CN2592656Y

CN2592656Y - Rotary guard plate of observation window of vacuum chamber for vacuum coating system

Info

Publication number: CN2592656Y
Application number: CN 03210900
Authority: CN
Inventors: 宋航; 李志明
Original assignee: Changchun Institute of Optics Fine Mechanics and Physics of CAS
Current assignee: Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date: 2003-01-08
Filing date: 2003-01-08
Publication date: 2003-12-17
Anticipated expiration: 2013-01-08

Abstract

The utility model relates to an improvement vacuum chamber observation window of a vacuum coating system, which comprises a basal plate 10, an observation hole 11, a rotary wheel 12, a rotary wheel 13, a spring 14, a magnet 15 and an observation hole 16. The utility model solves the problem that evaporation materials through the original observation window can be seen clearly and gradually fuzzy in opaque material evaporation; inner conditions of the vacuum chamber can not be seen before the thickness of evaporation film reaches requirements; the rotary guard plate of the utility model can solve problem of frequency window replacement; the inner conditions of the vacuum chamber can be conveniently seen when equipment is operated, and thus, the rate of finished products of evaporation devices can be improved. The utility model provides a rotary guard plate of an observation window of the vacuum chamber with the advantages of simple structure, convenient operation, high rate of finished products of the evaporation devices, which can observe evaporation conditions all the time in vacuum coating.

Description

The rotation plate washer of vacuum chamber viewing window in the vacuum coating system

Technical field: the utility model belongs to technical field of vacuum plating, relates to a kind of improvement to vacuum chamber viewing window in the vacuum coating system.

Background technology: the device of vacuum plating (or substrate) all requires uniform film thickness, the densification of overlay coating, the film that coats does not have pin hole, in order to reach this target, just have in vacuum chamber, add some rotations (comprising rotation, revolution) devices, and evaporation boat (or electron beam gun) manual damper used of heating, baking, thermometric, survey thickness, evaporating materials and bombardment device etc.This just needs viewing window and is observed the interior various devices of vacuum chamber and the situation of evaporation source.Because in vacuum chamber during evaporating materials, the form that is evaporated material and is with steam is present in the whole vacuum chamber, because the temperature of the sealed wall of vacuum chamber and the temperature of viewing window are variant, so, the glass on the viewing window covers with regard to the evaporant that is very easy to be deposited and is unfavorable for observing.

Existing viewing window as shown in Figure 1, comprising sealed wall 1, sealing glass 2, tongued and grooved flanges 3, transition minor axis 4, glass 5, jump ring 6.Viewing window is the hole that a circle is opened in the appropriate location on vacuum chamber sealed wall 1 mostly, and on sealed wall 1, settle transition minor axis 4, transition minor axis 4 is connected with tongued and grooved flanges 3, tongued and grooved flanges 3 seals sealing glass 2 suitably big or small and thickness, settle glass 5 at sealing glass 2 internal surfaces, the internal surface of glass 5 is positioned at the inboard of sealed wall 1, and jump ring 6 is positioned at transition minor axis 4 and so just forms a viewing window.Its using method is: after on will materials evaporated being placed on evaporation boat 8, before vacuumizing, place in viewing window suitably that the glass 5 of size is fixed in the transition minor axis 4 with jump ring 6 then, all are ready to the back and seal vacuum chamber and vacuumize and evaporate.During the rete of, light-proof material thicker when being coated with, the glass on the viewing window covers with regard to the evaporant that is very easy to be deposited and is unfavorable for observing, and causes the situation of whole plated film work to observe, and the quality of plated film is uncontrollable, makes the yield rate of evaporation device low.

Detailed content of the present utility model: when being coated with thicker, light-proof material in order to solve, on viewing window, be difficult for seeing the evaporation situation and the uncontrollable coating quality of whole plated film work, make problems such as the yield rate of evaporating device is low, the purpose of this utility model is to provide a kind of vacuum chamber viewing window that can observe the evaporation situation when vacuum plating all the time to rotate plate washer.

The utility model comprises substrate 10, vision slit 11, runner 12, rotor wheel 13, spring 14, magnet 15 and vision slit 16, preparation vision slit 11 and vision slit 16 on the medullary ray of substrate 10 bodies, fixed in position has runner 12 on the body of substrate 10, rotor wheel 13, spring 14 and magnet 15, magnet 15 is positioned at substrate 10 edges, vision slit 11 is positioned at the edge of substrate 10, vision slit 16 is positioned at the inboard of vision slit 11 and is offset to the center of substrate 10, runner 12 and rotor wheel 13 uniform distribution are placed on the substrate 10, settle vision slit 11 between runner 12 and rotor wheel 13 or between runner 12, spring 14 places on the rotation axis of rotor wheel 13.

During the utility model work, rotate along the interior annular of tongued and grooved flanges 3 across sealing glass 2 with magnet 15 opposite polarity magnet with one, the pressure of regulating spring 14, its substrate 10 can be rotated freely, at this moment just can vacuumize and test at the vacuum chamber of sealing, when evaporant hides vision slit 11 and vision slit 16 when not observing the inner case of vacuum chamber, utilize the magnetic force of magnet 15 to pass glass port, substrate 10 is changeed a little angle, make and exposed situation that the part that does not deposit the pervaporation thing just can see that vacuum chamber is interior on the glass 5.Repeated rotation substrate 10 then repeats to make and exposes the part that does not deposit the pervaporation thing on the glass 5.Therefore, in a plated film, can repeatedly see the situation of evaporant in the vacuum chamber.

Positively effect of the present utility model is, it solves original viewing window when the lighttight material of evaporation, beginning can be seen the situation of evaporant in the vacuum chamber clearly, just fuzzy gradually, when the film of often not waiting until evaporation meets the requirements of thickness, just cannot see the internal vacuum chamber situation, and every evaporation once must be changed a glass careless omission can not be arranged, in case occur forgeing, must operate again.And use rotation plate washer of the present utility model, and just can solve the frequent problem of changing glass, can be when operating equipment, more convenient situation about seeing clearly in the vacuum chamber, thus can improve the yield rate of evaporating device.It is more clearly that the indoor evaporant of against vacuum is watched.Vacuum apparatus does not make any changes, and can be good at, to the beginning to the whole operation in the vacuum chamber and the evaporation situation of evaporating materials observed.The utility model has solved when being coated with thicker, light-proof material, be difficult for seeing problems such as the evaporation situation of whole plated film work and uncontrollable coating quality on viewing window, the utility model provides a kind of yield rate height of simple in structure, easy to operate, evaporation device, the vacuum chamber viewing window that can observe the evaporation situation when vacuum plating all the time to rotate plate washer.

Description of drawings:

Fig. 1 is the synoptic diagram of background technology vacuum chamber viewing window

Fig. 2 is the front view of an embodiment of the utility model

Fig. 3 is the side-view of Fig. 2

Embodiment such as Fig. 2 are shown in Figure 3: comprise substrate 10, vision slit 11, runner 12, rotor wheel 13, spring 14, magnet 15 and vision slit 16,

Substrate 10 is to adopt phosphorus bronze sheet processing, and its diameter is 93 millimeters, also can adopt non-magnetic metal or polytetrafluoroethylmaterial material to make.The hole that vision slit 11 and vision slit 16 can adopt two waist shapes is of a size of 10 * 25 millimeters.Two runners 12 and rotor wheel 13 are to adopt 8 millimeters bearings to make.Rotor wheel 13 comprises spring 14, back up pad and rotation axis.Magnet 15 adopts size can rotate flap shutter forr a short time and gets final product.

At first will make material object in conjunction with the internal diameter of transition minor axis 4 according to the shape of Fig. 2, then it is placed on the centre of glass 5 and jump ring 6, for bigger rotation space can be arranged, jump ring 6 will move toward the direction in the vacuum chamber.The size of the circular non-magnet_conductible material that substrate 10 adopts is more smaller than the inner diameter of transition minor axis 4, as shown in Figure 2, when making, substrate 10 must be than the internal diameter of transition minor axis little 2-3 millimeter, so, just can guarantee that substrate 10 rotates freely in transition minor axis 4.Vision slit 11 and the vision slit 16 that also will make two waist shapes with centre point along the medullary ray of a diameter a ' a on substrate 10 selects vision slit 11 and vision slit 16 can increase the visual angle so in addition.Adopt two fixed runners 12 and a rotor wheel 13 to make simple in structure.Add the magnet 15 that has high-intensity magnetic field again, in order to make substrate 10 fine rotation and can not splitting away off in transition minor axis 4, active rotor wheel 13 is added with spring 14 on axle.

Claims

1, the rotation plate washer of vacuum chamber viewing window in the vacuum coating system, it is characterized in that: comprise substrate 10, vision slit 11, runner 12, rotor wheel 13, spring 14, magnet 15 and vision slit 16, preparation vision slit 11 and vision slit 16 on the medullary ray of substrate 10 bodies, fixed in position has runner 12 on the body of substrate 10, rotor wheel 13, spring 14 and magnet 15, magnet 15 is positioned at substrate 10 edges, vision slit 11 is positioned at the edge of substrate 10, vision slit 16 is positioned at the inboard of vision slit 11 and is offset to the center of substrate 10, runner 12 and rotor wheel 13 uniform distribution are placed on the substrate 10, settle vision slit 11 between runner 12 and rotor wheel 13 or between runner 12, spring 14 places on the rotation axis of rotor wheel 13.