CN107723662A - The PVD coatings and its realization device of a kind of different-thickness - Google Patents
The PVD coatings and its realization device of a kind of different-thickness Download PDFInfo
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- CN107723662A CN107723662A CN201710896696.4A CN201710896696A CN107723662A CN 107723662 A CN107723662 A CN 107723662A CN 201710896696 A CN201710896696 A CN 201710896696A CN 107723662 A CN107723662 A CN 107723662A
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- work rest
- thickness
- baffle plate
- binder course
- different
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention proposes a kind of the PVD coatings and its realization device of different-thickness.Using the PVD coatings of the different-thickness of the present invention, can effectively solve workpiece, mould or the drill bit of surface not at grade, when PVD is surface-treated the problem of face coat consistency of thickness, so that the internal stress that PVD coatings are applied to workpiece reduces, effectively extend the service life of workpiece, mould or drill bit.In addition, can also realize workpiece, mould or the drill bit of roughing and the finishing coating together in same stove, production efficiency is improved, saves the cost that different coating list is opened to a stove.
Description
Technical field
The invention belongs to technical field of surface, it is related to the PVD coatings and its realization device of a kind of different-thickness.
Background technology
At present, can be in workpiece, mould in order to improve hard alloy and the wear-resistant of high-speed steel, high temperature resistant and lubricity
Or the surface of drill bit applies different coatings to improve its performance.At present, physical vapour deposition (PVD) (PVD,
PhysicalVaporDeposition) grown up on the basis of modern physicses, chemistry, materialogy, electronics etc. are multidisciplinary
An advanced engineering technology.It is by target (plating thin-film material) under vacuum conditions, deposited by physical process
Process on substrate (needing film-coating workpiece) surface.At present, application of the PVD coatings on instrument, mould and drill bit be increasingly
Extensively, and performance improvement is also apparent from.
But current PVD coatings are generally all to pursue uniform thickness, so the deep bid used is also three-dimensional rotation formula
, the first dimension rotates to be the rotation of deep bid in itself, the rotation for rotating to be tree of the second dimension, the rotation for rotating to be knife of the third dimension
Turn.Using this equipment, the coating layer thickness that maximum advantage is finally to obtain very uniformly, but can also have individual defect, exactly need
The thickness of the coating plated on the surface of film-coating workpiece is all consistent.That is, using the deep bid of three-dimensional rotation formula, can not do
Go out the inconsistent PVD coatings of coating film thickness.But, it is necessary to one portion for some special workpiece, mould or drill bits
The coating layer thickness divided is slightly thin or inconsistent, so just can guarantee that the overall stress of workpiece, mould or drill bit so that use the longevity
Life can more extend.Or roughing workpiece, mould or the drill bit different with finishing are needed in same stove,
It is rough machined to be generally required for thick coating, and what is finished usually requires shallow layer, then just compare in same stove and be difficult to reality
It is existing.
The content of the invention
In order to solve problem above, the present invention proposes a kind of the PVD coatings and its realization device of different-thickness.Using this hair
The PVD coatings of bright different-thickness, can effectively solve workpiece, mould or the drill bit of surface not at grade,
When PVD is surface-treated the problem of face coat consistency of thickness so that the internal stress that PVD coatings are applied to workpiece reduces, effectively
Extend the service life of workpiece, mould or drill bit.In addition, it can also realize workpiece, mould or the brill of roughing and finishing
Head coating together in same stove, improves production efficiency, saves the cost that different coating list is opened to a stove.
The PVD coatings of a kind of different-thickness, it is characterised in that it includes matrix 1, binder course 2, functional layer 3, and functional layer can
To be that single coating or two different coatings are realized by single or multiple circulations.Wherein binder course 2 includes thickness
Binder course 21 and thin binder course 22, functional layer include thick functional layer 31 and thin functional layer 32.
Further, binder course 2 is AlCr70/30, TiAl50/50, Ti, AlTi60/40, Cr one of which, with reference to
The thickness of layer 2 is 0.01-0.8um.More specifically, when binder course 2 is AlCr70/30, the thickness of binder course 2 is 0.2-
0.3um or 0.5-0.8um；When binder course 2 is TiAl50/50 or Ti, the thickness of binder course 2 is 0.03-0.15um；Work as knot
When conjunction layer 2 is AlTi60/40, the thickness of binder course 2 is 0.03-0.15um；When binder course 2 is Ti, the thickness of binder course 2 is
0.002-0.01um；When binder course 2 is Cr, the thickness of binder course 2 is 0.01-0.08um.
Further, functional layer 3 is AlCr70/30, TiSi85/15, TiAl50/50, Ti, AlTi67/33, AlTi60/
One kind in 40, Cr, or two kinds of different coatings are by single or multiple circulation realizations.Finally, the gross thickness of functional layer 3
For 0.12um or 1.19-2.2um.
In some case study on implementation, the PVD coatings of different-thickness are realized on same workpiece, mould or drill bit.
In other case study on implementation, the PVD coatings of different-thickness are realized on different workpiece, mould or drill bit.
A kind of PVD coatings of different-thickness are realized by following device：It is a kind of to be applied to the new of vacuum coating field
The work rest of type, it includes：Work rest deep bid 4, work rest shallow bid, shift fork 6, fixed support 7 and baffle plate 8.Described work rest
Multiple work rest shallow bids are installed on deep bid 4, multiple work rest sleeve pipes, each work rest are installed on described work rest shallow bid
Shallow bid is provided with one or more shift forks 6, and each shift fork 6 provides one or more contacts.Described work rest shallow bid and shift fork 6
It is fixed on respectively by the main shaft and shifting fork bar 61 of work rest shallow bid on fixed support 7.Described baffle plate 8 is consolidated by fixing device
It is scheduled on shifting fork bar 61.
Further, the fixing device of described baffle plate 8 is an annular, has two screw holes to differ in size in annular.
When installing baffle plate 8, baffle plate 8 is inserted into the embedding mouth of annular, is screwed on after primary screw 830 then is inserted into primary screw hole, baffle plate 8 is pacified
On circular fixture 800.Then, ring device is interspersed on shifting fork bar 61, and adjusted to the height for needing shallow layer
Degree, most king bolt 820 is screwed on after inserting king bolt hole at last, and baffle plate 8 is arranged on into shifting fork bar 61 by circular fixture 800
On.
Further, described baffle plate 8 and circular fixture 800 are stainless steel because the material of stainless steel compared with
For stabilization.In addition, described baffle plate 8 and circular fixture 800 needs periodically to carry out blasting treatment, the week of usual blasting treatment
Phase is the 1-5 months.
Further, the quantity of described baffle plate 8 is for 1 or multiple.Specifically, according to needed in same stove apply scumbling
Depending on the quantity of the workpiece of layer, that is to say, that, it is necessary to which the workpiece amount for applying shallow layer is more, the quantity of baffle plate 8 is also more.Baffle plate
8 installation site is the position of shallow layer.
Further, realize that the work rest of the PVD coatings of different-thickness works as follows：In coating procedure
In, power transmission shaft is arranged at work rest bottom, and power transmission shaft can cause whole deep bid 4 to rotate (revolution).Deep bid 4 rotate (revolution) when
Wait and drive little gear, be workpiece shallow bid in little gear, workpiece shallow bid can also rotate (rotation) under the drive of little gear.Shift fork 6
Stir little gear so that knife rotates, that is to say, that has one or more contact between shift fork 6 and work rest shallow bid, in contact
Connection under can change the anglec of rotation of each workpiece sleeve pipe.So, by the three-dimensional rotation of deep bid 4, ensure that workpiece exists
It can be applied very uniform during coating.Again because being mounted with baffle plate 8 in the place for applying shallow layer, then baffle plate
8 uniform during the three-dimensional rotation of deep bid 4 can stop to fall some coatings so that coating is thinning compared to other places,
But coating uniform.
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the claim for limiting the present invention.Any modification, the equal replacement made within the spirit and principles of the invention
With improve etc., should be included within the scope of the present invention.
Brief description of the drawings
Fig. 1 is the cross section structure diagram of the PVD coatings with different-thickness of the present invention.
Fig. 2 is the work rest schematic diagram of prior art.
Fig. 3 is the work rest schematic diagram of specific implementation case 1.
Fig. 4 is the work rest schematic diagram of specific implementation case 2.
Fig. 5 is the front view of the combination of baffle plate and baffle fixing.
Fig. 6 is the side view of the combination of baffle plate and baffle fixing.
Main element symbol description：
Following embodiment will combine above-mentioned accompanying drawing and further illustrate the present invention.
Embodiment
Case 1 is embodied：
The PVD coatings of a kind of different-thickness, it is characterised in that it includes matrix 1, binder course 2, functional layer 3.Wherein combine
Layer 2 includes thick binder course 21 and thin binder course 22, and functional layer 3 includes thick functional layer 31 and thin functional layer 32.Described binder course 2
For AlCr70/30 coatings, the thickness of thick binder course 21 is 0.5um, and the thickness of thin binder course 22 is 0.3um；Described functional layer 3
Realized for AlCr70/30 coatings and TiSi85/15 coatings by four circulations, the thickness of final thick functional layer 31 is
1.32um, the thickness of thin functional layer 32 is 0.79um.
, it is necessary to which the workpiece of thick coating is rough machined drill bit, it is necessary to which the workpiece of shallow layer is finishing in the implementation case
The drill bit of work, its coating used is consistent, but the thickness of coating is different.Because the amount for needing shallow layer only has a work
One group of work rest on part shallow bid, therefore only need that a baffle plate 8 is installed on adjacent shifting fork bar 61.
A kind of PVD coatings of different-thickness are realized by following device：It is a kind of to be applied to the new of vacuum coating field
The work rest of type, it includes：Work rest deep bid 4, work rest shallow bid, shift fork 6, fixed support 7 and baffle plate 8.Described work rest
Multiple work rest shallow bids are installed on deep bid 4, multiple work rest sleeve pipes, each work rest are installed on described work rest shallow bid
Shallow bid is provided with one or more shift forks 6, and each shift fork 6 provides one or more contacts.Described work rest shallow bid and shift fork 6
It is fixed on respectively by the main shaft and shifting fork bar 61 of work rest shallow bid on fixed support 7.Described baffle plate 8 is consolidated by fixing device
It is scheduled on shifting fork bar 61.
Further, the fixing device of described baffle plate 8 is an annular, has two screw holes to differ in size in annular.
When installing baffle plate 8, baffle plate 8 is inserted into the embedding mouth of annular, is screwed on after primary screw 830 then is inserted into primary screw hole, baffle plate 8 is pacified
On circular fixture 800.Then, ring device is interspersed on shifting fork bar 61, and adjusted to the height for needing shallow layer
Degree, most king bolt 820 is screwed on after inserting king bolt hole at last, and baffle plate 8 is arranged on into shifting fork bar 61 by circular fixture 800
On.
Further, realize that the work rest of the PVD coatings of different-thickness works as follows：In coating procedure
In, power transmission shaft is arranged at work rest bottom, and power transmission shaft can cause whole deep bid 4 to rotate (revolution).Deep bid 4 rotate (revolution) when
Wait and drive little gear, be workpiece shallow bid in little gear, workpiece shallow bid can also rotate (rotation) under the drive of little gear.Shift fork 6
Stir little gear so that knife rotates, that is to say, that has one or more contact between shift fork 6 and work rest shallow bid, in contact
Connection under can change the anglec of rotation of each workpiece sleeve pipe.So, by the three-dimensional rotation of deep bid 4, ensure that workpiece exists
It can be applied very uniform during coating.Again because being mounted with baffle plate 8 in the place for applying shallow layer, then baffle plate
8 uniform during the three-dimensional rotation of deep bid 4 can stop to fall some coatings so that coating is thinning compared to other places,
But coating uniform.
Case 2 is embodied：
The PVD coatings of a kind of different-thickness, it is characterised in that it includes matrix 1, binder course 2, functional layer 3.Wherein combine
Layer 2 includes thick binder course 21 and thin binder course 22, and functional layer 3 includes thick functional layer 31 and thin functional layer 32.Described binder course 2
For TiAl50/50 coatings, the thickness of thick binder course 21 is 0.15um, and the thickness of thin binder course 22 is 0.03um；Described function
Layer 3 is TiAl50/50 coatings, and the thickness of thick functional layer 31 is 1.5um, and the thickness of thin functional layer 32 is 0.3um.
, it is necessary to which the workpiece of thick coating is rough machined drill bit, it is necessary to which the workpiece of shallow layer is finishing in the implementation case
The drill bit of work, its coating used is consistent, but the thickness of coating is different.Because the drill bit for needing to finish is distributed in two
On individual work rest shallow bid, there are the drill bit of one group of needs finishing, another work rest shallow bid on one of work rest shallow bid
On have the drill bit of two groups of needs finishing, therefore need three baffle plates 8 to realize shallow layer altogether.Three baffle plates 8 are separately mounted to
On two shifting fork bars 61, the two shifting fork bars 61 are connected with two work rest shallow bids respectively.
A kind of PVD coatings of different-thickness are realized by following device：It is a kind of to be applied to the new of vacuum coating field
The work rest of type, it includes：Work rest deep bid 4, work rest shallow bid, shift fork 6, fixed support 7 and baffle plate 8.Described work rest
Multiple work rest shallow bids are installed on deep bid 4, multiple work rest sleeve pipes, each work rest are installed on described work rest shallow bid
Shallow bid is provided with one or more shift forks 6, and each shift fork 6 provides one or more contacts.Described work rest shallow bid and shift fork 6
It is fixed on respectively by the main shaft and shifting fork bar 61 of work rest shallow bid on fixed support 7.Described baffle plate 8 is consolidated by fixing device
It is scheduled on shifting fork bar 61.
Further, the fixing device of described baffle plate 8 is an annular, has two screw holes to differ in size in annular.
When installing baffle plate 8, baffle plate 8 is inserted into the embedding mouth of annular, is screwed on after primary screw then is inserted into primary screw hole, baffle plate 8 is installed
On circular fixture 800.Then, ring device is interspersed on shifting fork bar 61, and adjusted to the height for needing shallow layer,
Most king bolt 820 is screwed on after inserting king bolt hole at last, and baffle plate 8 is arranged on shifting fork bar 61 by circular fixture 800.
Further, realize that the work rest of the PVD coatings of different-thickness works as follows：In coating procedure
In, power transmission shaft is arranged at work rest bottom, and power transmission shaft can cause whole deep bid 4 to rotate (revolution).Deep bid 4 rotate (revolution) when
Wait and drive little gear, be workpiece shallow bid in little gear, workpiece shallow bid can also rotate (rotation) under the drive of little gear.Shift fork 6
Stir little gear so that knife rotates, that is to say, that has one or more contact between shift fork 6 and work rest shallow bid, in contact
Connection under can change the anglec of rotation of each workpiece sleeve pipe.So, by the three-dimensional rotation of deep bid 4, ensure that workpiece exists
It can be applied very uniform during coating.Again because being mounted with baffle plate 8 in the place for applying shallow layer, then baffle plate
8 uniform during the three-dimensional rotation of deep bid 4 can stop to fall some coatings so that coating is thinning compared to other places,
But coating uniform.
Embodiment described above, its description is more specific and detailed, but therefore can not be interpreted as to patent of the present invention
The limitation of scope.It should be pointed out that for the person of ordinary skill of the art, the premise of present inventive concept is not being departed from
Under, various modifications and improvements can be made, these belong to protection scope of the present invention.Therefore, the protection of patent of the present invention
Scope should be determined by the appended claims.
Claims (10)
1. the PVD coatings of a kind of different-thickness, it is characterised in that it includes matrix, binder course, functional layer, and functional layer can be
What single coating or two different coatings were realized by single or multiple circulations, wherein binder course includes thick combine
Layer and thin binder course, functional layer include thick functional layer and thin functional layer.
2. the PVD coatings of different-thickness as claimed in claim 1, it is characterised in that：Described binder course is AlCr70/30,
TiAl50/50, Ti, AlTi60/40, Cr one of which, the thickness of binder course is 0.01-0.8um.
3. the PVD coatings of different-thickness as claimed in claim 1, it is characterised in that：Described binder course is AlCr70/30
When, joint thickness is 0.2-0.3um or 0.5-0.8um；When binder course is TiAl50/50 or Ti, joint thickness
For 0.03-0.15um；When binder course is AlTi60/40, joint thickness 0.03-0.15um；When binder course is Ti, knot
It is 0.002-0.01um to close thickness degree；When binder course is Cr, joint thickness 0.01-0.08um.
4. the PVD coatings of different-thickness as claimed in claim 1, it is characterised in that：Functional layer is AlCr70/30, TiSi85/
One kind in 15, TiAl50/50, Ti, AlTi67/33, AlTi60/40, Cr, or two kinds of different coatings pass through single or more
What secondary circulation was realized, the gross thickness of functional layer is 0.12um or 1.19-2.2um.
5. realizing the work rest of the PVD coatings of the different-thickness described in claim 1, it includes：Work rest deep bid, work rest are small
Disk, shift fork, fixed support and baffle plate, multiple work rest shallow bids are installed on described work rest deep bid, described work rest is small
Multiple work rest sleeve pipes are installed, each work rest shallow bid is provided with one or more shift forks, and each shift fork provides one on disk
Or multiple contacts, described work rest shallow bid and shift fork are fixed on fixed branch by the main shaft and shifting fork bar of work rest shallow bid respectively
On frame, described baffle plate is fixed on shifting fork bar by fixing device.
6. work rest as claimed in claim 5, it is characterised in that：Described baffle plate and circular fixture are stainless steel
Matter.
7. work rest as claimed in claim 5, it is characterised in that：Described baffle plate and circular fixture need periodically to carry out
Blasting treatment, the cycle of usual blasting treatment is the 1-5 months.
8. work rest as claimed in claim 5, it is characterised in that：The quantity of described baffle plate is for 1 or multiple.
9. the application process of work rest as claimed in claim 5, it is characterised in that：In coating procedure, work rest bottom has
Power transmission shaft, power transmission shaft can cause whole deep bid to rotate, and drive little gear when big disc spins, are that workpiece is small in little gear
Disk, workpiece shallow bid can also rotate under the drive of little gear, and shift fork stirs little gear so that knife rotate, that is to say, that shift fork with
There is one or more contact between work rest shallow bid, the anglec of rotation of each workpiece sleeve pipe can be changed under the connection of contact；
By the three-dimensional rotation of deep bid, ensure that workpiece can be applied very uniform during coating, but it is because thin applying
The place of coating has been mounted with baffle plate, then baffle plate uniformly can stop to fall some paintings during deep bid three-dimensional rotation
Layer so that coating is thinning compared to other places, but coating uniform.
10. work rest as claimed in claim 5, it is characterised in that：The fixing device of described baffle plate is one annular, in annular
There are two screw holes to differ in size；When installing baffle plate, baffle plate is inserted into the embedding mouth of annular, primary screw is then inserted into primary screw
Screwed on behind hole, baffle plate is arranged on circular fixture；Then, ring device is interspersed on shifting fork bar, and adjusted to need
The height of shallow layer is wanted, is most screwed at last behind king bolt insertion king bolt hole, baffle plate is arranged on by circular fixture and dialled
On fork arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710896696.4A CN107723662A (en) | 2017-09-28 | 2017-09-28 | The PVD coatings and its realization device of a kind of different-thickness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710896696.4A CN107723662A (en) | 2017-09-28 | 2017-09-28 | The PVD coatings and its realization device of a kind of different-thickness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107723662A true CN107723662A (en) | 2018-02-23 |
Family
ID=61208231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710896696.4A Pending CN107723662A (en) | 2017-09-28 | 2017-09-28 | The PVD coatings and its realization device of a kind of different-thickness |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111378929A (en) * | 2018-12-29 | 2020-07-07 | 苏州星蓝纳米技术有限公司 | Novel P coating |
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| US9920418B1 (en) * | 2010-09-27 | 2018-03-20 | James Stabile | Physical vapor deposition apparatus having a tapered chamber |
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| CN202139292U (en) * | 2011-06-29 | 2012-02-08 | 无锡启恒科技有限公司 | Novel workpiece holder applied to field of vacuum coating |
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| CN111378929A (en) * | 2018-12-29 | 2020-07-07 | 苏州星蓝纳米技术有限公司 | Novel P coating |
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Application publication date: 20180223 |