CN206359609U - A kind of work rest of vacuum coating equipment - Google Patents
A kind of work rest of vacuum coating equipment Download PDFInfo
- Publication number
- CN206359609U CN206359609U CN201720022931.0U CN201720022931U CN206359609U CN 206359609 U CN206359609 U CN 206359609U CN 201720022931 U CN201720022931 U CN 201720022931U CN 206359609 U CN206359609 U CN 206359609U
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- rotary table
- vacuum coating
- load
- coating equipment
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Abstract
A kind of work rest of vacuum coating equipment, including workpiece rotary table, load-bearing rotary table, main turntable and rotating shaft.Some workpiece rotary table rules are laid on load-bearing rotary table；Some load-bearing rotary table centers longitudinal arrangement is fixed in rotating shaft；The regularly arranged upper surface for being fixedly installed on main turntable of some rotating shafts.Workpiece rotary table upper surface, which is installed with workseat, workseat, is provided with workpiece positioning hole.The utility model drives workpiece to carry out multidirectional rotary simultaneously in vacuum coating equipment by Multi-stage rotary mechanism, advantageously ensures that the uniformity of each workpiece plated film station, so as to ensure workpiece plating film integrality and uniformity；Meanwhile, multidirectional rotary is conducive to homogenizing target as sputter atmosphere in vacuum coating environment, so as to improve target utilization ratio, further improves the workpiece plated film uniformity.
Description
Technical field
The utility model is related to vacuum coating Workpiece clamping technical field, more particularly to a kind of workpiece of vacuum coating equipment
Frame.
Background technology
With the raising of environmental requirement, the technique for vacuum coating of the pollutant such as no waste water, waste gas instead of traditional high pollution
Electroplating technology.In technique for vacuum coating, workpiece is positioned in target ion atmosphere, makes workpiece surface formation metal epithelium.Mesh
Before, it is many to drive workpiece to be rotated in vacuum coater using rotatable workpiece frame, to improve workpiece coating quality.But due to
Rotation mode is single, is relatively fixed the plated film site of workpiece, causes workpiece to be located at the peripheral side coating film thickness of work rest inclined
Greatly, and inner side coating film thickness is smaller.Simultaneously as atmosphere mobility is small in vacuum environment, when workpiece amount is larger, aligned gaps compared with
Hour, workpiece lower floor plating film integrality is poor.
Utility model content
The utility model provides a kind of work rest of vacuum coating equipment, not enough to solve above-mentioned prior art.Pass through multistage
Rotating mechanism drives workpiece to carry out multidirectional rotary simultaneously in vacuum coating equipment, advantageously ensures that the one of each workpiece plated film station
Cause property, so as to ensure workpiece plating film integrality and uniformity；Meanwhile, multidirectional rotary is conducive to homogenizing target in vacuum coating environment
Sputtering atmosphere, so as to improve target utilization ratio, further improves the workpiece plated film uniformity.
In order to realize the purpose of this utility model, intend using following technology：
A kind of work rest of vacuum coating equipment, it is characterised in that including workpiece rotary table, load-bearing rotary table, main turntable and rotating shaft,
Some workpiece rotary table rules are laid on the load-bearing rotary table, and some load-bearing rotary table center longitudinal arrangements are fixed on institute
State in rotating shaft, some regularly arranged upper surfaces for being fixedly installed on the main turntable of the rotating shaft, the workpiece rotary table upper surface
It is installed with workseat, the workseat and is provided with workpiece positioning hole.
Further, the workseat is circle, and the workpiece positioning hole is laid along workseat circumference outer rule.
Further, the workpiece rotary table is 4 or 6.
Further, the workpiece rotary table is laid by middle point symmetry of the axle center of the load-bearing rotary table.
Further, the load-bearing rotary table is 3~5.
Further, the rotating shaft is 3~5.
The beneficial effects of the utility model are：
1st, the utility model drives workpiece to carry out multidirectional rotary simultaneously in vacuum coating equipment by Multi-stage rotary mechanism,
The uniformity of each workpiece plated film station is advantageously ensured that, so as to ensure workpiece plating film integrality and uniformity；Meanwhile, multidirectional rotary
Be conducive to homogenizing target as sputter atmosphere in vacuum coating environment, so as to improve target utilization ratio, further improve workpiece plated film
The uniformity.
2nd, the utility model is by using load-bearing rotary table axle center as the symmetrically arranged Work turning table in midpoint, being conducive to load-bearing rotary table
Force balance, keeps the stationarity in rotary course, further improves the uniformity of workpiece plated film.
Brief description of the drawings
Fig. 1 shows the utility model structural representation.
Fig. 2 shows distribution schematic top plan view of the workpiece rotary table on load-bearing rotary table in the utility model embodiment.
Fig. 3 shows distribution schematic top plan view of the rotating shaft on main turntable in the utility model embodiment.
Fig. 4 shows the structural representation of tappet and its fixture in embodiment.
Fig. 5 shows assembly structure diagram of the workpiece on load-bearing rotary table in the utility model embodiment.
Embodiment
As shown in figure 1, a kind of work rest of vacuum coating equipment, including workpiece rotary table 1, load-bearing rotary table 2, main turntable 3 and turn
Axle 4.The upper surface of workpiece rotary table 1, which is installed with workseat 5, the workseat 5, is provided with workpiece positioning hole 51.As shown in figure 4,
After workpiece 8 is clamped by vacuum coating fixture 9, it is fixed at the workpiece positioning hole 51, in the workpiece rotary table 1, described holds
Multidirectional rotary is carried out under the drive of idling disk 2 and the main turntable 3.
The workpiece rotary table 1 is 4~6, is symmetrically laid on the load-bearing rotary table 2, to keep balance, it is ensured that steady
Rotation.Pass through the rotation of the workpiece rotary table 1, it is ensured that station of each workpiece being fixed thereon during vacuum coating is consistent
Property, so that coating quality when ensureing the larger workpiece amount of single treatment.And the direction of rotation of the workpiece rotary table 1 and the carrying
The direction of rotation of rotating disk 2 on the contrary, may advantageously facilitate homogenizing for target as sputter atmosphere in coating process, improve target utilization ratio and
Workpiece coating film thickness is homogeneous.
The load-bearing rotary table 2 is 3~5.According to the height of the workpiece 8, setting is fixed in the same rotating shaft 4
The gap of the load-bearing rotary table 2.
The rotating shaft 4 is 3~5.Each rotating shaft 4 is using the axle center of the main turntable 3 as the center of circle, and average lay is fixed on
On the rotating disk 3, rotated with the main turntable 3.
The motor of the workpiece rotary table 1 is arranged in rotary table base 11, the drive of the main turntable 3 and the rotating shaft 4
Dynamic motor 6 is closed in the casing 7 being arranged at immediately below the main turntable 3.To avoid polluting vacuum coating environment.
The workseat 5 is circle, and the workpiece positioning hole 51 is laid along the circumference outer of workseat 5 rule.It is described
The spacing of positioning hole 51 is set according to the width of the workpiece 8, makes the workpiece 8 by the fixture 9 in the positioning hole 51
After fixation, the spacing between workpiece 8 described in adjacent two is maintained at 2 times and the above in the width of the workpiece 8, to ensure vacuum coating
Quality.
Illustrate that the utility model embodiment is as follows in conjunction with the embodiments：
As shown in Fig. 2, Fig. 3 and Fig. 5, in embodiment, the main turntable 3 turns provided with 3 rotating shafts 4 described in every
3 load-bearing rotary tables 2 are fixed with axle 4, each load-bearing rotary table 2 is provided with 4 workpiece rotary tables 1, single institute
Workseat 5 is stated provided with 8 workpiece positioning holes, single vacuum coating can handle 288 tappet workpiece 8 simultaneously.
As shown in figure 4, the utility model is handled for the vacuum coating of automobile tappet outer surface in embodiment.The workpiece 8
Clamped by the fixture 9.As shown in figure 5, the locating rod 91 of the fixture 9 runs through the positioning hole 51, by the work
Part 8 is positioned at the upper surface of the workseat 5.
The utility model is loaded after vacuum coating cavity, by external power supply and the workpiece rotary table 1, the main turntable 3
Connected with the motor 6 of the rotating shaft 4.After startup power supply, the workpiece rotary table 1, which drives, to be fixed at the workseat 5
The workpiece 8 is turned clockwise (or rotate counterclockwise), and the rotating shaft 4 drives the load-bearing rotary table 2 to be revolved counterclockwise
Turn (or turning clockwise), the main turntable 3 drives the component for the side of being fixed thereon to be rotated at a slow speed.The workpiece rotary table 1
With the direction of rotation of the load-bearing rotary table 2 on the contrary, may advantageously facilitate the flowing of target as sputter atmosphere, the appearance of workpiece 8 is improved
The integrality and the uniformity of face plated film.
Claims (6)
1. a kind of work rest of vacuum coating equipment, it is characterised in that including workpiece rotary table (1), load-bearing rotary table (2), main turntable (3)
With rotating shaft (4), some workpiece rotary table (1) rules are laid on the load-bearing rotary table (2), some load-bearing rotary tables (2)
Center longitudinal arrangement is fixed in the rotating shaft (4), and some rotating shafts (4) are regularly arranged to be fixedly installed on the main turntable
(3) upper surface, workpiece rotary table (1) upper surface is installed with workseat (5), and workseat (5) place is positioned provided with workpiece
Hole (51).
2. the work rest of a kind of vacuum coating equipment according to claim 1, it is characterised in that the workseat (5) is circle
Shape, the workpiece positioning hole (51) is laid along the workseat (5) circumference outer rule.
3. the work rest of a kind of vacuum coating equipment according to claim 1, it is characterised in that the workpiece rotary table (1) is 4
Or 6.
4. a kind of work rest of vacuum coating equipment according to claim 3, it is characterised in that the workpiece rotary table (1) with
Laid for middle point symmetry in the axle center of the load-bearing rotary table (2).
5. the work rest of a kind of vacuum coating equipment according to claim 1, it is characterised in that the load-bearing rotary table (2) is 3
~5.
6. the work rest of a kind of vacuum coating equipment according to claim 1, it is characterised in that the rotating shaft (4) is 3~5
Root.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720022931.0U CN206359609U (en) | 2017-01-09 | 2017-01-09 | A kind of work rest of vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720022931.0U CN206359609U (en) | 2017-01-09 | 2017-01-09 | A kind of work rest of vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206359609U true CN206359609U (en) | 2017-07-28 |
Family
ID=59380644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720022931.0U Expired - Fee Related CN206359609U (en) | 2017-01-09 | 2017-01-09 | A kind of work rest of vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206359609U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111593314A (en) * | 2020-05-25 | 2020-08-28 | 宁波大榭开发区佳洁锌铸件有限公司 | Vacuum coating process and device |
| CN112626478A (en) * | 2020-12-15 | 2021-04-09 | 安徽新和博亚电子科技有限公司 | Electronic material surface coating treatment equipment and coating treatment method thereof |
| CN113789501A (en) * | 2021-09-09 | 2021-12-14 | 比尔安达(上海)润滑材料有限公司 | Method and system for forming multi-nano coating on surface of shaver cap |
| CN114351121A (en) * | 2022-03-21 | 2022-04-15 | 艾瑞森表面技术（苏州）股份有限公司 | Fixture for carrying out PECVD (plasma enhanced chemical vapor deposition) on long rod-shaped workpiece |
| CN114438577A (en) * | 2022-01-10 | 2022-05-06 | 上饶市兴杰达光电科技有限公司 | Anti-oxidation coating device for optical lens shell |
-
2017
- 2017-01-09 CN CN201720022931.0U patent/CN206359609U/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111593314A (en) * | 2020-05-25 | 2020-08-28 | 宁波大榭开发区佳洁锌铸件有限公司 | Vacuum coating process and device |
| CN111593314B (en) * | 2020-05-25 | 2022-04-19 | 宁波大榭开发区佳洁锌铸件有限公司 | Vacuum coating process and device |
| CN112626478A (en) * | 2020-12-15 | 2021-04-09 | 安徽新和博亚电子科技有限公司 | Electronic material surface coating treatment equipment and coating treatment method thereof |
| CN112626478B (en) * | 2020-12-15 | 2022-10-28 | 江门豪达电子科技有限公司 | Electronic material surface coating treatment equipment and coating treatment method thereof |
| CN113789501A (en) * | 2021-09-09 | 2021-12-14 | 比尔安达(上海)润滑材料有限公司 | Method and system for forming multi-nano coating on surface of shaver cap |
| CN113789501B (en) * | 2021-09-09 | 2023-07-25 | 比尔安达(上海)润滑材料有限公司 | Method and system for forming multi-nano coating on surface of shaver cap |
| CN114438577A (en) * | 2022-01-10 | 2022-05-06 | 上饶市兴杰达光电科技有限公司 | Anti-oxidation coating device for optical lens shell |
| CN114438577B (en) * | 2022-01-10 | 2023-07-25 | 广东伊菲特光学科技有限公司 | Optical lens shell anti-oxidation coating device |
| CN114351121A (en) * | 2022-03-21 | 2022-04-15 | 艾瑞森表面技术（苏州）股份有限公司 | Fixture for carrying out PECVD (plasma enhanced chemical vapor deposition) on long rod-shaped workpiece |
| CN114351121B (en) * | 2022-03-21 | 2022-06-14 | 艾瑞森表面技术（苏州）股份有限公司 | Fixture for carrying out PECVD (plasma enhanced chemical vapor deposition) on long rod-shaped workpiece |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 621000 Factory Building No. 6 of Changhong Complementary Industrial Park, Tangxun Town, Mianyang City, Sichuan Province Patentee after: TIE AI SI NEW MATERIAL TECHNOLOGY (MIanyang) CO., LTD. Address before: 621000 Factory Building No. 6 of Changhong Complementary Industrial Park, Tangxun Town, Mianyang City, Sichuan Province Patentee before: Surface treatment technology (Mianyang) Co., Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170728 Termination date: 20200109 |