CN101831610B - Observation window baffle device and cavity observation window having the same - Google Patents

Observation window baffle device and cavity observation window having the same Download PDF

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Publication number
CN101831610B
CN101831610B CN201010107551XA CN201010107551A CN101831610B CN 101831610 B CN101831610 B CN 101831610B CN 201010107551X A CN201010107551X A CN 201010107551XA CN 201010107551 A CN201010107551 A CN 201010107551A CN 101831610 B CN101831610 B CN 101831610B
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CN
China
Prior art keywords
flange
spacer
baffle plate
cavity
set collar
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201010107551XA
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Chinese (zh)
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CN101831610A (en
Inventor
杨明生
刘惠森
范继良
叶宗锋
郭远伦
王曼媛
王勇
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Dongguan Anwell Digital Machinery Co Ltd
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Dongguan Anwell Digital Machinery Co Ltd
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Priority to CN201010107551XA priority Critical patent/CN101831610B/en
Publication of CN101831610A publication Critical patent/CN101831610A/en
Application granted granted Critical
Publication of CN101831610B publication Critical patent/CN101831610B/en
Expired - Fee Related legal-status Critical Current
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Abstract

The invention discloses an observation window baffle device, which comprises a baffle rotating mechanism and a baffle. The baffle rotating mechanism comprises a flange base, a center shaft, an inner magnet fixing ring, an outer magnet fixing ring and a separating sleeve having a cavity, wherein the separating sleeve is fixedly connected to the flange base; the flange base is provided with a first through hole which passes through the flange base; the center shaft is inserted in the first through hole and two ends of the center shaft are extended out of the flange base; two ends of the center shaft are respectively a magnet bearing end and a baffle bearing end fixed to the baffle; the magnet bearing end is placed in the cavity; the inner magnet fixing ring is fixedly connected to the magnet bearing end; the baffle is fixedly connected to the baffle bearing end; the inner magnet fixing ring is at least fixed with two inner magnets; the outer magnet fixing ring is rotatably sleeved on the separating sleeve; and the inner magnet corresponding to the outer magnet fixing ring is fixedly connected to a plurality of outer magnets with a polar inverse to the inner magnets. The baffle is arranged between the observation window glass and the cavity, so when the window is not used for observing, the baffle is rotated to shield the through hole and prevent the glass from being polluted by the pollution source in the cavity.

Description

Viewing window retaining device and have the cavity observing window of this viewing window retaining device
Technical field
The present invention relates to the vacuum chamber mechanical field, particularly a kind of viewing window retaining device and have the cavity observing window of this viewing window retaining device.
Background technology
In vacuum or the high vacuum vapor deposition process, need observe vacuum cavity inside vapor deposition situation, cavity is externally connected with viewing window, and viewing window is generally a glass block.
But owing to have source of pollution in the cavity, this pollution so is diffused into the visibility meter that can reduce glass block on the glass block, influences observing effect.
Therefore, be badly in need of a kind of viewing window retaining device, make in the time need not observing glass block and cavity isolated, thereby the sharpness when keeping glass block to observe.
Summary of the invention
The purpose of this invention is to provide a kind of viewing window retaining device; Comprise baffle plate rotating mechanism and baffle plate; Said baffle plate rotating mechanism also comprises flange seat, hub, inner magnet set collar, outer magnet set collar and the spacer with a spacer cavity, and said spacer is fixed on the said flange seat, and said flange seat offers first through hole that connects self; Said hub is inserted in said first through hole and said flange seat is stretched out at said hub two ends; The two ends of said hub are respectively the baffle plate bearing end of magnet bearing end and affixed said baffle plate, and said magnet bearing end is placed in the said spacer cavity, and said inner magnet set collar is fixed on the said magnet bearing end; Said baffle plate is fixed on the said baffle plate bearing end; At least be connected with two inner magnets on the said inner magnet set collar, being sheathed on the said spacer of said outer magnet set collar rotation, the corresponding said inner magnet of said outer magnet set collar place affixed several and the opposite polarity outer magnet of said inner magnet.
Said flange seat comprises flange pedestal and the protruding tube affixed with said flange pedestal, and said first through hole runs through said pedestal and said protruding tube.
Said spacer comprises spacer pedestal and the protruding axle affixed with said spacer pedestal, and said spacer cavity is opened in the said spacer pedestal.
Said spacer is fixed on the said flange seat through screw, is provided with sealing-ring between said flange seat and the said spacer.
The outside, said magnet bearing end offers slot, and said inner magnet set collar is placed on the said slot admittedly.
Be installed with bearing on the said protruding axle, thereby said outer magnet set collar is placed in admittedly and makes being sheathed on the said spacer of the fixing rotation of said outer magnet on the said bearing.
The present invention also provides a kind of cavity observing window; Comprise flange combination, vitreum, pipe connecting and viewing window retaining device with through hole; Said vitreum is embedded at the outer end of said flange combination, and an end of the inner of said flange combination and said pipe connecting is affixed, and the other end of said pipe connecting and extraneous cavity are connected; Said viewing window retaining device is fixedly arranged on the said flange combination; Said viewing window retaining device comprises baffle plate rotating mechanism and baffle plate, and said baffle plate rotating mechanism also comprises flange seat, hub, inner magnet set collar, outer magnet set collar and the spacer with a spacer cavity, and said spacer is fixed on the said flange seat; Said flange seat offers first through hole that connects self; Said hub is inserted in the said through hole and said flange seat is stretched out at said hub two ends, and the two ends of said hub are respectively the baffle plate bearing end of magnet bearing end and affixed said baffle plate, and said magnet bearing end is placed in the said spacer cavity; Said inner magnet set collar is fixed on the said magnet bearing end; Said baffle plate is fixed on the said baffle plate bearing end, is connected with two inner magnets on the said inner magnet set collar at least, and what said outer magnet set collar rotated is sheathed on the said spacer; The corresponding said inner magnet of said outer magnet set collar place affixed several and the opposite polarity outer magnet of said inner magnet; The corresponding said Vitrea inboard of said through hole has the retaining bore portion with said baffle shapes size coupling, and said baffle plate bearing end puts in the through hole between corresponding said retaining bore portion of said flange combination and the extraneous cavity, and said baffle plate blocks said retaining bore portion when closed.
Said flange combination comprises first flange, second flange and the 3rd flange; Affixed said first flange of said second flange, one end; One end of the other end and said the 3rd flange is affixed; Said retaining bore portion is located in said second flange, and said viewing window retaining device is fixedly arranged on said second flange, and said baffle plate bearing end reaches the through hole between corresponding said retaining bore portion of said second flange and the extraneous cavity.
Said vitreum is embedded in said first flange to block said through hole; The both sides at said first flange, the corresponding said Vitrea edge of second flange are extended with first flange, second flange respectively; Be provided with gasket seal between said first flange and the said vitreum; Be provided with sealing-ring and center ring between said second flange and the said vitreum, said sealing-ring is located between inwall and the said center ring of first flange and is replaced the inwall and the said center ring of said first flange.
Form said retaining bore portion between said second flange, the baffle plate bearing end of said hub puts in the through hole between corresponding said second flange of second flange and the extraneous cavity.
Compared with prior art; The baffle plate of viewing window retaining device of the present invention is located at the through hole between viewing glass body and the extraneous cavity; In the time of need not observing, butterfly blocks through hole, prevents that vitreum from being influenced observing effect by the intravital source of pollution pollution in extraneous chamber.
Through following description and combine accompanying drawing, it is more clear that the present invention will become, and these accompanying drawings are used to explain embodiments of the invention.
Description of drawings
The cross-sectional schematic that Fig. 1 is communicated with extraneous cavity for cavity observing window of the present invention.
Fig. 2 is the sectional structure chart of cavity observing window of the present invention.
Fig. 3 is along the sectional view of section line A-A among Fig. 1.
Fig. 4 is the sectional structure chart of viewing window retaining device of the present invention.
Fig. 5 is the cross-sectional schematic of the baffle plate rotating mechanism of viewing window retaining device of the present invention.
Fig. 6 is the cross-sectional schematic of the flange pedestal of baffle plate rotating mechanism shown in Figure 5.
Fig. 7 is the cross-sectional schematic of the spacer of baffle plate rotating mechanism shown in Figure 5.
Fig. 8 is the cross-sectional schematic of the outer magnet set collar of baffle plate rotating mechanism shown in Figure 5.
Fig. 9 is the cross-sectional schematic of the inner magnet set collar of baffle plate rotating mechanism shown in Figure 5.
Figure 10 is the structural representation of the hub of baffle plate rotating mechanism shown in Figure 5.
Embodiment
Like Fig. 1, shown in Figure 2; This cavity observing window 100 is connected with extraneous cavity 50 through pipe connecting 40; This cavity observing window 100 comprises flange combination 10, vitreum 20 and the viewing window retaining device 30 with through hole, and vitreum 20 is embedded at the outer end of flange combination 10, and an end of the inner of flange combination 10 and pipe connecting 40 is affixed; The other end of pipe connecting 40 is communicated with extraneous cavity 50, and viewing window retaining device 30 is fixedly arranged on the flange combination 10.
To Fig. 5, viewing window retaining device 30 comprises baffle plate rotating mechanism 31 and baffle plate 32 with reference to figure 3.Baffle plate rotating mechanism 31 comprises flange seat 311, hub 312, inner magnet set collar 313, inner magnet 314, outer magnet set collar 315, outer magnet 316 and spacer 317.
In conjunction with Fig. 6, flange seat 311 comprise flange pedestal 311a and with the integrated protruding tube 311b of flange pedestal.Flange seat 311 is provided with first through hole 3111 that runs through flange pedestal 311a and protruding tube 311b.The flange pedestal is provided with packing ring storage tank 3112.
In conjunction with Fig. 7, spacer 317 comprise spacer pedestal 317a and with the integrated protruding axle 317b of spacer pedestal 317a.Offer spacer cavity 3171 in the spacer pedestal 317a.Spacer pedestal 317a and flange pedestal 311a correspondence have screw 33, thereby screw 34 is combined on and makes spacer pedestal 317a and flange pedestal 311a affixed in the screw 33.Be provided with sealing-ring 318 between flange pedestal 311a and the spacer pedestal 317a, sealing-ring 318 is placed in the packing ring storage tank 3112.
In conjunction with Fig. 5, Fig. 7 and Fig. 8, bearing 319 is placed on the protruding axle 317b admittedly, thereby outer magnet set collar 315 is placed in admittedly and makes being sheathed on the spacer 317 of outer magnet set collar 315 rotations on the bearing 319.Particularly, outer magnet set collar 315 outer ends have a hole clipping 3151, and bearing 319 is arranged in this hole clipping 3151; The outside of the corresponding bearing of protruding axle 317b is arranged with shaft block ring 35, and the outside of hole clipping 3151 corresponding bearings 319 is sheathed porose with back-up ring 36, thereby is fixedly arranged on bearing 319 in the hole clipping 3151.Outer magnet set collar 315 outsides offer several first storage tanks 3152, and outer magnet 316 is fixedly arranged in first storage tank 3152.
In conjunction with Fig. 4, Fig. 9 and Figure 10, the two ends of hub 312 are respectively the baffle plate bearing end 3122 of magnet bearing end 3121 and affixed baffle plate 32.Hub 312 is inserted in first through hole 3111 of flange seat 311.The magnet bearing end 3121 of hub 312 is stretched out flange pedestal 311a and is placed in the spacer cavity 3171; Magnet bearing end 3121 offers slot 3123, and inner magnet set collar 313 is placed on the slot 3123 admittedly, and in the present embodiment, inner magnet set collar 313 is placed on the slot 3123 through key connecting admittedly.Corresponding outer magnet 316 places are provided with several second storage tanks 3131 on the inner magnet set collar 313.Be installed with in second storage tank 3131 and outer magnet 316 opposite polarity inner magnets 314.Protruding tube 31b and affixed with baffle plate 32 screws is stretched out in the baffle plate bearing end 3122 of hub 312.
With reference to figure 2, flange combination 10 comprises first flange 11, second flange 12 and affixed first flange 11 of the 3rd flange 13, the second flanges 12 1 ends, and an end of the other end and the 3rd flange 13 is affixed.In the present embodiment, first flange 11, second flange 12 and the 3rd flange 13 are affixed each other through screw 14.Second flange 12 has the retaining bore portion 121 with baffle plate 32 shapes size coupling, and viewing window retaining device 30 is fixedly arranged on second flange 12, and baffle plate bearing end 3121 reaches the inboard of retaining bore portion 121.When baffle plate 42 closures, block bore portion 121.
The both sides at the edge of first flange 11, second flange, 12 corresponding vitreums 20 are extended with first flange 112, second flange 122 respectively, and vitreum 20 is embedded between first flange 112 and second flange 122.Be provided with gasket seal 15 between first flange 112 and the vitreum 20; Be provided with sealing-ring 16 and center ring 17 between second flange 122 and the vitreum 20, sealing-ring 16 is located between inwall and the center ring 17 of first flange 11 and is replaced the inwall and the center ring 16 of first flange 11.The space forms retaining bore portion 121 between second flange 112, and the baffle plate bearing end of hub 32 puts in the inboard of second flange 112.The size of baffle plate 32 and shape match with retaining bore portion 121, when baffle plate 32 closures, block bore portion 121.In the present embodiment, baffle plate 32 and retaining bore portion 121 types of being are fan-shaped.
Rotation outer magnet set collar 315 draws same sex repulsion because there is a natural attraction between the sexes, and and then rotation of inner magnet 314 drives hub 312 simultaneously and then drives baffle plate 32 rotations, can realize the open and close of baffle plate 32 according to the observation needs.In the time of need not observing extraneous cavity 50 inner cases, close baffle plate 32, prevent that vitreum 20 from being polluted by the source of pollution in the extraneous cavity 50 and influence observing effect.
It should be noted that several inner magnet 314 polarity can be interspersed,, also can all be S or N like S-N-S-N etc.; Several outer magnets 316 also can be interspersed, and like N-S-N-S, can all be N or S also, and are opposite with corresponding inner magnet 314 polarity; Baffle plate rotating mechanism 31 can be the baffle plate rotating mechanism of the employing magnet ring transmission principle of present embodiment, also can be the baffle plate rotating mechanism of other form, as long as hub is rotated; Inner magnet set collar 313 can be placed on the slot 3123 through key connecting admittedly, also can be placed in admittedly on the slot 3123 through other fixed form.
Invention has been described more than to combine most preferred embodiment, but the present invention is not limited to the embodiment of above announcement, and should contain various modification, equivalent combinations of carrying out according to the essence of present embodiment.

Claims (15)

1. viewing window retaining device; It is characterized in that: comprise baffle plate rotating mechanism and baffle plate; Said baffle plate rotating mechanism also comprises flange seat, hub, inner magnet set collar, outer magnet set collar and the spacer with a spacer cavity, and said spacer is fixed on the said flange seat, and said flange seat offers first through hole that connects self; Said hub is inserted in said first through hole and said flange seat is stretched out at said hub two ends; The two ends of said hub are respectively the baffle plate bearing end of magnet bearing end and affixed said baffle plate, and said magnet bearing end is placed in the said spacer cavity, and said inner magnet set collar is fixed on the said magnet bearing end; Said baffle plate is fixed on the said baffle plate bearing end; At least be connected with two inner magnets on the said inner magnet set collar, being sheathed on the said spacer of said outer magnet set collar rotation, the corresponding said inner magnet of said outer magnet set collar place affixed several and the opposite polarity outer magnet of said inner magnet.
2. viewing window retaining device as claimed in claim 1 is characterized in that: said flange seat comprises flange pedestal and the protruding tube affixed with said flange pedestal, and said first through hole runs through said pedestal and said protruding tube.
3. viewing window retaining device as claimed in claim 1 is characterized in that: said spacer comprises spacer pedestal and the protruding axle affixed with said spacer pedestal, and said spacer cavity is opened in the said spacer pedestal.
4. viewing window retaining device as claimed in claim 1 is characterized in that: said spacer is fixed on the said flange seat through screw, is provided with sealing-ring between said flange seat and the said spacer.
5. viewing window retaining device as claimed in claim 1 is characterized in that: the outside, said magnet bearing end offers slot, and said inner magnet set collar is placed on the said slot admittedly.
6. viewing window retaining device as claimed in claim 3 is characterized in that: be installed with bearing on the said protruding axle, thereby said outer magnet set collar is placed in admittedly and makes being sheathed on the said spacer of the fixing rotation of said outer magnet on the said bearing.
7. cavity observing window; Comprise flange combination, vitreum, pipe connecting and viewing window retaining device with through hole; Said vitreum is embedded at the outer end of said flange combination, and an end of the inner of said flange combination and said pipe connecting is affixed, and the other end of said pipe connecting and extraneous cavity are connected; Said viewing window retaining device is fixedly arranged on the said flange combination; It is characterized in that: said viewing window retaining device comprises baffle plate rotating mechanism and baffle plate, and said baffle plate rotating mechanism also comprises flange seat, hub, inner magnet set collar, outer magnet set collar and the spacer with a spacer cavity, and said spacer is fixed on the said flange seat; Said flange seat offers first through hole that connects self; Said hub is inserted in the said through hole and said flange seat is stretched out at said hub two ends, and the two ends of said hub are respectively the baffle plate bearing end of magnet bearing end and affixed said baffle plate, and said magnet bearing end is placed in the said spacer cavity; Said inner magnet set collar is fixed on the said magnet bearing end; Said baffle plate is fixed on the said baffle plate bearing end, is connected with two inner magnets on the said inner magnet set collar at least, and what said outer magnet set collar rotated is sheathed on the said spacer; The corresponding said inner magnet of said outer magnet set collar place affixed several and the opposite polarity outer magnet of said inner magnet; The corresponding said Vitrea inboard of said through hole has the retaining bore portion with said baffle shapes size coupling, and said baffle plate bearing end puts in the through hole between corresponding said retaining bore portion of said flange combination and the extraneous cavity, and said baffle plate blocks said retaining bore portion when closed.
8. cavity observing window as claimed in claim 7 is characterized in that: said flange seat comprises flange pedestal and the protruding tube affixed with said flange pedestal, and said first through hole runs through said pedestal and said protruding tube.
9. cavity observing window as claimed in claim 7 is characterized in that: said spacer comprises spacer pedestal and the protruding axle affixed with said spacer pedestal, and said spacer cavity is opened in the said spacer pedestal.
10. cavity observing window as claimed in claim 7 is characterized in that: said spacer is fixed on the said flange seat through screw, is provided with sealing-ring between said flange seat and the said spacer.
11. cavity observing window as claimed in claim 7 is characterized in that: the outside, said magnet bearing end offers slot, and said inner magnet set collar is placed on the said slot admittedly.
12. cavity observing window as claimed in claim 9 is characterized in that: be installed with bearing on the said protruding axle, thereby said outer magnet set collar is placed in admittedly and makes being sheathed on the said spacer of the fixing rotation of said outer magnet on the said bearing.
13. cavity observing window as claimed in claim 7; It is characterized in that: said flange combination comprises first flange, second flange and the 3rd flange; Affixed said first flange of said second flange, one end, an end of the other end and said the 3rd flange is affixed, and said retaining bore portion is located in said second flange; Said viewing window retaining device is fixedly arranged on said second flange, and said baffle plate bearing end reaches the through hole between corresponding said retaining bore portion of said second flange and the extraneous cavity.
14. cavity observing window as claimed in claim 13; It is characterized in that: said vitreum is embedded in said first flange to block said through hole; The both sides at said first flange, the corresponding said Vitrea edge of second flange are extended with first flange, second flange respectively; Be provided with gasket seal between said first flange and the said vitreum; Be provided with sealing-ring and center ring between said second flange and the said vitreum, said sealing-ring is located between inwall and the said center ring of first flange and is replaced the inwall and the said center ring of said first flange.
15. cavity observing window as claimed in claim 14 is characterized in that: said second flange forms said retaining bore portion, and the baffle plate bearing end of said hub puts in the through hole between corresponding said second flange of second flange and the extraneous cavity.
CN201010107551XA 2010-01-29 2010-01-29 Observation window baffle device and cavity observation window having the same Expired - Fee Related CN101831610B (en)

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CN201010107551XA CN101831610B (en) 2010-01-29 2010-01-29 Observation window baffle device and cavity observation window having the same

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Application Number Priority Date Filing Date Title
CN201010107551XA CN101831610B (en) 2010-01-29 2010-01-29 Observation window baffle device and cavity observation window having the same

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CN101831610B true CN101831610B (en) 2012-06-20

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* Cited by examiner, † Cited by third party
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CN106167891B (en) * 2016-08-31 2019-05-24 南昌凯迅光电有限公司 A kind of adjustable full angle evaporation mechanism form

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2592656Y (en) * 2003-01-08 2003-12-17 中国科学院长春光学精密机械与物理研究所 Rotary guard plate of observation window of vacuum chamber for vacuum coating system
US7241397B2 (en) * 2004-03-30 2007-07-10 Tokyo Electron Limited Honeycomb optical window deposition shield and method for a plasma processing system
CN101571411A (en) * 2009-06-08 2009-11-04 北京航空航天大学 Petal-shaped baffle plate observation window mechanism
CN201626980U (en) * 2010-01-29 2010-11-10 东莞宏威数码机械有限公司 Observation window baffle structure and cavity observation window device with baffle structure

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2592656Y (en) * 2003-01-08 2003-12-17 中国科学院长春光学精密机械与物理研究所 Rotary guard plate of observation window of vacuum chamber for vacuum coating system
US7241397B2 (en) * 2004-03-30 2007-07-10 Tokyo Electron Limited Honeycomb optical window deposition shield and method for a plasma processing system
CN101571411A (en) * 2009-06-08 2009-11-04 北京航空航天大学 Petal-shaped baffle plate observation window mechanism
CN201626980U (en) * 2010-01-29 2010-11-10 东莞宏威数码机械有限公司 Observation window baffle structure and cavity observation window device with baffle structure

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开平5-70947A 1993.03.23

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