CN205839122U - A kind of vacuum coating equipment - Google Patents
A kind of vacuum coating equipment Download PDFInfo
- Publication number
- CN205839122U CN205839122U CN201620768518.4U CN201620768518U CN205839122U CN 205839122 U CN205839122 U CN 205839122U CN 201620768518 U CN201620768518 U CN 201620768518U CN 205839122 U CN205839122 U CN 205839122U
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- CN
- China
- Prior art keywords
- gear
- work rest
- coating equipment
- revolution
- vacuum coating
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 29
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 239000011120 plywood Substances 0.000 claims description 6
- 239000013077 target material Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 239000010408 film Substances 0.000 description 11
- 229910052786 argon Inorganic materials 0.000 description 8
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000004549 pulsed laser deposition Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Abstract
This utility model is applicable to filming equipment technical field, provide a kind of vacuum coating equipment, including vacuum cavity, it is provided with in vacuum cavity for placing the work rest of workpiece, target, revolution gear, driving gear, driving motor, fixed gear and rotating gear.Target is arranged at work rest side, and work rest is rotatably mounted in revolution gear by a rotating shaft.Drive motor to drive gear to rotate, drive gear to be in transmission connection with revolution gear.Fixed gear is fixed in vacuum cavity, work rest and the fixing connection of a rotating shaft, and this rotating shaft is rotatably mounted in revolution gear, and rotating shaft is fixed with rotating gear and is connected, and rotating gear engages with fixed gear.Vacuum coating equipment of the present utility model can load workpiece on each side of work rest, and batch is more than three times of existing coater, in a plated film operation, can give more workpiece plated film, improve production efficiency.
Description
Technical field
This utility model belongs to filming equipment technical field, particularly relates to a kind of vacuum coating equipment.
Background technology
Vacuum coating equipment refers mainly to a class and workpiece carries out under higher vacuum the equipment of plated film, wherein, the skill of plated film
Art has many types, evaporates including vacuum ionic, magnetron sputtering, MBE molecular beam epitaxy, PLD pulsed laser deposition etc..Mainly
Thinking is divided into evaporation and sputtering two kinds.
The object needing plated film is referred to as workpiece (or substrate), needs the material being plated on workpiece to be referred to as target, such as silicon
Target, niobium target, aluminum target, titanium target etc..Workpiece and target are with in the vacuum chamber.Under vacuum, it is passed through the argon of certain air pressure, argon
It is argon ion that gas ionizes under high voltage (300-800V) electric field action, and argon ion accelerates bombardment target, thus by target material
It is splashed to surface of the work, forms thin film.
Current vacuum coating equipment is the most vertical, horizontal or level revolution form workpiece frame, and the batch of its product is few,
Production efficiency is low, and meanwhile, the flat target utilization rate that it is configured is relatively low, occurs when plated film oxidation reaction to generate oxide, holds
Easily pollute the edge of target material surface, thus cause target surface cleannes bad.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of vacuum coating equipment, it is intended to solve in prior art
The batch existing for vacuum coating equipment few, problem that production efficiency is low.
This utility model is achieved in that a kind of vacuum coating equipment, including vacuum cavity, arranges in described vacuum cavity
Have for placing the work rest of workpiece, target, revolution gear, driving gear and driving motor；Described target is arranged at described
Work rest side, described work rest is installed in described revolution gear, and described driving motor drives described driving gear to rotate, institute
State driving gear to be in transmission connection with revolution gear；Described vacuum coating equipment also includes fixed gear and rotating gear, described solid
Fixed gear is fixed in described vacuum cavity, and described work rest and the fixing connection of a rotating shaft, described rotating shaft is rotatably mounted in
In described revolution gear, and described rotating shaft is fixed with described rotating gear and is connected, described rotating gear and described fixed gear
Engagement.
Further, the rectangular shape of lateral cross section of described work rest, each side of described work rest all can load work
Part.
Further, described target is cylindrical target.
Further, in described target is rotatably mounted in described vacuum cavity.
Further, the edge of described revolution gear is provided with some along its multiple circumferentially spaced described workpiece
Frame, described fixed gear is arranged concentrically with described revolution gear, and described fixed gear is nibbled with all of rotating gear simultaneously
Close.
Further, described revolution gear has upper and lower spaced top plate and lower plywood, described fixed gear
And rotating gear is respectively positioned in the gap between described top plate and lower plywood；Further, described work rest can by a rotating shaft
It is rotatably mounted on described top plate.
This utility model compared with prior art, has the beneficial effects that: vacuum coating equipment of the present utility model, its work rest
The revolution gear round circumferential direction revolution along revolution gear can be followed, and work rest is while revolution, is secured to connect
Rotating gear rotate under the effect of fixed gear, owing to being connected from moving gear and rotating shaft are fixing, therefore, rotating shaft and workpiece
Frame all can carry out rotation centered by the axle center of rotating shaft.Due to work rest energy rotation, therefore, it can on the side of work rest equal
Workpiece on loading, the workpiece on each side, during rotation, all can rotate to the position relative with target, thus on each side
Workpiece all can complete plated film.And the work rest of existing vacuum coating equipment can not rotation, therefore can only fill on its one side
Carry workpiece, it is seen then that compared to existing vacuum coating equipment, vacuum coating equipment of the present utility model can be in each side of work rest
Loading workpiece on face, batch is more than three times of existing coater, in a plated film operation, can give more workpiece plated film,
Improve production efficiency.
Accompanying drawing explanation
Fig. 1 is longitudinal cross-sectional schematic of a kind of vacuum coating equipment that this utility model embodiment provides.
Detailed description of the invention
In order to make technical problem to be solved in the utility model, technical scheme and beneficial effect clearer, with
Lower combination drawings and Examples, are further elaborated to this utility model.Should be appreciated that concrete reality described herein
Execute example only in order to explain this utility model, be not used to limit this utility model.
As it is shown in figure 1, be a preferred embodiment of the present utility model, a kind of vacuum coating equipment, including vacuum cavity 100,
Be provided with in vacuum cavity 100 for place the work rest 1 of workpiece, target 2, revolution gear 3, drive gear 4, drive motor 5,
Fixed gear 6 and rotating gear 7.Revolution gear 3 has upper and lower spaced top plate 31 and lower plywood 32, fixing
Gear 6 and rotating gear 7 are respectively positioned in the gap between top plate 31 and lower plywood 32.
Target 2 is arranged at work rest 1 side, and work rest 1 is rotatably mounted on top plate 31 by a rotating shaft 8.Drive
Galvanic electricity machine 5 drives gear 4 to rotate, and drives gear 4 to be in transmission connection with revolution gear 3.Fixed gear 6 is fixed on vacuum cavity
In 100, work rest 1 is fixing with a rotating shaft 8 to be connected, and rotating shaft 8 is rotatably mounted on top plate 31, and rotating shaft 8 and rotation
Gear 7 is fixing to be connected, and rotating gear 7 engages with fixed gear 6.
Specifically, the rectangular shape of lateral cross section of above-mentioned work rest 1, four sides of work rest 1 all can load workpiece.Public
The edge turning gear 3 is provided with some along its multiple circumferentially spaced work rest 1, and fixed gear 6 is concentric with revolution gear 3
Arrange, and fixed gear 6 engages with all of rotating gear 7 simultaneously.
The vacuum coating equipment of the present embodiment, its work rest 1 can follow the revolution gear 3 round circumferential direction along revolution gear 3
Revolution, and work rest 1 is while revolution, and the rotating gear 7 being secured to connect rotates under the effect of fixed gear 6,
Owing to being connected from moving gear 7 and rotating shaft 8 is fixing, therefore, rotating shaft 8 and work rest 1 all can be carried out centered by the axle center of rotating shaft 1
Rotation.Due to work rest 1 energy rotation, therefore, it can on the side of work rest 1, all load workpiece, the workpiece on each side
During rotation, all can rotate to the position relative with target 2, thus the workpiece on each side all can complete plated film.And show
The work rest of some vacuum coating equipments can not rotation, therefore can only load workpiece on its one side, it is seen then that compared to existing
Vacuum coating equipment, the vacuum coating equipment of the present embodiment can load workpiece on each side of work rest 1, and batch is existing
More than three times of coater, in a plated film operation, can give more workpiece plated film, improve production efficiency.
Optimally, above-mentioned target 2 is cylindrical target, and target 2 is rotatably mounted in vacuum cavity 100, compared to
Flat target, the utilization rate of cylindrical target 2 is high；Meanwhile, even if there is oxidation reaction when plated film, also it is not easy to generate oxide
And pollute target surface.
The work process of the vacuum coating equipment of the present embodiment is as follows:
Start and drive motor 5, drive motor 5 to drive and drive gear 4 to rotate, drive gear 4 to drive revolution gear 3 to rotate,
The workpiece loaded on work rest 1 in revolution gear 3 and work rest 1 moves along the circumferencial direction of revolution gear 3.Work rest
1 while revolution, continuous rotation, and the workpiece on its each side is alternately rotated the position relative with target 2, and in this mistake
Cheng Zhong, target 2 also constantly rotation, each position on its periphery alternately rotates to the position relative with workpiece.Toward vacuum chamber
Being passed through the argon of certain air pressure in body 100, argon ionizes as argon ion, argon ion under high voltage (300-800V) electric field action
Accelerate bombardment target 2, thus by target 2 sputtering of materials to surface of the work, form thin film.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model, all at this
Any amendment, equivalent and the improvement etc. made within the spirit of utility model and principle, should be included in this utility model
Protection domain within.
Claims (6)
1. a vacuum coating equipment, including vacuum cavity, is provided with in described vacuum cavity for placing the work rest of workpiece, target
Material, revolution gear, driving gear and driving motor；Described target is arranged at described work rest side, and described work rest is installed
In described revolution gear, described driving motor drives described driving gear to rotate, described driving gear and revolution gear transmission
Connect；It is characterized in that, described vacuum coating equipment also includes that fixed gear and rotating gear, described fixed gear are fixed on institute
State in vacuum cavity, described work rest and the fixing connection of a rotating shaft, described rotating shaft is rotatably mounted in described revolution gear,
And described rotating shaft is fixing with described rotating gear to be connected, and described rotating gear engages with described fixed gear.
2. vacuum coating equipment as claimed in claim 1, it is characterised in that the rectangular shape of lateral cross section of described work rest, institute
Each side stating work rest all can load workpiece.
3. vacuum coating equipment as claimed in claim 1, it is characterised in that described target is cylindrical target.
4. the vacuum coating equipment as described in any one in claims 1 to 3, it is characterised in that described target is rotatably pacified
It is loaded in described vacuum cavity.
5. the vacuum coating equipment as described in any one in claims 1 to 3, it is characterised in that the edge of described revolution gear
Being provided with some along its multiple circumferentially spaced described work rest, described fixed gear is concentric with described revolution gear to be set
Put, and described fixed gear engages with all of rotating gear simultaneously.
6. the vacuum coating equipment as described in any one in claims 1 to 3, it is characterised in that on described revolution gear has,
Under spaced top plate and lower plywood, described fixed gear and rotating gear are respectively positioned on described top plate and lower plywood
Between gap in；Further, described work rest is rotatably mounted on described top plate by a rotating shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620768518.4U CN205839122U (en) | 2016-07-19 | 2016-07-19 | A kind of vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620768518.4U CN205839122U (en) | 2016-07-19 | 2016-07-19 | A kind of vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205839122U true CN205839122U (en) | 2016-12-28 |
Family
ID=57625129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620768518.4U Active CN205839122U (en) | 2016-07-19 | 2016-07-19 | A kind of vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205839122U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048552A (en) * | 2016-07-19 | 2016-10-26 | 深圳市东丽华科技有限公司 | Vacuum coating machine |
| CN113981399A (en) * | 2021-11-17 | 2022-01-28 | 机械科学研究总院青岛分院有限公司 | RV reducer gear surface coating device and method |
-
2016
- 2016-07-19 CN CN201620768518.4U patent/CN205839122U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048552A (en) * | 2016-07-19 | 2016-10-26 | 深圳市东丽华科技有限公司 | Vacuum coating machine |
| CN113981399A (en) * | 2021-11-17 | 2022-01-28 | 机械科学研究总院青岛分院有限公司 | RV reducer gear surface coating device and method |
| CN113981399B (en) * | 2021-11-17 | 2023-09-26 | 机械科学研究总院青岛分院有限公司 | RV reducer gear surface coating device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200107 Address after: 404100 No.78, Yunwu Road, Beibei District, Chongqing Patentee after: Xiameixi technology partnership (limited partnership) of Liangjiang New District, Chongqing Address before: 3, building 4, 518109, Baohua Industrial Park, 45 Hua Sheng Road, Longhua New District, Guangdong, Shenzhen Patentee before: SHENZHEN WONDERINNO TECHNOLOGY CO., LTD. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200821 Address after: No.5-138, Yunhan Avenue, Shuitu hi tech Industrial Park, Beibei District, Chongqing Patentee after: CHONGQING XINJING SPECIAL GLASS Co.,Ltd. Address before: 404100 No.78, Yunwu Road, Beibei District, Chongqing Patentee before: Xiameixi technology partnership (L.P.) of Liangjiang New District, Chongqing |