CN103361616B - Vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus - Google Patents
Vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus Download PDFInfo
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- CN103361616B CN103361616B CN201210104658.8A CN201210104658A CN103361616B CN 103361616 B CN103361616 B CN 103361616B CN 201210104658 A CN201210104658 A CN 201210104658A CN 103361616 B CN103361616 B CN 103361616B
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- planet carrier
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- gear ring
- row star
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Abstract
The invention discloses a kind of vacuum ion plating three axle at the uniform velocity to connect and turn film coating apparatus, comprise sun gear, inner row star-wheel, transition satellite gear, outer row star-wheel, gear ring, gear ring gag lever post, planet carrier and planet carrier stationary installation.Sun gear is arranged on the central position of planet carrier, the radius radioactivity such as described inner row star-wheel, transition satellite gear and outer row star-wheel are respectively are arranged between sun gear and gear ring, gear ring gag lever post is fixed on gear ring, and planet carrier is fixed by planet carrier stationary installation.The present invention is that a kind of vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus, achieves three axles and at the uniform velocity connects and turn (revolution, rotation, a rotation) function; Vacuum ion plating three axle at the uniform velocity connects the axial optional position that turn convenient film coating apparatus can be arranged on arbitrarily movable axis, and quantity is not limit; Cancel shift fork, without necessity of shift fork location; Rotary work dish is installed plated parts and can upper dress or lower extension also can be carried out simultaneously simultaneously, simplifies installation, takes off parts operation; Make full use of the useful space, multiplication axis of rotation quantity.
Description
Technical field
What the present invention relates to is that a kind of vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus.
Background technology
At present, the working rotary table of vaccum ion coater has three axles: the 1st turning axle is large rotary work dish axle, 2nd turning axle is movable rotation-shaft, 3rd turning axle is the plated preassembling axle of rotary work dish, its structural principle is that gear motor drives large rotary work dish axle, through geartransmission, movable rotation-shaft is rotated, movable rotation-shaft is provided with rotary work dish, rotary work dish outer ring has some positive rhombuses can install the turning axle of plated parts, the positive rhombus turning axle that can install plated parts carries out angular travel under stationary shaft shift fork 14 is stirred (if rotator is six squares, scratch diskette often rotates a circle being fixed on, rotator rotates 60 degree, if successively 12 sides then scratch diskette often rotate a circle, rotator rotates 30 degree, by that analogy) be rotated in place and namely stop, wait for and stirring next time.The drawback of said apparatus is the turning axle that positive rhombus can install plated parts is not rotate continuously but intermittent rotary, can not ensure that plated parts can be subject to the bombardment (namely can only realize at the uniform velocity revolving round the sun, at the uniform velocity rotation, can not realize at the uniform velocity rotating) of ionic fluid at any time equably, and the 3rd turning axle can only be positioned at rotary work dish wait radius one circle.
Summary of the invention
The object of this invention is to provide a kind of three axles that realize at the uniform velocity to connect vacuum ion plating three axle turned and at the uniform velocity connect and turn film coating apparatus.
The technical scheme that the present invention is adopted for achieving the above object is: a kind of vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus, comprise sun gear, inner row star-wheel, transition satellite gear, outer row star-wheel, gear ring, gear ring gag lever post, planet carrier and planet carrier stationary installation, sun gear is arranged on the central position of planet carrier, the radius radioactivity such as described inner row star-wheel, transition satellite gear and outer row star-wheel are respectively are arranged between sun gear and gear ring, gear ring gag lever post is fixed on gear ring, and planet carrier is fixed by planet carrier stationary installation.
Described gear ring gag lever post is motionless relative to stationary shaft, and gear ring, planet carrier are relative to sun gear differential speed rotation.
Described planet carrier upper end is provided with assembling device pilot hole.
Described planet carrier lower end is provided with lower hang device pilot hole.
Described upper assembling device pilot hole and lower hang device pilot hole and inner row star-wheel, transition satellite gear and outer row star-wheel is each is integrated altogether.
The present invention is that a kind of vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus, achieves three axles and at the uniform velocity connects and turn (revolution, rotation, a rotation) function; Three axles at the uniform velocity connect the axial optional position that turn convenient film coating apparatus can be arranged on arbitrarily movable axis, and quantity is not limit; Cancel shift fork, without necessity of shift fork location; Rotary work dish is installed plated parts and can upper dress or lower extension also can be carried out simultaneously simultaneously, simplifies installation, takes off parts operation; Make full use of the useful space, multiplication axis of rotation quantity.
Accompanying drawing explanation
Fig. 1 is that a kind of vacuum ion plating three of the present invention axle at the uniform velocity connects the front view turning film coating apparatus.
Fig. 2 is that a kind of vacuum ion plating three of the present invention axle at the uniform velocity connects the vertical view turning film coating apparatus.
Fig. 3 is that a kind of vacuum ion plating three of the present invention axle at the uniform velocity connects the side-view turning film coating apparatus.
Fig. 4 is that a kind of vacuum ion plating three of the present invention axle at the uniform velocity connects the stereographic map turning film coating apparatus.
Fig. 5 is that a kind of vacuum ion plating three of the present invention axle at the uniform velocity connects the work pivoted frame schematic diagram turning film coating apparatus.
Embodiment
As shown in Figure 1, Figure 2, Figure 3 and Figure 4, vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus, be exactly that sun gear and gear ring export moment needed for rotation and the one arranging turning axle that equidistantly doubles at the uniform velocity connects rotary device jointly, comprise sun gear 1, inner row star-wheel 2, transition satellite gear 3, outer row star-wheel 4, gear ring 5, gear ring gag lever post 8, planet carrier 6 and planet carrier stationary installation 9, sun gear 1 is arranged on the central position of planet carrier 6.Inner row star-wheel 2, the radius radioactivity such as transition satellite gear 3 and outer row star-wheel 4 are respectively are arranged between sun gear 1 and gear ring 5, gear ring gag lever post 8 is fixed on gear ring 5, planet carrier 6 is fixed by planet carrier stationary installation 9, the moment that the transmission of sun gear 1 power is spread out of by movable axis drives inner row star-wheel 2 by sun gear 1, then transition satellite gear 3 is passed to, pass to outer row star-wheel 4 again, gear ring 5 is passed torque to by outer row star-wheel 4, now because the gear ring gag lever post 8 of gear ring 5 does not have displacement movement each other with the stationary shaft 15 on large rotary work dish, thus gear ring 5 has rotary motion relative to sun gear 1, adjacent outer satellite gear 4 is passed torque to again by gear ring 5, pass to adjacent transition satellite gear 3 again.The convenient axle group that links comprises lower hang device pilot hole 7, upper assembling device pilot hole 10 separately and inner row star-wheel 2, transition satellite gear 3, outer row star-wheel 4 is each to be integrated altogether, so when the 1st turning axle 11 is large rotary work dish axle, when 2nd turning axle 12 is movable rotation-shaft uniform rotation, 3rd turning axle 13 is plated preassembling axle (link convenient axle group) the also uniform rotation thereupon (rotation) of rotary work dish, thus realize three axles at the uniform velocity connect turn, again because the transmission of power is that sun gear 1 passes to gear ring 5 from inside to outside, pass torque to adjacent outer row star-wheel 4 and adjacent transition satellite gear 3 more simultaneously, thus not only outboard gears 4 achieves at the uniform velocity spinfunction, inner row star-wheel 2 simultaneously, transition satellite gear 3, also at the uniform velocity rotate thereupon.
Vacuum ion plating three axle of the present invention at the uniform velocity connects the principle of work turning film coating apparatus: when sun gear 1 is driven rotation by movable axis, because because gear ring 5 is motionless relative to stationary shaft 15 under the effect of gear ring gag lever post 8, now sun gear 1 is then provided with relative angular travel with between movable axis thereupon, the transmission of power is by sun gear 1 simultaneously, inner row star-wheel 2, transition satellite gear 3, outer row star-wheel 4 gives gear ring 5, adjacent outer row star-wheel 4 and adjacent transition satellite gear 3 is passed to again by gear ring 5, the convenient axle group that links comprises lower hang device pilot hole 7 and upper assembling device pilot hole 10 is independent and inner row star-wheel 2, transition satellite gear 3, outer row star-wheel 4 is each to be integrated altogether, this device can carry out separately upper dress or the operation of lower extension parts, also can carry out above-mentioned operation simultaneously, upper dress, lower extension all can the plated parts of easy installation different diameter.
The present invention is under the prerequisite of not changing existing vaccum ion coater physical construction, can realize, at the axial direction due of movable rotation-shaft, some rotary work dishes are installed, installation site and quantity do not stress the impact of transmission, cancel shift fork, simplify mode of operation, rotary work dish is multiplex, on fill plated parts and can hang plated parts down again.Can improve receiving member ratio (such as: if when former rotary work dish can install 20 plated parts new rotary work dish can install 30 plated parts and more than, spacing between parts and between former rotary work disk component spacing constant), raise labour productivity 50% and more than, improve the consistence of plated parts plated film bonding strength and coating film thickness.
The above; be only and invent preferably embodiment; but scope is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the present invention discloses; be equal to according to technical scheme of the present invention and inventive concept thereof and replace or change, all should be encompassed within protection scope of the present invention.
Claims (1)
1. vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus, it is characterized in that: comprise sun gear, inner row star-wheel, transition satellite gear, outer row star-wheel, gear ring, gear ring gag lever post, planet carrier and planet carrier stationary installation, sun gear is arranged on the central position of planet carrier, described inner row star-wheel, transition satellite gear and outer row star-wheel the radius radioactivity such as are respectively arranged between sun gear and gear ring, gear ring gag lever post is fixed on gear ring, planet carrier is fixed by planet carrier stationary installation, described gear ring gag lever post is motionless relative to stationary shaft, gear ring, planet carrier is relative to sun gear differential speed rotation, described planet carrier upper end is provided with assembling device pilot hole, described planet carrier lower end is provided with lower hang device pilot hole, described upper assembling device pilot hole and lower hang device pilot hole and inner row star-wheel, transition satellite gear and outer row star-wheel is each is integrated altogether.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210104658.8A CN103361616B (en) | 2012-04-11 | 2012-04-11 | Vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210104658.8A CN103361616B (en) | 2012-04-11 | 2012-04-11 | Vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103361616A CN103361616A (en) | 2013-10-23 |
| CN103361616B true CN103361616B (en) | 2015-09-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210104658.8A Expired - Fee Related CN103361616B (en) | 2012-04-11 | 2012-04-11 | Vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus |
Country Status (1)
| Country | Link |
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| CN (1) | CN103361616B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022018282A1 (en) * | 2020-07-24 | 2022-01-27 | Fox Biosystems Nv | Sputter deposition system |
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| CN103590006B (en) * | 2013-12-02 | 2015-12-30 | 上海沃家真空设备科技有限公司 | A kind of multifunctional vacuum Revolving rack of film-plating machine |
| CN104630707B (en) * | 2015-01-23 | 2016-04-13 | 中国航天时代电子公司 | A kind of microwave device coating film treatment device and method suppressing secondary electron emission |
| CN105734514B (en) * | 2016-04-26 | 2017-12-29 | 成都极星等离子科技有限公司 | A kind of magnetic control sputtering device and its method for plating black coating on perforated metal product using metal targets |
| CN106244993B (en) * | 2016-09-13 | 2019-10-11 | 宇龙计算机通信科技(深圳)有限公司 | A kind of vacuum plating pivoted frame and vacuum coating equipment |
| CN107723662A (en) * | 2017-09-28 | 2018-02-23 | 苏州星蓝纳米技术有限公司 | The PVD coatings and its realization device of a kind of different-thickness |
| CN107699862B (en) * | 2017-11-14 | 2019-06-18 | 沈阳博帅材料科技有限公司 | A kind of rotary body coating clamp |
| CN109852939B (en) * | 2019-03-29 | 2021-04-27 | 陕西理工大学 | Tool coating rotating stand device of high-vacuum multi-arc ion coating machine |
| CN112195447A (en) * | 2020-10-26 | 2021-01-08 | 天长市石峰玻璃有限公司 | Vacuum coating machine for glass bottle based on automatic control |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101319305A (en) * | 2007-06-06 | 2008-12-10 | 茂德科技股份有限公司 | Physics vapour deposition system |
| CN201729872U (en) * | 2010-05-25 | 2011-02-02 | 北京北仪创新真空技术有限责任公司 | Planetary workpiece carrier |
| CN201793727U (en) * | 2010-08-03 | 2011-04-13 | 深圳市振恒昌实业有限公司 | Planet gear mouse cage type work rest |
| CN202543311U (en) * | 2012-04-11 | 2012-11-21 | 庞厚星 | Vacuum ion plating three-axis constant-speed continuous-rotation coating device |
-
2012
- 2012-04-11 CN CN201210104658.8A patent/CN103361616B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101319305A (en) * | 2007-06-06 | 2008-12-10 | 茂德科技股份有限公司 | Physics vapour deposition system |
| CN201729872U (en) * | 2010-05-25 | 2011-02-02 | 北京北仪创新真空技术有限责任公司 | Planetary workpiece carrier |
| CN201793727U (en) * | 2010-08-03 | 2011-04-13 | 深圳市振恒昌实业有限公司 | Planet gear mouse cage type work rest |
| CN202543311U (en) * | 2012-04-11 | 2012-11-21 | 庞厚星 | Vacuum ion plating three-axis constant-speed continuous-rotation coating device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022018282A1 (en) * | 2020-07-24 | 2022-01-27 | Fox Biosystems Nv | Sputter deposition system |
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| CN103361616A (en) | 2013-10-23 |
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