CN103252939B - Chromium nitride/boron nitride titanium nano composite multi-layer coating cutter and preparation method thereof - Google Patents
Chromium nitride/boron nitride titanium nano composite multi-layer coating cutter and preparation method thereof Download PDFInfo
- Publication number
- CN103252939B CN103252939B CN201310184346.7A CN201310184346A CN103252939B CN 103252939 B CN103252939 B CN 103252939B CN 201310184346 A CN201310184346 A CN 201310184346A CN 103252939 B CN103252939 B CN 103252939B
- Authority
- CN
- China
- Prior art keywords
- layer
- cutter
- crn
- stress gradient
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 70
- 239000011248 coating agent Substances 0.000 title claims abstract description 66
- 238000002360 preparation method Methods 0.000 title claims abstract description 25
- 239000002114 nanocomposite Substances 0.000 title claims abstract description 24
- 239000010936 titanium Substances 0.000 title claims abstract description 14
- 229910052582 BN Inorganic materials 0.000 title claims abstract description 13
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 title claims abstract description 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims abstract description 13
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 title claims abstract description 13
- 229910052719 titanium Inorganic materials 0.000 title claims abstract description 13
- 229910010060 TiBN Inorganic materials 0.000 claims abstract description 25
- 230000008021 deposition Effects 0.000 claims abstract description 20
- 239000011651 chromium Substances 0.000 claims abstract description 16
- 239000002131 composite material Substances 0.000 claims abstract description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 44
- 239000011159 matrix material Substances 0.000 claims description 27
- 229910052757 nitrogen Inorganic materials 0.000 claims description 22
- 238000004140 cleaning Methods 0.000 claims description 19
- 239000011230 binding agent Substances 0.000 claims description 17
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 8
- 238000005137 deposition process Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 8
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 7
- 150000002500 ions Chemical class 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000000151 deposition Methods 0.000 abstract description 18
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000007797 corrosion Effects 0.000 abstract description 2
- 238000005260 corrosion Methods 0.000 abstract description 2
- 238000010849 ion bombardment Methods 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 23
- 238000005520 cutting process Methods 0.000 description 18
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 239000002173 cutting fluid Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 230000000740 bleeding effect Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 229910019590 Cr-N Inorganic materials 0.000 description 1
- 229910019588 Cr—N Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000003913 materials processing Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
The invention provides a chromium nitride/boron nitride titanium nano composite multi-layer coating cutter, which at least comprises a cutter base, a wearing layer and a combined layer deposited on the cutter base, and further comprises a buffer layer and a stress gradient layer, wherein the buffer layer is adhered to the combined layer; the stress gradient layer is adhered to the buffer layer; the wearing layer is adhered to the stress gradient layer; the combined layer is formed in a Cr ion bombardment mode; the buffer layer is formed in a low-energy Cr ion deposition mode; the stress gradient layer is CrN; and the wearing layer is a nano multi-layer composite coating which is formed by alternatively laminating CrN and TiBN. The coating cutter not only has good wearing resistance but also has good corrosion resistance due to the multi-layer structure. The invention further provides a preparation method of the cutter. Equipment and process for preparing the cutter are both simple, and the preparation process is easy to control, so that good industrial application prospects are achieved.
Description
Technical field
The present invention relates to a kind of superhard coating cutter, particularly relate to a kind of chromium nitride/boron nitride titanium nanocomposite laminated coating, and scribble the preparation method of cutter of this coating, belong to thin film materials art.
Summary of the invention
Machining is a kind of main method that in machine-building, materials processing is shaped, and referring to by using cutting tool, removing the part of machining object excess surface, having reached the processing method of the shape of regulation, size and quality.Along with the development of machinery manufacturing industry, in process, do not use the high speed of any cutting fluid, dry cutting is a new green manufacturing technique, it can obtain cleaning, free of contamination chip, eliminates a large amount of expenses of cutting fluid and process thereof simultaneously, reduces production cost.According to statistics, in large-duty manufacturing enterprise, the supply of cutting fluid and cutting fluid, maintenance and recycling expense are added together and will account for 13% ~ 17% of workpiece manufacture cost, also bring huge environmental cost, and cutter expense only account for 2% ~ 5% simultaneously.Dry cutting be not simple few with or without cutting fluid, consider to have lacked the lubrication of cutting fluid, cooling, the auxiliary function such as chip removal and chip breaking.Dry cutting is owing to weakening cutting fluid effect, amount of heat can be produced in cutting zone, cutting data is larger, temperature in cutting zone is also higher, causes cutter life to shorten, and production efficiency reduces, and machined surface quality is deteriorated, therefore, can dry cutting carry out smoothly, and cutter plays key effect.The cutter of high-speed dry cutting must can bear higher cutting temperature than wet type cutting tool, require that there is less coefficient of friction at cutter and interface, work piece contact zone, to solve the dependence to the cooling of cutting fluid, lubrication and chip removal effect of cutter when traditional wet is cut simultaneously.In high-speed cutting processing, the cutter material of employing, except requiring to have except good heat endurance, impact resistance, wearability and thermal fatigue resistance, also requires between workpiece to be machined material, must have less chemical affinity.Normally used metal knife cannot meet these day by day harsh requirements above-mentioned, so employing material surface modifying technology, superhard cutter coating material is plated on metal cutting tool surface, the advantage of its " superhard, tough, wear-resisting, self-lubricating " can be played, thus greatly improve the durability of metal cutting tool in modern process and adaptability.
TiN coating is because its higher hardness becomes conventional cutter coat, but a large amount of defect limits the further increase of material hardness in this coating column crystal, and serviceability temperature more than 500 DEG C time coating just start to lose efficacy and significantly limit the application and development of TiN coating; Adulterate in TiN light element, such as B element, the nano composite structure of brilliant rice received by the Ti-B-N amorphous parcel that can form two-phase or three-phase, can improve the hardness of coating, dry friction performance and red hardness greatly.CrN coating, due to high, wear-resistant, the high temperature resistant especially excellent corrosion resistance of hardness, makes it be used widely on injection mold and wear parts.
Nano-multilayer film is the recent tendency of current cutter development, and its mechanical property is better than common metal nitride coatings greatly, has cutting ability more better than single coating.For the high request of current cutting technology to cutting tool, if Ti-B-N coat system and Cr-N coat system to be combined preparation CrN/TiBN nano composite super-hard coating, so necessarily there is important prospects for commercial application.
Summary of the invention
The invention solves the problem in background technology, provide a kind of chromium nitride/boron nitride titanium nanocomposite laminated coating cutter, this coated cutting tool not only has good anti-wear performance, simultaneously because sandwich construction has good decay resistance.
Realizing the technical scheme that above-mentioned purpose of the present invention adopts is:
A kind of chromium nitride/boron nitride titanium nanocomposite laminated coating cutter, the binder course at least comprising tool matrix, wearing layer and be deposited on tool matrix, also include cushion and stress gradient layer, cushion is attached on binder course, the attachment of stress gradient layer on the buffer layer, wearing layer is attached on stress gradient layer, wherein binder course is formed by high energy Cr Ions Bombardment, cushion is formed by low energy Cr ion deposition, stress gradient layer is CrN, and wearing layer is the alternately laminated nanometer multilayer composite coating of CrN and TiBN.
The thickness of binder course is 10 ~ 30 nanometers, and the thickness of cushion is 40 ~ 200 nanometers.
The thickness of stress gradient layer is 300 ~ 600 nanometers, thickness direction has stress gradient 2 ~ 4 in stress gradient layer.
The gross thickness of wearing layer is 1 ~ 5 micron, and in wearing layer, individual layer CrN thickness is 2 ~ 10 nanometers, and individual layer TiBN thickness is 1 ~ 5 nanometer, CrN and TiBN in wearing layer is equipped with 100 ~ 3000 layers.
Described tool matrix is high-speed steel or hard alloy cutter.
The present invention additionally provides the preparation method of above-mentioned cutter simultaneously, comprises the following steps: be placed on by tool matrix on work rest, first carries out aura cleaning to tool matrix; After cleaning terminates, under ar gas environment, vacuum 0.01 Pa ~ 0.1Pa ,-800V ~-1000V bias condition, open Cr target, make with high energy Cr Ions Bombardment tool matrix and deposit on tool matrix to obtain binder course; Then, under ar gas environment, vacuum 0.1 Pa ~ 1Pa ,-50V ~-200V bias condition, low energy Cr ion is deposited on binder course and generates cushion; Again under nitrogen environment, vacuum 0.5Pa ~ 4.0Pa ,-50V ~-250V bias condition, deposit CrN stress gradient layer on the buffer layer, in deposition process, increase nitrogen pressure; Last under nitrogen environment, vacuum 0.5Pa ~ 4.0Pa ,-50V ~-350V bias condition, open TiB
2target, CrN stress gradient layer deposits wearing layer, and wearing layer is the alternately laminated multi-layer composite coatings of CrN and TiBN; In aura cleaning and coating deposition process, temperature controls at 200 ~ 400 DEG C, has deposited rear cooling naturally, i.e. obtained chromium nitride/boron nitride titanium nanocomposite laminated coating cutter.
Tool matrix is high-speed steel or hard alloy cutter, and in preparation process, tool matrix revolves round the sun with work rest, and the revolution speed of work rest is 1.5 ~ 12rpm.
The thickness of stress gradient layer is 300 ~ 600 nanometers, and in the process of deposition stress gradient layer, the pressure of nitrogen carries out from small to large regulating and is divided into 2 ~ 4 stages, and the time of each phase lasts is identical.
In the present invention, adopt high energy Cr Ions Bombardment tool surface, the pollution of getting rid of tool surface can be bombarded further on the one hand, atom on the other hand in backing material also can be sputtered out and deposit with Cr Ar ion mixing, and incident ion is stayed in substrate, so just form the metallurgical bonding layer of solid solution condition at " film-Ji interface " place, the existence of binder course can improve the adhesive force of coating greatly; Reduce substrate bias afterwards, low energy Cr ion is deposited directly to tool surface and forms cushion, and face-centred cubic metal level can alleviate film internal stress; Then progressively add nitrogen, deposition CrN ceramic layer, because nitrogen progressively adds, so CrN layer can form several different stress gradient, can reduce coating thermal shrinkage stress, strengthen film-substrate cohesion further; Finally deposit CrN/TiBN nanometer multilayer composite coating, regulated the thickness in a double-deck cycle by control work rest rotating speed and target current, during deposition, adopt high pure metal Cr target and TiB
2ceramic target, TiB
2the characteristic of conductive and heat-conductive makes it become cathode arc source, and the high-melting-point of 2980 DEG C can reduce the drop of coating surface, obtains excellent coating surface.
Technical scheme provided by the invention compared with prior art has following advantage: 1, compared with magnetron sputtering, present invention employs cathodic arc ion plating technology to prepare coating, make because ionization level is high coating have good adhesion and hardness, overcome the problem that coating binding force prepared by magnetron sputtering method is lower; 2, relative and existing comparatively conventional ceramic TiB
2with pure Ti mosaic target, the pure TiB that the present invention adopts
2ceramic target obtain coating composition evenly; 3, coating structure of the present invention adopts four-layer structure, and wherein existing binder course has again stress gradient layer, can obtain excellent adhesive force; 4, the CrN/TiBN nano composite multiple layer superhard coating Knoop hardness that the present invention obtains can reach more than 4000HK, is better than 0.2, good mechanical performance with carbide alloy to the coefficient of friction that rubs; 5, realize the equipment that arc ion plating (aip) adopts in the present invention comparatively common, and coating apparatus structure is simple, easy to control, prospects for commercial application is good.
Prepared by the present invention, CrN/TiBN super hard nano multi-layer composite coatings cutter has good adhesion and abrasion-proof and temperature-resistant performance, ensure that cutter long-term stable operation, tool sharpening performance is increased substantially, crudy is stablized, working (machining) efficiency improves, and reduces the production cost of producer.
Accompanying drawing explanation
The structural representation of plater of Fig. 1 for adopting in embodiments of the invention;
Fig. 2 is the structural representation of coating prepared in embodiment 1;
Fig. 3 is the surface topography of coating prepared in embodiment 1;
Fig. 4 is the Cross Section Morphology of coating prepared in embodiment 1.
In figure: 1, fire door; 2, Cr target; 3, TiB
2target; 4, work rest; 5, heater; 6, bleeding point; 7, tool matrix; 8-binder course; 9, cushion; 10, stress gradient layer; 11, wearing layer.
Detailed description of the invention
Below in conjunction with specific embodiment, detailed specific description is done to the present invention.
All as shown in Figure 1, the deposit cavity of this device is surrounded by furnace wall the coating apparatus adopted in following examples, and deposit cavity height is 1000mm, and diameter is 800mm.Deposit cavity side is provided with fire door 1, to facilitate the handling of workpiece.Deposit cavity is provided with bleeding point 6, and vacuumize unit and vacuumized by bleeding point 6 pairs of deposit cavities, vacuumizing unit can be made up of diffusion pump and mechanical pump, and also can adopt molecular pump, end vacuum can reach 5 × 10
-4pa.The centre of deposit cavity is heater 5, and heating power 10-30 kilowatt, can improve the efficiency of heating surface.Eight electric arc target divide 4 row to be arranged on furnace wall, and every two are classified as one group, totally two groups.Respectively Cr target 2 and TiB are installed
2target 3, sample is contained on work rest 4, and rotates with work rest 4.This layout makes plasma density in deposit cavity increase considerably, and the complete submergence of workpiece in the plasma, thus makes coating deposition rate, hardness, adhesive force be greatly improved.Simultaneously this device is owing to being optimized target structure, Distribution of Magnetic Field evenly, make electric arc homogenous combustion on target surface, improve the uniformity of coating.
Embodiment 1
The preparation technology of the chromium nitride provided in the present embodiment/boron nitride titanium nanocomposite laminated coating cutter is as follows: first put into from fire door on work rest by tool matrix, then close fire door, vacuumize, chamber to be deposited vacuum reaches 5.0 × 10
-3after Pa, deposition cavity temperature is set to 200 DEG C.After completing above-mentioned preparation, under ar gas environment, carry out argon plasma aura cleaning 20min to high-speed steel or carbide cutter tool, during cleaning, air pressure is 2.0Pa, and substrate bias is-800V; After aura cleaning terminates, in 0.01Pa Ar Pressure, under the condition of substrate bias-800V, open Cr target, with high energy Cr Ions Bombardment tool matrix, the metal bonding layer of deposit thickness 10 nanometer; Then in 0.1Pa Ar Pressure, the metal buffer layer of 50 nanometers under the condition of substrate bias-50V, is deposited.The condition sinking deposition being-50V at nitrogen environment, substrate bias afterwards amasss CrN stress gradient layer, two stress gradients are comprised in stress gradient layer, nitrogen pressure corresponding to two stress gradients is respectively 0.5Pa and 1.0Pa, and thickness corresponding to two stress gradients is 150 nanometers, the gross thickness of stress gradient layer is 300 nanometers.Last under nitrogen environment, vacuum 0.5Pa ,-50V bias condition, open TiB
2target, deposition CrN/TiBN nanometer multilayer composite coating, codeposition 120 individual layer CrN and individual layer TiBN, the gross thickness of wearing layer is 1.14 microns.The substrate bias applied in whole deposition process is pulsed bias, and dutycycle remains on 80%, and work rest rotating speed is 1.5rpm, and total coating thickness is about 1.5 microns, and preparation terminates rear cooling naturally, obtains CrN/TiBN nano composite multiple layer superhard coating cutter.
As shown in Figure 2, binder course 8 is deposited on tool matrix 7 coating structure schematic diagram obtained in the present embodiment, and cushion 9 is attached on binder course 8, and stress gradient layer 10 is attached on cushion 9, and wearing layer 11 is attached on stress gradient layer 10.
As shown in Figure 3, the Cross Section Morphology of coating as shown in Figure 4 for the surface topography of coating obtained in the present embodiment.Nanocomposite laminated coating cutter obtained in the present embodiment after testing, its hardness be 30GPa, with steel ball to the coefficient of friction that rubs be 0.23, wear rate is 4.0 × 10
-16m
3/ Nm, adhesive force is 65N.
Embodiment 2
The preparation technology of the chromium nitride provided in the present embodiment/boron nitride titanium nanocomposite laminated coating cutter is as follows: first put into from fire door on work rest by tool matrix, then close fire door, vacuumize, chamber to be deposited vacuum reaches 5.0 × 10
-3after Pa, deposition cavity temperature is set to 250 DEG C.After completing above-mentioned preparation, under ar gas environment, carry out argon plasma aura cleaning 20min to high-speed steel or carbide cutter tool, during cleaning, air pressure is 2.0Pa, and substrate bias is-800V; After aura cleaning terminates, in 0.02Pa Ar Pressure, under the condition of substrate bias-800V, open Cr target, with high energy Cr Ions Bombardment tool matrix, the metal bonding layer of deposit thickness 10 nanometer; Then in 0.2Pa Ar Pressure, the metal buffer layer of 50 nanometers under the condition of substrate bias-100V, is deposited.The condition sinking deposition being-150V at nitrogen environment, substrate bias afterwards amasss CrN stress gradient layer, two stress gradients are comprised in stress gradient layer, nitrogen pressure corresponding to two stress gradients is respectively 0.5Pa and 1.0Pa, and thickness corresponding to two stress gradients is 150 nanometers, the gross thickness of stress gradient layer is 300 nanometers.Last under nitrogen environment, vacuum 1.0Pa ,-100V bias condition, open TiB
2target, deposition CrN/TiBN nanometer multilayer composite coating, codeposition 240 individual layer CrN and individual layer TiBN, the gross thickness of wearing layer is 1.14 microns.The substrate bias applied in whole deposition process is pulsed bias, and dutycycle remains on 80%, and work rest rotating speed is 3rpm, and total coating thickness is about 1.5 microns, and preparation terminates rear cooling naturally, obtains CrN/TiBN nano composite multiple layer superhard coating cutter.
Nanocomposite laminated coating cutter obtained in the present embodiment after testing, its hardness be 49GPa, with steel ball to the coefficient of friction that rubs be 0.18, wear rate is 1.02 × 10
-16m
3/ Nm, adhesive force are 76N.
Embodiment 3
The preparation technology of the chromium nitride provided in the present embodiment/boron nitride titanium nanocomposite laminated coating cutter is as follows: first put into from fire door on work rest by tool matrix, then close fire door, vacuumize, chamber to be deposited vacuum reaches 5.0 × 10
-3after Pa, deposition cavity temperature is set to 300 DEG C.After completing above-mentioned preparation, under ar gas environment, carry out argon plasma aura cleaning 20min to high-speed steel or carbide cutter tool, during cleaning, air pressure is 2.0Pa, and substrate bias is-800V; After aura cleaning terminates, in 0.04Pa Ar Pressure, under the condition of substrate bias-1000V, open Cr target, with high energy Cr Ions Bombardment tool matrix, the metal bonding layer of deposit thickness 20 nanometer; Then in 0.4Pa Ar Pressure, the metal buffer layer of 100 nanometers under the condition of substrate bias-150V, is deposited.The condition sinking deposition being-200V at nitrogen environment, substrate bias afterwards amasss CrN stress gradient layer, four stress gradients are comprised in stress gradient layer, nitrogen pressure corresponding to four stress gradients is respectively 0.5Pa, 1.0Pa, 1.5Pa and 2.0Pa, and thickness corresponding to four stress gradients is 100 nanometers, the gross thickness of stress gradient layer is 400 nanometers.Last under nitrogen environment, vacuum 2.0Pa ,-250V bias condition, open TiB
2target, deposition CrN/TiBN nanometer multilayer composite coating, codeposition 960 individual layer CrN and individual layer TiBN, the gross thickness of wearing layer is 2.5 microns.The substrate bias applied in whole deposition process is pulsed bias, and dutycycle remains on 80%, and work rest rotating speed is 6rpm, and total coating thickness is about 3 microns, and preparation terminates rear cooling naturally, obtains CrN/TiBN nano composite multiple layer superhard coating cutter.
Nanocomposite laminated coating cutter obtained in the present embodiment after testing, its hardness be 36GPa, with steel ball to the coefficient of friction that rubs be 0.18, wear rate is 1.54 × 10
-16m
3/ Nm, adhesive force are 72N.
Embodiment 4
The preparation technology of the chromium nitride provided in the present embodiment/boron nitride titanium nanocomposite laminated coating cutter is as follows: first put into from fire door on work rest by tool matrix, then close fire door, vacuumize, chamber to be deposited vacuum reaches 5.0 × 10
-3after Pa, deposition cavity temperature is set to 400 DEG C.After completing above-mentioned preparation, under ar gas environment, carry out argon plasma aura cleaning 20min to high-speed steel or carbide cutter tool, during cleaning, air pressure is 2.0Pa, and substrate bias is-800V; After aura cleaning terminates, in 0.08Pa Ar Pressure, under the condition of substrate bias-1000V, open Cr target, with high energy Cr Ions Bombardment tool matrix, the metal bonding layer of deposit thickness 30 nanometer; Then in 0.8Pa Ar Pressure, the metal buffer layer of 200 nanometers under the condition of substrate bias-200V, is deposited.The condition sinking deposition being-250V at nitrogen environment, substrate bias afterwards amasss CrN stress gradient layer, four stress gradients are comprised in stress gradient layer, nitrogen pressure corresponding to four stress gradients is respectively 0.5Pa, 1.0Pa, 2.0Pa and 4.0Pa, and thickness corresponding to four stress gradients is 150 nanometers, the gross thickness of stress gradient layer is 600 nanometers.Last under nitrogen environment, vacuum 4.0Pa ,-350V bias condition, open TiB
2target, deposition CrN/TiBN nanometer multilayer composite coating, codeposition 2880 individual layer CrN and individual layer TiBN, the gross thickness of wearing layer is 4.2 microns.The substrate bias applied in whole deposition process is pulsed bias, and dutycycle remains on 80%, and work rest rotating speed is 12rpm, and total coating thickness is about 5 microns, and preparation terminates rear cooling naturally, obtains CrN/TiBN nano composite multiple layer superhard coating cutter.
Nanocomposite laminated coating cutter obtained in the present embodiment after testing, its hardness be 33GPa, with steel ball to the coefficient of friction that rubs be 0.25, wear rate is 9.13 × 10
-16m
3/ Nm, adhesive force are 68N.
Claims (4)
1. the preparation method of chromium nitride/boron nitride titanium nanocomposite laminated coating cutter, this cutter at least comprises tool matrix, wearing layer and the binder course be deposited on tool matrix, also include cushion and stress gradient layer, cushion is attached on binder course, the attachment of stress gradient layer on the buffer layer, wearing layer is attached on stress gradient layer, wherein binder course is formed by high energy Cr Ions Bombardment, cushion is formed by low energy Cr ion deposition, stress gradient layer is CrN, wearing layer is the alternately laminated nanometer multilayer composite coating of CrN and TiBN, it is characterized in that the method comprises the following steps: be placed on by tool matrix on work rest, first aura cleaning is carried out to tool matrix, after cleaning terminates, under ar gas environment, vacuum 0.01Pa ~ 0.1Pa ,-800V ~-1000V bias condition, open Cr target, make with high energy Cr Ions Bombardment tool matrix and deposit on tool matrix to obtain binder course, then, under ar gas environment, vacuum 0.1Pa ~ 1Pa ,-50V ~-200V bias condition, low energy Cr ion is deposited on binder course and generates cushion, again under nitrogen environment, vacuum 0.5Pa ~ 4.0Pa ,-50V ~-250V bias condition, deposit CrN stress gradient layer on the buffer layer, in deposition process, increase nitrogen pressure, the thickness of stress gradient layer is 300 ~ 600 nanometers, and in the process of deposition stress gradient layer, the pressure of nitrogen carries out from small to large regulating and is divided into 2 ~ 4 stages, and the time of each phase lasts is identical, last under nitrogen environment, vacuum 0.5Pa ~ 4.0Pa ,-50V ~-350V bias condition, open TiB
2target, CrN stress gradient layer deposits wearing layer, and wearing layer is the alternately laminated multi-layer composite coatings of CrN and TiBN, in aura cleaning and coating deposition process, temperature controls at 200 ~ 400 DEG C, has deposited rear cooling naturally, i.e. obtained chromium nitride/boron nitride titanium nanocomposite laminated coating cutter.
2. preparation method according to claim 1, is characterized in that: tool matrix is high-speed steel or hard alloy cutter, and in preparation process, tool matrix revolves round the sun with work rest, and the revolution speed of work rest is 1.5 ~ 12rpm.
3. preparation method according to claim 1, is characterized in that: the thickness of binder course is 10 ~ 30 nanometers, and the thickness of cushion is 40 ~ 200 nanometers.
4. preparation method according to claim 1, it is characterized in that: the gross thickness of wearing layer is 1 ~ 5 micron, in wearing layer, individual layer CrN thickness is 2 ~ 10 nanometers, and individual layer TiBN thickness is 1 ~ 5 nanometer, CrN and TiBN in wearing layer is equipped with 100 ~ 3000 layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310184346.7A CN103252939B (en) | 2013-05-17 | 2013-05-17 | Chromium nitride/boron nitride titanium nano composite multi-layer coating cutter and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310184346.7A CN103252939B (en) | 2013-05-17 | 2013-05-17 | Chromium nitride/boron nitride titanium nano composite multi-layer coating cutter and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103252939A CN103252939A (en) | 2013-08-21 |
| CN103252939B true CN103252939B (en) | 2014-12-24 |
Family
ID=48957311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310184346.7A Active CN103252939B (en) | 2013-05-17 | 2013-05-17 | Chromium nitride/boron nitride titanium nano composite multi-layer coating cutter and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103252939B (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103898467A (en) * | 2014-04-18 | 2014-07-02 | 常州多晶涂层科技有限公司 | Nanometer composite TiCrBN coating and preparation method thereof |
| CN105671496B (en) * | 2016-01-28 | 2019-02-12 | 武汉江海行纳米科技有限公司 | A kind of molybdenum nitride/nitrogen boron titanium nanocomposite laminated coating cutter and preparation method thereof |
| CN105603387B (en) * | 2016-02-11 | 2018-04-03 | 广东工业大学 | Boron nitride system composite coating, the gradient ultra-fine cemented carbide cutter with the composite coating and preparation method thereof |
| CN106756785A (en) * | 2016-12-29 | 2017-05-31 | 西安交通大学青岛研究院 | A kind of multiple elements design nanometer hard coat and preparation method thereof |
| CN106835131A (en) * | 2017-03-17 | 2017-06-13 | 浙江工业大学 | A kind of preparation of plural layers and its method for Combined with Performance Evaluation |
| CN106835013B (en) * | 2017-03-22 | 2019-06-18 | 广州铁路职业技术学院 | Nano-composite coating cutter and preparation method thereof |
| CN109666904B (en) * | 2018-12-27 | 2021-01-19 | 安徽多晶涂层科技有限公司 | Low-stress high-wear-resistance anti-erosion coating, preparation method and application |
| CN111235541B (en) * | 2020-03-16 | 2022-10-14 | 湖南六方晶科技有限责任公司 | Cutter rotating stand for preparing metal oxide coating by PVD (physical vapor deposition) method |
| CN113817984B (en) * | 2021-11-24 | 2022-03-18 | 武汉中维创发工业研究院有限公司 | Nano multilayer composite ceramic coating and preparation method and application thereof |
| CN115627445B (en) * | 2022-12-22 | 2023-03-28 | 爱柯迪股份有限公司 | Anti-adhesion high-entropy boride composite coating for aluminum die-casting die and preparation method of composite coating |
| CN116695062B (en) * | 2023-05-09 | 2024-01-23 | 东莞市普拉提纳米科技有限公司 | High-entropy composite cutter coating for cutting stainless steel and preparation method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1473680A (en) * | 2002-05-21 | 2004-02-11 | �����ʩ���عɷݹ�˾ | TiBN coating |
| CN101462386A (en) * | 2007-12-21 | 2009-06-24 | 山特维克知识产权股份有限公司 | Coated cutting tool and a method of making a coated cutting tool |
| CN101700573A (en) * | 2009-11-09 | 2010-05-05 | 浙江汇锦梯尔镀层科技有限公司 | Mold for molding magnetic material powder with high hardness and high wear resistance and manufacturing method thereof |
| CN101837478A (en) * | 2009-03-17 | 2010-09-22 | 双叶电子工业株式会社 | Cutting tool |
| CN102166849A (en) * | 2010-12-20 | 2011-08-31 | 武汉新铬涂层设备有限公司 | Chromium nitride aluminum-titanium composite coating, cutter deposited with same, and preparation method |
| CN202037930U (en) * | 2011-04-06 | 2011-11-16 | 武汉大学苏州研究院 | Cutter with nanometer multi-layer superhard composite coating |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5959879A (en) * | 1982-09-29 | 1984-04-05 | Hitachi Metals Ltd | Multi-coated material and its production |
| JP2001239449A (en) * | 2000-02-29 | 2001-09-04 | Allied Material Corp | Pad conditioner for cmp |
-
2013
- 2013-05-17 CN CN201310184346.7A patent/CN103252939B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1473680A (en) * | 2002-05-21 | 2004-02-11 | �����ʩ���عɷݹ�˾ | TiBN coating |
| CN101462386A (en) * | 2007-12-21 | 2009-06-24 | 山特维克知识产权股份有限公司 | Coated cutting tool and a method of making a coated cutting tool |
| CN101837478A (en) * | 2009-03-17 | 2010-09-22 | 双叶电子工业株式会社 | Cutting tool |
| CN101700573A (en) * | 2009-11-09 | 2010-05-05 | 浙江汇锦梯尔镀层科技有限公司 | Mold for molding magnetic material powder with high hardness and high wear resistance and manufacturing method thereof |
| CN102166849A (en) * | 2010-12-20 | 2011-08-31 | 武汉新铬涂层设备有限公司 | Chromium nitride aluminum-titanium composite coating, cutter deposited with same, and preparation method |
| CN202037930U (en) * | 2011-04-06 | 2011-11-16 | 武汉大学苏州研究院 | Cutter with nanometer multi-layer superhard composite coating |
Non-Patent Citations (3)
| Title |
|---|
| JP昭59-59879A 1984.04.05 * |
| JP特开2001-239449A 2001.09.04 * |
| K.Muller.《Deposition of TiBN hard films on hot-working-steel dies for aluminium extrusion via a duplex process》.《Acta metallurgica sinica(English letters)》.2001,第14卷(第6期), * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103252939A (en) | 2013-08-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103252939B (en) | Chromium nitride/boron nitride titanium nano composite multi-layer coating cutter and preparation method thereof | |
| CN102653855B (en) | Preparation method of abrasion-resistant and oxidation-resisting TiAlSiN nanometer composite superhard coating | |
| CN102922052B (en) | AlTiN-AlCrN super hard nano multilayer composite coating hob and preparation method thereof | |
| CN104002516B (en) | A kind of CrAlN/MoS with high rigidity and low-friction coefficient 2laminated coating and preparation method thereof | |
| CN101518935B (en) | PVD nano composite ceramic coating screw and method for manufacturing same | |
| CN101430004B (en) | PVD chromium based ceramic composite coating piston ring and method for producing the same | |
| CN102080207B (en) | DLC (diamond-like carbon)/TiAlN (titanium aluminium nitride)/CrN (chromium nitride)/Cr (chromium) multilayer superhard film coating and preparation method thereof | |
| CN106086806B (en) | A kind of AlTiCrN high-temperature wear resistant coating and preparation method thereof | |
| CN103084600B (en) | Superhard TiN-TiSiN-CN multilayer alternate composite gradient coating carbide blade and preparation method thereof | |
| CN103757597B (en) | A kind of TiN/CrAlSiN nanocomposite laminated coating and preparation method thereof | |
| CN103212729B (en) | A kind of have NC cutting tool of CrAlTiN superlattice coating and preparation method thereof | |
| CN101879794A (en) | CrTiAlSiN nano composite coating, cutter deposited with same and preparation method thereof | |
| CN104131256A (en) | Multilayer nanometer composite cutting tool coating and preparation method thereof | |
| CN107083551A (en) | A kind of ternary doping nano composite multiple layer diamond-like coating and its preparation method and application | |
| CN103143761B (en) | AlTiN-MoN nano multi-layer composite coating milling cutter and preparation method thereof | |
| CN107761063B (en) | A kind of high-temperature oxidation resistant self-lubricating laminated coating and preparation method thereof | |
| CN103978748B (en) | Polynary gradient tool coating of high-temperature self-lubrication multi-arc ion coating and preparation method thereof in one | |
| CN107190233A (en) | A kind of preparation technology of the Si dopen Nano composite coatings with ultrahigh hardness | |
| CN103256142A (en) | Fuel-saving type Cr-O-N nanocrystalline composite ceramic coated piston ring of diesel engine and preparation method thereof | |
| CN103938157B (en) | A kind of ZrNbAlN superlattice coating and preparation method | |
| CN109576643A (en) | A kind of TiSiVN multicomponent complex gradient cutter coat and preparation method thereof | |
| CN103305789A (en) | CrAlN/ZrO2 nanometer coating and preparation method thereof | |
| CN104152857B (en) | High-hardness TiAlZrN/CrN nano multi-layer coating and preparation method thereof | |
| CN104372299B (en) | Sandwich construction hard, wear-resisting, lubricant coating and preparation method thereof | |
| CN104451542A (en) | High temperature resistant multilayer coating high in hardness and low in friction coefficient and preparation method of multilayer coating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SUZHOU JIANGHAIXING NANO TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: YICHANG HOUHUANG VACUUM TECHNOLOGY CO., LTD. Effective date: 20150227 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 443500 YICHANG, HUBEI PROVINCE TO: 215000 SUZHOU, JIANGSU PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20150227 Address after: Suzhou City, Jiangsu province 215000 Industrial Park Suzhou Linquan Street No. 399 National University Science Park of Southeast University (Suzhou) South Engineering Institute Patentee after: Suzhou River Haihang Nano Technology Co. Ltd. Address before: 443500 No. 88, innovation industry park, Yichang, Hubei, Changyang Patentee before: Yichang Houhuang Vacuum Technology Co., Ltd. |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20170206 Address after: 443500 Changyang City, Yichang province innovation industrial park, Dan water Road No. 1, No. two, No. Patentee after: HUBEI JANGHAE INDUSTRY AND TRADE GROUP CO., LTD. Address before: Suzhou City, Jiangsu province 215000 Industrial Park Suzhou Linquan Street No. 399 National University Science Park of Southeast University (Suzhou) South Engineering Institute Patentee before: Suzhou River Haihang Nano Technology Co. Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191227 Address after: 443500, No. 88, development avenue, innovation industrial park, Yichang, Hubei, Changyang Patentee after: Yichang Houhuang Vacuum Technology Co., Ltd. Address before: No.1, Danshui 2nd Road, Changyang Innovation Industrial Park Patentee before: HUBEI JANGHAE INDUSTRY AND TRADE GROUP CO., LTD. |
|
| TR01 | Transfer of patent right |