CN206428322U - Form the high vacuum magnetically controlled DC sputtering device of malleable multilayer variable alloy protecting film - Google Patents
Form the high vacuum magnetically controlled DC sputtering device of malleable multilayer variable alloy protecting film Download PDFInfo
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- CN206428322U CN206428322U CN201720173197.8U CN201720173197U CN206428322U CN 206428322 U CN206428322 U CN 206428322U CN 201720173197 U CN201720173197 U CN 201720173197U CN 206428322 U CN206428322 U CN 206428322U
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- wheel
- magnetic control
- control target
- chamber body
- pump
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Abstract
The utility model provides a kind of high vacuum magnetically controlled DC sputtering device for forming malleable multilayer variable alloy protecting film, automatic pumping system（1）, magnetic control target A（4）, magnetic control target B（5）It is arranged at vacuum coating chamber body（2）On；Automatic pumping system（1）Including mechanical pump, high vacuum oil diffuse pump, lobe pump, sliding vane rotary pump, maintenance pump；Vacuum coating chamber body（2）Vertical, two plane magnetic control targets of setting are set to, and transparent viewing port, magnetic control target A are set（4）, magnetic control target B（5）Including target stand, strong magnet, planar metal target；Wheel revolution device（6）Wheel is set at the uniform velocity to revolve round the sun, wheel rotating device（7）Wheel is set to be installed to coating machine, wheel can rotate, wheel fixes buckle（9）It is arranged on wheel（8）With vacuum coating chamber body（2）Between；Inlet duct（10）It is arranged at vacuum coating chamber body（2）.
Description
Technical field
The utility model is related to multilayer alloy protecting film field of surface treatment equipment.
Background technology
At present, physical vapor deposition（PVD）Extensive utilization is into surface of automobile part handling process, in Automobile
Played a significant role in the processing of the component surfaces such as mark, automotive hub block, automotive hub.Physical vapor deposition feature is table
Face reaches the white bright bright luster decorative effect of metal, and compared with conventional spray paint bottom powder+colored paint+colored varnish, coating performance is suitable, outside
Sight can reach electroplating effect.
The content of the invention
Therefore, the utility model purpose is to provide a kind of improved high vacuum magnetically controlled DC sputtering device.
Form the high vacuum magnetically controlled DC sputtering device of malleable multilayer variable alloy protecting film, including Automatic-bleeding system
System, vacuum coating chamber body, magnetic control target A, magnetic control target B, wheel revolution device, wheel rotating device, wheel are fixed buckle, entered
Device of air.
Automatic pumping system, magnetic control target A, magnetic control target B are arranged in vacuum coating chamber body.Vacuum-pumping system bag
Include mechanical pump, high vacuum oil diffuse pump, lobe pump, sliding vane rotary pump, maintenance pump；After pump is opened, vacuum reduction, different vacuums are certainly
It is dynamic to open associated pump.
Vacuum coating chamber body is set to vertical, two plane magnetic control targets of setting, and sets transparent viewing port, is easy in observation
Face plated film situation.Vacuum is first extracted when being worked in vacuum film coating chamber body, working gas is re-filled with.
Magnetic control target A, magnetic control target B include target stand, strong magnet, planar metal target.
Wheel revolution device makes wheel at the uniform velocity be revolved round the sun in vacuum chamber, and the period of revolution is adjustable；Wheel rotating device makes
Wheel is installed to coating machine, and wheel can rotate, it is ensured that whole wheel coating film thickness is consistent.Wheel fixes buckle and is arranged on wheel
Between vacuum coating chamber body；Inlet duct is arranged at vacuum coating chamber body.
Brief description of the drawings
Fig. 1 is that the high vacuum magnetically controlled DC sputtering device of the utility model formation malleable multilayer variable alloy protecting film shows
It is intended to.
In figure：In 1- automatic pumping systems, 2- vacuum coating chamber bodies, 3- vacuum film coating chamber bodies, 4- magnetic control target A, 5- magnetic
Target B, 6- wheel revolution device is controlled, 7- wheel rotating devices, 8- wheels, 9- wheels fix buckle, 10- inlet ducts.
Embodiment
Form the high vacuum magnetically controlled DC sputtering device of malleable multilayer variable alloy protecting film, including automatic pumping system
1, vacuum coating chamber body 2, magnetic control target A4, magnetic control target B5, wheel revolution device 6, wheel rotating device 7, wheel fixing card
Button 9, inlet duct 10.
Automatic pumping system 1, magnetic control target A4, magnetic control target B5 are arranged in vacuum coating chamber body 2.Vacuum suction system
System 1 includes mechanical pump, high vacuum oil diffuse pump, lobe pump, sliding vane rotary pump, maintenance pump；After pump is opened, vacuum reduction is different true
Reciprocal of duty cycle automatically turns on associated pump.
Vacuum coating chamber body 2 is set to vertical, two plane magnetic control targets of setting, and sets transparent viewing port.Vacuum coating
Vacuum is first extracted during 3 work in chamber body, working gas is re-filled with.
Magnetic control target A4, magnetic control target B5 include target stand, strong magnet, planar metal target.
Wheel revolution device 6 makes wheel at the uniform velocity be revolved round the sun in vacuum chamber, and the period of revolution is adjustable；Wheel rotating device 7
Wheel is set to be installed to coating machine, wheel can rotate, it is ensured that whole wheel coating film thickness is consistent.Wheel is fixed buckle 9 and is arranged on
Between wheel 8 and vacuum coating chamber body 2；Inlet duct 10 is arranged at vacuum coating chamber body 2.
Claims (1)
1. the high vacuum magnetically controlled DC sputtering device of malleable multilayer variable alloy protecting film is formed, including automatic pumping system
（1）, vacuum coating chamber body（2）, magnetic control target A（4）, magnetic control target B（5）, wheel revolution device（6）, wheel rotating device
（7）, wheel fix buckle（9）, inlet duct（10）, it is characterised in that：
Automatic pumping system（1）, magnetic control target A（4）, magnetic control target B（5）It is arranged at vacuum coating chamber body（2）On；Automatically take out
Gas system（1）Including mechanical pump, high vacuum oil diffuse pump, lobe pump, sliding vane rotary pump, maintenance pump；
Vacuum coating chamber body（2）Vertical, two plane magnetic control targets of setting are set to, and transparent viewing port, magnetic control target A are set
（4）, magnetic control target B（5）Including target stand, strong magnet, planar metal target；
Wheel revolution device（6）Wheel is set at the uniform velocity to revolve round the sun, wheel rotating device（7）Wheel is set to be installed to coating machine, wheel can be with
Rotation, wheel fixes buckle（9）It is arranged on wheel（8）With vacuum coating chamber body（2）Between；Inlet duct（10）It is arranged at vacuum
Plated film chamber body（2）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720173197.8U CN206428322U (en) | 2017-02-25 | 2017-02-25 | Form the high vacuum magnetically controlled DC sputtering device of malleable multilayer variable alloy protecting film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720173197.8U CN206428322U (en) | 2017-02-25 | 2017-02-25 | Form the high vacuum magnetically controlled DC sputtering device of malleable multilayer variable alloy protecting film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206428322U true CN206428322U (en) | 2017-08-22 |
Family
ID=59590136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720173197.8U Expired - Fee Related CN206428322U (en) | 2017-02-25 | 2017-02-25 | Form the high vacuum magnetically controlled DC sputtering device of malleable multilayer variable alloy protecting film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206428322U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108543687A (en) * | 2018-03-21 | 2018-09-18 | 中信戴卡股份有限公司 | A kind of high ductibility periodic variable alloy protecting film and forming method |
-
2017
- 2017-02-25 CN CN201720173197.8U patent/CN206428322U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108543687A (en) * | 2018-03-21 | 2018-09-18 | 中信戴卡股份有限公司 | A kind of high ductibility periodic variable alloy protecting film and forming method |
| US11072853B2 (en) | 2018-03-21 | 2021-07-27 | Citic Dicastal Co., Ltd | High-ductility periodic variable alloy protective film and forming method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170822 |