JP5748726B2 - Optical inspection device - Google Patents

Optical inspection device Download PDF

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JP5748726B2
JP5748726B2 JP2012235570A JP2012235570A JP5748726B2 JP 5748726 B2 JP5748726 B2 JP 5748726B2 JP 2012235570 A JP2012235570 A JP 2012235570A JP 2012235570 A JP2012235570 A JP 2012235570A JP 5748726 B2 JP5748726 B2 JP 5748726B2
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inspection
fixing groove
stage
vacuum
inspection stage
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JP2013228356A (en
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ヘ−チョル，カン
ホン−ギュ，リム
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GigaVis Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Description

本発明は、光学検査装置に係り、より詳細には、フレキシブルな材質の検査シートの映像を獲得する過程で、検査シートの変形を最小化し、平滑度を保持して、より迅速かつ正確な検査を進行させる光学検査装置に関する。   The present invention relates to an optical inspection apparatus, and more particularly, in the process of acquiring an image of an inspection sheet made of a flexible material, the deformation of the inspection sheet is minimized, the smoothness is maintained, and the inspection is performed more quickly and accurately. The present invention relates to an optical inspection apparatus that advances the process.

一般的に、各種ディスプレイ装置は、さらに大型化する趨勢に反して、製品の厚さはさらに薄くなる状況である。前記のようなディスプレイ装置は、普通光学カメラを利用したビジョン検査を通じて不良の有無を検出する。   In general, various display devices are in a situation where the thickness of the product is further reduced against the trend of further increase in size. The display device as described above detects the presence or absence of defects through a vision inspection using an ordinary optical camera.

前記のようなビジョン検査を施行するためには、検査対象物を移送する移送手段及び検査が進行するための検査対象物を固定する固定手段が必須的に設けなければならない。
特に、薄膜素材として軟性を有するフィルム、ホールが形成している基板などの表面検査において、固定手段の平滑度は、非常に重要な事案として台頭されている。検査が進行する間に、検査シートの平滑度を確保するための固定手段として、従来には二重の透明ガラス基板の間に検査シートを配置するか、外郭にホールを加工し、前記ホールに真空吸着力を印加して、検査シートを吸着して固定する方法があった。 In order to carry out the vision inspection as described above, a transfer means for transferring the inspection object and a fixing means for fixing the inspection object for the inspection to proceed must be provided.
In particular, smoothness of fixing means has emerged as a very important matter in surface inspection of a film having flexibility as a thin film material, a substrate on which holes are formed, and the like. As a fixing means for ensuring the smoothness of the inspection sheet while the inspection proceeds, conventionally, the inspection sheet is arranged between double transparent glass substrates, or a hole is processed in the outer shell, There was a method of adsorbing and fixing an inspection sheet by applying a vacuum adsorption force.

真空チャック装置は、基板とチャック装置との間の空気を吸引して負圧（ｎｅｇａｔｉｖｅ ｐｒｅｓｓｕｒｅ）にすることによって、基板を真空吸着する技術である。この装置は、基板の全面を強い負圧で稠密に吸着するために、撓みやすい基板に対しても、撓みを抑制しながら吸着することができる。しかし、前記のような場合、検査シートの歪曲や浮き上がり現象によって、平面度が確保されず、検査の不可領域が発生する問題点があった。   The vacuum chuck device is a technique for vacuum-adsorbing a substrate by sucking air between the substrate and the chuck device to create a negative pressure. Since the entire surface of the substrate is densely adsorbed with a strong negative pressure, this apparatus can adsorb even a substrate that is easily bent while suppressing the bending. However, in such a case, there is a problem in that the flatness cannot be ensured due to the distortion or the floating phenomenon of the inspection sheet, and the inspection ineffective area occurs.

本発明は、前述した従来技術の問題点を解決するためのものであって、変形されやすい素材の検査シートを精密に固定させた平面保持状態でビジョン検査を可能にすることによって、検査速度を高め、より安定かつ正確な検査を可能にする光学検査装置の提供をその目的とする。   The present invention is intended to solve the above-described problems of the prior art, and enables inspection inspection by maintaining a flat surface in which an inspection sheet made of a material that is easily deformed is fixed precisely. It is an object of the present invention to provide an optical inspection apparatus that enables higher and more stable and accurate inspection.

前記の課題を果たすための本発明の一実施形態による光学検査装置は、上面に縁部に沿って下方に凹入された定着溝が形成され、前記定着溝と下面とを貫通して流路を形成し、透光材からなって、検査シートがローディングされる検査ステージと、前記検査ステージの側面または下面を支持する固定フレームと、前記検査ステージの定着溝に付着して固定される多孔質セラミック材の吸着パネルと、前記流路に真空圧を加えて、前記吸着パネル上の検査シートを吸着させる真空モジュールと、前記検査ステージの下方から検査ステージ上の検査シートに光を照射するバックライトユニットと、前記検査ステージの上方に配されて、前記検査ステージにローディングされた検査シートのイメージを獲得する撮像手段と、を含む。   In an optical inspection apparatus according to an embodiment of the present invention for achieving the above-described problem, a fixing groove recessed downward along an edge portion is formed on an upper surface, and a flow path passes through the fixing groove and the lower surface. Formed of a translucent material, an inspection stage on which an inspection sheet is loaded, a fixed frame that supports a side surface or a lower surface of the inspection stage, and a porous material that adheres and is fixed to a fixing groove of the inspection stage A ceramic material adsorption panel, a vacuum module that applies vacuum pressure to the flow path to adsorb the inspection sheet on the adsorption panel, and a backlight that irradiates the inspection sheet on the inspection stage from below the inspection stage A unit; and an imaging unit that is disposed above the inspection stage and acquires an image of an inspection sheet loaded on the inspection stage.

本発明の望ましい実施形態によれば、前記真空モジュールは、一端が前記検査ステージの流路と連結された真空ホースと、前記真空ホースの他端と連結されて真空圧を加える真空ポンプと、を含む。   According to a preferred embodiment of the present invention, the vacuum module includes a vacuum hose having one end connected to the flow path of the inspection stage, and a vacuum pump connected to the other end of the vacuum hose and applying a vacuum pressure. Including.

本発明の望ましい実施形態によれば、前記検査ステージに形成された定着溝の深さと、前記定着溝に差し込まれる吸着パネルの厚さは、同様に形成されて、前記検査ステージと吸着パネルの上面とが同じ平面で滑らかに連結される。
本発明の望ましい実施形態によれば、前記定着溝は、前記検査ステージの上面のエッジに段差を形成して固定される。 According to a preferred embodiment of the present invention, the depth of the fixing groove formed in the inspection stage and the thickness of the suction panel inserted into the fixing groove are similarly formed, and the upper surface of the inspection stage and the suction panel Are smoothly connected in the same plane.
According to a preferred embodiment of the present invention, the fixing groove is fixed by forming a step at the edge of the upper surface of the inspection stage.

本発明の望ましい実施形態によれば、前記セラミックパネルの定着溝は、前記検査ステージの縁部に沿って形成されるフレーム部と、前記フレーム部を連通するように中心部を横切って形成された横断部と、を含む。   According to a preferred embodiment of the present invention, the fixing groove of the ceramic panel is formed across a central portion so as to communicate with a frame portion formed along an edge of the inspection stage and the frame portion. A cross section.

本発明の望ましい実施形態によれば、前記吸着パネルは、ローディングされた検査シートに吸着力が加えられないように真空圧が伝達されない回避区間が形成される。   According to a preferred embodiment of the present invention, the suction panel is formed with an avoidance section where vacuum pressure is not transmitted so that suction force is not applied to the loaded inspection sheet.

本発明による光学検査装置によれば、変形されやすい素材の検査シートのエッジ面を微細かつ均一な吸着力で精密に固定させた状態でビジョン検査を可能にすることによって、検査速度を高め、より正確な検査がなされうる。   According to the optical inspection apparatus according to the present invention, the inspection speed can be increased by enabling the vision inspection in a state where the edge surface of the inspection sheet of the material that is easily deformed is precisely fixed with a fine and uniform adsorption force. An accurate inspection can be made.

また、検査シートに加えられる物理的衝撃を最小化し、吸着力を高めることができて、検査シートの損傷及び変形を防止し、安定して検査が進行しうる。   In addition, the physical impact applied to the inspection sheet can be minimized and the suction force can be increased, so that the inspection sheet can be prevented from being damaged and deformed, and the inspection can proceed stably.

本発明の一実施形態による光学検査装置の斜視図である。It is a perspective view of the optical inspection apparatus by one Embodiment of this invention. 本発明の一実施形態による光学検査装置の使用状態図である。It is a use condition figure of the optical inspection device by one embodiment of the present invention. 本発明の他の実施形態による光学検査装置の平面図である。It is a top view of the optical inspection apparatus by other embodiment of this invention. 本発明の一実施形態による光学検査装置の断面図である。It is sectional drawing of the optical inspection apparatus by one Embodiment of this invention. 本発明のさらに他の実施形態による光学検査装置の断面図である。It is sectional drawing of the optical inspection apparatus by further another embodiment of this invention.

本発明を添付した図面を参照して詳しく説明すれば、次の通りである。ここで、同じ構成に対しては、同じ符号を使い、反復される説明、本発明の要旨を不明にする恐れがある公知機能及び構成についての詳細な説明は省略する。本発明の実施形態は、当業者に本発明をより完全に説明するために提供されるものである。したがって、図面での要素の形状及びサイズなどは、より明確な説明のために誇張されうる。   Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. Here, the same reference numerals are used for the same components, and repeated descriptions and detailed descriptions of known functions and configurations that may obscure the gist of the present invention are omitted. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. Accordingly, the shape and size of elements in the drawings may be exaggerated for a clearer description.

図１は、本発明の一実施形態による光学検査装置の斜視図であり、図２は、本発明の一実施形態による光学検査装置の使用状態図である。   FIG. 1 is a perspective view of an optical inspection apparatus according to an embodiment of the present invention, and FIG. 2 is a use state diagram of the optical inspection apparatus according to an embodiment of the present invention.

本発明の一実施形態による光学検査装置は、フレキシブルな素材の検査シート１０を真空吸着して固定し、ビジョン検査を施行するためのものであって、上面に縁部に沿って下方に凹入された定着溝１１０が形成され、前記定着溝１１０と下面とを貫通して流路１２０を形成し、透光材からなって、前記検査シート１０がローディングされる検査ステージ１００と、前記検査ステージ１００の側面または下面を支持する固定フレーム２００と、前記検査ステージ１００の定着溝１１０に差し込まれて固定される多孔質セラミック材の吸着パネル３００と、前記流路１２０に真空圧を加えて、前記吸着パネル３００上の検査シート１０を吸着させる真空モジュール４００と、前記検査ステージ１００の下方から検査ステージ１００上の検査シート１０に光を照射するバックライトユニット５００と、前記検査ステージ１００の上方に配されて、前記検査ステージ１００にローディングされた検査シート１０のイメージを獲得する撮像手段６００とを含む。   The optical inspection apparatus according to an embodiment of the present invention is for vacuum-adsorbing and fixing a flexible material inspection sheet 10 to perform a vision inspection, and is recessed downward along an edge on an upper surface. The fixing groove 110 is formed, the flow path 120 is formed through the fixing groove 110 and the lower surface, the inspection stage 100 is made of a translucent material and the inspection sheet 10 is loaded thereon, and the inspection stage. 100 by applying a vacuum pressure to the fixed frame 200 that supports the side surface or the lower surface of the 100, the porous ceramic material adsorption panel 300 that is inserted and fixed in the fixing groove 110 of the inspection stage 100, and the flow path 120, A vacuum module 400 for adsorbing the inspection sheet 10 on the suction panel 300 and an inspection sheet on the inspection stage 100 from below the inspection stage 100 A backlight unit 500 for emitting light to 10, arranged above the inspection stage 100 includes an imaging unit 600 for acquiring an image of the test sheet 10 loaded on the inspection stage 100.

本発明で指称する検査シート１０は、フィルム、ホールが形成された基板、紙、布、薄板、薄膜を含めた公知の多様な板状素材が該当しうる。   The inspection sheet 10 referred to in the present invention may correspond to various known plate-like materials including a film, a substrate on which holes are formed, paper, cloth, thin plate, and thin film.

前記検査ステージ１００は、透光材からなり、上面に縁部に沿って下方に凹入された定着溝１１０が形成され、前記定着溝１１０と下面とを貫通して複数の流路１２０を形成し、上面に前記検査シート１０が検査のために定着される。   The inspection stage 100 is made of a translucent material, has a fixing groove 110 recessed downward along the edge on the upper surface, and forms a plurality of flow paths 120 through the fixing groove 110 and the lower surface. Then, the inspection sheet 10 is fixed on the upper surface for inspection.

検査ステージ１００は、ガラス、アクリルのように、前記検査ステージ１００の下方に配されたバックライトユニット５００の光が透過できるように透明な素材で構成しなければならない。また、前記検査ステージ１００の形状は、正方形、長方形、円形などを含めて検査が進行する検査シート１０の形状に対応して備えられることが望ましい。一例として、検査シート１０が正方形である場合、前記検査ステージ１００も正方形に形成される。１つの検査ステージ１００で１つの検査シート１０が検査されることが原則であるが、検査速度を高めるために、１つの検査ステージ１００で複数の検査シート１０がローディングされ、検査が進行しうる。後者の場合、前記検査ステージ１００のサイズや形状は、複数の検査シート１０がローディングされるように、それに合わせて余裕のあるように形成されなければならない。   The inspection stage 100 must be made of a transparent material such as glass or acrylic so that light from the backlight unit 500 disposed below the inspection stage 100 can be transmitted. In addition, it is desirable that the inspection stage 100 has a shape corresponding to the shape of the inspection sheet 10 in which the inspection proceeds including a square, a rectangle, a circle, and the like. As an example, when the inspection sheet 10 is square, the inspection stage 100 is also formed in a square. In principle, one inspection sheet 10 is inspected in one inspection stage 100, but in order to increase the inspection speed, a plurality of inspection sheets 10 are loaded in one inspection stage 100, and inspection can proceed. In the latter case, the size and shape of the inspection stage 100 must be formed with a margin so that a plurality of inspection sheets 10 can be loaded.

一方、前記検査ステージ１００の上面に、縁部には下方に凹入された定着溝１１０が形成され、前記定着溝１１０と下面とを貫通して流路１２０が形成される。前記定着溝１１０は、後述する吸着パネル３００が定着されるための空間であり、流路１２０は、前記吸着パネル３００に真空圧を加えるための通路として作用する。前記定着溝１１０と流路１２０は、その幅が異なり、望ましくは、流路１２０の幅が定着溝１１０の幅に比べて狭くなって、それらの間に段差を形成するように階段状に連結されうる。一例として、前記定着溝１１０は、正方形の検査ステージ１００の縁部に沿って正方形の形態で形成され、あらゆる定着溝１１０が１つで連結されて、内部に閉空間を形成する構造を取ることができるが、複数の定着溝１１０が区間別にそれぞれの定着溝１１０の間が遮蔽された構造を取ることができる。 On the other hand, a fixing groove 110 recessed downward is formed on the upper surface of the inspection stage 100, and a flow path 120 is formed through the fixing groove 110 and the lower surface. The fixing groove 110 is a space for fixing a suction panel 300 described later, and the flow path 120 functions as a passage for applying a vacuum pressure to the suction panel 300. The fixing groove 110 and the flow path 120 are different in width, and desirably, the width of the flow path 120 is narrower than the width of the fixing groove 110 and is connected stepwise so as to form a step therebetween. Can be done. As an example, the fixing groove 110, along the edges of the inspection stage 100 squares formed by square form, any fixing groove 1 1 0 is connected in one, the structure forming a closed space inside Although a plurality of fixing grooves 1 1 0 can be taken for each section, the fixing grooves 1 1 0 can be shielded.

固定フレーム２００は、前記検査ステージ１００の側面または下面を支持して、前記検査ステージ１００を本体７００に連結する役割を果たす。固定フレーム２００は、ジグ（ｊｉｇ）のような構造を取り、テーブル形態の本体７００に、前記検査ステージ１００を固定させることができる。参考までに、前記本体７００には、前記検査ステージ１００が差し込まれる空き空間が中心部に形成されうる。   The fixed frame 200 supports the side surface or the lower surface of the inspection stage 100 and serves to connect the inspection stage 100 to the main body 700. The fixed frame 200 has a jig-like structure, and the inspection stage 100 can be fixed to a main body 700 having a table shape. For reference, the main body 700 may be formed with a free space in the center where the inspection stage 100 is inserted.

吸着パネル３００は、多孔質のセラミック素材からなり、前記検査ステージ１００の定着溝１１０に差し込まれて固定される。前記吸着パネル３００は、定着溝１１０の形状と対応するように備えられて定着溝１１０に差し込まれうる。一例として、前記定着溝１１０は、長方形であり、前記吸着パネル３００も長方形を取る。したがって、前記検査ステージ１００の上面には、縁部に沿って吸着パネル３００が外部に露出され、前記露出された吸着パネル３００を通じて検査シート１０が固定されうる。前記吸着パネル３００が多孔質のセラミック素材からなる場合、セラミックに形成された微細な空隙に空気が吸入されながら、吸着パネル３００の上面に吸着力が発生し、前記吸着力を通じて検査シート１０が固定されうる。   The suction panel 300 is made of a porous ceramic material, and is inserted into the fixing groove 110 of the inspection stage 100 and fixed. The suction panel 300 may be provided to correspond to the shape of the fixing groove 110 and may be inserted into the fixing groove 110. As an example, the fixing groove 110 has a rectangular shape, and the suction panel 300 also has a rectangular shape. Accordingly, the suction panel 300 may be exposed to the outside along the edge on the upper surface of the inspection stage 100, and the inspection sheet 10 may be fixed through the exposed suction panel 300. When the suction panel 300 is made of a porous ceramic material, suction force is generated on the upper surface of the suction panel 300 while air is sucked into a fine gap formed in the ceramic, and the inspection sheet 10 is fixed through the suction force. Can be done.

本発明の望ましい実施形態によれば、前記検査ステージ１００に形成された定着溝１１０の深さ（Ｄ）と、前記定着溝１１０に差し込まれる吸着パネル３００の厚さ（Ｔ）は、同様に形成されて、前記検査ステージ１００と吸着パネル３００の上面とが平面で滑らかに連結される。   According to a preferred embodiment of the present invention, the depth (D) of the fixing groove 110 formed in the inspection stage 100 and the thickness (T) of the suction panel 300 inserted into the fixing groove 110 are similarly formed. Thus, the inspection stage 100 and the upper surface of the suction panel 300 are smoothly connected in a plane.

すなわち、前記吸着パネル３００と検査ステージ１００が、平面で連結されない場合、その上面に搭載された検査シート１０の形状が変形されるか、吸着力が低下するなどの問題が発生する恐れがある。したがって、前記のような問題が発生しないように、吸着パネル３００と検査ステージ１００とを平面で連結する。   That is, when the suction panel 300 and the inspection stage 100 are not connected in a plane, there is a possibility that the shape of the inspection sheet 10 mounted on the upper surface of the suction panel 300 is deformed or the suction force is reduced. Therefore, the suction panel 300 and the inspection stage 100 are connected in a plane so that the above-described problem does not occur.

真空モジュール４００は、前記流路１２０に真空圧を加えて、前記吸着パネル３００上の検査シート１０を吸着させる機能を果たす。前記真空モジュール４００が流路１２０と連結されて真空圧を加えれば、前記定着溝１１０に差し込まれた吸着パネル３００に吸着力が発生する。   The vacuum module 400 functions to apply a vacuum pressure to the flow path 120 to adsorb the inspection sheet 10 on the adsorption panel 300. When the vacuum module 400 is connected to the flow path 120 and applies a vacuum pressure, a suction force is generated in the suction panel 300 inserted into the fixing groove 110.

本発明の望ましい実施形態によれば、前記真空モジュール４００は、一端が前記検査ステージ１００の流路１２０と連結された真空ホース４１０と、前記真空ホース４１０の他端と連結されて真空圧を加える真空開閉弁と真空ポンプ４２０とを含みうる。したがって、前記真空ポンプ４２０が可動されれば、前記真空ホース４１０を通じて流路１２０と定着溝１１０との空気が抜け出しながら真空圧が発生し、吸着パネル３００に吸着力が発生する。   According to a preferred embodiment of the present invention, the vacuum module 400 is connected to the vacuum hose 410 having one end connected to the flow path 120 of the inspection stage 100 and the other end of the vacuum hose 410 to apply vacuum pressure. A vacuum opening / closing valve and a vacuum pump 420 may be included. Accordingly, when the vacuum pump 420 is moved, a vacuum pressure is generated while the air in the flow path 120 and the fixing groove 110 escapes through the vacuum hose 410, and an adsorption force is generated in the adsorption panel 300.

バックライトユニット５００は、前記検査ステージ１００の下方に配され、前記検査ステージ１００上の検査シート１０に光を照射する光源として作用する。   The backlight unit 500 is disposed below the inspection stage 100 and functions as a light source for irradiating light onto the inspection sheet 10 on the inspection stage 100.

したがって、前記バックライトユニット５００から照射された光が検査ステージ１００を通過し、その上面にローディングされた検査シート１０を透過して撮像手段６００に入力されて、検査シート１０の不良の有無を検査することができる。一例として、前記検査シート１０に複数のホールが打孔されたものであるか、フィルム上に形成されたパターン部の形状と、前記ホールが諸位置に正確に打孔されたか、またはその形状イメージの不良の有無を検査することができる。   Accordingly, the light emitted from the backlight unit 500 passes through the inspection stage 100, passes through the inspection sheet 10 loaded on the upper surface thereof, and is input to the imaging unit 600 to inspect for the presence or absence of the inspection sheet 10. can do. As an example, a plurality of holes are punched in the inspection sheet 10, the shape of the pattern portion formed on the film, and the holes are accurately punched at various positions, or an image of the shape The presence or absence of defects can be inspected.

撮像手段６００は、前記検査ステージ１００の上方に配されて、前記検査ステージ１００にローディングされた検査シート１０のイメージを獲得するものであって、カメラを含む。前記撮像手段６００で獲得したイメージを通じてイメージ分析を施行し、不良の有無を判別することができる。   The imaging unit 600 is arranged above the inspection stage 100 and acquires an image of the inspection sheet 10 loaded on the inspection stage 100, and includes a camera. Image analysis can be performed through the image acquired by the imaging unit 600 to determine whether there is a defect.

図３は、本発明の他の実施形態による光学検査装置の平面図であり、図４は、本発明の一実施形態による光学検査装置の断面図である。   FIG. 3 is a plan view of an optical inspection apparatus according to another embodiment of the present invention, and FIG. 4 is a cross-sectional view of the optical inspection apparatus according to an embodiment of the present invention.

本発明の望ましい実施形態によれば、前記定着溝１１０は、前記検査ステージ１００の上面のエッジに段付けられて形成される。   According to a preferred embodiment of the present invention, the fixing groove 110 is formed to be stepped on the edge of the upper surface of the inspection stage 100.

前記の場合、吸着パネル３００の一側面は、検査ステージ１００の定着溝１１０に支持されるが、他側面は、固定フレーム２００または本体７００に支持される。前記のように、定着溝１１０がエッジに形成される場合、検査ステージ１００の面積を最大限に活用することができて、多様なサイズの検査シート１０を固定し、検査させうる効果がある。   In the above case, one side surface of the suction panel 300 is supported by the fixing groove 110 of the inspection stage 100, while the other side surface is supported by the fixed frame 200 or the main body 700. As described above, when the fixing groove 110 is formed at the edge, the area of the inspection stage 100 can be utilized to the maximum, and the inspection sheets 10 of various sizes can be fixed and inspected.

図５は、本発明のさらに他の実施形態による光学検査装置の断面図である。   FIG. 5 is a cross-sectional view of an optical inspection apparatus according to still another embodiment of the present invention.

本発明の望ましい実施形態によれば、前記定着溝１１０は、前記検査ステージ１００の縁部に沿って形成されるフレーム部１０１と、前記フレーム部１０１を連通するように中心部を横切って形成された横断部１０２とを含む。   According to a preferred embodiment of the present invention, the fixing groove 110 is formed across the central portion so as to communicate with the frame portion 101 formed along the edge of the inspection stage 100 and the frame portion 101. And a transverse section 102.

一例として、前記定着溝１１０は、検査テーブル１００の縁部に沿って正方形に形成されたフレーム部１０１と、前記正方形のフレーム部１０１の対向する面を連結して、フレーム部１０１の内部空間を４つの空間に区画する‘十’字形状の横断部１０２で構成することができる。前記の場合、フレーム部１０１と横断部１０２のそれぞれの定着溝１１０には、いずれも下面と貫通される流路１２０が形成され、定着溝１１０には吸着パネル３００が差し込まれ、真空モジュール４００と連結されて吸着力が発生することがある。   As an example, the fixing groove 110 connects the frame portion 101 formed in a square shape along the edge of the inspection table 100 and the opposing surface of the square frame portion 101 to form an internal space of the frame portion 101. It can be composed of a cross section 102 having a “ten” shape that is divided into four spaces. In the above case, the fixing groove 110 of each of the frame part 101 and the transverse part 102 is formed with a flow path 120 penetrating the lower surface, and the suction panel 300 is inserted into the fixing groove 110, and the vacuum module 400. They may be connected to generate an adsorption force.

したがって、１つの検査テーブル１００で複数の検査シート１０を固定し、検査を施行し、１つの検査シート１０であるとしても、検査が不要な領域が中心部に形成された場合、中心部を固定することができて、検査シート１０をより安定して固定することができる。   Accordingly, a plurality of inspection sheets 10 are fixed with one inspection table 100, inspection is performed, and even if only one inspection sheet 10 is formed, if an area that does not require inspection is formed in the center, the center is fixed. It is possible to fix the inspection sheet 10 more stably.

本発明の望ましい実施形態によれば、前記吸着パネル３００は、ローディングされた検査シート１０に吸着力が加えられないように真空圧が伝達されない回避区間が形成される。   According to a preferred embodiment of the present invention, the suction panel 300 is formed with an avoidance section where vacuum pressure is not transmitted so that suction force is not applied to the loaded inspection sheet 10.

前記回避区間は、真空圧の影響を受けない領域であって、吸着力が発生しない。前記回避区間は、吸着パネル３００に空隙を塞ぐ特殊な処理を行うか、吸着パネル３００の上面にテープなどを付着する方法で形成され、また定着溝１１０が形成されず、したがって、吸着パネル３００も形成されないように設けられた区間であり得る。前記のような回避区間は、検査シート１０が固定されるエッジ面に微細ホールが形成されて、吸入が不可能な場合のために設けられる。したがって、小型または大型の薄板までもサイズに合わせて適用可能であり、数μから数ｍｍの厚さのシート製品も真空吸着して平面度を保持し、シート型製品の外郭の孔やマークを塗被して製作使用できる。   The avoidance section is an area that is not affected by the vacuum pressure, and no suction force is generated. The avoidance section is formed by performing a special process for closing the gap in the suction panel 300 or by attaching a tape or the like to the upper surface of the suction panel 300, and the fixing groove 110 is not formed. It may be a section provided so as not to be formed. The avoidance section as described above is provided in the case where fine holes are formed on the edge surface to which the inspection sheet 10 is fixed and inhalation is impossible. Therefore, even small or large thin plates can be applied according to the size, and sheet products with a thickness of several μ to several mm are vacuum-adsorbed to maintain flatness, and holes and marks on the outer edges of sheet-type products are formed. Can be used by coating.

また、製品によって、非検査領域が中央にある場合にも、中間部にセラミックシートを付着するか、分離型で締結する方法も可能であり、表面色相も光学検査に合う黒色や白色などの多様な色相も適用し、セラミック粒子の小粒子の隙間で溝による製品の損傷や光反射による屈折がなしに、μ級以内の均一な平面度を保持できる効果がある。   Also, depending on the product, even when the non-inspection area is in the center, it is possible to attach a ceramic sheet to the middle part or fasten with a separate type, and the surface hue can be varied such as black and white suitable for optical inspection The effect of maintaining a uniform flatness of less than μ-class is also possible without applying any hue and without damaging the product due to grooves or refraction due to light reflection in the gaps between small particles of ceramic particles.

前記のような本発明の光学検査装置によれば、変形されやすい素材の検査シート１０のエッジ面を微細かつ均一な吸着力で精密に固定させた状態でビジョン検査を可能にすることによって、検査速度を高め、より正確な検査がなされうる長所がある。   According to the optical inspection apparatus of the present invention as described above, inspection can be performed by enabling vision inspection in a state where the edge surface of the inspection sheet 10 made of a material that is easily deformed is precisely fixed with a fine and uniform suction force. There is an advantage that speed can be increased and more accurate inspection can be performed.

また、検査シート１０に加えられる物理的衝撃を最小化し、吸入固定力は高めることができて、検査シート１０の損傷及び変形を防止し、安定して検査が進行しうる長所がある。   Further, the physical impact applied to the inspection sheet 10 can be minimized, the suction fixing force can be increased, the damage and deformation of the inspection sheet 10 can be prevented, and the inspection can proceed stably.

以上の説明は、本発明の技術思想を例示的に説明したものに過ぎないものであって、当業者ならば、本発明の本質的な特性から外れない範囲内で多様な修正、変更及び置き換えが可能であろう。したがって、本発明に開示された実施形態及び添付した図面は、本発明の技術思想を限定するためのものではなく、説明するためのものであり、このような実施形態及び添付した図面によって、本発明の技術思想の範囲が限定されるものではない。本発明の保護範囲は、下記の特許請求の範囲によって解析しなければならず、それと同等な範囲内にあるあらゆる技術思想は、本発明の権利範囲に含まれると解析しなければならない。   The above description is merely illustrative of the technical idea of the present invention, and various modifications, changes, and replacements may be made by those skilled in the art without departing from the essential characteristics of the present invention. Would be possible. Accordingly, the embodiments disclosed in the present invention and the accompanying drawings are not intended to limit the technical idea of the present invention, but are to explain the present invention. The scope of the technical idea of the invention is not limited. The protection scope of the present invention must be analyzed by the following claims, and all technical ideas within the equivalent scope must be analyzed as being included in the scope of the right of the present invention.

本発明は、光学検査装置関連の技術分野に適用されうる。   The present invention can be applied to a technical field related to an optical inspection apparatus.

１００：検査ステージ
１０１：フレーム部
１０２：横断部
１１０：定着溝
１２０：流路
２００：固定フレーム
３００：吸着パネル
３１０：回避区間
４００：真空モジュール
４１０：真空ホース
４２０：真空ポンプ
５００：バックライトユニット
６００：撮像手段
７００：本体 100: Inspection stage 101: Frame part 102: Crossing part 110: Fixing groove 120: Flow path 200: Fixed frame 300: Adsorption panel 310: Avoidance section 400: Vacuum module 410: Vacuum hose 420: Vacuum pump 500: Backlight unit 600 : Imaging means 700: Main body

Claims (6)

フレキシブルな素材の検査シートを真空吸着して固定し、ビジョン検査を施行するための光学検査装置において、
上面に縁部に沿って下方に凹入された定着溝が形成され、前記定着溝と下面とを貫通して流路を形成し、透光材からなって、前記検査シートがローディングされる検査ステージと、
前記検査ステージの側面または下面を支持する固定フレームと、
前記検査ステージの定着溝に差し込まれて固定される多孔質セラミック材の吸着パネルと、
前記流路に真空圧を加えて、前記吸着パネル上の検査シートを吸着させる真空モジュールと、
前記検査ステージの下方から検査ステージ上の検査シートに光を照射するバックライトユニットと、
前記検査ステージの上方に配されて、前記検査ステージにローディングされた検査シートのイメージを獲得する撮像手段と、
を含み、
前記定着溝と前記流路とは、前記流路の幅が前記定着溝の幅に比べて狭くなり、前記定着溝と前記流路との間に段差を形成するように階段状に連結され、
前記検査ステージは四角形であり、
前記定着溝は前記検査ステージの各辺に沿って形成されており、
前記真空モジュールは前記検査ステージの辺毎に設けられることを特徴とする光学検査装置。 In an optical inspection device that performs vacuum inspection by fixing a flexible material inspection sheet by vacuum suction,
A fixing groove recessed downward along the edge is formed on the upper surface, and a flow path is formed through the fixing groove and the lower surface. The inspection sheet is made of a translucent material and loaded with the inspection sheet. Stage,
A fixed frame that supports a side surface or a lower surface of the inspection stage;
An adsorption panel of a porous ceramic material fixed by being inserted into the fixing groove of the inspection stage;
A vacuum module that applies a vacuum pressure to the flow path to adsorb the inspection sheet on the adsorption panel;
A backlight unit that irradiates light onto the inspection sheet on the inspection stage from below the inspection stage;
An imaging means arranged above the inspection stage to obtain an image of an inspection sheet loaded on the inspection stage;
Including
The fixing groove and the flow path are connected stepwise so that the width of the flow path is narrower than the width of the fixing groove, and a step is formed between the fixing groove and the flow path .
The inspection stage is square,
The fixing groove is formed along each side of the inspection stage;
The optical inspection apparatus, wherein the vacuum module is provided for each side of the inspection stage . 前記真空モジュールは、
一端が前記検査ステージの流路と連結された真空ホースと、
前記真空ホースの他端と連結されて真空圧を加える真空ポンプと、
を含むことを特徴とする請求項１に記載の光学検査装置。 The vacuum module is
A vacuum hose having one end connected to the flow path of the inspection stage;
A vacuum pump connected to the other end of the vacuum hose to apply a vacuum pressure;
The optical inspection apparatus according to claim 1, comprising: 前記検査ステージに形成された定着溝の深さと、前記定着溝に差し込まれる吸着パネルの厚さは、同様に形成されて、前記検査ステージと吸着パネルの上面とが平面で滑らかに連結されることを特徴とする請求項１に記載の光学検査装置。   The depth of the fixing groove formed on the inspection stage and the thickness of the suction panel inserted into the fixing groove are formed in the same manner, and the inspection stage and the upper surface of the suction panel are smoothly connected in a plane. The optical inspection apparatus according to claim 1. 前記定着溝は、前記検査ステージの上面のエッジに段付けられて形成されたことを特徴とする請求項１に記載の光学検査装置。   The optical inspection apparatus according to claim 1, wherein the fixing groove is formed by being stepped on an edge of an upper surface of the inspection stage. 前記定着溝は、前記検査ステージの縁部に沿って形成されるフレーム部と、前記フレーム部を連通するように中心部を横切って形成された横断部とを含むことを特徴とする請求項１に記載の光学検査装置。   2. The fixing groove includes a frame portion formed along an edge portion of the inspection stage and a transverse portion formed across a central portion so as to communicate with the frame portion. The optical inspection apparatus described in 1. 前記吸着パネルは、ローディングされた検査シートに吸着力が加えられないように真空圧が伝達されない回避区間が形成されたことを特徴とする請求項１に記載の光学検査装置。   The optical inspection apparatus according to claim 1, wherein the suction panel has an avoidance section where vacuum pressure is not transmitted so that suction force is not applied to the loaded inspection sheet.
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