CN108466191A - Image measuring device - Google Patents
Image measuring device Download PDFInfo
- Publication number
- CN108466191A CN108466191A CN201710100247.4A CN201710100247A CN108466191A CN 108466191 A CN108466191 A CN 108466191A CN 201710100247 A CN201710100247 A CN 201710100247A CN 108466191 A CN108466191 A CN 108466191A
- Authority
- CN
- China
- Prior art keywords
- adsorption
- measuring device
- adsorption site
- image measuring
- line
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
Abstract
A kind of image measuring device includes a pedestal, this pedestal is equipped with a column, and can be along the image capture unit that short transverse moves equipped with one；Pedestal is equipped with a moveable microscope carrier, the microscope carrier is equipped with one to adsorb the adsorption site for being measured object, the adsorption site is equipped with most spaced adsorption zones, respectively the adsorption zone corresponds to a pump-line respectively, respectively the pump-line is connected to a pumping pipeline and is evacuated, so that respectively the adsorption site generates adsorption capacity respectively.
Description
Technical field
The present invention is related with image measuring device, refers in particular to a kind of image measurement being measured object positioning using air-flow absorption
Device.
Background technology
Before being measured using image measuring device to being measured object, it is necessary to it will first be measured object and be positioned on microscope carrier,
In the hope of accurately measurement result.General such as semiconductor substrate or lead frame are measured object, are not easy to be fixed on microscope carrier because its is frivolous
On, therefore a suction tray can be arranged in known image measuring device on its microscope carrier, so that it is generated suction to inhale using air-extractor
Attached positioning is measured object, and so known image measuring device is traditional suction tray, is the suction tray of whole piece formula, the absorption
Disk is single binding domain can be adsorbed when semiconductor substrate or lead frame etc., which are measured object, is placed in the suction tray
Region is less than region not to be adsorbed more, and is not easy firm adsorbing and is measured object, especially has hollow out as lead frame is this
Portion is measured object, can actually cover the area of the suction tray much smaller than uncovered area firmly, lead to adsorption capacity not
Foot, and lead frame can not be positioned on microscope carrier really, the displacement of lead frame can be caused when measuring mobile and then reduction amount is surveyed
Precision.
Invention content
The object of the present invention is to provide a kind of image measuring device, the microscope carrier of the image measuring device is equipped with an adsorption site,
The adsorption site is equipped with most spaced adsorption zones, and respectively the adsorption zone will produce adsorption capacity, it is made to be measured object at least
Several adsorption zones can be covered all, and firm adsorption capacity is provided, when it is lead frame to be measured object, can actually be covered
The area of the adsorption zone can be more than uncovered area firmly, and adsorbing for can consolidating is measured object, will not make when moving
At the displacement for being measured object, and then improve the precision measured.
Another object of the present invention is to provide a kind of image measuring device, which is equipped between the respectively adsorption zone
Most gas holes by air blowing to release the positioning states for being measured object, and is easier to measure to be moved forward and backward and is measured object, together
When gas hole different air-blowing quantities can be provided, provide different air blowing powers with the object that is measured that correspondence is different.
It is still another object of the present invention to provide a kind of image measuring device, which is equipped with a height adjusting
The conveying seat of position will be measured object and be delivered to the adsorption site to facilitate.
Secondary the one of the present invention is designed to provide a kind of image measuring device, which senses quilt equipped with a plurality of
The sensing element for measuring object location is located at positioning really for being measured object.
To achieve the above object, the present invention takes following technical scheme：
The present invention provides a kind of image measuring device comprising has：One pedestal and a column on the pedestal, this is vertical
Column is equipped with an image capture unit that can be moved along a short transverse, and the pedestal can be with respect to the pedestal along level side equipped with one
To mobile microscope carrier；It is characterized in that；The microscope carrier is equipped with an adsorption site, which is equipped with most spaced absorption
Area, respectively the adsorption zone respectively correspond to a pump-line, respectively the pump-line be connected to a pumping pipeline and be evacuated, for respectively should
Adsorption site generates adsorption capacity respectively.
In one embodiment, which is equipped with most gas holes between the respectively adsorption zone, and respectively the gas hole is connected to
It blows to a gassing pipe and being connect with an insufflation line, for the respectively outside blow gas of the gas hole, and the gas blow pipe
The pumping pipeline of line and the adsorption site is respectively connected to a gas control equipment that can be evacuated and be blown, gas control dress
It sets and can control to switch pumping or blow, and the gas control equipment can control the air-blowing quantity of the insufflation line, to provide not
Same air blowing power.
In one embodiment, most spaced depressions are equipped in the adsorption site, respectively the depression is respectively equipped with one with more
Suction tray made of permeability material is for forming the adsorption zone, and the depression forms equally distributed stream in the bottom of suction tray
Road, the runner are connected to the pump-line.
In one embodiment, which is further provided with a conveying seat, which is set to the side of the adsorption site, to will be by
It measures object and is delivered to the adsorption site, and the conveying seat is equipped with one to the adjusting apparatus for the height for adjusting the conveying seat conveying seat
Equipped with one to adjust the conveying seat height adjusting apparatus.
In one embodiment, which senses the sensing element for being measured object location equipped with a plurality of.
The beneficial effects of the invention are as follows：The advantage of the invention is that several absorption can at least be covered all by being measured object
Area, and firm adsorption capacity is provided, when it is lead frame to be measured object, can actually cover the area of the adsorption zone can be more than
Uncovered area firmly, and adsorbing for can consolidating is measured object, will not cause the displacement for being measured object when moving, in turn
Improve the precision measured.Furthermore the advantage of the invention is that by the air blowing of gas hole, the positioning shape for being measured object can be released
State, and be easier to measure to be moved forward and backward and be measured object, while gas hole can provide different air-blowing quantities, be measured so that correspondence is different
It surveys object and different air blowing powers is provided.In addition, the advantage of the invention is that the adsorption site side is equipped with a height adjusting position
Conveying seat, will be measured object to facilitate and be delivered to the adsorption site.
Description of the drawings
Fig. 1 is the stereoscopic schematic diagram of the present invention.
Fig. 2 is the stereoscopic schematic diagram of adsorption site of the present invention.
Fig. 3 is the diagrammatic cross-section of adsorption site of the present invention, and expression is measured the use state that object is adsorbed on adsorption site.
Fig. 4 is the diagrammatic cross-section of adsorption site of the present invention, and expression is measured object and is blown off in the use state of adsorption site.
Fig. 5 is that the present invention is measured object to the schematic diagram of adsorption site using seat conveying is conveyed.
Specific implementation mode
Referring to Fig. 1, those shown is image measuring device provided by the invention comprising there is a pedestal 1, the pedestal 1
Side is equipped with a column 11, which is equipped with one for capturing the image capture unit 12 of object image, and the wherein image is picked
Take device 12 can be in 11 upper edge of column, the one short transverse Z movements；In the present embodiment, which includes one
Zoom camera lens, an image acquisition unit and a coaxial light source.
It holds, which is equipped with a microscope carrier 13, which can be defined as X-direction and the side Y in 1 upper edge one of pedestal
To horizontal linear direction relative to the pedestal 1 move, the microscope carrier 13 and the image capture unit 12 can pass through various known drives
Flowing mode driving movement.
The above-mentioned microscope carrier 13 includes an adsorption site 3 and one conveying seat 2, and the wherein conveying seat 2 is set to the one of the adsorption site 3
Side, the object to be measured that is measured is delivered to the adsorption site 3；In the present embodiment, which is equipped with an adjusting apparatus 21,
The height for adjusting the conveying seat 2 to coordinate the thickness for being measured object will thereby be measured object and smoothly send to the adsorption site 3.
In addition, the adsorption site 3 be equipped with it is a plurality of to sense the sensing element 5 (see Fig. 2) for being measured object location, can be to be measured object defeated
Confirm after sending to the adsorption site 3 and is measured whether object reaches correct position.
As shown in Figures 2 and 3, which is equipped with most spaced adsorption zones 31, and respectively the adsorption zone 31 is distinguished
A pump-line 32 is corresponded to, respectively the pump-line 32 is connected to a pumping pipeline 34 and is evacuated, so that respectively the adsorption zone 31 divides
Adsorption capacity is not generated, is equipped with most spaced depressions 36 in the present embodiment, in the adsorption site 3, and respectively the depression 36 is distinguished
Equipped with one with suction tray made of porous material 37 for forming the adsorption zone 31, and the depression 36 is in the bottom of suction tray 37
Equally distributed runner 38 is formed, which is connected to the pump-line 32, and the pump-line 32 inside adsorption site 3 again through connecting
The pumping pipeline 34 is passed to, which is then connected to a gas control equipment 4 that can be evacuated, to provide the respectively suction
The adsorption capacity in attached area 31.
As shown in Figures 2 and 4, which is equipped with most gas holes 33 between the respectively interval of the adsorption zone 31, respectively
The gas hole 33 is connected to the gassing pipe 331 that one is set to inside the adsorption site 3 and is connect with an insufflation line 35 and blown,
For each 33 outside blow gas of gas hole, and the insufflation line 35 is connected to the gas control equipment 4, gas control dress
The insufflation line 35 can be carried out to blow and can control air-blowing quantity by setting 4, to provide different air blowing powers, while the gas control
Device 4 processed is controllable to be evacuated or is blown with switching.
By above structure, as shown in Figure 3-Figure 5, when be measured object 6 preparation the adsorption site 3 is sent to by the conveying seat 2 when,
The gas control equipment 4 can control to blow, air will be sprayed from the gas hole 33 as illustrated in fig. 4, and order is measured 6 quilt of object
Slightly blow off the adsorption site 3, can make to be measured object 6 and is unhinderedly smoothly pushed on the adsorption site 3 and can avoid being measured
Object 6 is damaged in conveying；Object 6 to be measured reaches positioning, and after confirming that its position is correct by the sensing element 5, at this time may be used
It controls the gas control equipment 4 to be evacuated, air will be pumped into from the pump-line 32 as illustrated in fig. 3, thereby the respectively absorption
Negative pressure state is formed in the depression 36 in area 31, and then each suction tray 37 is made to form one suction, since multiple adsorption zones 31 are set
It is calculated as compartment of terrain arrangement and forms plural ranks, and each adsorption zone 31 will produce suction, therefore being measured object 6 will be complete
It covers above more than one adsorption zone 31, thereby provides quite firm suction to being measured object 5, in order to object 6 will be measured
It is firmly adsorbed on the adsorption site 3, and subsequent image measurement operation can be carried out.
And after the image measurement operation for being measured object carries out, it can control the gas control equipment 4 to stop pumping, and cut
Change air blowing into, you can object 6 will be measured and blown off as illustrated in fig. 4 the suction tray 37, thereby release and be measured object 6 in the adsorption site
Positioning states on 3 are measured object 5 in order to for removing.
Via above description, the advantage of the invention is that several adsorption zones can at least be covered all by being measured object, and carry
For firm adsorption capacity, when it is lead frame to be measured object, can actually cover the adsorption zone area can be more than it is not coating
The area covered, and adsorbing for can consolidating is measured object, will not cause the displacement for being measured object, and then raising amount when moving
The precision of survey.
Furthermore the advantage of the invention is that by the air blowing of gas hole, the positioning states for being measured object can be released, and be more easy to
It is measured object in measuring to be moved forward and backward, while gas hole can provide different air-blowing quantities, is provided with the object that is measured that correspondence is different
Different air blowing powers.
In addition, the advantage of the invention is that the adsorption site side is equipped with the conveying seat of a height adjusting position, to side
Just object will be measured and be delivered to the adsorption site.
Claims (7)
1. a kind of image measuring device comprising have a pedestal and a column on the pedestal, which can edge equipped with one
The image capture unit of one short transverse movement, and the pedestal is equipped with a microscope carrier, which can be with respect to the pedestal along level side
To movement, it is characterised in that：The microscope carrier is equipped with an adsorption site, which is equipped with most spaced adsorption zones, respectively should
Adsorption zone corresponds to a pump-line respectively, and respectively the pump-line is connected to a pumping pipeline and is evacuated, for each adsorption site
Adsorption capacity is generated respectively.
2. image measuring device as described in claim 1, which is characterized in that the adsorption site is set between each adsorption zone
There is most gas holes, respectively the gas hole is connected to a gassing pipe and is connect with an insufflation line and blown, for respectively should
The outside blow gas of gas hole, and the pumping pipeline of the insufflation line and the adsorption site be respectively connected to one can carry out pumping and
The gas control equipment of air blowing, the gas control equipment are simultaneously controllable with switching pumping or air blowing.
3. image measuring device as claimed in claim 2, which is characterized in that the gas control equipment can control the air blowing
The air-blowing quantity of pipeline, to provide different air blowing powers.
4. image measuring device as described in claim 1, which is characterized in that be equipped in the adsorption site most spaced
Depression, respectively the depression be respectively equipped with one with suction tray made of porous material for forming the adsorption zone, and the respectively depression
It is respectively communicated with the pump-line.
5. image measuring device as claimed in claim 4, which is characterized in that the depression is formed in the bottom of the suction tray
Equally distributed runner, the runner are connected to the pump-line.
6. image measuring device as described in claim 1, which is characterized in that the microscope carrier is further provided with a conveying seat, the conveying
Seat is set to the side of the adsorption site, will be measured object and be delivered to the adsorption site, and the conveying seat is equipped with one to adjust
The adjusting apparatus of the height of the conveying seat.
7. image measuring device as described in claim 1, which is characterized in that the adsorption site senses quilt equipped with a plurality of
Measure the sensing element of object location.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710100247.4A CN108466191A (en) | 2017-02-23 | 2017-02-23 | Image measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710100247.4A CN108466191A (en) | 2017-02-23 | 2017-02-23 | Image measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108466191A true CN108466191A (en) | 2018-08-31 |
Family
ID=63266639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710100247.4A Pending CN108466191A (en) | 2017-02-23 | 2017-02-23 | Image measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108466191A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110420864A (en) * | 2019-07-15 | 2019-11-08 | 中导光电设备股份有限公司 | A kind of ULED screen substrate detection/measuring device and its application method |
| CN110420865A (en) * | 2019-07-15 | 2019-11-08 | 中导光电设备股份有限公司 | ULED screen substrate detection/backlight of measuring device detects/measures objective table |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2746181Y (en) * | 2004-11-30 | 2005-12-14 | 大连理工大学 | Vacuum suction cup |
| CN1775641A (en) * | 2004-11-17 | 2006-05-24 | 三发机电有限公司 | Substrate transmission device |
| CN2791334Y (en) * | 2005-05-08 | 2006-06-28 | 秀鸿电子工业有限公司 | Vacuum disc |
| CN101210795A (en) * | 2006-12-29 | 2008-07-02 | 深圳富泰宏精密工业有限公司 | Measuring device and measuring method |
| TWM499556U (en) * | 2014-12-30 | 2015-04-21 | Rato High Tech Corp | Carrying board and optical inspection apparatus comprising carrying board |
-
2017
- 2017-02-23 CN CN201710100247.4A patent/CN108466191A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1775641A (en) * | 2004-11-17 | 2006-05-24 | 三发机电有限公司 | Substrate transmission device |
| CN2746181Y (en) * | 2004-11-30 | 2005-12-14 | 大连理工大学 | Vacuum suction cup |
| CN2791334Y (en) * | 2005-05-08 | 2006-06-28 | 秀鸿电子工业有限公司 | Vacuum disc |
| CN101210795A (en) * | 2006-12-29 | 2008-07-02 | 深圳富泰宏精密工业有限公司 | Measuring device and measuring method |
| TWM499556U (en) * | 2014-12-30 | 2015-04-21 | Rato High Tech Corp | Carrying board and optical inspection apparatus comprising carrying board |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110420864A (en) * | 2019-07-15 | 2019-11-08 | 中导光电设备股份有限公司 | A kind of ULED screen substrate detection/measuring device and its application method |
| CN110420865A (en) * | 2019-07-15 | 2019-11-08 | 中导光电设备股份有限公司 | ULED screen substrate detection/backlight of measuring device detects/measures objective table |
| CN110420864B (en) * | 2019-07-15 | 2023-10-13 | 中导光电设备股份有限公司 | ULED screen substrate detection/measurement equipment |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180831 |
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| RJ01 | Rejection of invention patent application after publication |