CN107699862B - A kind of rotary body coating clamp - Google Patents
A kind of rotary body coating clamp Download PDFInfo
- Publication number
- CN107699862B CN107699862B CN201711135311.9A CN201711135311A CN107699862B CN 107699862 B CN107699862 B CN 107699862B CN 201711135311 A CN201711135311 A CN 201711135311A CN 107699862 B CN107699862 B CN 107699862B
- Authority
- CN
- China
- Prior art keywords
- pallet
- turntable
- gear
- fixed
- lever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention discloses a kind of rotary body coating clamp, and turntable is arranged in coating confined space, and the turntable is fixed with shaft, and shaft is connect with the motor output shaft outside coating confined space；Multiple groups pallet is set on the turntable, the outer rim of the pallet is respectively provided with gear, wherein, it is driving pallet close to the outermost pallet of turntable, outer ledge of the gear beyond turntable of the driving pallet is simultaneously engaged with lever, the lever is fixed and teeth corresponding with gear are arranged in outside, and the gear of the driving pallet is successively engaged with the gear of other pallets, forms rotating device.The invention has the advantages that fixture can be placed on same pallet it is multiple, driving pallet and lever cooperatively form the rotation of each pallet, driven by rotary disc pallet revolution simultaneously, this addresses the problem parts in cavity often can only coating one side, there is the phenomenon that " yin-yang " face.
Description
Technical field
The present invention relates to a kind of rotary body coating clamps, are especially deposited or sputter for the targets such as ion plating, PVD, CVD
Coating technology-specific fixture.
Background technique
Currently, rotary body class part is carrying out the targets class such as ion plating, vapor deposition, PVD, CVD vapor deposition or sputtering surface technology
It carries out in application, part stationary is placed in closed cavity, cavity has newel rotation, drives cavity inner rotary table or hook
It is rotated.Target is deposited or sputters at piece surface by energy excitation, forms overlay coating.
Part in cavity often can only coating one side, there is the phenomenon that " yin-yang " face.Solution often can only be secondary
Coating, even if there is also the phenomenons that uneven coating is even on its circumferencial direction to rotary body class part for secondary coating.
Summary of the invention
The object of the present invention is to provide a kind of device for solving rotating body parts coating problem of non-uniform, specific technical solutions
It is as follows:
Turntable is arranged in coating confined space in a kind of rotary body coating clamp, and the turntable is fixed with shaft, shaft and applies
Plate the motor output shaft connection outside confined space；Multiple groups pallet is set on the turntable, the outer rim of the pallet is respectively provided with gear,
Wherein, close to the outermost pallet of turntable be driving pallet, it is described driving pallet gear beyond turntable outer ledge and with
Lever engagement, the lever is fixed and teeth corresponding with gear, the gear and other pallets of the driving pallet is arranged in outside
Gear successively engage, formed rotating device.
For fixed link is arranged convenient for the center of the multiple workpiece of simultaneous processing, the pallet, workpiece is set on the fixed link
On.
For Rational Arrangement turntable plane space and guarantee engagement between pallet, multiple rotations are set on the turntable and are filled
It sets.
For adjustment public affairs turn around when pallet rotation angle, the lever be it is multiple, along the circumferential arrangement of turntable；The shelves
Adjustment device can be set to guarantee that the radial direction along turntable is adjusted in bar, adapts to the rotation of pallet different angle；
The adjustment device includes the slideway being arranged radially along turntable, slide is arranged on slideway, lever is fixed on slide
On, the slide is fixed with adjustment bar；The adjustment bar is fixed with the handle being arranged in outside coating confined space, and along slideway side
To moving back and forth.
The invention has the advantages that fixture can be placed on same pallet it is multiple, driving pallet cooperatively formed with lever it is each
The rotation of pallet, while driven by rotary disc pallet revolves, this addresses the problem parts in cavity often can only coating one side, exist
The phenomenon that " yin-yang " face.
Detailed description of the invention
Fig. 1 is rotary body coating fixture schematic diagram；
Fig. 2 is adjustment apparatus structure schematic diagram.
Specific embodiment
The present invention is illustrated with reference to the accompanying drawing, as shown, a kind of operation instruction of rotary body coating fixture, within
Illustrating for hex nut:
Turntable 1 is set in coating confined space, and the turntable 1 and shaft 2 are fixed, the electricity outside shaft and coating confined space
Machine exports axis connection；Multiple groups pallet 3 is set, and the outer rim of the pallet is respectively provided with gear 6, wherein close to turntable on the turntable 1
Outermost pallet is driving pallet, and outer ledge of the gear 6 beyond turntable 1 of the driving pallet simultaneously engages, institute with lever 5
It states that lever 5 is fixed and outside is arranged teeth corresponding with gear, the gear of the gear of the driving pallet and other pallets is successively
Engagement forms rotating device.
For fixed link 7 is arranged convenient for the center of the multiple workpiece of simultaneous processing, the pallet, workpiece 4 is set on the fixation
On bar 7.
For Rational Arrangement turntable plane space and guarantee engagement between pallet, multiple rotations are set on the turntable and are filled
It sets.
For adjustment public affairs turn around when pallet rotation angle, the lever 5 be it is multiple, along the circumferential arrangement of turntable；It is described
Adjustment device can be set to guarantee that the radial direction along turntable is adjusted in lever 5, adapts to the rotation of pallet different angle；
The adjustment device includes the slideway 9 being arranged radially along turntable, slide 8 is arranged on slideway, lever 5 is fixed on cunning
On seat 8, the slide 8 and adjustment bar 10 are fixed；The adjustment bar 10 and the handle being arranged in outside the side wall 12 of coating confined space
Hand 11 is fixed, and moves back and forth along slideway direction, and the lever of different number can be set as needed in this way, with adjust it is different from
Gyration.
It is the preferred embodiment of the present invention above, without departing from the inventive concept of the premise, also should be regarded as of the invention
Protection scope.
Claims (3)
1. a kind of rotary body coating clamp, it is characterised in that: turntable is arranged in coating confined space, the turntable and shaft are solid
Fixed, shaft is connect with the motor output shaft outside coating confined space；Multiple groups pallet, the outer rim of the pallet are set on the turntable
It is respectively provided with gear, wherein close to the outermost pallet of turntable to drive pallet, the gear of the driving pallet is beyond the outer of turntable
Side edge is simultaneously engaged with lever, and the lever is fixed and teeth corresponding with gear, the gear of the driving pallet is arranged in outside
It is successively engaged with the gear of other pallets, forms rotating device；The rotation angle of pallet, the lever when turning around for adjustment public affairs
To be multiple, along the circumferential arrangement of turntable；It further include adjustment device；The adjustment device includes the cunning being arranged radially along turntable
Slide is arranged on slideway in road, and lever is fixed on slide, and the slide is fixed with adjustment bar；The adjustment bar is being applied with setting
Handle outside plating confined space is fixed.
2. rotary body coating clamp according to claim 1, it is characterised in that: fixed link is arranged in the center of the pallet,
Workpiece is set in the fixed link.
3. rotary body coating clamp according to claim 1, it is characterised in that: multiple rotation dresses are arranged on the turntable
It sets.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711135311.9A CN107699862B (en) | 2017-11-14 | 2017-11-14 | A kind of rotary body coating clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711135311.9A CN107699862B (en) | 2017-11-14 | 2017-11-14 | A kind of rotary body coating clamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107699862A CN107699862A (en) | 2018-02-16 |
| CN107699862B true CN107699862B (en) | 2019-06-18 |
Family
ID=61179572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711135311.9A Active CN107699862B (en) | 2017-11-14 | 2017-11-14 | A kind of rotary body coating clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107699862B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280896B (en) * | 2018-11-30 | 2023-08-18 | 深圳天成真空技术有限公司 | Vacuum coating machine |
| CN117621969B (en) * | 2024-01-25 | 2024-04-12 | 中航兰田装备制造有限公司 | Self-unloading semitrailer |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1614078A (en) * | 2003-11-04 | 2005-05-11 | 电子科技大学 | Planar magnetic sputtering-multi-station film coating apparatus |
| JP2006063391A (en) * | 2004-08-26 | 2006-03-09 | Nippon Piston Ring Co Ltd | Device for holding workpiece for film formation |
| CN2848874Y (en) * | 2005-11-04 | 2006-12-20 | 夏建业 | Rotary plating object frame for vacuum film plating |
| CN100999814A (en) * | 2006-01-14 | 2007-07-18 | 鸿富锦精密工业（深圳）有限公司 | Multifunctional sputtering system and process |
| CN101619443A (en) * | 2009-07-27 | 2010-01-06 | 浙江工业大学 | High-efficiency film coating machine for solar thermal-collecting tubes |
| JP2012224878A (en) * | 2011-04-15 | 2012-11-15 | Nissan Motor Co Ltd | Mechanism for moving workpiece for vapor deposition apparatus, and vapor deposition method using the same |
| CN103361616A (en) * | 2012-04-11 | 2013-10-23 | 庞厚星 | Vacuum ion plating triaxial constant speed successive rotating coating film device |
| CN103590006A (en) * | 2013-12-02 | 2014-02-19 | 上海沃家真空设备科技有限公司 | Multifunctional vacuum-coating machine rotating rack |
| CN105603377A (en) * | 2016-02-23 | 2016-05-25 | 东莞市汇成真空科技有限公司 | Vacuum plating workpiece rotating stand motion mechanism allowing speed to be adjusted independently during revolution and autorotation |
| CN106835059A (en) * | 2017-02-27 | 2017-06-13 | 江阴市中兴光电实业有限公司 | Coating machine diaphragm rotating mechanism with adjustable angle planetary plate |
| CN207435540U (en) * | 2017-11-14 | 2018-06-01 | 沈阳博帅材料科技有限公司 | A kind of rotary body coating clamp |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6632282B2 (en) * | 2001-09-24 | 2003-10-14 | Neocera, Inc. | Planetary multi-substrate holder system for material deposition |
-
2017
- 2017-11-14 CN CN201711135311.9A patent/CN107699862B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1614078A (en) * | 2003-11-04 | 2005-05-11 | 电子科技大学 | Planar magnetic sputtering-multi-station film coating apparatus |
| JP2006063391A (en) * | 2004-08-26 | 2006-03-09 | Nippon Piston Ring Co Ltd | Device for holding workpiece for film formation |
| CN2848874Y (en) * | 2005-11-04 | 2006-12-20 | 夏建业 | Rotary plating object frame for vacuum film plating |
| CN100999814A (en) * | 2006-01-14 | 2007-07-18 | 鸿富锦精密工业（深圳）有限公司 | Multifunctional sputtering system and process |
| CN101619443A (en) * | 2009-07-27 | 2010-01-06 | 浙江工业大学 | High-efficiency film coating machine for solar thermal-collecting tubes |
| JP2012224878A (en) * | 2011-04-15 | 2012-11-15 | Nissan Motor Co Ltd | Mechanism for moving workpiece for vapor deposition apparatus, and vapor deposition method using the same |
| CN103361616A (en) * | 2012-04-11 | 2013-10-23 | 庞厚星 | Vacuum ion plating triaxial constant speed successive rotating coating film device |
| CN103590006A (en) * | 2013-12-02 | 2014-02-19 | 上海沃家真空设备科技有限公司 | Multifunctional vacuum-coating machine rotating rack |
| CN105603377A (en) * | 2016-02-23 | 2016-05-25 | 东莞市汇成真空科技有限公司 | Vacuum plating workpiece rotating stand motion mechanism allowing speed to be adjusted independently during revolution and autorotation |
| CN106835059A (en) * | 2017-02-27 | 2017-06-13 | 江阴市中兴光电实业有限公司 | Coating machine diaphragm rotating mechanism with adjustable angle planetary plate |
| CN207435540U (en) * | 2017-11-14 | 2018-06-01 | 沈阳博帅材料科技有限公司 | A kind of rotary body coating clamp |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107699862A (en) | 2018-02-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6000173B2 (en) | PVD processing apparatus and PVD processing method | |
| CN107699862B (en) | A kind of rotary body coating clamp | |
| US20170183769A1 (en) | Film formation apparatus and film-formed workpiece manufacturing method | |
| CN207435540U (en) | A kind of rotary body coating clamp | |
| CN106048552A (en) | Vacuum coating machine | |
| CN1564719A (en) | Edging/gumming machine for non-circular metal covers intende for containers | |
| US11649543B2 (en) | Target structure of physical vapor deposition | |
| CN105671512A (en) | Sphere vacuum coating clamping device | |
| JP2003027233A (en) | Work article supporting body for coating device | |
| CN207086943U (en) | Arc rail precision clamping jaw | |
| CN203197592U (en) | Machining rotating clamp | |
| CN103184416A (en) | Rotation and revolution combined type vacuum sputtering apparatus | |
| CN209144243U (en) | The target loading attachment and system of impulse laser deposition system | |
| CN202499902U (en) | Substrate holder capable of achieving automatically overturning | |
| CN106868465B (en) | A kind of application method of the device for vacuum chamber magnetron sputtering | |
| CN106737067A (en) | A kind of Switch of working position component of full-automatic roller sander | |
| WO2019162533A8 (en) | Carrier system and method for turning and centering a workpiece | |
| CN205839122U (en) | A kind of vacuum coating equipment | |
| CN201324996Y (en) | Grinder capable of regulating angle | |
| CN108359943A (en) | Variable gear ratio tunnel type sputter coating machine | |
| CN206428322U (en) | Form the high vacuum magnetically controlled DC sputtering device of malleable multilayer variable alloy protecting film | |
| CN105483634B (en) | A kind of substrate table apparatus | |
| CN220313064U (en) | Multi-angle shot blasting device | |
| CN203650282U (en) | Grinding wheel structure | |
| JP6951584B2 (en) | Film formation method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221104 Address after: 110117 No. 10-2, Hunnan Second Road, Hunnan District, Shenyang City, Liaoning Province (2003) Patentee after: Shenyang Juncheng Material Technology Co.,Ltd. Address before: 110180 No. 10-2, Hunnan Second Road, Hunnan District, Shenyang, Liaoning (1666) Patentee before: SHENYANG BOSHUAI MATERIAL TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right |