TWI498542B - Optical inspection device - Google Patents
Optical inspection device Download PDFInfo
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- TWI498542B TWI498542B TW101137138A TW101137138A TWI498542B TW I498542 B TWI498542 B TW I498542B TW 101137138 A TW101137138 A TW 101137138A TW 101137138 A TW101137138 A TW 101137138A TW I498542 B TWI498542 B TW I498542B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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- Length Measuring Devices By Optical Means (AREA)
Description
本發明係有關於一種，此尤指一種在擷取軟性材質而成之檢測基片過程中，使檢測基片之變形最小化，維持其平滑度，進而得以進行迅速且精準檢測之光學檢測裝置者。The present invention relates to an optical detecting device which is capable of minimizing deformation of a detecting substrate during the process of detecting a substrate, and maintaining the smoothness thereof, thereby enabling rapid and accurate detection. By.
按市售之各種顯示裝置逐漸走向大型化趨勢，反觀，產品之厚度卻呈現逐漸變薄之狀況。如上所述之顯示裝置，其係透過利用光學相機之視覺檢測進而檢出不良與否。According to various display devices that are commercially available, the trend toward large-scale is gradually increasing. On the other hand, the thickness of the product is gradually thinning. The display device as described above detects defects or not by visual inspection using an optical camera.
為執行如上所述之視覺檢測，必須設置輸送檢測對象之輸送裝置，以及為進行檢測用以固定檢測對象之固定裝置。In order to perform the visual inspection as described above, it is necessary to provide a transport device that transports the detection object, and a fixture that performs detection to fix the object to be detected.
尤其，對於由薄膜素材而成，因而具有軟性之軟片，以及設有孔之基板等之表面檢測而言，固定裝置之平滑度一向被視為極為重要之事。為此，在雙層之透明玻璃基板之間配置檢測基片，或在外緣穿孔，並於該孔施加真空吸附力，進而吸附檢測基片使其固定之裝置，均為在進行檢測過程中，用以確保檢測基片平滑度之習知固定裝置。In particular, the smoothness of the fixing device has always been considered to be extremely important for the surface detection of a film made of a film material, a soft film, and a substrate provided with a hole. For this reason, a detection substrate is disposed between the double-layer transparent glass substrates, or a device for perforating the outer edge, and applying a vacuum adsorption force to the holes, thereby adsorbing and detecting the substrate to be fixed, is in the process of performing the detection. A conventional fixture for ensuring the smoothness of a substrate.
真空吸盤裝置，其係藉由吸收基板與吸盤裝置間之空氣，使呈負壓(negative pressure)，進而真空吸附基板之技術。而此裝置係以強烈負壓緊密吸附基板之整體面，因而對於容易彎曲之基板，亦能夠達到一邊抑制彎曲一邊完成吸附之效果；惟如上所述之情形，具有由於檢測基片扭曲變形，導致產生局部扭曲現象，以致無法確保其平面度，進而產生不可檢測領域之缺失。A vacuum chuck device is a technique for absorbing a negative pressure by absorbing air between a substrate and a chuck device, thereby vacuum adsorbing the substrate. Moreover, the device closely adsorbs the entire surface of the substrate with a strong negative pressure, so that for the substrate which is easy to bend, the effect of suppressing the bending while completing the adsorption can be achieved; however, as described above, there is a distortion due to the detection substrate. Local distortion occurs, so that the flatness cannot be ensured, resulting in the absence of undetectable areas.
有鑑於此，本案發明人歷經無數次改良後，終於完成本發明之光學檢測裝置，即本發明之目的，乃在提供一種光學檢測裝置，將易變形材質而成之檢測基片加以精密固定，以利在固定狀態下完成視覺檢測，進而提升檢測速度及達成更加穩定且正確之檢測者。In view of the above, the inventor of the present invention has finally completed the optical detecting device of the present invention after numerous improvements, and an object of the present invention is to provide an optical detecting device for precisely fixing a detecting substrate made of a deformable material. Eli completes the visual inspection in a fixed state, thereby improving the detection speed and achieving a more stable and correct detector.
為達上述本發明之目的，本發明之光學檢測裝置，係包含有：一檢測台，係由光穿透性材質而成，供裝載檢測基片，另形成有沿著上面邊緣方向往下凹入之容置凹槽，並藉由貫通該容置凹槽與下面形成流路；一固定架，係供支撐該檢測台之側面或上面；一吸板，係由多孔質陶瓷材質而成，供插設於該檢測台之容置凹槽；一真空模組，係於該流路施加真空壓，藉使該吸板上之檢測基片作吸附；一背光元件，係由該檢測台之下方將光照射於檢測台上之檢測基片；一成像裝置，係裝設於該檢測台之上方，供擷取裝載於該測台之檢測基片之影像者，其中：該真空模組，係包含有：一真空泵浦，其一端與該檢測台之流路相連之真空軟管， 與該真空軟管之另一端相連，藉以施加真空壓；形成於該檢測台之容置凹槽之深度，與插設於該容置凹槽之吸板之厚度相同，藉以讓該檢測台與吸板之上面往相同平面作平整相連。For the purpose of the present invention, the optical detecting device of the present invention comprises: a detecting station made of a light transmissive material for loading the detecting substrate, and further formed with a concave direction along the upper edge direction. The receiving groove is received, and a flow path is formed through the receiving groove and the lower surface; a fixing frame is provided for supporting the side or the top of the detecting table; a suction plate is made of a porous ceramic material. Inserting a receiving groove in the detecting table; a vacuum module is configured to apply vacuum pressure to the flow path, so that the detecting substrate on the suction plate is adsorbed; and a backlight component is used by the detecting platform The detection substrate is irradiated with light on the detection table; an imaging device is mounted above the inspection table for capturing the image of the detection substrate loaded on the measurement platform, wherein: the vacuum module, The utility model comprises: a vacuum pump, a vacuum hose whose one end is connected to the flow path of the inspection platform, Connected to the other end of the vacuum hose, thereby applying a vacuum pressure; the depth of the receiving groove formed in the detecting table is the same as the thickness of the suction plate inserted in the receiving groove, thereby allowing the detecting table to The top of the suction plate is connected to the same plane.
該容置凹槽，係藉由形成於該檢測台之上面邊緣之卡榫加以固定。The accommodating recess is fixed by a latch formed on an upper edge of the detecting table.
該陶瓷吸板之容置凹槽，係包含有：一邊緣部，係以沿著該檢測台之邊緣方式加以形成；一橫切部，係以穿越中心部方式加以形成，以供連通該邊緣部；該吸板，係形成有真空壓無法傳遞之迴避區間，以防止吸附力施加於裝載之檢測基片。The receiving groove of the ceramic suction plate comprises: an edge portion formed along an edge of the inspection table; a transverse portion formed by crossing the center portion for connecting the edge The suction plate is formed with an avoidance section in which the vacuum pressure cannot be transmitted to prevent the adsorption force from being applied to the loaded detection substrate.
上述發明之光學檢測裝置，其係具有以下效果：The optical detecting device of the above invention has the following effects:
1.將易變形材質而成之檢測基片之緣面，以微細且均一之吸附力加以固定方式進行視覺檢測，藉以提升檢測速度及達到更加正確之檢測。1. The edge of the detection substrate which is made of a deformable material is visually detected by a fine and uniform adsorption force, thereby improving the detection speed and achieving a more accurate detection.
2.使施加於檢測基片之物理衝擊最小化，同時可有效提升吸附力，藉此能夠有效防止檢測基片之損傷及變形，並能夠進行穩定之檢測。2. The physical impact applied to the detecting substrate is minimized, and the adsorption force can be effectively increased, whereby damage and deformation of the detecting substrate can be effectively prevented, and stable detection can be performed.
為利 貴審查委員瞭解本發明之發明特徵、內容與優點及其所能達成之功效，茲將本創作配合附圖，並以實施例之表達形式詳細說明如下，而其中所使用之圖式，其主旨僅為示意及 五輔助說明書之用，未必為本發明實施後之真實比例與精準配置，故不應就所附之圖式的比例與配置關係解讀、侷限本發明與實際實施上的權利範圍，合先敘明。In order to understand the features, contents and advantages of the invention, and the effects thereof, the present invention will be described in detail with reference to the accompanying drawings, and the drawings used therein, The subject matter is only for indication and The use of the five supplementary instructions is not necessarily the true proportion and precise configuration after the implementation of the invention. Therefore, the proportions and configuration relationships of the attached drawings should not be interpreted or limited, and the scope of the invention and the actual implementation scope should be .
第1圖，係本發明一較佳實施例之示意圖；第2圖，係本發明一較佳實施例之使用狀態圖。1 is a schematic view of a preferred embodiment of the present invention; and FIG. 2 is a view showing a state of use of a preferred embodiment of the present invention.
本發明一較佳實施例之光學檢測裝置，係一種將由軟性素材而成之檢測基片10以真空加以吸附、固定，以對其執行視覺檢測者，包含：一檢測台100，係由光穿透性材質而成，供裝載檢測基片10，另形成有沿著上面邊緣方向往下凹入之容置凹槽110，並藉由貫通該容置凹槽110與下面形成流路120；一固定架200，係供支撐該檢測台100之側面或上面；一吸板300，係由多孔質陶瓷材質而成，供插設於該檢測台100之容置凹槽110；一真空模組400，係於該流路120施加真空壓，使該吸板300上之檢測基片10作吸附；一背光元件500，係由該檢測台100之下方將光照射於檢測台100上之檢測基片10；一成像裝置600，係裝設於該檢測台100之上方，供擷取裝載於該測台100之檢測基片10之影像。An optical detecting device according to a preferred embodiment of the present invention is a method in which a detecting substrate 10 made of a soft material is adsorbed and fixed by vacuum to perform visual inspection thereon, comprising: a detecting station 100, which is worn by light. a permeable material for loading the detecting substrate 10, and a receiving recess 110 recessed downwardly along the upper edge direction, and forming a flow path 120 through the accommodating recess 110 and the lower surface; The fixing frame 200 is for supporting the side or the top of the detecting table 100; a suction plate 300 is made of a porous ceramic material for inserting into the receiving groove 110 of the detecting table 100; a vacuum module 400 Applying a vacuum pressure to the flow path 120 to cause the detection substrate 10 on the suction plate 300 to be adsorbed; a backlight element 500 is a detection substrate on which the light is irradiated on the detection table 100 from below the detection table 100. An imaging device 600 is mounted above the inspection station 100 for capturing images of the detection substrate 10 mounted on the measurement platform 100.
本發明所稱檢測基片10，係可由軟片、設有孔之基板、紙、布、薄板、薄膜等習用各類板形素材所構成。The detecting substrate 10 of the present invention may be composed of a film, a substrate provided with a hole, a paper, a cloth, a thin plate, a film, and the like, and various types of plate-shaped materials.
該檢測台100，係由光穿透性材質而成，供裝載檢測基片10，其上面形成有沿著上面邊緣方向往下凹入之容置凹槽 110，並藉由貫通該容置凹槽110與下面形成流路120，而該檢測基片10則安裝於其上面，以供檢測。The detecting station 100 is made of a light transmissive material for loading the detecting substrate 10, and the receiving surface is formed with a receiving recess recessed downward along the upper edge direction. 110, and forming a flow path 120 through the accommodating recess 110 and the lower surface, and the detecting substrate 10 is mounted thereon for detection.
該檢測台100，係應由透明素材所構成，如玻璃、壓克力等，以能夠讓配置於其下方之背光元件500之光穿透。此外，該檢測台100之形狀，可包含正方形、長方形、圓形等，以對應於預計進行檢測之檢測基片10之形狀為較佳。茲舉一例加以說明，當該檢測基片10為正方形時，該檢測台100亦呈正方形。以在一檢測台100檢測一檢測基片10為原則，惟基於提升檢測速度，可在一檢測台100裝載複數個檢測基片10且進行檢測。後者，該檢測台100之大小或形狀，應以具有足夠空間方式加以搭配，以能夠裝載複數個檢測基片10。The inspection station 100 should be composed of a transparent material such as glass, acryl or the like to allow light of the backlight element 500 disposed under it to penetrate. Further, the shape of the inspection table 100 may include a square, a rectangle, a circle, or the like, preferably in accordance with the shape of the detection substrate 10 which is expected to be detected. As an example, when the detecting substrate 10 is square, the detecting station 100 is also square. Based on the principle that a test substrate 100 detects a test substrate 10, based on the lift detection speed, a plurality of test substrates 10 can be loaded on a test stand 100 and detected. In the latter case, the size or shape of the inspection station 100 should be matched in a sufficiently spatial manner to enable loading of a plurality of detection substrates 10.
另一方面，該檢測台100之上面邊緣，形成有往下方凹入之容置凹槽110，並貫穿該容置凹槽100與下面形成流路120。該容置凹槽110，其係供安裝吸板300(後續作補充說明)之空間；流路120則係供作於該吸板300施加真空壓所需之通路。該容置凹槽110與流路120，其寬度不相同，可藉階梯形加以相連，以供其兩者間形成卡榫，此時，該流路120之寬度比該容置凹槽110之寬度較窄為較佳。茲舉一例加以說明，該容置凹槽120可沿著正方形檢測台100之邊緣形成為正方形，而所有容置凹槽110，則可為藉由連接成一體，使其內部形成封閉空間之結構，但可為由複數個容置凹槽110分別依個別區間呈各容置凹槽110之間呈封閉之結構。On the other hand, the upper edge of the inspection table 100 is formed with a receiving recess 110 recessed downward, and a flow path 120 is formed through the receiving recess 100 and the lower surface. The receiving recess 110 is a space for mounting the suction plate 300 (described later in detail); the flow path 120 is for providing a passage required for the suction plate 300 to apply a vacuum pressure. The accommodating recess 110 and the flow path 120 have different widths and can be connected by a step shape for forming a latch therebetween. At this time, the width of the flow path 120 is larger than that of the accommodating recess 110. A narrower width is preferred. As an example, the accommodating recess 120 may be formed in a square shape along the edge of the square detecting table 100, and all the accommodating recesses 110 may be a structure in which the inside is formed into a closed space by being integrally connected. However, the plurality of accommodating recesses 110 may be respectively closed between the accommodating recesses 110 according to the respective intervals.
該固定架200，係藉由支撐該檢測台100之側面或下面，進而扮演將該檢測台100連接於本體700之角色。該固定架 200，係可為同夾具(jig)之結構，並可將該檢測台100固定於呈桌形結構之本體700。此時，該本體700之中心部位，可形成一個中空的空間，供插入該檢測台100。The fixing frame 200 plays the role of connecting the detecting table 100 to the body 700 by supporting the side or the bottom of the detecting table 100. The holder 200, which may be the same jig structure, and the test stand 100 may be fixed to the body 700 in a table-like structure. At this time, a central portion of the body 700 can form a hollow space for insertion into the inspection station 100.
該吸板300，係由多孔質陶瓷素材所構成，並插設於該檢測台100之容置凹槽110。該吸板300之形狀，可對應於該容置凹槽110之形狀，以供插入該容置凹槽110內。茲舉一例加以說明，該容置凹槽110呈長方形，而該吸板300亦呈長方形。因此，該檢測台100之上面，係該吸板300沿著其邊緣呈外漏狀態，而可透過外漏之該吸板300使該檢測基片10加以固定。若該吸板300由多孔質陶瓷素材所構成，空氣便會透過形成於陶瓷之微細空隙吸入，進而產生往該吸板300上面之吸附力，並透過該吸附力使該檢測基片10加以固定。The suction plate 300 is made of a porous ceramic material and is inserted into the receiving groove 110 of the inspection table 100. The shape of the suction plate 300 can correspond to the shape of the receiving groove 110 for insertion into the receiving groove 110. As an example, the receiving recess 110 has a rectangular shape, and the suction plate 300 has a rectangular shape. Therefore, on the upper surface of the inspection table 100, the suction plate 300 is in an external leakage state along the edge thereof, and the detection substrate 10 can be fixed by the suction plate 300 which is leaked externally. If the suction plate 300 is made of a porous ceramic material, air is sucked through the fine voids formed in the ceramic, thereby generating an adsorption force on the suction plate 300, and the detection substrate 10 is fixed by the adsorption force. .
本發明之較佳實施例，其中形成於該檢測台100之容置凹槽110之深度(D)，與插設於該容置凹槽110之吸板300之厚度(T)相同，進而使該檢測台100與吸板300之上面以平面方式加以連接。In a preferred embodiment of the present invention, the depth (D) formed in the receiving recess 110 of the detecting station 100 is the same as the thickness (T) of the suction plate 300 inserted in the receiving recess 110, thereby The test stand 100 is connected to the upper surface of the suction plate 300 in a planar manner.
即，當該吸板300與檢測台100無法以平面加以連接時，便有可能會發生其上面所搭載檢測基片10之形狀變形或吸附力減弱等之問題。因此，將該吸板300與檢測台100以水平方式加以連接，以避免發生如上所述之問題。That is, when the suction plate 300 and the inspection table 100 cannot be connected in a plane, there is a possibility that the shape of the detection substrate 10 mounted thereon is weakened or the adsorption force is weakened. Therefore, the suction plate 300 and the inspection table 100 are connected in a horizontal manner to avoid the problem as described above.
該真空模組400，係具有將真空壓施加於該流路120，使該吸板300上之檢測基片10作吸附之功能。當該真空模組400與流路20相連，藉以施加真空壓時，便由插設於該容置凹槽110之吸板300產生吸附力。The vacuum module 400 has a function of applying a vacuum pressure to the flow path 120 to adsorb the detection substrate 10 on the suction plate 300. When the vacuum module 400 is connected to the flow path 20, when the vacuum pressure is applied, the suction force is generated by the suction plate 300 inserted in the accommodating recess 110.
本發明之較佳實施例，其中該真空模組400，係可包含：一真空軟管410，其一端供與該檢測台100之流路120相連；一開關閥與真空泵浦420，其與該真空軟管410相連，藉以施加真空壓。In a preferred embodiment of the present invention, the vacuum module 400 can include: a vacuum hose 410 having one end connected to the flow path 120 of the inspection station 100; an on-off valve and a vacuum pump 420, Vacuum hoses 410 are connected to apply vacuum pressure.
因此，當該真空泵浦420運轉時，該流路120與容置凹槽100之空氣便會透過該真空軟管410向外流出，藉以產生真空壓，同時在該吸板300產生吸附力。Therefore, when the vacuum pump 420 is operated, the flow path 120 and the air accommodating the groove 100 will flow outward through the vacuum hose 410, thereby generating a vacuum pressure, and at the same time, an adsorption force is generated in the suction plate 300.
該背光元件500，係配置於該檢測台100之下方，供作將光照射於該檢測台100上之檢測基片10之光源。The backlight element 500 is disposed below the detection stage 100 and serves as a light source for detecting the substrate 10 on the detection stage 100.
因此，由該背光元件500照射之光，便會通過該檢測台100，並穿透裝載於其上面之該檢測基片10，藉以輸往該成像裝置(600)，進而能夠檢測該檢測基片10之不良與否。茲舉一例加以說明，可檢測鑽孔於該檢測基片10之複數個孔或軟片上所形成花樣部之形狀，與該孔是否位於正確位置或其形狀影像之不良與否。Therefore, the light irradiated by the backlight element 500 passes through the detecting station 100 and penetrates the detecting substrate 10 mounted thereon, thereby being sent to the image forming apparatus (600), thereby being capable of detecting the detecting substrate. 10 is not good or not. As an example, the shape of the pattern formed on the plurality of holes or films of the detecting substrate 10 can be detected, and whether the hole is in the correct position or the image of the shape is defective or not.
該成像裝置600，係配置於該檢測台100之上方，供擷取裝載於該檢測台100之檢測基片10之影像者，包含相機。透過該成像裝置600所擷取之影像，可執行影像分析及辨別不良與否。The imaging device 600 is disposed above the detection platform 100 and includes a camera for capturing images of the detection substrate 10 mounted on the detection platform 100. Through the image captured by the imaging device 600, image analysis and discrimination can be performed.
第3圖，係本發明另一較佳實施例之平面圖；第4圖，係本發明一較佳實施例之斷面圖。Figure 3 is a plan view of another preferred embodiment of the present invention; and Figure 4 is a cross-sectional view of a preferred embodiment of the present invention.
本發明之較佳實施例，其中該容置凹槽110係形成於該檢測台100之上面邊緣。In the preferred embodiment of the present invention, the receiving recess 110 is formed on the upper edge of the detecting station 100.
上述情形，吸板300之一側面，係藉由檢測台100之容置凹槽110所支撐，但另一側面，則藉由固定架200或本體700所支撐。如上所述，當容置凹槽110形成於邊緣時，由於可充分運用檢測台100之面積，因而具有可固定及檢測各類尺寸檢測基片10之效果。In the above case, one side of the suction plate 300 is supported by the receiving groove 110 of the detecting table 100, but the other side is supported by the fixing frame 200 or the body 700. As described above, when the accommodating recess 110 is formed at the edge, since the area of the detecting stage 100 can be fully utilized, there is an effect that the substrate 10 of various sizes can be fixed and detected.
第5圖，係本發明又一較佳實施例之斷面圖。Figure 5 is a cross-sectional view showing still another preferred embodiment of the present invention.
本發明之較佳實施例，其中該容置凹槽120，係包含：一邊緣部101，係沿著該檢測台100之邊緣形成；一橫切部102，係以穿越中心部方式加以形成，以供連通該邊緣部101。In a preferred embodiment of the present invention, the accommodating recess 120 includes: an edge portion 101 formed along an edge of the detecting table 100; and a transverse portion 102 formed by crossing the central portion. For connecting the edge portion 101.
茲舉一例加以說明，該容置部110，係可由沿著檢測台100邊緣呈正方形之邊緣部101，與將面對該正方形邊緣部101之面加以連接，藉以將邊緣部101之內部空間分割為4個空間之呈「+」字形之橫切部102所構成。上述情形，邊緣部101與橫切部102各容置凹槽110，皆形成與下面貫穿之流路120，容置凹槽110內則插入吸板300，並與真空模組400相連，進而產生吸附力。As an example, the accommodating portion 110 may be connected to the surface facing the square edge portion 101 by the edge portion 101 which is square along the edge of the detecting table 100, thereby dividing the internal space of the edge portion 101. It is composed of a cross section 102 having a "+" shape of four spaces. In the above case, the edge portion 101 and the transverse portion 102 each receive the recess 110, and the flow path 120 is formed through the bottom surface. The receiving recess 110 is inserted into the suction plate 300 and connected to the vacuum module 400, thereby generating Adsorption force.
因此，可在一個檢測台100對複數個檢測基片10執行固定及檢測，即便是一個檢測基片10，當其中心部形成有不必檢測之領域時，亦可固定其中心部，藉以得以讓檢測基片10更加穩固。Therefore, fixing and detecting can be performed on a plurality of detecting substrates 10 at one detecting station 100. Even if one detecting substrate 10 is formed with a field in which the center portion is not required to be detected, the center portion can be fixed, thereby allowing The substrate 10 is detected to be more stable.
本發明之較佳實施例，其中該吸板300係形成真空壓無法傳遞之迴避區間，以避免吸附力施加於裝載之檢測基片10。In a preferred embodiment of the present invention, the suction plate 300 forms an avoidance section in which the vacuum pressure cannot be transmitted to prevent the adsorption force from being applied to the loaded detection substrate 10.
該迴避區間，係不受真空壓影響之領域，不會產生吸附 力。該迴避區間可由對吸板300作阻塞空隙之特殊處理，或在吸板300上面貼膠帶等方法所構成，此外，不會形成容置凹槽110，因此，可為亦不形成吸板300之區間。如上所述之迴避區間，其主要用途在於供固定檢測基片10之緣面形成微細孔，以致無法吸入之情形。因此，無論小型乃至大型，均可搭配其尺寸加以適用，同時由數微米至數毫米厚度之基片產品，亦可經由真空吸附，藉以維持平面度，並可避開墊基片形產品外緣之孔或標記加以使用。The avoidance interval is in the field that is not affected by the vacuum pressure and does not cause adsorption. force. The avoidance section may be formed by a special treatment for blocking the gap of the suction plate 300, or by attaching a tape to the suction plate 300, and further, the receiving groove 110 is not formed, and therefore, the suction plate 300 may not be formed. Interval. The avoidance section as described above is mainly used in the case where the edge of the fixed detecting substrate 10 is formed with fine pores so that it cannot be inhaled. Therefore, whether it is small or even large, it can be used with its size. At the same time, the substrate products with a thickness of several micrometers to several millimeters can also be vacuum-adsorbed to maintain flatness and avoid the outer edge of the pad-shaped product. Holes or marks are used.
此外，依產品其非檢測領域位於中央時，亦可採用在其中間部貼附陶瓷基片或以分離形作連接之方法，並可適用符合表面色度光學檢測之黑色或白色等各種色彩，同時具有往陶瓷顆粒之小顆粒空隙，在沒有凹槽所引起之損傷或光反射所引起之折射下，可使其維持微米等級以內均一平面度之效果。In addition, depending on whether the non-detection field of the product is located at the center, a ceramic substrate may be attached to the middle portion thereof or connected by a separate shape, and various colors such as black or white which are optically detected by surface chromaticity may be applied. At the same time, there are small particle gaps to the ceramic particles, which can maintain the uniform flatness within the micrometer level without the damage caused by the grooves or the refraction caused by the light reflection.
如上所述，本發明之光學檢測裝置，其優點如下：As described above, the optical detecting device of the present invention has the following advantages:
1.將易變形材質而成之檢測基片之緣面，以微細且均一之吸附力加以固定方式進行視覺檢測，藉以提升檢測速度及達到更加正確之檢測。1. The edge of the detection substrate which is made of a deformable material is visually detected by a fine and uniform adsorption force, thereby improving the detection speed and achieving a more accurate detection.
2.使施加於檢測基片之物理衝擊最小化，同時可有效提升吸附力，藉此能夠有效防止檢測基片之損傷及變形，並能夠進行穩定之檢測。2. The physical impact applied to the detecting substrate is minimized, and the adsorption force can be effectively increased, whereby damage and deformation of the detecting substrate can be effectively prevented, and stable detection can be performed.
以上所述，僅為本發明之可行實施例，並非用以限定本發明之專利範圍，舉凡依據下列申請專利範圍所述之內容、特徵以及其精神而為之其他變化的等效實施，皆應包含於本發明之專利範圍內。The above is only a possible embodiment of the present invention, and is not intended to limit the scope of the patents of the present invention, and the equivalent implementations of other changes described in the following claims are intended to be It is included in the patent of the present invention.
綜上所述，本發明所具體界定於申請專利範圍之技術特徵，未見於同類技術而具新穎性，且較習知技術具進步性，並能供產業充份利用，已符合發明專利要件，爰依法具文提出申請，謹請 鈞局依法核予專利，以維護本申請人合法之權益。In summary, the present invention is specifically defined in the technical features of the scope of the patent application, is not found in the same technology and has novelty, and is more advanced than the prior art, and can be fully utilized by the industry, and has met the requirements of the invention patent.提出 Apply in accordance with the law, and ask the SIPO to approve the patent in accordance with the law to protect the legitimate rights and interests of the applicant.
100‧‧‧檢測台100‧‧‧Testing station
101‧‧‧邊緣部101‧‧‧Edge
102‧‧‧橫切部102‧‧‧cross section
110‧‧‧容置部110‧‧‧Receipt Department
120‧‧‧流路120‧‧‧flow path
200‧‧‧固定架200‧‧‧ fixed frame
300‧‧‧吸板300‧‧‧ suction plate
310‧‧‧迴避區間310‧‧‧ avoidance interval
400‧‧‧真空模組400‧‧‧vacuum module
410‧‧‧真空軟管410‧‧‧Vacuum hose
420‧‧‧真空泵浦420‧‧‧vacuum pump
500‧‧‧背光元件500‧‧‧Backlight components
600‧‧‧成像裝置600‧‧‧ imaging device
700‧‧‧本體700‧‧‧ Ontology
第1圖係本發明一較佳實施例之示意圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic illustration of a preferred embodiment of the invention.
第2圖係本發明一較佳實施例之使用狀態圖。Figure 2 is a diagram showing the state of use of a preferred embodiment of the present invention.
第3圖係本發明另一較佳實施例之平面圖。Figure 3 is a plan view of another preferred embodiment of the present invention.
第4圖係本發明一較佳實施例之斷面圖。Figure 4 is a cross-sectional view of a preferred embodiment of the present invention.
第5圖係本發明又一較佳實施例之斷面圖。Figure 5 is a cross-sectional view showing still another preferred embodiment of the present invention.
100‧‧‧檢測台100‧‧‧Testing station
200‧‧‧固定架200‧‧‧ fixed frame
300‧‧‧吸板300‧‧‧ suction plate
400‧‧‧真空模組400‧‧‧vacuum module
410‧‧‧真空軟管410‧‧‧Vacuum hose
420‧‧‧真空泵浦420‧‧‧vacuum pump
700‧‧‧本體700‧‧‧ Ontology
Claims (5)
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| KR1020120044004A KR101325762B1 (en) | 2012-04-26 | 2012-04-26 | Optical inspection device |
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| KR (1) | KR101325762B1 (en) |
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- 2012-11-20 CN CN2012104725716A patent/CN103376059A/en active Pending
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2013228356A (en) | 2013-11-07 |
| CN103376059A (en) | 2013-10-30 |
| JP5748726B2 (en) | 2015-07-15 |
| KR101325762B1 (en) | 2013-11-08 |
| TW201344178A (en) | 2013-11-01 |
| KR20130120830A (en) | 2013-11-05 |
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