CN101831610B - Observation window baffle device and cavity observation window having the same - Google Patents
Observation window baffle device and cavity observation window having the same Download PDFInfo
- Publication number
- CN101831610B CN101831610B CN201010107551XA CN201010107551A CN101831610B CN 101831610 B CN101831610 B CN 101831610B CN 201010107551X A CN201010107551X A CN 201010107551XA CN 201010107551 A CN201010107551 A CN 201010107551A CN 101831610 B CN101831610 B CN 101831610B
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- China
- Prior art keywords
- flange
- spacer
- baffle plate
- cavity
- set collar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 125000006850 spacer group Chemical group 0.000 claims description 56
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 33
- 241001300078 Vitrea Species 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 abstract description 7
- 239000005357 flat glass Substances 0.000 abstract 1
- 238000012856 packing Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
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Abstract
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Claims (15)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010107551XA CN101831610B (en) | 2010-01-29 | 2010-01-29 | Observation window baffle device and cavity observation window having the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201010107551XA CN101831610B (en) | 2010-01-29 | 2010-01-29 | Observation window baffle device and cavity observation window having the same |
Publications (2)
Publication Number | Publication Date |
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CN101831610A CN101831610A (en) | 2010-09-15 |
CN101831610B true CN101831610B (en) | 2012-06-20 |
Family
ID=42715829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201010107551XA Expired - Fee Related CN101831610B (en) | 2010-01-29 | 2010-01-29 | Observation window baffle device and cavity observation window having the same |
Country Status (1)
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CN (1) | CN101831610B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106167891B (en) * | 2016-08-31 | 2019-05-24 | 南昌凯迅光电有限公司 | A kind of adjustable full angle evaporation mechanism form |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2592656Y (en) * | 2003-01-08 | 2003-12-17 | 中国科学院长春光学精密机械与物理研究所 | Rotary guard plate of observation window of vacuum chamber for vacuum coating system |
US7241397B2 (en) * | 2004-03-30 | 2007-07-10 | Tokyo Electron Limited | Honeycomb optical window deposition shield and method for a plasma processing system |
CN101571411A (en) * | 2009-06-08 | 2009-11-04 | 北京航空航天大学 | Petal-shaped baffle plate observation window mechanism |
CN201626980U (en) * | 2010-01-29 | 2010-11-10 | 东莞宏威数码机械有限公司 | Observation window baffle structure and cavity observation window device with baffle structure |
-
2010
- 2010-01-29 CN CN201010107551XA patent/CN101831610B/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2592656Y (en) * | 2003-01-08 | 2003-12-17 | 中国科学院长春光学精密机械与物理研究所 | Rotary guard plate of observation window of vacuum chamber for vacuum coating system |
US7241397B2 (en) * | 2004-03-30 | 2007-07-10 | Tokyo Electron Limited | Honeycomb optical window deposition shield and method for a plasma processing system |
CN101571411A (en) * | 2009-06-08 | 2009-11-04 | 北京航空航天大学 | Petal-shaped baffle plate observation window mechanism |
CN201626980U (en) * | 2010-01-29 | 2010-11-10 | 东莞宏威数码机械有限公司 | Observation window baffle structure and cavity observation window device with baffle structure |
Non-Patent Citations (1)
Title |
---|
JP特开平5-70947A 1993.03.23 |
Also Published As
Publication number | Publication date |
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CN101831610A (en) | 2010-09-15 |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
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Granted publication date: 20120620 Termination date: 20140129 |