem for clamping during prism especially its inclined-plane plated film.
Accompanying drawing explanation
Fig. 1 is embodiment of the present invention overall structure schematic diagram.
(1) master in figure;(2) prism;(3) angled complimentary block;
The placement schematic diagram of right lateral surface A and left-hand face C is plated when Fig. 2 is embodiment of the present invention plated film clamping.
Fig. 3 plates the placement schematic diagram of surface B when being embodiment of the present invention plated film clamping.
The placement schematic diagram of lower surface D is plated when Fig. 4 is embodiment of the present invention plated film clamping.
Fig. 5 tetra-prism needs each schematic surface of plated film.
Detailed description of the invention
As shown in the figure: the embodiment of the present invention is made up of master 1, prism 2,3 three parts of angled complimentary block, master offers a shape and size through hole identical with prism lower surface, is provided with in through-hole wall face for carrying four prisms and the boss of angled complimentary block;The angle of the angle of angled complimentary block 3 and size design and prism 2 and size keep complementation.During clamping, prism 2 precision cleaning well after splice with angled complimentary block 3, then entirety puts into master 1, makes the face to be plated of prism 2 with the export-oriented face of master 1 (this face is vertical with evaporation source can plate rete in a vacuum chamber equably) in approximately the same plane.
Embodiment:
Prism 2 good for attrition process is put on superclean bench, scouring accurate before optical detection lamp, make up to the clean surface degree before plated film;Master 1 and angled complimentary block 3 ultrasonic washing unit clean up removal surface by stain etc., and drying is set level standby;The A face of the prism 2 cleaned and angled complimentary block 3 are combined, puts in master 1, then entirety puts into coater planetary fixture, starts plated film.Repeat this program and plate B, C, D face of this four prism successively.The mode in each face of clamping is as shown in Figure 2, Figure 3, Figure 4.
Plated film is looked into each surface with optical detection lamp inspection after completing and each face Lamda950 ultraviolet/visible/near infrared spectrophotometer is carried out spectrum test analysis.It is shown that with four prisms after the method clamping plated film, test spectral is qualified, and surface quality is good, without rete diffraction.

Claims (3)

1. a clamping method during prism plated film, the cross section of described four prisms is rectangle, longitudinal section is isosceles trapezoid, in its rectangle, transverse plane is upper surface, rectangle lower end plane is lower surface, the area of lower surface is more than the area of upper surface, isosceles trapezoid base angle angle near lower surface is A, and upper surface is parallel with lower surface, and front side surface is parallel with rear side surface;The clamping method adopted is made up of tabular master and three angled complimentary blocks, offers a shape and size through hole identical with prism lower surface, be provided with in through-hole wall face for carrying four prisms and the boss of angled complimentary block on master;The cross section of first angled complimentary block is rectangle, longitudinal section is right-angled trapezium, and in its rectangle, transverse plane is upper surface, rectangle lower end plane is lower surface, and the area of lower surface is more than the area of upper surface, upper surface is parallel with lower surface, and front side surface is parallel with rear side surface;An angle near the base angle of right-angled trapezium lower surface is 90 degree, and another angle is B, A+B=180 degree;The width of first angled complimentary block lower surface is identical with the width of through hole, and the length of first angled complimentary block lower surface adds the waist long sum length equal to through hole of prism isosceles trapezoid;Second identical with the 3rd angled complimentary block structure, cross section is rectangle, longitudinal section is right angled triangle, its upper end is a line segment, lower end plane is rectangle lower surface, line segment is parallel with lower surface, and front side surface is parallel with rear side surface, and one, the base angle angle near the triangle of lower surface is 90 degree, another angle is B, A+B=180 degree;Second identical with the width of through hole with the width of the 3rd angled complimentary block lower surface, the length of second and three angled complimentary block lower surface adds the length sum length equal to through hole on the upper base of prism isosceles trapezoid, it is characterised in that: the upper surface of four prisms, lower surface, left-hand face, right lateral surface are coated surface;When left-hand face or right lateral surface plated film, prism and first angled complimentary block splice, and put in the through hole of master together, eventually put into and carry out plated film in coater;When upper surface plated film, prism and second and the 3rd angled complimentary block splicing, put in the through hole of master together, eventually put into and coater carries out plated film;Instantly during surface coating, prism is directly placed in the through hole of master, eventually puts into and carries out plated film in coater.
2. the clamping method described in claim 1, it is characterised in that: wherein, master, angled complimentary block material be metal material.
3. the clamping method described in claim 1 or 2, it is characterised in that: the angle of angled complimentary block keeps complementation with prism, it is ensured that the inclined-plane to be coated of prism can be fixed in master smoothly.
CN201410719272.7A 2014-12-02 2014-12-02 A kind of clamping method when four prisms plated film Expired - Fee Related CN105714263B (en)

Priority Applications (1)

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CN201410719272.7A CN105714263B (en) 2014-12-02 2014-12-02 A kind of clamping method when four prisms plated film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410719272.7A CN105714263B (en) 2014-12-02 2014-12-02 A kind of clamping method when four prisms plated film

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CN105714263A true CN105714263A (en) 2016-06-29
CN105714263B CN105714263B (en) 2018-07-31

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109267012A (en) * 2018-09-19 2019-01-25 南京格奥光电科技有限公司 A kind of more faceted pebble nanoprism processing technologys
CN112030128A (en) * 2020-08-21 2020-12-04 中国科学院西安光学精密机械研究所 A coating anchor clamps for Sagnac type interferometer subassembly

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101165206A (en) * 2006-10-20 2008-04-23 鸿富锦精密工业(深圳)有限公司 Substrate fixture and rotary disc for coating film and film coating machine
CN101393273A (en) * 2007-09-21 2009-03-25 鸿富锦精密工业(深圳)有限公司 Lens coating jig and lens coating method
CN101634011A (en) * 2008-07-21 2010-01-27 中国科学院宁波材料技术与工程研究所 Magnetic control sputtering device and method for uniformly coating film on outer surface of workpiece
CN201634759U (en) * 2010-01-11 2010-11-17 成都派斯光学有限公司 Vacuum coater
CN203049027U (en) * 2012-12-26 2013-07-10 京浜光学制品(常熟)有限公司 One-time molding film-plating clamp of right-angle prism

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101165206A (en) * 2006-10-20 2008-04-23 鸿富锦精密工业(深圳)有限公司 Substrate fixture and rotary disc for coating film and film coating machine
CN101393273A (en) * 2007-09-21 2009-03-25 鸿富锦精密工业(深圳)有限公司 Lens coating jig and lens coating method
CN101634011A (en) * 2008-07-21 2010-01-27 中国科学院宁波材料技术与工程研究所 Magnetic control sputtering device and method for uniformly coating film on outer surface of workpiece
CN201634759U (en) * 2010-01-11 2010-11-17 成都派斯光学有限公司 Vacuum coater
CN203049027U (en) * 2012-12-26 2013-07-10 京浜光学制品(常熟)有限公司 One-time molding film-plating clamp of right-angle prism

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109267012A (en) * 2018-09-19 2019-01-25 南京格奥光电科技有限公司 A kind of more faceted pebble nanoprism processing technologys
CN109267012B (en) * 2018-09-19 2020-06-19 南京格奥光电科技有限公司 Multi-faceted nano prism processing technology
CN112030128A (en) * 2020-08-21 2020-12-04 中国科学院西安光学精密机械研究所 A coating anchor clamps for Sagnac type interferometer subassembly

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