TWM499556U - Carrying board and optical inspection apparatus comprising carrying board - Google Patents

Carrying board and optical inspection apparatus comprising carrying board Download PDF

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Publication number
TWM499556U
TWM499556U TW103223278U TW103223278U TWM499556U TW M499556 U TWM499556 U TW M499556U TW 103223278 U TW103223278 U TW 103223278U TW 103223278 U TW103223278 U TW 103223278U TW M499556 U TWM499556 U TW M499556U
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Taiwan
Prior art keywords
holes
board
vacuum
tested
vacuum table
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TW103223278U
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Chinese (zh)
Inventor
si-guo Su
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Rato High Tech Corp
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Priority to TW103223278U priority Critical patent/TWM499556U/en
Publication of TWM499556U publication Critical patent/TWM499556U/en

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

承載板及具有該承載板之光學檢測設備Carrier board and optical detecting device having the same

本創作關於一種設承載板及具有該承載板之光學檢測設備,該承載板係用於設置於光學檢測設備的真空台上,以供承載例如硬板或軟板等待測板,該光學檢測設備用於檢測待測板表面之電路圖案。The present invention relates to a carrier board and an optical detecting device having the same, which is used for mounting on a vacuum table of an optical detecting device for carrying, for example, a hard board or a soft board waiting for a measuring board, the optical detecting apparatus A circuit pattern for detecting the surface of the board to be tested.

電路板的生產線中,為了及早檢測電路板上的缺陷,係應用一種光學檢測設備來檢測電路板表面的電路圖案,主要利用影像處理的技術,比對待測之電路板表面影像與標準影像間的差異,來判斷待測之電路板表面是否存在缺限(例如存在異物或電路圖案異常)。In the production line of the circuit board, in order to detect defects on the circuit board early, an optical detecting device is used to detect the circuit pattern on the surface of the circuit board, mainly using image processing technology, compared with the surface image of the circuit board to be measured and the standard image. Difference, to determine whether there is a defect in the surface of the board to be tested (for example, foreign matter or circuit pattern is abnormal).

習知光學檢測設備具有真空台、抽氣裝置及影像擷取裝置,係以真空台來承載待測之電路板,該真空台頂面上係具有凹陷之容置槽,該容置槽底面上排列有複數個吸孔,且該真空台係連接至該抽氣裝置,檢測進行時,該抽氣裝置係啟動並抽氣,而經由該等吸孔吸住待測之電路板,該影像擷取裝置擷取待測之電路板的影像,並經過影像處理及比對分析後,可檢出電路板表面是否存在缺陷。The conventional optical detecting device has a vacuum table, a pumping device and an image capturing device, and carries a circuit board to be tested by a vacuum table. The top surface of the vacuum table has a recessed receiving groove on the bottom surface of the receiving groove. A plurality of suction holes are arranged, and the vacuum table is connected to the air suction device. When the detection is performed, the air suction device is activated and evacuated, and the circuit board to be tested is sucked through the suction holes. The device takes the image of the circuit board to be tested, and after image processing and comparison analysis, it can detect whether there is a defect on the surface of the circuit board.

習知光學檢測設備中,待測之電路板係藉由靠合在該容置槽之側壁來讓待側之電路板對位及定位,以供後續取像及處理分析。然而,習知光學檢測設備係有可檢測電路板尺寸上的限制,其係由於該容置槽的大小係限制了可檢測之電路板的最大尺寸(例如24*26吋),而不利於廠房內現有機台的擴充應用。此外,習知光學檢測設備之真空台的吸孔孔徑大且面積密度低,因此導致當該抽氣裝置之馬力控制不當時,會造成該等吸孔的吸力過大,被吸附之電路板易變形及受損。In the conventional optical detecting device, the circuit board to be tested is positioned and positioned by the side of the receiving slot to be aligned and processed for subsequent image taking and processing analysis. However, the conventional optical detecting device has a limitation on the size of the detectable circuit board, because the size of the receiving groove limits the maximum size of the detectable circuit board (for example, 24*26 吋), which is unfavorable for the factory. Expanded applications of existing machines. In addition, the vacuum table of the conventional optical detecting device has a large aperture and a low area density, so that when the horsepower of the air suction device is improperly controlled, the suction of the suction holes is excessive, and the adsorbed circuit board is easily deformed. And damaged.

本創作之一目的在於為改善習知光學檢測設備由於真空台之容置槽大小而限制了可檢測電路板之尺寸、及真空台的吸孔孔徑大且面積密度低而可能使電路板易於變形及受損的問題。One of the aims of the present invention is to improve the size of the detectable circuit board due to the size of the receiving groove of the vacuum table, and the large aperture of the vacuum table and the low area density may cause the circuit board to be easily deformed. And the problem of damage.

為達上述目的及其他目的,本創作係提供一種承載板,用於一光學檢測設備之一真空台上以供承載一待測板,該真空台係具有一容置槽以容置該承載板,該容置槽底面係具有複數個真空吸附孔,其特徵在於:該承載板具有複數個通孔,該等真空吸附孔的每一者係對應該等通孔中的至少一者,各該通孔之孔徑係小於各該真空吸附孔之孔徑,且該承載板之厚度係等於該容置槽深度。For the above purposes and other purposes, the present invention provides a carrier board for use on a vacuum table of an optical inspection device for carrying a board to be tested, the vacuum table having a receiving slot for receiving the carrier board The bottom surface of the accommodating groove has a plurality of vacuum adsorption holes, wherein the carrier plate has a plurality of through holes, each of the vacuum adsorption holes being corresponding to at least one of the through holes, each of the holes The aperture of the through hole is smaller than the aperture of each of the vacuum adsorption holes, and the thickness of the carrier plate is equal to the depth of the receiving groove.

上述之承載板,其中各該通孔之孔徑係為0.5-1.5公釐。In the above carrier board, each of the through holes has a pore diameter of 0.5 to 1.5 mm.

上述之承載板,其中各該通孔之孔徑係為1公釐。In the above-mentioned carrier sheet, the diameter of each of the through holes is 1 mm.

上述之承載板,其中該等通孔係以每平方公分至少10個的面積密度排列。The above-mentioned carrier sheet, wherein the through holes are arranged at an area density of at least 10 per square centimeter.

上述之承載板,其中該等通孔係排列成複數行,每一行中任二通孔的間距係為相同。In the above-mentioned carrier board, the through holes are arranged in a plurality of rows, and the spacing of any two through holes in each row is the same.

為達上述目的及其他目的,本創作係提供一種光學檢測設備,用於檢測一待測板上的電路圖案,該光學檢測設備包含一真空台、一抽氣裝置及一影像擷取裝置,其中該真空台係具有一容置槽及一抽氣室,該容置槽係形成於該真空台頂部且具有複數個真空吸附孔,該容置槽係透過該等真空吸附孔與該抽氣室連通,該抽氣裝置係連接該抽氣室以對該抽氣室抽氣,該影像擷取裝置係正對該真空台,該光學檢測設備更包含上述之承載板,該承載板係設置於該容置槽中,以供承載該待測板於其上。For the above purposes and other purposes, the present invention provides an optical detecting device for detecting a circuit pattern on a board to be tested, the optical detecting device comprising a vacuum table, an air extracting device and an image capturing device, wherein The vacuum stage has a receiving groove and a pumping chamber. The receiving groove is formed on the top of the vacuum table and has a plurality of vacuum adsorption holes, and the receiving groove passes through the vacuum adsorption holes and the pumping chamber. Connected, the air extracting device is connected to the pumping chamber to pump the air pumping chamber, and the image capturing device is directly facing the vacuum table, and the optical detecting device further comprises the above-mentioned carrier board, the carrier board is disposed on The accommodating groove is configured to carry the board to be tested thereon.

上述之光學檢測設備,其中該真空台於該容置槽周圍係設置有複數個定位條,用於讓該待測板靠合定位。In the above optical detecting device, the vacuum table is provided with a plurality of positioning strips around the receiving groove for positioning the board to be tested.

綜上,上述之承載板係可使光學檢測設備適用至更大尺寸的待測板,並由於該真空台上所有真空吸附孔皆與承載板之通孔有所對應而連通,且該等通孔排列均勻及緊密,而可增進該待測板檢測時的平整度及貼合度。In summary, the above-mentioned carrier board enables the optical detecting device to be applied to a larger-sized board to be tested, and since all vacuum suction holes on the vacuum table are corresponding to the through-holes of the carrier board, and the same The holes are arranged evenly and tightly, and the flatness and the fit of the test plate can be improved.

為充分瞭解本創作之目的、特徵及功效,茲藉由下述具體之實施例,並配合所附之圖式,對本創作做一詳細說明,說明如後:In order to fully understand the purpose, features and effects of this creation, the following specific examples, together with the attached drawings, provide a detailed description of the creation, as explained below:

圖1至圖4係用於說明本創作實施例之示意圖,該等圖式中顯示之比例係非為實際比例,圖式顯示之結構及比例係僅為說明本創作的技術內容之用。1 to 4 are diagrams for explaining the present embodiment, and the ratios shown in the drawings are not actual ratios, and the structures and proportions shown in the drawings are only for explaining the technical contents of the present creation.

請參閱圖1,本創作實施例係關於一光學檢測設備100,該光學檢測設備100係用於檢測硬板或軟板等待測板表面的電路圖案,其係擷取該待測板的表面影像後,對擷取之影像進行影像處理並判斷,而可檢出待測板之表面是否存在異物或圖案異常等瑕疵。Referring to FIG. 1 , the present embodiment relates to an optical detecting apparatus 100 for detecting a circuit pattern of a hard board or a soft board waiting for a surface of the measuring board, which is a surface image of the board to be tested. After that, the image of the captured image is processed and judged, and the surface of the board to be tested can be detected whether there is foreign matter or abnormal pattern.

如圖1所示,該光學檢測設備100包含一真空台20、一抽氣裝置30及一影像擷取裝置40,此外,該光學檢測設備100還具有顯示螢幕50、周邊裝置(鍵盤60a及滑鼠60b等)、系統主機(圖未示)、感測機構(圖未示)及驅動機構(圖未示)等。As shown in FIG. 1, the optical detecting device 100 includes a vacuum table 20, an air extracting device 30, and an image capturing device 40. In addition, the optical detecting device 100 further has a display screen 50 and peripheral devices (keyboard 60a and sliding). Mouse 60b, etc., system host (not shown), sensing mechanism (not shown) and drive mechanism (not shown).

請參閱圖2及圖3,該真空台20係具有一容置槽21及一抽氣室22,該容置槽21係形成於該真空台20頂部且具有複數個真空吸附孔23,該容置槽21係透過該等真空吸附孔23與該抽氣室22連通,該抽氣裝置30係連接該抽氣室以對該抽氣室22抽氣,該影像擷取裝置40係正對該真空台20。Referring to FIG. 2 and FIG. 3 , the vacuum table 20 has a receiving groove 21 and a pumping chamber 22 . The receiving groove 21 is formed on the top of the vacuum table 20 and has a plurality of vacuum adsorption holes 23 . The trough 21 is connected to the pumping chamber 22 through the vacuum suction holes 23, and the air extracting device 30 is connected to the pumping chamber to evacuate the pumping chamber 22. The image capturing device 40 is directly Vacuum table 20.

一承載板10係可拆裝地設置於該容置槽21中,以供承載該待測板200於其上,藉以讓該影像擷取裝置40擷取該待測板200表面之影像。該承載板10具有複數個通孔11,該等真空吸附孔23的每一者係對應該等通孔11中的至少一者,各該通孔11之孔徑係小於各該真空吸附孔23之孔徑,即一個真空吸附孔23係對應連通一個以上的通孔11;並且,該承載板10之厚度係等於該容置槽21深度,因此,該承載板10之表面係與該容置槽21周圍之表面齊平,而可讓較大的待測板200(例如24*32吋或更大尺寸)能延伸放置於該容置槽21周圍之表面。A carrier board 10 is detachably disposed in the accommodating slot 21 for carrying the image to be tested 200 thereon, so that the image capturing device 40 captures an image of the surface of the panel 200 to be tested. The carrier plate 10 has a plurality of through holes 11 , each of the vacuum adsorption holes 23 corresponding to at least one of the through holes 11 , and each of the through holes 11 has a smaller aperture than each of the vacuum adsorption holes 23 . The aperture, that is, a vacuum adsorption hole 23, is correspondingly connected to the one or more through holes 11; and the thickness of the carrier plate 10 is equal to the depth of the accommodating groove 21, and therefore, the surface of the carrier plate 10 and the accommodating groove 21 The surrounding surface is flush, and the larger panel 200 to be tested (for example, 24*32 inch or larger) can be extended to the surface around the accommodating groove 21.

本實施例中,所述「該承載板10之厚度係等於該容置槽21深度」,此處之「等於」係包含製造該承載板10時尺寸之誤差在內,即該承載板10之厚度係大致上相等於該容置槽21深度。In this embodiment, the “the thickness of the carrier plate 10 is equal to the depth of the accommodating slot 21”, where “equal to” includes the error of the size when manufacturing the carrier 10, that is, the carrier 10 The thickness is substantially equal to the depth of the accommodating groove 21.

本實施例中,該抽氣裝置30係可包含有一真空幫浦31及一管線32,該管線32係連接該真空幫浦31及該真空台20之抽氣室22,該真空幫浦31係透過該管線32對該抽氣室22抽氣。In this embodiment, the air pumping device 30 can include a vacuum pump 31 and a pipeline 32. The pipeline 32 is connected to the vacuum pump 31 and the pumping chamber 22 of the vacuum table 20. The pumping chamber 22 is evacuated through the line 32.

本實施例中,該影像擷取裝置40係可包含攝影機、光源模組等。光源模組係將光照射至該待測板200表面,攝影機係擷取該待測板200表面的影像。In this embodiment, the image capturing device 40 can include a camera, a light source module, and the like. The light source module irradiates light onto the surface of the board to be tested 200, and the camera captures an image of the surface of the board 200 to be tested.

此外,該真空台20於該容置槽21周圍係可設置有複數個定位條24,各該定位條24係凸出於該容置槽周圍之表面,用於讓該待測板200靠合定位,該等定位條24係可藉由螺絲或黏合等方式組裝於該容置槽周圍之表面,且可依需求(例如該待測板200之尺寸)配置其數量或位置。In addition, the vacuum table 20 can be provided with a plurality of positioning strips 24 around the accommodating groove 21, and each of the positioning strips 24 protrudes from the surface around the accommodating groove for accommodating the board to be tested 200. For positioning, the positioning strips 24 can be assembled on the surface around the receiving groove by screws or adhesives, and the number or position can be configured according to requirements (for example, the size of the board to be tested 200).

如圖4所示,本實施例之承載板10中,各該通孔11之孔徑D係可為0.5-1.5公釐,較佳的是,各該通孔11之孔徑係為1公釐。並且,該等通孔11係排列成複數行,每一行中任二通孔11的間距係為相同,該等通孔11係以每平方公分至少10個的面積密度排列於該承載板10上。藉此,由於該等通孔11面積密度高且均勻分布,且該真空台20上所有真空吸附孔23係與承載板10之通孔11有所對應而連通,故當該抽氣裝置30抽氣時,氣壓對該承載板10表面的待測板200所造成之吸力能均勻分布,並增加了吸附面積,進而增進了該待測板200檢測時的平整度及貼合度。As shown in FIG. 4, in the carrier 10 of the embodiment, the diameter D of each of the through holes 11 may be 0.5-1.5 mm, and preferably, the through-hole 11 has a hole diameter of 1 mm. Moreover, the through holes 11 are arranged in a plurality of rows, and the spacing of any two through holes 11 in each row is the same, and the through holes 11 are arranged on the carrier plate 10 at an area density of at least 10 per square centimeter. . Therefore, since the area density of the through holes 11 is high and evenly distributed, and all the vacuum adsorption holes 23 on the vacuum table 20 are in communication with the through holes 11 of the carrier plate 10, when the air suction device 30 is drawn When the gas is gas, the suction force of the plate 200 to be tested on the surface of the carrier plate 10 is evenly distributed, and the adsorption area is increased, thereby improving the flatness and the fit of the board to be tested 200.

綜上,本創作實施例之承載板10係可使該光學檢測設備100適用至更大尺寸的待測板200,並由於該真空台20上所有真空吸附孔23皆與承載板10之通孔11有所對應而連通,且該等通孔11排列均勻及緊密,而可增進該待測板200檢測時的平整度及貼合度。In summary, the carrier board 10 of the present embodiment can be applied to the larger size of the board to be tested 200, and all the vacuum suction holes 23 on the vacuum table 20 are connected to the through holes of the carrier board 10. 11 is connected and connected, and the through holes 11 are evenly arranged and compacted, thereby improving the flatness and the fit of the board to be tested 200.

本創作在上文中已以較佳實施例揭露,然熟習本項技術者應理解的是,該實施例僅用於描繪本創作,而不應解讀為限制本創作之範圍。應注意的是,舉凡與該實施例等效之變化與置換,均應設為涵蓋於本創作之範疇內。因此,本創作之保護範圍當以申請專利範圍所界定者為準。The present invention has been disclosed in the above preferred embodiments, and it should be understood by those skilled in the art that the present invention is only intended to depict the present invention and should not be construed as limiting the scope of the present invention. It should be noted that variations and permutations equivalent to those of the embodiments are intended to be included within the scope of the present invention. Therefore, the scope of protection of this creation is subject to the definition of the scope of patent application.

10‧‧‧承載板
11‧‧‧通孔
20‧‧‧真空台
21‧‧‧容置槽
22‧‧‧抽氣室
23‧‧‧真空吸附孔
24‧‧‧定位條
30‧‧‧抽氣裝置
31‧‧‧真空幫浦
32‧‧‧管線
40‧‧‧影像擷取裝置
50‧‧‧顯示螢幕
60a‧‧‧鍵盤
60b‧‧‧滑鼠
100‧‧‧光學檢測設備
200‧‧‧待測板
D‧‧‧孔徑
10‧‧‧Bearing board
11‧‧‧through hole
20‧‧‧vacuum table
21‧‧‧ accommodating slots
22‧‧‧Exhaust chamber
23‧‧‧Vacuum adsorption holes
24‧‧‧Positioning strip
30‧‧‧Exhaust device
31‧‧‧vacuum pump
32‧‧‧ pipeline
40‧‧‧Image capture device
50‧‧‧ Display screen
60a‧‧‧ keyboard
60b‧‧‧mouse
100‧‧‧Optical testing equipment
200‧‧‧Test board
D‧‧‧ aperture

[圖1]係本創作實施例之光學檢測設備的示意圖。 [圖2]係本創作實施例中真空台與承載板的結構示意圖。 [圖3]係本創作實施例之光學檢測設備檢測待測板的示意圖。 [圖4]係本創作實施例之承載板的結構示意圖。Fig. 1 is a schematic view showing an optical detecting apparatus of the present embodiment. 2 is a schematic structural view of a vacuum table and a carrier plate in the present embodiment. [Fig. 3] is a schematic view showing the optical detecting device of the present embodiment for detecting a board to be tested. FIG. 4 is a schematic structural view of a carrier board according to the present embodiment.

10‧‧‧承載板 10‧‧‧Bearing board

11‧‧‧通孔 11‧‧‧through hole

20‧‧‧真空台 20‧‧‧vacuum table

22‧‧‧抽氣室 22‧‧‧Exhaust chamber

23‧‧‧真空吸附孔 23‧‧‧Vacuum adsorption holes

24‧‧‧定位條 24‧‧‧Positioning strip

30‧‧‧抽氣裝置 30‧‧‧Exhaust device

31‧‧‧真空幫浦 31‧‧‧vacuum pump

32‧‧‧管線 32‧‧‧ pipeline

40‧‧‧影像擷取裝置 40‧‧‧Image capture device

200‧‧‧待測板 200‧‧‧Test board

Claims (7)

一種承載板,用於一光學檢測設備之一真空台上以供承載一待測板,該真空台係具有一容置槽以容置該承載板,該容置槽底面係具有複數個真空吸附孔,其特徵在於:該承載板具有複數個通孔,該等真空吸附孔的每一者係對應該等通孔中的至少一者,各該通孔之孔徑係小於各該真空吸附孔之孔徑,且該承載板之厚度係等於該容置槽深度。A carrier plate for use on a vacuum table of an optical detecting device for carrying a board to be tested, the vacuum table having a receiving groove for receiving the carrier plate, the bottom surface of the receiving groove having a plurality of vacuum adsorption The hole is characterized in that: the carrier plate has a plurality of through holes, each of the vacuum adsorption holes is corresponding to at least one of the through holes, and each of the through holes has a smaller aperture than each of the vacuum adsorption holes. The aperture is, and the thickness of the carrier plate is equal to the depth of the accommodating groove. 如請求項第1項所述之承載板,其中各該通孔之孔徑係為0.5-1.5公釐。The carrier sheet according to Item 1, wherein each of the through holes has a pore diameter of 0.5 to 1.5 mm. 如請求項第1項所述之承載板,其中各該通孔之孔徑係為1公釐。The carrier sheet of claim 1, wherein each of the through holes has a pore size of 1 mm. 如請求項第1、2或3項所述之承載板,其中該等通孔係以每平方公分至少10個的面積密度排列。The carrier sheet of claim 1, 2 or 3, wherein the through holes are arranged at an area density of at least 10 per square centimeter. 如請求項第4項所述之承載板,其中該等通孔係排列成複數行,每一行中任二通孔的間距係為相同。The carrier board of claim 4, wherein the through holes are arranged in a plurality of rows, and the spacing of any two through holes in each row is the same. 一種光學檢測設備,用於檢測一待測板上的電路圖案,該光學檢測設備包含一真空台、一抽氣裝置及一影像擷取裝置,其中該真空台係具有一容置槽及一抽氣室,該容置槽係形成於該真空台頂部且具有複數個真空吸附孔,該容置槽係透過該等真空吸附孔與該抽氣室連通,該抽氣裝置係連接該抽氣室以對該抽氣室抽氣,該影像擷取裝置係正對該真空台,其特徵在於:該光學檢測設備更包含如請求項第1至5項中任一項所述之承載板,該承載板係設置於該容置槽中,以供承載該待測板於其上。An optical detecting device for detecting a circuit pattern on a board to be tested, the optical detecting device comprising a vacuum table, an air extracting device and an image capturing device, wherein the vacuum table has a receiving groove and a pumping device a gas chamber, the accommodating groove is formed on the top of the vacuum table and has a plurality of vacuum adsorption holes, the accommodating groove is communicated with the suction chamber through the vacuum adsorption holes, and the air suction device is connected to the air suction chamber The image capturing device is in the form of a carrier plate according to any one of claims 1 to 5, wherein the image capturing device is in the form of a carrier plate according to any one of claims 1 to 5, The carrying board is disposed in the receiving slot for carrying the board to be tested thereon. 如請求項第6項所述之光學檢測設備,其中該真空台於該容置槽周圍係設置有複數個定位條,用於讓該待測板靠合定位。The optical detecting device of claim 6, wherein the vacuum table is provided with a plurality of positioning strips around the receiving slot for positioning the panel to be tested.
TW103223278U 2014-12-30 2014-12-30 Carrying board and optical inspection apparatus comprising carrying board TWM499556U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108466191A (en) * 2017-02-23 2018-08-31 台濠科技股份有限公司 Image measuring device
CN108855962A (en) * 2018-06-06 2018-11-23 东莞市运泰自动化科技有限公司 It is a kind of for being pressed into the detection machine of the jig plate of electroceramics particle capacitor
CN113524644A (en) * 2020-04-14 2021-10-22 苏州光越微纳科技有限公司 Soft film limiting mechanism

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108466191A (en) * 2017-02-23 2018-08-31 台濠科技股份有限公司 Image measuring device
CN108855962A (en) * 2018-06-06 2018-11-23 东莞市运泰自动化科技有限公司 It is a kind of for being pressed into the detection machine of the jig plate of electroceramics particle capacitor
CN108855962B (en) * 2018-06-06 2024-02-09 东莞市运泰自动化科技有限公司 A detection machine that is used for pressing in electric ceramic particle capacitive tool board
CN113524644A (en) * 2020-04-14 2021-10-22 苏州光越微纳科技有限公司 Soft film limiting mechanism

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