CN110420864A - A kind of ULED screen substrate detection/measuring device and its application method - Google Patents

A kind of ULED screen substrate detection/measuring device and its application method Download PDF

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Publication number
CN110420864A
CN110420864A CN201910635363.5A CN201910635363A CN110420864A CN 110420864 A CN110420864 A CN 110420864A CN 201910635363 A CN201910635363 A CN 201910635363A CN 110420864 A CN110420864 A CN 110420864A
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China
Prior art keywords
substrate
detection
signal processing
plate
processing unit
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CN201910635363.5A
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Chinese (zh)
Inventor
张梁
郝朋飞
李波
黄建佳
邓怀波
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In Photoelectric Equipment Ltd By Share Ltd
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In Photoelectric Equipment Ltd By Share Ltd
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Priority to CN201910635363.5A priority Critical patent/CN110420864A/en
Publication of CN110420864A publication Critical patent/CN110420864A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/02Measures preceding sorting, e.g. arranging articles in a stream orientating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/04Sorting according to size
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/361Processing or control devices therefor, e.g. escort memory
    • B07C5/362Separating or distributor mechanisms

Abstract

The present invention discloses a kind of ULED screen substrate detection/measuring device and its application method, equipment includes signal processing unit, detection device, pre- alignment device, manipulator and about two material mouths, and the detection device, pre- alignment device, manipulator and about two material mouths are connect with signal processing unit to be realized signal interaction, is automatically performed screen substrate feeding, pre- contraposition, detection, blanking overall process;Material mouth limited block is laminated to form multilayer limit space the present invention up and down, do not need replacement fixture can loading and unloading difference size/shape substrate, two loading and unloading mouths replace loading and unloading, improve loading and unloading efficiency, ULED screen substrate detection/measuring device of the present invention can realize the function of being changed without the detection that screen substrate to various different size/shapes can be completed in frock clamp, it solves the problems, such as to replace frock clamp repeatedly, full-automation completes each process, improves production efficiency.

Description

A kind of ULED screen substrate detection/measuring device and its application method
Technical field
The present invention relates to screen detection field, espespecially a kind of ULED screen substrate detection/measuring device and its application method.
Background technique
ULED screen uses multi partition separate backlight control technology, and image quality performance has a big promotion, therefore ULED screen be widely used in electron medical treatment show and this two big field of LCD TV on, but currently on the market ULED screen by In customize the characteristics of, round and rectangular, round common size that shape and size are not that fixed, common shape has There are 4 cun, 6 cun and 8 cun, rectangular to common are size 200mm~300mm x 200mm~400mm, existing detection device cannot Compatible various shape and size, can only detect a kind of shape or a kind of size needs more if to detect other shapes or size Frock clamp is changed, fixture and objective table fixture of fixture, positioning mechanism including upper and lower material mouth etc., replacement frock clamp were debugged Journey is cumbersome, inefficient.
Summary of the invention
Replacement frock clamp is not needed, is able to achieve while handling not similar shape to solve the above problems, the present invention provides one kind The ULED screen substrate detection/measuring device and its application method that shape, various sizes of screen substrate detect.
To achieve the above object, the technical solution adopted by the present invention is that: a kind of ULED screen substrate detection/measuring device, Including signal processing unit, the detection device being mounted on lathe, pre- alignment device, manipulator and about two material mouths, detection Device, pre- alignment device, manipulator and about two material mouths are connect with signal processing unit to be realized signal interaction, is automatically performed screen Curtain substrate feeding, pre- contraposition, detection, blanking overall process;Upper and lower material mouth include bottom plate, be arranged on bottom plate several at least two The substrate cartridge and inductive pick-up of the limited block of layer, different size/shape, limited block according to substrate cartridge size/shape It is small to be stacked in upper principle greatly lower, formed multilayer can place different size/shapes substrate cartridge limit space, every kind The substrate cartridge of size/shape can only place one layer of limit space wherein, and every layer of limit space and next layer of limit space are not Inductive pick-up is arranged in the position of overlapping.
Further, limited block setting diagonal two angle points of substrate cartridge or wantonly three angle points or four angle points or arbitrarily Two sides or three sides or four sides.
Further, it is equipped with a notch for being convenient for manipulator loading and unloading in the middle part of bottom plate a side of upper and lower material mouth, is equipped with and lacks The side of mouth is flowing end;It is L-type detent on the inside of limited block, limited block is arranged in four corner locations of substrate cartridge, and every layer Inductive pick-up is nearby set on the inside of the diagonal limited block of limit space, and inductive pick-up is press-down type inductive pick-up, is pushed The switch of formula inductive pick-up protrudes from this layer of limited block bottom surface.
Further, mounting rack is equipped at the flowing end of bottom plate, mounting rack is equipped with for detecting the base in substrate cartridge Plate cassette substrate detector whether outstanding, cassette substrate detector are located above the notch of bottom plate.
Further, limited block top edge inner side chamfering slides into limit space along the slope of chamfering convenient for substrate cartridge In.
Further, detection device, pre- alignment device and about two material mouths are located at four direction around manipulator, mechanical Hand is driven by manipulator driving device, and manipulator driving device includes Z motor and rotating electric machine.
Further, signal processing unit is industrial computer or PLC controller.
Further, detection device include equipment platform, gantry support, detector, detection platform, backlighting arrangement and Electric cabinet;Detection platform is arranged on equipment platform, drives detection platform on equipment platform along the axis side X/Y by driving assembly To movement, gantry support is erected above equipment platform, and detector is installed on the crossbeam of gantry support, and detector is equipped with camera I installing port and camera II installing port, detector is against detection platform;Detection platform includes mounting base, objective table, standard film load Platform and air extractor, mounting base are equipped with a counterbore, and standard film microscope carrier is fixed in the counterbore, and objective table is mounted on installation bottom On plate, the mounting base below objective table is equipped with a through-hole, and clear size of opening is less than objective table size;Objective table and standard film microscope carrier Screen substrate is placed when for detecting, air extractor is connect with objective table and standard scale microscope carrier, pumping absorption fixed screen when detection Curtain substrate;Backlighting arrangement is arranged in objective table side.
Further, objective table includes superstructure plate and understructure plate, the superstructure plate and understructure plate For rigid transparent material, the superstructure plate includes at least one piece of adsorption plate, and adsorption plate is divided into an at least adsorption zone, each suction At least one adsorption hole is arranged in attached area, and the adsorption hole runs through the adsorption plate, and the adsorption hole is with scheduled size and interval It is distributed, side is provided with multiple sinking air drains to the understructure plate upward, and the sinking air drain is corresponding with the adsorption hole And be connected to, aspirating hole is arranged in understructure plate side, and the aspirating hole is connected with the sinking air drain, lower layer's knot Structure plate side setting aspirating hole is connect with the air extractor in detection platform.
A kind of application method of ULED screen substrate detection/measuring device, includes the following steps,
(a) it is adapted what the limited block that substrate cartridge is placed on upper and lower material mouth was formed with the substrate cartridge size/shape One layer of limit space in, trigger this layer of inductive pick-up switch and generate inductive signal and be transmitted to signal processing identified in units and go out base The size/shape of board casket;
(b) signal processing unit control manipulator will be on the board carrying to be measured to pre- alignment device in substrate cartridge;
(c) signal processing unit controls pre- alignment device and completes pre- contraposition to substrate to be measured;
(d) substrate for completing to align in advance is transported to detection dress by signal processing unit control manipulator from pre- alignment device On the objective table for the detection platform set adsorption zone compatible with the size/shape of substrate to be measured or on standard film microscope carrier, pumping The fixed substrate to be measured of device absorption;
(e) signal processing unit control detection platform or detector movement, detect substrate to be measured;
(f) signal processing unit control manipulator returns the board carrying for completing measurement in the substrate cartridge of material mouth up and down.
The beneficial effects of the present invention are: ULED screen substrate detection/measuring device of the present invention, which can be realized, is changed without tooling The function of the detection of the screen substrate to various different size/shapes can be completed in fixture, solves to replace frock clamp repeatedly Problem, full-automation complete each process, improve production efficiency.
Material mouth limited block is laminated to form multilayer limit space the present invention up and down, and not needing replacement fixture can loading and unloading difference The substrate of size/shape, two loading and unloading mouths replace loading and unloading, improve loading and unloading efficiency.
The subregion of the objective table adsorption hole of detection device of the present invention is arranged, and can adsorb to different size substrates, solves The problem of general objective table of having determined cannot be compatible with various shape and size, adsorption hole are that round and sinking air drain side is vertical Facade, bottom surface are horizontal plane, and bottom surface has carried out polishing treatment, these special constructions design, maximization reduces Problem of Shading, more Solves the problems, such as backlight uniformity when detection well.
The detection platform of detection device of the invention can improve under the drive of driving assembly along the direction X/Y high-speed motion Detection efficiency.
Positioning and clamping mechanism and auxiliary clamping device are arranged in the first mounting base pre- alignment device of the invention, simultaneously Two-dimensional motion mechanism or four-dimensional movement mechanism are arranged in the second mounting base, compact-sized, the reasonable employment device space;Energy The circle and square substrate of enough compatible various sizes, equipment that no replacement is required when carrying out the substrate of pre- contraposition different sizes and shapes, Effectively improve the working efficiency that substrate aligns in advance.
The present invention by controlling each section device signal processing unit in use, can make manipulator complete Corresponding pre- contraposition process is also completed at feeding, haul, each process of blanking, while pre- alignment device, detection device completes base Plate detects process.
Detailed description of the invention
Fig. 1 is a kind of ULED screen substrate detection/measuring device overall structure diagram of the present invention;
Fig. 2 is structure of the detecting device schematic diagram of the invention;
Fig. 3 is loading and unloading mouth structure schematic diagram of the invention;
Fig. 4 is loading and unloading mouth partial structure diagram of the invention;
Fig. 5 is material mouth side structure schematic view up and down of the invention;
Fig. 6 is carrier structure schematic diagram of the invention;
Fig. 7 is objective table superstructure plate schematic diagram of the invention;
Fig. 8 is objective table understructure plate schematic diagram of the invention;
Fig. 9 is the overall schematic with two-dimensional motion mechanism of pre- alignment device of the invention;
Figure 10 is the left view schematic diagram with two-dimensional motion mechanism of pre- alignment device of the invention;
Figure 11 is the overall schematic with four-dimensional movement mechanism of pre- alignment device of the invention;
Figure 12 is the enlarged diagram of the second auxiliary clamping device of pre- alignment device of the invention;
Figure 13 is the schematic front view of the four maintenance and operation function mechanism of band of pre- alignment device of the invention;
Figure 14 is the left view schematic diagram with four-dimensional movement mechanism of pre- alignment device of the invention;
Figure 15 is the schematic top plan view with four-dimensional movement mechanism of pre- alignment device of the invention;
Figure 16 is the buffer gear structural schematic diagram with limit sensors of pre- alignment device of the invention.
Specific embodiment
Refering to Figure 1, the present invention is about a kind of ULED screen substrate detection/measuring device, including signal processing list Position, detection device 100, pre- alignment device 200, manipulator 300 and about two material mouths 400 being mounted on lathe, detection dress Set 100, pre- alignment device 200, manipulator 300 and about two material mouths 400 connect with signal processing unit realize signal interaction, It is automatically performed screen substrate feeding, pre- contraposition, detection, blanking overall process;Upper and lower material mouth 400 includes bottom plate 410, is arranged in bottom plate On several at least two layers limited blocks 420, different size/shape substrate cartridge 430 and inductive pick-up 440, limit Block 420 according to substrate cartridge 430 size/shape it is small be stacked in upper principle greatly lower, formed multilayer can place different rulers The limit space of the substrate cartridge 430 of very little/shape, the substrate cartridge 430 of every kind of size/shape can only place one layer of limit wherein Inductive pick-up 440 is arranged in bit space, every layer of limit space and the nonoverlapping position of next layer of limit space.
As shown in Fig. 2, detection device 100 include equipment platform 110, electric cabinet 180, gantry support 120, detector 130, Detection platform 140 and backlighting arrangement 150;Detection platform 140 is arranged on equipment platform 110, is driven by driving assembly Detection platform 140 moves on equipment platform 110 along X/Y axis direction, and the driving assembly of detection platform 140 is an X-direction The linear motor of the linear motor of movement and the movement of a Y direction, it is flat that the linear motor stator electric 142 of X-direction is mounted on equipment Platform 110 along the x axis on, mover is mounted on 140 bottom of detection platform, and mover drives detection platform 140 back and forth to transport on stator It is dynamic;Y-axis linear motor stator electric 143 is mounted on detection platform 140 and goes up on two sides along the y axis, and mover drives detection platform 140 It is moved back and forth on stator;Gantry support 120 is erected at 110 top of equipment platform, installs detection on the crossbeam of gantry support 120 First 130, detector 130 is equipped with camera I installing port 131 and camera II installing port 132, and detector 130 is against detection platform 140, detector 130 is driven by driving device and is moved along X/Y axis direction;Detection platform 140 includes mounting base 141, loading Platform 160, standard film microscope carrier 170 and air extractor, mounting base 141 are equipped with a counterbore, and it is heavy that standard film microscope carrier 170 is fixed on this In hole, objective table 160 is mounted on mounting base 141, and the mounting base 141 of 160 lower section of objective table is equipped with a through-hole, through-hole ruler Very little to be less than 160 size of objective table, through-hole facilitates light transmission, detects convenient for backlight, and objective table 160 and standard film microscope carrier 170 are for examining Screen substrate is placed when survey, air extractor is connect with objective table 160 and standard scale microscope carrier 170, pumping absorption fixed screen when detection Curtain substrate;Backlighting arrangement 150 is arranged in 160 side of objective table, and objective table 160 is suitable for various different size/shapes Substrate can also place standard-sized substrate, and standard film microscope carrier 170 is for placing standard-sized substrate.
In some embodiments, the setting of limited block 420 in 430 diagonal two angle points of substrate cartridge or wantonly three angle points or Four angle points or any two sides or three sides or four sides, limited block 420 can be two layers or three layers or four layers.
In some embodiments, limited block 420 is equipped with fixed screw hole, is fixed on limited block 420 by bolt On bottom plate 410 or next layer of limited block 420.
In some embodiments, as in Figure 3-5, one is equipped in the middle part of 410 a side of bottom plate of upper and lower material mouth 400 to be convenient for The notch 411 of manipulator loading and unloading, the side equipped with notch 411 are flowing end;It is L-type detent shape, limit on the inside of limited block 420 Four corner locations of substrate cartridge 430 are arranged in position block 420, along 411 center line symmetrical setting of notch in two sides, every layer of limit Inductive pick-up 440 is nearby arranged in diagonal 420 inside of limited block in space, and inductive pick-up 440 is press-down type inductive pick-up, The switch of press-down type inductive pick-up protrudes from 420 bottom surface of this layer of limited block, switchs lower end connecting spring, press-down type induction sensing Device lower end is fixed on 410 bottom of bottom plate, in use, substrate cartridge 430 is put into the compatible one layer of limit space of size, base Board casket 430 depresses the switch for protruding from the press-down type inductive pick-up of 420 bottom surface of this layer of limited block, and spring is by compression triggering sense Induction signal is transferred to signal processing unit, and different layers generate different inductive signals and represent different 430 sizes of substrate cartridge/shapes Shape compares 430 size of substrate cartridge stored in signal processing unit according to different inductive signals and differentiates base referring to the table of comparisons Board size/shape.
In some embodiments, mounting rack 412 is equipped at the flowing end of bottom plate 410, mounting rack is equipped with for detecting Substrate cassette substrate detector 413 whether outstanding in substrate cartridge 430, cassette substrate detector 413 are located at lacking for bottom plate 411 top of mouth, 413 emission detection light of cassette substrate detector encounter the prominent feelings for stopping optical path of substrate in substrate cartridge 430 Condition sends signal to signal processing unit, prompts substrate in operator's substrate cartridge 430 prominent.
In some embodiments, 420 top edge inner side chamfering of limited block, convenient for substrate cartridge 430 along the oblique of chamfering Hill wash enters in limit space.
In some embodiments, detection device 100, pre- alignment device 200 and about two material mouths 400 are located at manipulator 300 surrounding four directions, manipulator 300 are driven by manipulator driving device, and manipulator driving device includes Z motor and rotation Motor, driving device are mounted on 300 bottom of manipulator;The carrying of one 360 degree of rotation manipulator completing substrate, is not required to multiple machines Tool hand, save the cost reduce the overall volume of equipment.
In some embodiments, signal processing unit is industrial computer or PLC controller, completes the whole each portion of equipment The signal interaction divided, control equipment automatization operation.
As shown in figs 6-8, objective table 160 include superstructure plate 161 and understructure plate 162, superstructure plate 161 and Understructure plate 162 is rigid transparent material, and superstructure plate 161 is bonded with understructure plate 162 using shadowless glue, upper layer knot Structure plate 161 includes at least one piece of adsorption plate 1611, and adsorption plate 1611 divides at least one adsorption zone 163, each adsorption zone setting At least one adsorption hole 164, adsorption hole 164 run through adsorption plate 1611, and adsorption hole 164 is divided with scheduled size and interval Cloth, side is provided with multiple sinking air drains 1621 to understructure plate 162 upward, and sinking air drain 1621 is corresponding with adsorption hole 164 and connects Logical, aspirating hole 166 is arranged in 162 side of understructure plate, and aspirating hole 166 is connected with sinking air drain 1621, understructure plate 162 Side setting aspirating hole 166 is connect with the air extractor in detection platform 140.
Superstructure plate 1 selects two block sizes and equiform adsorption plate 1611 to combine, and two pieces of adsorption plates 1611 are symmetrical Setting, centre there are feeding operating space, are divided into multiple adsorption zones 163, each dotted line on every piece of adsorption plate to feeding manipulator Frame is an adsorption zone 163, and each adsorption zone is provided with multiple round or rectangular adsorption holes 164, adsorption hole 164 and superstructure plate 161 are vertically arranged, multiple 164 rectangular array of adsorption hole settings, it should be noted that the quantity and adsorption hole of adsorption zone 163 164 quantity is configured according to the full-size substrate to backlight testing product, to adapt to the ULED screen of different size/shapes The detection of curtain substrate.The quantity of adsorption zone 163 is three, and adsorption hole 164 is distributed according to different size substrates from inside to outside, is divided into Innermost layer adsorption hole, secondary internal layer adsorption hole and outermost layer adsorption hole, each adsorption zone are divided into the first suction according to the position of adsorption hole Attached area, the second adsorption zone and third adsorption zone, the first adsorption zone are made of innermost layer adsorption hole, and the second adsorption zone includes innermost layer Adsorption hole and secondary internal layer adsorption hole, third adsorption zone include whole adsorption holes, and understructure plate 162 is a monolith orientation or circle Shape slab, understructure plate 162 towards upside be provided with the corresponding sinking air drain 1621 of adsorption hole 164, to make adsorption hole 164 It is interconnected with sinking air drain 1621.The side of sinking air drain 1621 is vertical elevation, and bottom surface is horizontal plane, and bottom surface is also thrown Light grinding process reduces Problem of Shading to a greater extent in this way, is provided with installation on the position at four angles of understructure plate 162 Hole 165, the understructure plate that mounting hole 165 passes through, passing through mounting hole 165 by screw can be by objective table fixed test platform On mounting base 141 on 140,162 side of understructure plate is provided with aspirating hole 166, aspirating hole 166 and 1621 phase of sinking air drain Connection, two pieces of adsorption plates 1611 and understructure plate 162 are all made of rigid transparent material, preferably avoid Problem of Shading.
Objective table working principle: lower to signal to detection device after signal processing identified in units goes out the size/shape of substrate 100, the air extractor pair adsorption zone 163 compatible with the substrate size/shape to be measured for controlling detection platform 140 is taken out The screen substrate being placed on the adsorption zone 163 is fixed in gas, absorption, and the different sizes gone out according to signal processing identified in units/ The information substrate of shape, control air extractor are evacuated different adsorption zones 163, realize and inhale to the substrate of different size/shapes Attached fixation, convenient for detection;And it is vertical elevation that adsorption hole 164, which is round and sinking air drain side, bottom surface is horizontal plane, bottom Face has carried out polishing treatment, these special constructions design, maximization reduces Problem of Shading, backlight when having better solved detection Homogeneity question.
As shown in figures 9 to 16, pre- alignment device 200 includes lathe, is bolted the first installation being arranged on lathe Moving load part 202, positioning and clamping mechanism, auxiliary clamping machine in the first mounting base 201 is arranged in the 201, second mounting base 205 of seat The two-dimensional motion mechanism 206 in the second mounting base 205 is arranged in structure and planer-type detection agency;Positioning and clamping mechanism, additional lock Hold mechanism and two-dimensional motion mechanism 206 be electrically connected with signal processing unit, by signal processing unit control positioning and clamping mechanism, It assists clamping device and the work of two-dimensional motion mechanism 206 or stops;
Planer-type detection agency includes the detector mounting rack 211 being mounted by means of bolts in the first mounting base 201 And it is fixedly mounted on the detector 213 on detector mounting rack 211, detector 213 is located at the top of moving load part 202, detection The signal output end of device 213 is connected with the signal input part of signal processing unit;
First through hole is provided in first mounting base 201, moving load part 202 includes the support of support base 221, the second through-hole of band 223,4 plate 222, sensor installation seat substrate limited block 224 and 12 piece support columns 225;Support base 221, which is bolted, to be set The periphery of first through hole is set in the first mounting base 201 and is located at, support plate 222, which is bolted, to be arranged in support base 221 Top, sensor installation seat 223 and substrate limited block 224 be bolted the top that support plate 222 is arranged in, and senses It is bolted in device mounting base 223 and first sensor 226 is installed, signal output end and the PLC control of first sensor 226 The signal input part of device processed connects, and 12 support columns 225 are vertically arranged, support column and the first mounting base 201 is integrally formed and position In the periphery of support plate 222;
This section please refers to Figure 11, Figure 12 and Figure 15, and direction please refers to Figure 15, and positioning and clamping mechanism and auxiliary clamping device are equal Positioned at the periphery of support column 225, positioning and clamping mechanism includes the first positioning and clamping mechanism 231, the second positioning and clamping mechanism 232, Assisting clamping device includes the first auxiliary clamping device 241 and the second auxiliary clamping device 242;First positioning and clamping mechanism 231 Including the first cylinder 271, the pedestal of the first cylinder 271 is mounted by means of bolts in the first mounting base 201 and its front end Inclined downward to the left, close to the upper right corner of the first mounting base 201, the top of the first cylinder 271 is provided with to be slided therewith for end thereafter The sliding block 210 of dynamic cooperation, the top of sliding block 210 and Y type grip slipper 237 are fixed, and the front end of sliding block 210 passes through link block and the The piston rod part of one cylinder 271 connects, and the piston rod band movable slider 210 of the first cylinder 271 does stretching motion, 210 band of sliding block Dynamic Y type grip slipper 33 does stretching motion, 237 fronts of Y type grip slipper are V-shaped and two V-type items respectively with the first mounting base 201 Upper side edge is parallel with right edge, and the front end of two V-type items is provided with protruding block, is fixedly installed respectively on two protruding blocks There are the first positioning clamping block 234 and the second positioning clamping block 235, the first positioning clamping block 234 and the second positioning clamping block 235 divide Not Yong Yu clamping square substrate adjacent both sides;Second positioning and clamping mechanism 232 is driven by the second cylinder 272, the second cylinder 272 pedestal is horizontally disposed and is mounted by means of bolts in the first mounting base 201, the rear end of the pedestal of the second cylinder 272 Portion is close to the right edge of the first mounting base 201, and the rectangular grip slipper 238 of the second positioning and clamping mechanism 232 is square and rectangular folder It holds and is provided with third positioning clamping block 236 on seat 238, the second positioning clamping block 235 and third positioning clamping block 236 are positioned at rectangular Substrate is ipsilateral, one side of common clamping square substrate or for clamping circular substrate;First auxiliary clamping device 241 and second Assist 242 structure of clamping device identical, the first auxiliary clamping device 241 includes third cylinder 281, sliding block 210, auxiliary grip slipper 233, buffer gear and the first auxiliary grip block 243, the first auxiliary grip block 243 are set to pair of the first positioning clamping block 234 Face, the straight line that the motion profile and the second positioning clamping block 235, third positioning clamping block 236 of the first auxiliary grip block 243 coexist In parallel;Second auxiliary clamping device 242 includes the 4th cylinder 282, sliding block 210, auxiliary grip slipper 233, buffer gear and second Assist grip block 244, sliding block 210 is mounted on the 4th cylinder 282 and is slidably matched therewith, the piston rod of the 4th cylinder 282 and The connection of sliding block 210 simultaneously does straight reciprocating motion in the 4th cylinder 282 with movable slider 210, and auxiliary grip slipper 233 is fixed at cunning On block 210, buffer gear includes guide rail 284, rear spring seat 285, limit spacing block 286, spring 287 and preceding spring base 288, is led The top of auxiliary grip slipper 233 is arranged in rail 284, and rear spring seat 285 is fixed at the rear end of guide rail 284, guide rail 284 Front end by limit spacing block 286 and auxiliary grip slipper 233 front end fix, one end of spring 287 and rear spring seat 285 is fixed, and before the other end of spring 287 is fixed in spring base 288, the bottom of preceding spring base 288 is fixedly installed cunning Block a and sliding block b, sliding block a and sliding block b are arranged on guide rail 284 and with guide rail 284 respectively and are slidably matched, the second additional lock Hold the top of spring base 288 before block 244 is fixed at;
Second mounting base 205 is located at the underface of the first mounting base 201, two-dimensional motion mechanism 206 include working arm 261, Drive working arm 261 in the Z-direction Z axis movement mechanism moved and the horizontal revolving motion machine of the drive rotation of working arm 261 Structure;Z axis movement mechanism is driven using Z-direction cylinder 265, and Z-direction cylinder 265, which is bolted, to be arranged in the second mounting base 205, The piston rod of Z-direction cylinder 265 is arranged vertically upwards and the top of piston rod is connected with horizontal revolving motion mechanism, by Z-direction cylinder 265 drive horizontal revolving motion mechanisms move in the Z-axis direction;Horizontal revolving motion mechanism includes θ motor 264, θ driving tooth Wheel, the power intake of working arm 261 is provided with θ driven gear, θ driving gear and the engagement of θ driven gear, by θ driving gear θ driven gear and working arm 261 is driven to do horizontal revolving motion;261 upper end of working arm sequentially passes through first through hole and second and leads to Hole and top is provided with sucker 209, sucker 209 is connected with adsorbing mechanism, by PLC controller control sucker 209 work or Stop;The ULED panel substrate size reference table of comparisons is stored in PLC controller, for identification the size/shape of ULED panel substrate, The pre- contraposition program of setting at least two in PLC controller, the pre- contraposition of the ULED panel substrate for executing different size/shapes, Corresponding pre- contraposition program is chosen according to the size/shape of ULED panel substrate.
By above-mentioned setting, structure novel, design rationally, by positioning and clamping mechanism and the setting of auxiliary clamping device the In one mounting base 201, while two-dimensional motion mechanism 206 being arranged in the second mounting base 205, compact-sized, reasonable employment is set Standby space;It is provided with buffer gear on auxiliary clamping device, spring 287 plays buffer function when substrate aligns in advance, effectively protects Shield substrate is not extruded destruction;The grip block of two positioning and clamping mechanisms cooperates the grip block square shaped of two auxiliary clamping devices Substrate, which carries out holding-and-aligning, can be completed the pre- contraposition work of square substrate;Two-dimensional motion mechanism 206 cooperates the second positioning clamping The pre- contraposition work of circular substrate can be completed in block 235, the auxiliary grip block 244 of third positioning clamping block 236, second and detector Make;Circle and square substrate to various sizes can be aligned in advance in the pre- alignment device, reduce equipment usage quantity, Reduce investment, the production cost of equipment;Simultaneously because the pre- alignment device can be compatible with the round and rectangular of various sizes simultaneously Substrate, equipment that no replacement is required when carrying out the substrate of pre- contraposition different sizes and shapes, effectively improves the work effect that substrate aligns in advance Rate.
In some embodiments, the rounded perhaps rectangular auxiliary grip block of positioning clamping block is rounded or rectangular;It is slow Limit sensors are provided on punch mechanism;As shown in figure 16, at this point, sliding block 210 and auxiliary grip slipper 233 pass through connecting plate 247 It is fixed, drive the movement of connecting plate 247 to drive buffer gear to move by sliding block 210;Limit sensors include 245 He of inductor L-type incudes baffle 246, and inductor 245 is fixed at the bottom of auxiliary grip slipper 233 by screw, incudes the one of baffle 246 It before side is fixed on by screw on spring base 288, answers baffle 246 to do horizontal reciprocating movement by preceding 288 dynamic of spring base, incudes The another side of baffle 246 and inductor 245 match, when induction baffle 246 moves to inductor under the drive of preceding spring base 288 When 245 induction range, for inductor 245 to signal processing unity emitter signal, it is right that signal processing unit controls the inductor 245 The cylinder answered stops working;When spring 287 resets, preceding 288 dynamic of spring base answers baffle 246 to leave the sense of inductor 245 Range is answered, for inductor 245 to signal processing unity emitter signal, signal processing unit controls the corresponding cylinder of inductor 245 It resets;The surface of above-mentioned grip block all has elasticity, and substrate is destroyed when it being avoided to be in contact with substrate.By adding limit sensing Device is not required to set multiple cylinder/motor ranges according to substrate size, simplifies contraposition process, while making to align more accurate.
In some embodiments, the X of X-direction is provided in the second mounting base 205 to sliding rail, X is arranged on sliding rail There is X-axis movement mechanism, X-axis movement mechanism includes X to coaster, X to motor 262, drives X to coaster in X-axis from X to motor 262 Direction movement;X is provided with Y-direction sliding rail on coaster, and Y-axis movement mechanism is provided on Y-direction sliding rail;Y-axis movement mechanism includes peace Y-direction coaster and Y-direction motor 263 on Y-direction sliding rail, Y-direction motor 263 drive Y-direction coaster to move in Y direction;Z axis is transported Motivation structure is mounted by means of bolts on Y-direction coaster, two-dimensional motion mechanism 206, X-axis movement mechanism and Y-axis movement mechanism group At four-dimensional movement mechanism;Two-dimensional motion mechanism 206 is added into X-axis movement mechanism and Y-axis movement mechanism forms tetra- maintenance and operation of X, Y, Z, θ Motivation structure, i.e. working arm 261 can drive sucker 209 and substrate to move or do horizontal rotation fortune in X, Y, Z axis direction respectively It is dynamic;The pre- contraposition work of circular substrate can be completed by the four-dimensional movement mechanism tie detector 213, the circular substrate is pre- right The auxiliary that position work is not required to clamping device can be completed.
In some embodiments, two sensor mounts of installation are bolted in the first mounting base 201 212, it is bolted installation second sensor 214, two second sensors respectively on two sensor mounts 212 The adjacent both sides edge of 214 difference detection senses ULED panel substrates, the signal output ends of two second sensors 214 is and signal Handle the signal input part connection of unit;Two second sensors 214 and detector 213 cooperate four-dimensional movement mechanism can be completed The pre- contraposition work of square substrate.
In some embodiments, support column 225 is vertically arranged with 12, and the bottom and first of every support column 225 is pacified The top of dress seat 201 is fixed, and the top of every support column 225 is raised, and every 3 support columns 225 form one group and are arranged in L Type, four groups of support columns 225 are separately positioned on 222 4 jiaos of support plate of periphery;First positioning clamping block 234, the second positioning clamping Block 235, third positioning clamping block 236, first assist grip block 243 and the second auxiliary grip block 244 size is identical, height phase Deng the bottom for the above-mentioned grip block that the top of support column 225 is higher than and the top for being lower than above-mentioned grip block;By support column 225 Top is set as convex shape, is further reduced the contact area of moving load part 202 and substrate, further reduced substrate and is worn Probability;The top of support column 225 is higher than the bottom of grip block and is lower than the top of grip block, and grip block is effectively ensured to substrate Normally clamped.
In some embodiments, first through hole and the second through-hole are all larger than the outer diameter of working arm 261, first through hole and The projection of two through-holes in the vertical direction is overlapped;First through hole and the setting of the size shape of the second through-hole are identical, and are located at same Vertical direction avoids space waste, while the movement for being set as working arm 261 of two through hole provides rationally effective sky Between.
In some embodiments, there are two the settings of support base 221 and its section is L-shaped, two L-type support bases 221 Central symmetry about the first mounting base 201;Because working arm 261 can generate air-flow during exercise, which is set Setting makes the movement edge of working arm 261 have enough air flow spaces, guarantees working arm 261 at work not by air-flow It influences, enhances stability when equipment operation, while extending service life of equipment.
Pre- alignment device structure novel designs reasonable, long service life, and positioning and clamping mechanism and auxiliary clamping device are set It sets in the first mounting base, while two-dimensional motion mechanism 206 or four-dimensional movement mechanism being arranged in the second mounting base, structure Compact, the reasonable employment device space;It is provided with buffer gear on auxiliary clamping device, spring plays buffering when substrate aligns in advance Effect, effective protection substrate are not extruded destruction;Pre- alignment device can be compatible with the circle and square substrate of various sizes, reduce Equipment usage quantity reduces investment, the production cost of equipment;The pre- alignment device can be compatible with the circle of various sizes simultaneously And square substrate, equipment that no replacement is required when carrying out the substrate of pre- contraposition different sizes and shapes effectively improve what substrate aligned in advance Working efficiency.
A kind of application method of ULED screen substrate detection/measuring device, includes the following steps,
(a) limited block 420 that substrate cartridge 430 is placed on upper and lower material mouth 400 is formed with 430 ruler of substrate cartridge In the compatible one layer of limit space of very little/shape, triggers this layer of inductive pick-up switch generation inductive signal and be transmitted at signal Reason identified in units goes out the size/shape of substrate cartridge 430;
(b) signal processing unit controls manipulator 300 for the board carrying to be measured in substrate cartridge 430 to pre- alignment device On 200;
(c) signal processing unit controls pre- alignment device 200 and completes pre- contraposition to substrate to be measured;
(d) substrate for completing to align in advance is transported to by signal processing unit control manipulator 300 from pre- alignment device 200 On the objective table 160 of the detection platform 140 of detection device 100 adsorption zone 163 compatible with the size/shape of substrate to be measured or On standard film microscope carrier 170, the fixed substrate to be measured of air extractor absorption;
(e) signal processing unit control detection platform 140 or detector 130 move, and detect to substrate to be measured;
(f) board carrying for completing measurement is returned the substrate card of material mouth 400 up and down by signal processing unit control manipulator 300 In casket 430.
The working principle of detection device: the limited block 420 of upper and lower material mouth 400 is small according to the size/shape of substrate cartridge 430 It is stacked in upper principle greatly lower, the limit space of substrate cartridge 430 of different size/shapes can be placed by forming multilayer, often The substrate cartridge 430 of kind size/shape can only place one layer of limit space wherein, and every layer of limit space is empty with next layer of limit Between nonoverlapping position inductive pick-up 440 is set, the substrate cartridge 430 of different size/shapes places one layer of limit wherein Space, the inductive pick-up 440 for triggering this layer limit generate inductive signal and are transferred to signal processing unit, signal processing unit root The size of substrate cartridge 430 is identified according to different inductive signals, storage differentiates substrate size/shape in signal processing unit 430 size of substrate cartridge is referring to the table of comparisons, by identifying that the size of substrate cartridge 430 obtains the size/shape of substrate;Inspection About two material mouths 400 are arranged in measurement equipment, and alternately loading and unloading improve loading and unloading efficiency, save the loading and unloading time, each loading and unloading Mouthfuls 400 all both can feeding or blanking, can also non-defective unit with a feeding, another blanking or a mouth feeding, after detection It is divided to two mouth blankings with defective products, sorting function is provided, operator can be arranged according to demand;Signal processing unit controls manipulator 300 driving device drives manipulator 300 to take out substrate to be measured from the substrate cartridge 430 of upper and lower material mouth 400, and it is pre- right to be carried to It is aligned in advance on the device 200 of position, signal processing unit chooses corresponding pre- contraposition according to the substrate size/shape identified Program thens follow the steps 1 or step 2 if feeding is square substrate;If feeding is circular substrate, 3 or step are thened follow the steps Rapid 4;
1, substrate is placed on support column 225 by manipulator;Setting first sensor 226 starts from detection to substrate to base Plate is put completely needs 0.1 second on support column 225, then 226 detection of first sensor to substrate delay backward signal processing in 0.1 second Unity emitter detection to substrate signal, according to substrate after the signal that signal processing unit recipient to first sensor 226 emits Size successively drives the first positioning and clamping mechanism 231 and the by solenoid valve control the first cylinder 271 and the second cylinder 272 respectively Two positioning and clamping mechanisms 232 move to stop motion behind predetermined position;Then signal processing unit passes through solenoid valve control the 4th Cylinder 282 drives the second auxiliary clamping device 242 close to substrate, the second additional lock on the second auxiliary clamping device 242 When holding power that block 244 is subject to and being more than a certain setting value, limit sensors work in the second auxiliary grip block 244, limit sensing Device passes through solenoid valve control to signal processing unity emitter signal after the signal that signal processing unit recipient to limit sensors issues 282 stop motion of the 4th cylinder is made, the angle adjustment work of substrate is completed at this time, and signal processing unit passes through solenoid valve control again Third cylinder 281 drives the first auxiliary clamping device 241 close to substrate, when first on the first auxiliary clamping device 241 is auxiliary When the power for helping grip block 243 to be subject to is more than a certain setting value, the limit sensors in the first auxiliary grip block 243 work, limit Sensor passes through electromagnetism after the signal that signal processing unit recipient to limit sensors issues to signal processing unity emitter signal Valve controls 281 stop motion of third cylinder, and contraposition work is completed in advance at this time.
2, substrate is placed on support column 225 by manipulator, and 226 detection of first sensor to substrate is delayed 0.1 second backward For the detection of signal processing unity emitter to the signal of substrate, signal processing unit receives after the signal control sucker 209 for substrate It is sucked, while controlling the work of Z-direction cylinder 265, Z-direction cylinder 265 drives working arm 261 and sucker 209 and substrate to move upwards Stop motion when to predetermined position;Then the control of signal processing unit successively controls X to 263 work of motor 262 and Y-direction motor respectively Make, X drives working arm 261 and sucker 209 and substrate to move horizontally to motor 262, when substrate motion to one second biography When in the induction range of sensor 214, second sensor 214 is received to signal processing unity emitter signal, signal processing unit It controls X after the signal to stop working to motor 262, synchronous signal processing unit control 213 horizontal movement of detector can extremely be examined Stop motion when measuring basic edge, detector 213 measures one group of offset data of substrate and saves at this time, then Y-direction motor 263 drive working arms 261 and sucker 209 and substrate move horizontally, when substrate motion to another second sensor 214 When in induction range, second sensor 214 is controlled after receiving the signal to signal processing unity emitter signal, signal processing unit Y-direction motor 263 processed stops working, and synchronous signal processing unit control detector 213, which is moved horizontally to, is able to detect that substrate side Stop motion when edge, detector 213 measures second group of offset data of substrate at this time, and the comprehensive two groups of offsets of detector 213 obtain The signal is simultaneously transmitted to signal processing unit by the offset and deviation angle of substrate;After signal processing unit receives the signal It controls X according to the offset of substrate and deviation angle to work to motor 262, Y-direction motor 263, Z-direction cylinder 265, θ motor 264, X To the offset of motor 262, the movement adjustment substrate of Y-direction motor 263, the movement of Z-direction cylinder 265 returns to substrate on support column 225, The deviation angle of the work adjustment substrate of θ motor 264, returns on support column 225 after the completion of substrate adjustment, it is complete to align process in advance At.
3, substrate is placed on support column 225 by manipulator, and 226 detection of first sensor to substrate is delayed 0.1 second backward The detection of signal processing unity emitter to substrate signal, after the signal that signal processing unit recipient to first sensor 226 emits, Substrate is sucked PLC control sucker 209, and synchronous signal handles unit control Z-direction cylinder 265 and works, and 265 band of Z-direction cylinder is started building Make arm 261 and sucker 209 and stop motion when substrate moves up to predetermined position;Then signal processing unit control detection Device 213 be moved horizontally to can detection to substrate edges when stopping, the θ motor 264 of signal processing unit control at this time drives work Arm 261 and sucker 209 and substrate do the movement to rotate a circle, and θ motor 65 stops working after rotating a circle, and detector 213 is surveyed Substrate offset and the offset signal is transmitted to signal processing unit;Signal processing unit is controlled after receiving the signal Sucker 209 processed stops working and is determined according to the offset of substrate by the first positioning and clamping mechanism of solenoid valve control 231 and second Position clamping device 232 goes to stop motion behind predetermined position, and signal processing unit passes through the auxiliary clamping of solenoid valve control second again Mechanism 242 is close to substrate, when the power that the second auxiliary grip block 244 on the 4th cylinder 282 is subject to is more than a certain setting value, Limit sensors work in second auxiliary grip block 244, limit sensors are to signal processing unity emitter signal, signal processing 242 stop motion of clamping device is assisted by solenoid valve control the secondth after the signal that unit recipient is issued to limit sensors, Substrate is sucked the sucker 209 of signal processing unit control at this time, and then signal processing unit control Z-direction cylinder 265 drives work Arm 261 and sucker 209 and substrate reset, and are placed in substrate on support column 225, arrive at this point, contraposition process is completed in advance.
4, substrate is placed on support column 225 by manipulator, and 226 detection of first sensor to substrate is delayed 0.1 second backward The detection of signal processing unity emitter to substrate signal, signal processing unit receive first sensor 226 transmitting signal after, Substrate is sucked signal processing unit control sucker 209, and synchronous signal handles unit control Z-direction cylinder 265 and works, Z-direction cylinder Stop motion when 265 drive working arms 261 and sucker 209 and substrate move up to predetermined position;Then signal processing list Position controls X again and works to motor 262, and X drives working arm 261 and sucker 209 and substrate to move horizontally to motor 262, when When substrate edges are moved in the induction range of detector 213, detector 213 is believed to signal of signal processing unity emitter Number processing unit receive detector 213 transmitting signal after control X stop working to motor 262, synchronous signal handle unit Control θ motor 264 drives working arm 261 and sucker 209 and substrate to do the movement to rotate a circle, θ motor 264 after rotating a circle It stops working, which is simultaneously transmitted to signal processing unit by the substrate offset that detector 213 measures;Signal processing Unit is started building according to the offset of substrate control X to motor 262, Y-direction motor 263,265 band of Z-direction cylinder after receiving the signal Make arm 261 and sucker 209 and substrate moves in X, Y, Z axis, up to position of the substrate motion to after correcting, at last signal Reason unit control sucker 209, X stop working to motor 262, Y-direction motor 263 and Z-direction cylinder 265, at this point, aligning process in advance It completes.
Signal processing unit controls manipulator 300 for the objective table of the board carrying of pre- contraposition completion to detection platform 140 160 or standard film microscope carrier 170 on, what it is such as feeding is standard-sized substrate, then can be placed in objective table 160 or standard film microscope carrier 170, if the substrate of feeding is not standard size, then it is placed on objective table 160;Signal processing unit controls detection platform 140 On air extractor pair adsorption zone compatible with the substrate size/shape to be measured be evacuated, absorption, which is fixed, is placed on this Screen substrate to be measured on adsorption zone, after fixing substrate to be measured, signal processing unit controls the driving assembly of detection platform 140 It drives detection platform 140 to be X/Y to movement, makes all detections of head 130 after testing of monolith substrate, can also be detector 130 It is moved simultaneously with detection platform 140, detection platform 140 is X to movement, and detector does Y-direction movement, while motion detection efficiency is more Height, motion mode can select suitable mode according to the size shape of substrate;After detection, the control of signal processing unit is mechanical The substrate that hand 300 detects completion completes the detection of one piece of substrate from being carried in meeting substrate cartridge 430 on objective table 160.
Embodiment of above be only preferred embodiments of the present invention will be described, not to the scope of the present invention into Row limits, and without departing from the spirit of the design of the present invention, this field ordinary engineering and technical personnel is to technical side of the invention The various changes and improvements that case is made, should fall within the scope of protection determined by the claims of the present invention.

Claims (10)

1. a kind of ULED screen substrate detection/measuring device, it is characterised in that: including signal processing unit, be mounted on lathe Detection device (100), pre- alignment device (200), manipulator (300) and about two material mouths (400), the detection device (100), pre- alignment device (200), manipulator (300) and about two material mouths (400) connect realization letter with signal processing unit Number interaction is automatically performed screen substrate feeding, pre- contraposition, detection, blanking overall process;The material mouth (400) up and down includes bottom plate (410), the substrate cartridge (430) of several at least two layers limited blocks (420) on bottom plate, different size/shapes is set And inductive pick-up (440), the limited block (420) according to substrate cartridge (430) size/shape it is small lower greatly in upper principle It is stacked, the limit space of substrate cartridge (430) of different size/shapes can be placed by forming multilayer, every kind of size/shape Substrate cartridge (430) can only place one layer of limit space wherein, and every layer of limit space and next layer of limit space are nonoverlapping Inductive pick-up (440) are arranged in position.
2. ULED screen substrate detection/measuring device according to claim 1, it is characterised in that: the limited block (420) It is arranged in diagonal two angle points of substrate cartridge (430) or wantonly three angle points or four angle points or any two sides or three sides Or four sides.
3. ULED screen substrate detection/measuring device according to claim 1, it is characterised in that: the material mouth up and down (400) it is equipped with a notch (411) for being convenient for manipulator loading and unloading in the middle part of bottom plate (410) a side, is equipped with the one of notch (411) Side is flowing end;It is L-type detent on the inside of the limited block (420), four in substrate cartridge (430) are arranged in limited block (420) Nearby inductive pick-up (440) are arranged in corner location, the diagonal limited block of every layer of limit space (420) inside, and the induction passes Sensor (440) is press-down type inductive pick-up, and the switch of press-down type inductive pick-up protrudes from this layer of limited block (420) bottom surface.
4. ULED screen substrate detection/measuring device according to claim 1 or 3, it is characterised in that: the bottom plate (410) mounting rack (412) are equipped at flowing end, mounting rack is equipped with for whether detecting the substrate in substrate cartridge (430) Cassette substrate detector (413) outstanding, cassette substrate detector (413) are located above the notch (411) of bottom plate.
5. ULED screen substrate detection/measuring device according to claim 1 or 2 or 3, it is characterised in that: the limit Block (420) top edge inner side chamfering slides into limit space convenient for substrate cartridge (430) along the slope of chamfering.
6. ULED screen substrate detection/measuring device according to claim 1, it is characterised in that: the detection device (100), pre- alignment device (200) and about two material mouths (400) are located at manipulator (300) surrounding four direction, the machinery Hand (300) is driven by manipulator driving device, and manipulator driving device includes Z motor and rotating electric machine.
7. ULED screen substrate detection/measuring device according to claim 1, it is characterised in that: the signal processing list Position is industrial computer or PLC controller.
8. ULED screen substrate detection/measuring device according to claim 1, it is characterised in that: the detection device It (100) include equipment platform (110), gantry support (120), detector (130), detection platform (140), backlighting arrangement (150) and electric cabinet (180);The detection platform (140) is arranged on equipment platform (110), is driven and is examined by driving assembly It surveys platform (140) to move on equipment platform (110) along X/Y axis direction, the gantry support (120) is erected at equipment platform (110) above, detector (130) are installed on the crossbeam of gantry support (120), the detector (130) is installed equipped with camera I Mouth (131) and camera II installing port (132), detector (130) are opposite detection platform (140);The detection platform (140) includes Mounting base (141), objective table (160), standard film microscope carrier (170) and air extractor, the mounting base (141) are equipped with one Counterbore, the standard film microscope carrier (170) are fixed in the counterbore, and the objective table (160) is mounted on mounting base (141), Mounting base (141) below objective table (160) is equipped with a through-hole, and clear size of opening is less than objective table (160) size;The loading Platform (160) and standard film microscope carrier (170) are for placing screen substrate, the air extractor and objective table (160) and mark when detecting The connection of quasi- table microscope carrier (170), pumping absorption fixed mask substrate when detection;The backlighting arrangement (150) is arranged in loading Platform (160) side.
9. ULED screen substrate detection/measuring device according to claim 8, it is characterised in that: the objective table (160) Including superstructure plate (161) and understructure plate (162), the superstructure plate (161) and understructure plate (162) are Bright hard material, the superstructure plate (161) include that at least one piece of adsorption plate (1611), adsorption plate (1611) is divided at least one At least one adsorption hole (164) is arranged in adsorption zone (163), each adsorption zone, and the adsorption hole (164) runs through the adsorption plate (1611), the adsorption hole (164) is distributed with scheduled size and interval, the understructure plate (162) side upward Multiple sinking air drains (1621) are provided with, the sinking air drain (1621) is corresponding with the adsorption hole (164) and is connected to, the lower layer Aspirating hole (166) are arranged in structural slab (162) side, and the aspirating hole (166) is connected with the sinking air drain (1621), described Understructure plate (162) side setting aspirating hole (166) is connect with the air extractor on detection platform (140).
10. a kind of application method of ULED screen substrate detection/measuring device, it is characterised in that: include the following steps,
(a) by substrate cartridge (430) be placed on up and down material mouth (400) limited block (420) formed with the substrate cartridge (430) In the compatible one layer of limit space of size/shape, triggers this layer of inductive pick-up switch generation inductive signal and be transmitted to signal Processing identified in units goes out the size/shape of substrate cartridge (430);
(b) signal processing unit controls manipulator (300) for the board carrying to be measured in substrate cartridge (430) to pre- alignment device (200) on;
(c) signal processing unit controls pre- alignment device (200) and is aligned in advance to substrate to be measured;
(d) substrate for completing to align in advance is transported to by signal processing unit control manipulator (300) from pre- alignment device (200) Objective table (160) adsorption zone compatible with the size/shape of substrate to be measured of the detection platform (140) of detection device (100) (163) on or on standard film microscope carrier (170), the fixed substrate to be measured of air extractor absorption;
(e) signal processing unit control detection platform (140) or/and detector (130) movement, detect substrate to be measured;
(f) board carrying for completing measurement is returned the substrate card of material mouth (400) up and down by signal processing unit control manipulator (300) In casket (430).
CN201910635363.5A 2019-07-15 2019-07-15 A kind of ULED screen substrate detection/measuring device and its application method Pending CN110420864A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110906980A (en) * 2019-11-14 2020-03-24 深圳市华星光电半导体显示技术有限公司 Detection system and detection method
CN111735484A (en) * 2020-07-14 2020-10-02 苏州鼎纳自动化技术有限公司 Cross measuring mechanism
CN112122176A (en) * 2020-09-29 2020-12-25 苏州精濑光电有限公司 Automatic detection method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110906980A (en) * 2019-11-14 2020-03-24 深圳市华星光电半导体显示技术有限公司 Detection system and detection method
CN110906980B (en) * 2019-11-14 2021-10-08 深圳市华星光电半导体显示技术有限公司 Detection system and detection method
CN111735484A (en) * 2020-07-14 2020-10-02 苏州鼎纳自动化技术有限公司 Cross measuring mechanism
CN112122176A (en) * 2020-09-29 2020-12-25 苏州精濑光电有限公司 Automatic detection method

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