CN208121187U - A kind of filming equipment with target defencive function - Google Patents
A kind of filming equipment with target defencive function Download PDFInfo
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- CN208121187U CN208121187U CN201820418270.8U CN201820418270U CN208121187U CN 208121187 U CN208121187 U CN 208121187U CN 201820418270 U CN201820418270 U CN 201820418270U CN 208121187 U CN208121187 U CN 208121187U
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- target
- thin wire
- defencive function
- plated film
- charging carriage
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Abstract
The utility model relates to a kind of filming equipments with target defencive function, including coating machine and charging carriage, vacuum cavity is equipped with inside the coating machine, end is equipped in the vacuum cavity, collets are equipped between the end and vacuum chamber body wall, it is vertically-mounted above end to have target, the target rotatable movement, the target cover for improving plating film uniformity is equipped outside the target, plated film mouth is offered on the target cover, target covers at plated film mouth and is equipped with thin wire gauze, the thin wire gauze is equipped with charging carriage in the side opposite with target, the charging carriage is equipped with the fixture for fixed substrate.The utility model provides a kind of filming equipment with target defencive function; the equipment is by installing thin wire gauze on the plated film mouth of target cover; the charging carriage for being fixed with substrate is spaced with rotary target material; the setting of thin wire gauze not only effectively prevents resting on target when broken glass is fallen and causes to damage to it; and also there is certain scattering process to target as sputter process; conducive to the uniformity for improving plated film, and then improve product quality.
Description
Technical field
The utility model relates to coating technique field, in particular to a kind of filming equipment with target defencive function.
Background technique
Coated basal plate usually first completes TFT- in 5 generations and the production of higher generation line mostly based on TFT patch box glass at present
After array glass and CF glass processing procedure, using being bonded and being cut into 3.5 generation line sizes, send to thinned factory and be thinned, after being thinned
It send to touch screen factory and carries out Oncell touch-control sensor processing procedure.Existing Oncell touch screen is used with TFT liquid crystal display glass
CF glass back after (including array face glass and CF glass) patch box is thinned well manufactures touch function, realizes liquid crystal display
With the double action of touch sensor, this method is simple, and cost is relatively low, in recent years by the common concern of people.But due to plating
Film glass substrate be through cutting and be thinned after TFT paste box glass, glass quality is highly brittle, be easy in coating process because by
Heat and rupture, the glass fragment after rupture can be fallen from charging carriage into inside plated film vacuum cavity, and segment glass fragment meeting
It inevitably rests on above endways target.Due to the lasting rotation that target can not stop in coating process, cause to rest on
Glass on rotary target material can scratch target.Target material surface will be unable to regular picture build-up of luminance once scratched, and then can not be just
It is often used, influences being normally carried out for coating process.And since plated film target is expensive, a target usually may be up to more than 20
Ten thousand, thickness but only 5-9mm, therefore usually will not directly be abandoned for the target of surface damage, but select to repair, it repairs
Target is just switched on plated film cavity and target material surface is polished flat with sander, on the one hand the process for target of polishing wastes high
On the other hand expensive target has also delayed the production time, be unfavorable for improving production efficiency.
Utility model content
In order to solve the above-mentioned technical problem the utility model, provides a kind of filming equipment with target defencive function,
The equipment is separated by by installing thin wire gauze on the plated film mouth of target cover, by the charging carriage for being fixed with substrate with rotary target material
It opens, not only effectively prevents resting on when broken glass is fallen on target and it is caused to damage, but also be mounted on thin on plated film mouth
Wire netting can form certain scattering process to target as sputter process, conducive to the uniformity for improving plated film, and then improve product quality.
To achieve the above object, the utility model provides a kind of filming equipment with target defencive function, including plating
Film machine and charging carriage are equipped with vacuum cavity inside the coating machine, are equipped with end in the vacuum cavity, the end and true
Collets are equipped between cavity body wall, vertically-mounted above end to have a target, the target rotatable movement, outside the target
It is equipped with the target cover for improving plating film uniformity, plated film mouth is offered on the target cover, target, which covers at plated film mouth, to be equipped with carefully
Wire netting, the thin wire gauze are equipped with charging carriage in the side opposite with target, and the charging carriage is equipped with for solid
Determine the fixture of substrate.
Further, the thin wire gauze includes the thin wire of several equidistant parallel distributions, the distribution side of the thin wire
To orthogonal with the traffic direction of charging carriage.
Further, the diameter of the thin wire is 0.4-0.6mm.
Further, the distance between adjacent thin wire is distributed in 28-32mm.
Further, the distance between adjacent thin wire is 30mm.
Further, the substrate is that TFT pastes box glass.
The advantageous effects that the utility model is played are as follows：
Compared with prior art, the utility model provides a kind of filming equipment with target defencive function, this sets
For by installing thin wire gauze on the plated film mouth of target cover, the charging carriage for being fixed with substrate is spaced with rotary target material, carefully
The setting of wire netting not only effectively prevents resting on target when broken glass is fallen and causes to damage to it, but also to target as sputter
Process also has certain scattering process, conducive to the uniformity for improving plated film, and then improves product quality.
Detailed description of the invention
Fig. 1 is the positional diagram of charging carriage, target cover and plated film mouth before adding thin wire gauze.
Fig. 2 is the positional diagram of charging carriage after adding thin wire gauze, target cover and thin wire gauze.
Positional structure schematic diagram of the Fig. 3 between substrate, thin wire gauze, target and vacuum chamber body wall.
Description of symbols：
The end 1-, 2- target, 3- target cover, 4- collets, 5- substrate, 6- thin wire gauze, 7- charging carriage, 8- plated film mouth.
9- vacuum chamber body wall
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；In order to better illustrate this embodiment, attached
Scheme certain components to have omission, zoom in or out, does not represent the size of actual product；To those skilled in the art,
The omitting of some known structures and their instructions in the attached drawings are understandable；The same or similar label corresponds to same or similar
Component；The terms describing the positional relationship in the drawings are only for illustration, should not be understood as the limitation to this patent.
Specific embodiment
The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawing, so that advantages and features of the invention are more
It is easily readily appreciated by one skilled in the art, to make apparent define to protection scope of the present invention.
Embodiment 1：
As shown in Figures 2 and 3, a kind of filming equipment with target defencive function, including plated film are present embodiments provided
Machine and charging carriage 7, the coating machine inside are equipped with vacuum cavity, and the vacuum cavity is made of cylinder, pedestal and top cover, institute
The pedestal for stating vacuum cavity is equipped with end 1, and collets 4 are equipped between the end 1 and vacuum chamber body wall 9, are erected above end 1
Target 2 is directly installed, the target 2 can be rotated around the axis of its own, be equipped with and be used for outside the target 2
The target cover 3 of plating film uniformity is improved, plated film mouth 8 is offered on the target cover 3, rotary target material 2 sputters at substrate by plated film mouth 8
Membrane product is formed on 5, target cover 3 is equipped with thin wire gauze 6 at plated film mouth 8, and the thin wire gauze 6 is opposite with target 2 one
Side is equipped with charging carriage 7, and the charging carriage 7 is equipped with several fixtures for fixed substrate 5, and fixture is evenly distributed on dress
The two sides up and down of trolley 7 are carried, substrate 5 selects TFT to paste box glass in the present embodiment, and the two sides up and down of charging carriage 7 are installed respectively
There are four fixtures to be used for better fixed substrate 5.Above-mentioned thin wire gauze 6 includes the thin wire of several equidistant parallels distribution, described
Thin wire is vertically installed at plated film mouth 8, and the traffic direction of the distribution arrangement and charging carriage 7 of the thin wire is orthogonal.One
As formed thin wire gauze 6 thin wire diameter be distributed in 0.4-0.6mm, the distance between adjacent thin wire is distributed in 28-32mm,
The distance between the diameter of thin wire and adjacent thin wire can be adjusted according to the area of substrate 5 in practical applications.?
In the present embodiment, the area of glass substrate 5 is 750mm*650mm, and the thin wire diameter of selection is 0.5mm, adjacent thin wire
Spacing is 30mm, and since the thin wire diameter of selection is smaller, the spacing of adjacent thin wire is very big with respect to for iron wire diameter, and phase
The very little again for the area of glass substrate 5 proves that the setting of thin wire gauze 6 can be with by repetition test and a large amount of production
Effectively stop broken glass to rest on target 2 when falling to damage it, and the setting of thin wire gauze 6 does not influence target not only
The deposition of material 2 on a glass substrate 5 can be improved the uniformity of film layer due to the scattering of thin wire gauze 6 instead, be conducive to improve plated film
The quality of product.
Specific coating process process is as follows：
It clamps glass substrate 5 with fixture first to hang on it on charging carriage 7 vertically, later on coating machine works as dress
When load trolley 7 carries the operation of glass substrate 5 to plated film mouth 8, start plated film, the substance on rotary target material 2 can be in coating process
Sputtering forms film on a glass substrate 5, and the glass substrate 5 that partially there is fine crack in this process can be due to heated
And rupture, the glass fragment after rupture can fall to 2 side of target from charging carriage 7 or rest on vertical rotary target material
On 2, since coating process target 2 is in lasting rotation, the glass fragment rested on target 2 can scratch target 2, such as Fig. 1
It is shown.But after plated film mouth 8 has installed thin wire gauze 6 additional, glass fragment is blocked in thin wire gauze 6 and rotation by thin wire gauze 6
The opposite side of target 2, thin wire gauze 6 can significantly stop passing through for glass fragment, avoid target 2 and are damaged, mention
High 2 service life of target, reduces production cost.
Obviously, the above embodiments of the present invention is merely examples for clearly illustrating the present invention, and
It is not limitations of the embodiments of the present invention.For those of ordinary skill in the art, in above description
On the basis of can also make other variations or changes in different ways.There is no need and unable to give all embodiments
Exhaustion.Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention etc., should be included in
Within the protection scope of the utility model claims.
Claims (6)
1. a kind of filming equipment with target defencive function, which is characterized in that including coating machine and charging carriage（7）, described
It is equipped with vacuum cavity inside coating machine, is equipped with end in the vacuum cavity（1）, the end（1）With vacuum chamber body wall（9）It
Between be equipped with collets（4）, end（1）Top is vertically-mounted target（2）, the target（2）Rotatable movement, the target
（2）Outside is equipped with the target cover for improving plating film uniformity（3）, the target cover（3）On offer plated film mouth（8）, target cover（3）
In plated film mouth（8）Place is equipped with thin wire gauze（6）, the thin wire gauze（6）With target（2）Opposite side is equipped with loading
Trolley（7）, the charging carriage（7）It is equipped with and is used for fixed substrate（5）Fixture.
2. a kind of filming equipment with target defencive function as described in claim 1, which is characterized in that the thin wire gauze
（6）Thin wire including the distribution of several equidistant parallels, the distribution arrangement and charging carriage of the thin wire（7）Traffic direction it is mutual
It is perpendicular.
3. a kind of filming equipment with target defencive function as claimed in claim 2, which is characterized in that the thin wire it is straight
Diameter is 0.4-0.6mm.
4. a kind of filming equipment with target defencive function as claimed in claim 3, which is characterized in that between adjacent thin wire
Range distribution in 28-32mm.
5. a kind of filming equipment with target defencive function as claimed in claim 4, which is characterized in that between adjacent thin wire
Distance be 30mm.
6. a kind of filming equipment with target defencive function as described in claim 1, which is characterized in that the substrate（5）For
TFT pastes box glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820418270.8U CN208121187U (en) | 2018-03-27 | 2018-03-27 | A kind of filming equipment with target defencive function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820418270.8U CN208121187U (en) | 2018-03-27 | 2018-03-27 | A kind of filming equipment with target defencive function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208121187U true CN208121187U (en) | 2018-11-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820418270.8U Active CN208121187U (en) | 2018-03-27 | 2018-03-27 | A kind of filming equipment with target defencive function |
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| CN (1) | CN208121187U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114481060A (en) * | 2021-12-23 | 2022-05-13 | 凯盛信息显示材料(洛阳)有限公司 | ITO conductive film glass plate sputtering cavity structure |
-
2018
- 2018-03-27 CN CN201820418270.8U patent/CN208121187U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114481060A (en) * | 2021-12-23 | 2022-05-13 | 凯盛信息显示材料(洛阳)有限公司 | ITO conductive film glass plate sputtering cavity structure |
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