CN107699862A - A kind of rotary body coating clamp - Google Patents
A kind of rotary body coating clamp Download PDFInfo
- Publication number
- CN107699862A CN107699862A CN201711135311.9A CN201711135311A CN107699862A CN 107699862 A CN107699862 A CN 107699862A CN 201711135311 A CN201711135311 A CN 201711135311A CN 107699862 A CN107699862 A CN 107699862A
- Authority
- CN
- China
- Prior art keywords
- pallet
- rotating disk
- gear
- lever
- rotary body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention discloses a kind of rotary body coating clamp, rotating disk is set in coating confined space, the rotating disk is fixed with rotating shaft, and rotating shaft is connected with the motor output shaft outside coating confined space；Multigroup pallet is set on the rotating disk, the outer rim of the pallet is respectively provided with gear, wherein, it is driving pallet close to the outermost pallet of rotating disk, the gear of the driving pallet exceeds the outer ledge of rotating disk and engaged with lever, the lever is fixed and outside sets teeth corresponding with gear, and the gear of the driving pallet engages successively with the gear of other pallets, forms tumbler.It is an advantage of the invention that：Fixture can be placed multiple on same pallet, and driving pallet and lever cooperatively form the rotation of each pallet, while driven by rotary disc pallet revolves round the sun, this addresses the problem part in cavity often can only coating one side, the phenomenon in " negative and positive " face be present.
Description
Technical field
The present invention relates to a kind of rotary body coating clamp, is particularly deposited or sputters for the target such as ion plating, PVD, CVD
Coating technology-specific fixture.
Background technology
At present, rotary body class part is carrying out the target class such as ion plating, evaporation, PVD, CVD evaporation or sputtering surface technology
When being applied, part stationary is placed in closed cavity, and cavity has newel rotation, drives cavity inner rotary table or hook
Rotated.Target is deposited or sputtered at piece surface by energy excitation, form overlay coating.
Part in cavity often can only coating one side, the phenomenon in " negative and positive " face be present.Solution often can only be secondary
Coating, even if there is also the phenomenon that uneven coating is even on its circumferencial direction to rotary body class part for secondary coating.
The content of the invention
It is an object of the invention to provide a kind of device for solving rotating body parts coating problem of non-uniform, concrete technical scheme
It is as follows：
A kind of rotary body coating clamp, rotating disk is set in coating confined space, the rotating disk is fixed with rotating shaft, and rotating shaft is with applying
Plate the motor output shaft connection outside confined space；Multigroup pallet is set on the rotating disk, the outer rim of the pallet is respectively provided with gear,
Wherein, be driving pallet close to rotating disk outermost pallet, the gear of the driving pallet beyond rotating disk outer ledge and with
Lever is engaged, and the lever is fixed and outside sets teeth corresponding with gear, the gear and other pallets of the driving pallet
Gear engage successively, formed tumbler.
For ease of processing multiple workpiece, the centrally disposed fix bar of the pallet simultaneously, workpiece is set on the fix bar
On.
Plane space for Rational Arrangement rotating disk and ensure engagement between pallet, set on the rotating disk and multiple rotate dress
Put.
The rotation angle of pallet when being turned around for adjustment public affairs, the lever is multiple, along the circumferential arrangement of rotating disk；The shelves
Bar can set adjusting apparatus to ensure that the radial direction along rotating disk is adjusted, and adapt to the rotation of pallet different angle；
The adjusting apparatus includes the slideway being radially arranged along rotating disk, sets slide on slideway, lever is fixed on slide
On, the slide is fixed with adjustment bar；The adjustment bar is fixed with the handle being arranged on outside coating confined space, and along slideway side
To moving back and forth.
It is an advantage of the invention that：Fixture can be placed on same pallet it is multiple, driving pallet cooperatively formed with lever it is each
The rotation of pallet, at the same driven by rotary disc pallet revolve round the sun, this addresses the problem part in cavity often can only coating one side, exist
The phenomenon in " negative and positive " face.
Brief description of the drawings
Fig. 1 is rotary body coating fixture schematic diagram；
Fig. 2 is adjusting apparatus structural representation.
Embodiment
The present invention is illustrated below in conjunction with the accompanying drawings, as illustrated, a kind of operation instruction of rotary body coating fixture, within
Illustrating exemplified by hex nut：
Rotating disk 1 is set in coating confined space, and the rotating disk 1 is fixed with rotating shaft 2, rotating shaft and the electricity outside coating confined space
Machine exports axis connection；Multigroup pallet 3 is set on the rotating disk 1, the outer rim of the pallet is respectively provided with gear 6, wherein, close to rotating disk
Outermost pallet is driving pallet, and the gear 6 of the driving pallet exceeds the outer ledge of rotating disk 1 and engaged with lever 5, institute
State that lever 5 is fixed and outside sets corresponding with gear teeth, the gear of the driving pallet and the gear of other pallets are successively
Engagement, form tumbler.
For ease of processing multiple workpiece, the centrally disposed fix bar 7 of the pallet simultaneously, workpiece 4 is set on the fixation
On bar 7.
Plane space for Rational Arrangement rotating disk and ensure engagement between pallet, set on the rotating disk and multiple rotate dress
Put.
The rotation angle of pallet when being turned around for adjustment public affairs, the lever 5 is multiple, along the circumferential arrangement of rotating disk；It is described
Lever 5 can set adjusting apparatus to ensure that the radial direction along rotating disk is adjusted, and adapt to the rotation of pallet different angle；
The adjusting apparatus includes the slideway 9 being radially arranged along rotating disk, sets slide 8 on slideway, lever 5 is fixed on cunning
On seat 8, the slide 8 is fixed with adjustment bar 10；The adjustment bar 10 and the handle being arranged on outside the side wall 12 of coating confined space
Hand 11 is fixed, and is moved back and forth along slideway direction, can so be arranged as required to the lever of varying number, with adjust it is different from
Gyration.
Above is the preferred embodiments of the present invention, without departing from the inventive concept of the premise, also should be regarded as the present invention's
Protection domain.
Claims (5)
- A kind of 1. rotary body coating clamp, it is characterised in that：Rotating disk is set in coating confined space, and the rotating disk is consolidated with rotating shaft Fixed, rotating shaft is connected with the motor output shaft outside coating confined space；Multigroup pallet, the outer rim of the pallet are set on the rotating disk Gear is respectively provided with, wherein, it is driving pallet close to the outermost pallet of rotating disk, the gear of the driving pallet is beyond the outer of rotating disk Lateral edges are simultaneously engaged with lever, and the lever is fixed and outside sets teeth corresponding with gear, the gear of the driving pallet Engaged successively with the gear of other pallets, form tumbler.
- 2. rotary body coating clamp according to claim 1, it is characterised in that：The centrally disposed fix bar of the pallet, Workpiece is set in the fix bar.
- 3. rotary body coating clamp according to claim 1, it is characterised in that：Multiple rotate is set to fill on the rotating disk Put.
- 4. rotary body coating clamp according to claim 1, it is characterised in that：The lever is multiple, along the circle of rotating disk Week arrangement.
- 5. rotary body coating clamp according to claim 1, it is characterised in that：Also include adjusting apparatus；The adjustment dress Put including the slideway being radially arranged along rotating disk, slide is set on slideway, lever is fixed on slide, the slide and adjustment bar It is fixed；The adjustment bar is fixed with the handle being arranged on outside coating confined space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711135311.9A CN107699862B (en) | 2017-11-14 | 2017-11-14 | A kind of rotary body coating clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711135311.9A CN107699862B (en) | 2017-11-14 | 2017-11-14 | A kind of rotary body coating clamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107699862A true CN107699862A (en) | 2018-02-16 |
| CN107699862B CN107699862B (en) | 2019-06-18 |
Family
ID=61179572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711135311.9A Active CN107699862B (en) | 2017-11-14 | 2017-11-14 | A kind of rotary body coating clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107699862B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280896A (en) * | 2018-11-30 | 2019-01-29 | 深圳天成真空技术有限公司 | Vacuum coating equipment |
| CN117621969A (en) * | 2024-01-25 | 2024-03-01 | 中航兰田装备制造有限公司 | Self-unloading semitrailer |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030059557A1 (en) * | 2001-09-24 | 2003-03-27 | K.S. Harshavardhan | Planetary multi-substrate holder system for material deposition |
| CN1614078A (en) * | 2003-11-04 | 2005-05-11 | 电子科技大学 | Planar magnetic sputtering-multi-station film coating apparatus |
| JP2006063391A (en) * | 2004-08-26 | 2006-03-09 | Nippon Piston Ring Co Ltd | Device for holding workpiece for film formation |
| CN2848874Y (en) * | 2005-11-04 | 2006-12-20 | 夏建业 | Rotary plating object frame for vacuum film plating |
| CN100999814A (en) * | 2006-01-14 | 2007-07-18 | 鸿富锦精密工业（深圳）有限公司 | Multifunctional sputtering system and process |
| CN101619443A (en) * | 2009-07-27 | 2010-01-06 | 浙江工业大学 | High-efficiency film coating machine for solar thermal-collecting tubes |
| JP2012224878A (en) * | 2011-04-15 | 2012-11-15 | Nissan Motor Co Ltd | Mechanism for moving workpiece for vapor deposition apparatus, and vapor deposition method using the same |
| CN103361616A (en) * | 2012-04-11 | 2013-10-23 | 庞厚星 | Vacuum ion plating triaxial constant speed successive rotating coating film device |
| CN103590006A (en) * | 2013-12-02 | 2014-02-19 | 上海沃家真空设备科技有限公司 | Multifunctional vacuum-coating machine rotating rack |
| CN105603377A (en) * | 2016-02-23 | 2016-05-25 | 东莞市汇成真空科技有限公司 | Vacuum plating workpiece rotating stand motion mechanism allowing speed to be adjusted independently during revolution and autorotation |
| CN106835059A (en) * | 2017-02-27 | 2017-06-13 | 江阴市中兴光电实业有限公司 | Coating machine diaphragm rotating mechanism with adjustable angle planetary plate |
| CN207435540U (en) * | 2017-11-14 | 2018-06-01 | 沈阳博帅材料科技有限公司 | A kind of rotary body coating clamp |
-
2017
- 2017-11-14 CN CN201711135311.9A patent/CN107699862B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030059557A1 (en) * | 2001-09-24 | 2003-03-27 | K.S. Harshavardhan | Planetary multi-substrate holder system for material deposition |
| CN1614078A (en) * | 2003-11-04 | 2005-05-11 | 电子科技大学 | Planar magnetic sputtering-multi-station film coating apparatus |
| JP2006063391A (en) * | 2004-08-26 | 2006-03-09 | Nippon Piston Ring Co Ltd | Device for holding workpiece for film formation |
| CN2848874Y (en) * | 2005-11-04 | 2006-12-20 | 夏建业 | Rotary plating object frame for vacuum film plating |
| CN100999814A (en) * | 2006-01-14 | 2007-07-18 | 鸿富锦精密工业（深圳）有限公司 | Multifunctional sputtering system and process |
| CN101619443A (en) * | 2009-07-27 | 2010-01-06 | 浙江工业大学 | High-efficiency film coating machine for solar thermal-collecting tubes |
| JP2012224878A (en) * | 2011-04-15 | 2012-11-15 | Nissan Motor Co Ltd | Mechanism for moving workpiece for vapor deposition apparatus, and vapor deposition method using the same |
| CN103361616A (en) * | 2012-04-11 | 2013-10-23 | 庞厚星 | Vacuum ion plating triaxial constant speed successive rotating coating film device |
| CN103590006A (en) * | 2013-12-02 | 2014-02-19 | 上海沃家真空设备科技有限公司 | Multifunctional vacuum-coating machine rotating rack |
| CN105603377A (en) * | 2016-02-23 | 2016-05-25 | 东莞市汇成真空科技有限公司 | Vacuum plating workpiece rotating stand motion mechanism allowing speed to be adjusted independently during revolution and autorotation |
| CN106835059A (en) * | 2017-02-27 | 2017-06-13 | 江阴市中兴光电实业有限公司 | Coating machine diaphragm rotating mechanism with adjustable angle planetary plate |
| CN207435540U (en) * | 2017-11-14 | 2018-06-01 | 沈阳博帅材料科技有限公司 | A kind of rotary body coating clamp |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280896A (en) * | 2018-11-30 | 2019-01-29 | 深圳天成真空技术有限公司 | Vacuum coating equipment |
| CN109280896B (en) * | 2018-11-30 | 2023-08-18 | 深圳天成真空技术有限公司 | Vacuum coating machine |
| CN117621969A (en) * | 2024-01-25 | 2024-03-01 | 中航兰田装备制造有限公司 | Self-unloading semitrailer |
| CN117621969B (en) * | 2024-01-25 | 2024-04-12 | 中航兰田装备制造有限公司 | Self-unloading semitrailer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107699862B (en) | 2019-06-18 |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221104 Address after: 110117 No. 10-2, Hunnan Second Road, Hunnan District, Shenyang City, Liaoning Province (2003) Patentee after: Shenyang Juncheng Material Technology Co.,Ltd. Address before: 110180 No. 10-2, Hunnan Second Road, Hunnan District, Shenyang, Liaoning (1666) Patentee before: SHENYANG BOSHUAI MATERIAL TECHNOLOGY Co.,Ltd. |