CN205011833U - Clamping device of vacuum sputter coating substrate - Google Patents
Clamping device of vacuum sputter coating substrate Download PDFInfo
- Publication number
- CN205011833U CN205011833U CN201520668550.0U CN201520668550U CN205011833U CN 205011833 U CN205011833 U CN 205011833U CN 201520668550 U CN201520668550 U CN 201520668550U CN 205011833 U CN205011833 U CN 205011833U
- Authority
- CN
- China
- Prior art keywords
- sided
- elastic card
- crossbeam
- substrate
- elasticity card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 48
- 238000004544 sputter deposition Methods 0.000 title claims abstract description 15
- 239000011248 coating agent Substances 0.000 claims abstract description 17
- 238000000576 coating method Methods 0.000 claims abstract description 17
- 239000000047 product Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000006227 byproduct Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model provides a clamping device of vacuum sputter coating substrate, be by: erecting roof beam one side and setting up two piece at least crossbeams, the crossbeam sets up to cross, and cross crossbeam both sides set up the curb girder respectively, the plane symmetry set up two two -sided elasticity cards of going up under middle part transverse beam symmetry set up two two -sided elasticity card, top crossbeams down, and two -sided elasticity card down and two -sided going up set up two -sided substrate between the elasticity card, set up a set of two -sided elasticity card and the two -sided elasticity card down gone up with middle part transverse beam below the crossbeam of top, the curb girder below symmetry of top crossbeam sets up on the curb girder of elasticity card on two single faces, middle part crossbeam the plane symmetry and sets up elasticity card under two single faces, sets up the single face substrate on the single face under elasticity card and the single face between the elasticity card, single face or one set of clamping of two -sided coating film sharing are equipped, and the commonality is strong, change the product variety, convenient and fast, the problem of diffraction is solved, can produce the low resistance expensive goods, simple structure, the cost is cheap, the permanent use.
Description
Technical field
The utility model relates to electronic product ITO plated film processing production equipment, especially a kind of clamping device of vacuum sputtering coating substrate.
Background technology
Existing ITO vacuum sputtering coating substrate clamping equipment, various informative, have inserted, have open.Open, structure is simple, and clamping substrate is convenient, highly versatile, low cost, but coated product quality is influenced, can not production high-quality product; Inserted, complex structure, clamping substrate is slightly difficult, and the matter clamping substrate convenient amount of product is guaranteed, but poor universality, often kind of product corresponding to a set of, will involve great expense; No matter inserted or open, do not accomplish the versatility of one side and double-sided coating at present, all need two suits to clamp standby; In view of the foregoing, it is inserted that ITO vacuum sputtering coating substrate clamping is equipped, complex structure, clamping substrate is slightly difficult, one side and double-sided coating need two suits to clamp standby, need to improve inserted vacuum sputtering coating substrate clamping equipment, now invent a kind of clamping device of vacuum sputtering coating substrate.
Utility model content
The purpose of this utility model is to overcome the inserted of existing ITO vacuum sputtering coating substrate clamping equipment, complex structure, clamping substrate is slightly difficult, one side and double-sided coating need two suits to clamp standby, need to improve inserted vacuum sputtering coating substrate clamping equipment, pass through appropriate design, a kind of clamping device of vacuum sputtering coating substrate is provided, the crossbeam of particular design is fixed on vertical beam by connection piece, spring chuck is connected by screw on crossbeam, one side product or two-sided product, be free-handly fixed on spring chuck; One side and two-sided product, clamping equipment is compatible, and the product of different size, as long as moving beam, and retightens, and just can use; Suitable spacing between the catch that crossbeam is upper and lower and substrate, can prevent diffraction, and the efficiency of production is high.
The utility model to achieve these goals, adopt following technical scheme: a kind of clamping device of vacuum sputtering coating substrate, be by: on two-sided substrate, two-sided lower elastic card, two-sided upper elastic card, crossbeam, vertical beam, one side, under elastic card, one side, elastic card, single substrate are formed; As shown in the figure, vertical beam side arranges at least two crossbeams, and crossbeam is set to cross, and cross crossbeam both sides arrange curb girder respectively; Be symmetrical arranged above middle beam below two two-sided lower elastic cards, upper cross-beam and be symmetrical arranged two two-sided upper elastic cards, two-sided upper elastic card is corresponding with the dop of two-sided lower elastic card to be arranged, and arranges two-sided substrate between two-sided lower elastic card and two-sided upper elastic card; Below upper cross-beam with above middle beam, one group of two-sided upper elastic card and two-sided lower elastic card are set; Elastic card under two one sides is symmetrical arranged above the curb girder being symmetrical arranged elastic card, middle beam on two one sides below the curb girder of upper cross-beam, on one side, elastic card is corresponding with the dop of elastic card under one side is arranged, and one side arranges single substrate between elastic card under elastic card and one side; Vertical beam side arranges at least two crossbeams, and between neighbouring two crossbeams, the specification of corresponding substrate is arranged, and arranges two-sided substrate between two crossbeams; Crossbeam is set to cross, and cross crossbeam both sides arrange curb girder respectively; Between two crossbeam curb girders of the same side, single substrate is set.
Beneficial effect: single or double plated film shares a set of clamping equipment, highly versatile; Change range of product, convenient and swift; Free-hand quick despatch substrate, reduces the use of manpower; Solve diffraction problems, can production low-resistance expensive goods; Structure is simple, and handling ease, low cost, forever uses.
Vertical beam of the present utility model and travelling car are one, and the crossbeam of particular design is fixed on vertical beam by connection piece, and spring chuck is connected by screw on crossbeam, one side product or two-sided product, are free-handly fixed on spring chuck; One side and two-sided product, clamping equipment is compatible, and the product of different size, as long as moving beam, and retightens, and just can use; Suitable spacing between the catch that crossbeam is upper and lower and substrate, can prevent diffraction.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the utility model is described in further detail:
Fig. 1 is, general assembly structural representation;
Fig. 2 is, side elevational cross-section structural representation;
Fig. 3 is, installs the structural representation of two-sided substrate;
Fig. 4 is, installs single substrate structural representation;
In Fig. 1,2,3,4: elastic card 7, single substrate 8 under elastic card 6, one side on two-sided substrate 1, two-sided lower elastic card 2, two-sided upper elastic card 3, crossbeam 4, vertical beam 5, one side.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the utility model is described in further detail:
As shown in the figure, vertical beam 5 side arranges at least two crossbeams 4, and crossbeam 4 is set to cross, and cross crossbeam 4 both sides arrange curb girder respectively; Middle beam 4 is symmetrical arranged two two-sided lower elastic cards 2 above, upper cross-beam 4 is symmetrical arranged two two-sided upper elastic cards 3 below, two-sided upper elastic card 3 is corresponding with the dop of two-sided lower elastic card 2 to be arranged, and arranges two-sided substrate 1 between two-sided lower elastic card 2 and two-sided upper elastic card 3; Upper cross-beam 4 arranges one group of two-sided upper elastic card 3 and two-sided lower elastic card 2 above below with middle beam 4;
Elastic card 7 under two one sides is symmetrical arranged above the curb girder being symmetrical arranged elastic card 6, middle beam 4 on two one sides below the curb girder of upper cross-beam 4, on one side, elastic card 6 is corresponding with the dop of elastic card under one side 7 is arranged, and one side arranges single substrate 8 between elastic card 7 under elastic card 6 and one side;
Vertical beam 5 side arranges at least two crossbeams 4, and between neighbouring two crossbeams 4, the specification of corresponding substrate is arranged, and arranges two-sided substrate 1 between two crossbeams 4; Crossbeam 4 is set to cross, and cross crossbeam 4 both sides arrange curb girder respectively; Between two crossbeam 4 curb girders of the same side, single substrate 8 is set.
Claims (3)
1. a clamping device for vacuum sputtering coating substrate, be by: on two-sided substrate (1), two-sided lower elastic card (2), two-sided upper elastic card (3), crossbeam (4), vertical beam (5), one side, under elastic card (6), one side, elastic card (7), single substrate (8) are formed; It is characterized in that: as shown in the figure, vertical beam (5) side arranges at least two crossbeams (4), and crossbeam (4) is set to cross, and cross crossbeam (4) both sides arrange curb girder respectively; Middle beam (4) is symmetrical arranged two two-sided lower elastic cards (2) above, upper cross-beam (4) is symmetrical arranged two two-sided upper elastic cards (3) below, two-sided upper elastic card (3) is corresponding with the dop of two-sided lower elastic card (2) to be arranged, and arranges two-sided substrate (1) between two-sided lower elastic card (2) and two-sided upper elastic card (3); Upper cross-beam (4) arranges one group of two-sided upper elastic card (3) and two-sided lower elastic card (2) above with middle beam (4) below.
2. according to the clamping device of a kind of vacuum sputtering coating substrate described in claim 1, it is characterized in that: above the curb girder being symmetrical arranged elastic card (6) on two one sides, middle beam (4) below the curb girder of upper cross-beam (4), be symmetrical arranged elastic card (7) under two one sides, on one side, elastic card (6) is corresponding with the dop of elastic card under one side (7) is arranged, and one side arranges single substrate (8) between elastic card (7) under elastic card (6) and one side.
3. according to the clamping device of a kind of vacuum sputtering coating substrate described in claim 1, it is characterized in that: vertical beam (5) side arranges at least two crossbeams (4), between neighbouring two crossbeams (4), the specification of corresponding substrate is arranged, and arranges two-sided substrate (1) between two crossbeams (4); Crossbeam (4) is set to cross, and cross crossbeam (4) both sides arrange curb girder respectively; Between two crossbeam (4) curb girders of the same side, single substrate (8) is set.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520668550.0U CN205011833U (en) | 2015-08-23 | 2015-08-23 | Clamping device of vacuum sputter coating substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520668550.0U CN205011833U (en) | 2015-08-23 | 2015-08-23 | Clamping device of vacuum sputter coating substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205011833U true CN205011833U (en) | 2016-02-03 |
Family
ID=55210446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520668550.0U Expired - Fee Related CN205011833U (en) | 2015-08-23 | 2015-08-23 | Clamping device of vacuum sputter coating substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205011833U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107881479A (en) * | 2017-12-01 | 2018-04-06 | 江西中科泰盛光电有限公司 | A kind of substrate frame |
-
2015
- 2015-08-23 CN CN201520668550.0U patent/CN205011833U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107881479A (en) * | 2017-12-01 | 2018-04-06 | 江西中科泰盛光电有限公司 | A kind of substrate frame |
| CN107881479B (en) * | 2017-12-01 | 2019-08-20 | 江西中科泰盛光电有限公司 | A kind of substrate frame |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160203 |