CN103045998B - Product containing CrNiTiAlN quinary coating and preparation method thereof - Google Patents

Product containing CrNiTiAlN quinary coating and preparation method thereof Download PDF

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CN103045998B
CN103045998B CN201210529693.4A CN201210529693A CN103045998B CN 103045998 B CN103045998 B CN 103045998B CN 201210529693 A CN201210529693 A CN 201210529693A CN 103045998 B CN103045998 B CN 103045998B
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nicrn
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coating
crnitialn
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CN103045998A (en
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金杰
田正磊
李娜
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Guangzhou Kuaididian Intelligent Technology Co.,Ltd.
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Zhejiang University of Technology ZJUT
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Abstract

The invention discloses a product containing a CrNiTiAlN quinary coating. The product takes a Cr layer as a bottom layer and takes an NiCrN layer as a transition layer, wherein a plurality of NiCrN-CrN-AlN-TiN composite coatings with the thickness are deposited on the NiCrN layer, and the thickness of the composite coatings can achieve 2-5 mu m; and according to the product disclosed by the invention, a multi-layer gradient design and a nitriding process before film plating are adopted, so that a coating-substrate bonding strength is greatly improved, and the critical load of the prepared gradient coatings in a scratch test is as high as 68N, which is relatively higher than related plated layers prepared by other methods and processes. The hardness of the product containing the CrNiTiAlN quinary coating can achieve 2880HV; the anti-impact, wear-resistant and anti-friction performances and the thermal stability of the surfaces of a mold and a cutter are greatly improved, and the friction coefficient and the rate of weight loss caused by wear are greatly reduced; and the wetting angle of mold steel to an organic solvent is improved, thereby showing that the coating can be used for greatly improving the demolding performance of the mold.

Description

A kind of preparation method of the goods containing CrNiTiAlN five yuan of coatings
(1) technical field
The present invention relates to a kind of novel PVD five yuan of coatings, be used for improving cutter, die surface hardness, Modificati on and shock-resistant polishing machine, significantly improve cutter, mold use life-span; Improve the demolding performace of die surface, improve plastic component formed product precision, be i.e. a kind of goods and preparation method containing CrNiTiAlN five yuan of coatings.The method and similar preparation method's ratio, cost is lower.
(2) background technology
Along with developing rapidly of automotive industry, the demand of automobile accessories part increases considerably.Wherein, the quality of workpiece, output and production cost often depend on quality and the acceptable life of mould.But under extremely severe working condition, often there is early stage surface failure in die steel.For preventing mould generation early failure, extend the mold use life-span, most economical most efficient manner carries out surface treatment to mould exactly.PVD magnetic sputtering coating effectively can improve the surface property such as hardness, antiwear and antifriction of matrix.Wherein, CrTiAlN quaternary compound coating obtains the extensive concern of domestic and international researcher with the mechanical property of its excellence.CrTiAlN quaternary compound coating has better hardness, film/film-substrate binding strength than current most widely used TiN and CrN.The application of CrTiAlN coating on the instrument such as drill bit, lathe tool is extensively approved, but for mould, the application of this coating is but restricted.This is mainly because the Working environment of die steel is extremely severe, and CrTiAlN coating self performance also exists larger defect, and such as its toughness is poor, is easy to cracking, peels off under shock load.For further optimized coatings over-all properties and raising film substrate bond strength, the present invention introduces Ni element on the basis of CrTiAlN coating, is intended to develop a kind of quinary CrNiTiAlN coating.
(3) summary of the invention
The object of the invention is to provide a kind of goods containing CrNiTiAlN five yuan of coatings and preparation method, improves the film substrate bond strength of CrTiAlN compound coating further, and the size controlling each layer tissue crystal grain within the scope of nanoscale and evenly; The layer thickness of every one deck is also within the scope of nanoscale; Coating structure voidage is low, dense structure, makes coating have best hardness/toughness combination, and the shock-resistant polishing machine of optimized coatings, antifriction performance and Modificati on, improve the demolding performace of mould.The technical solution used in the present invention is:
Goods containing CrNiTiAlN five yuan of coatings, described goods are with Cr layer for bottom, and with NiCrN layer for transition layer, on NiCrN layer, deposit thickness is (NiCrN-CrN-AlN-TiN) compound coating of some layers, makes the thickness of compound coating reach 2 ~ 5 μm.Usually on NiCrN transition layer, deposit NiCrN-CrN-AlN-TiN compound coating 2 ~ 2.5h can make the thickness of compound coating reach 2 ~ 5 μm.
A kind of preparation method of the described goods containing CrNiTiAlN five yuan of compound coatings, described method is: 1) pre-treatment: by goods substrate ultrasonic cleaning 5 ~ 10min in basic solution, ultrasonic cleaning 6 ~ 9min in acetone again, finally ultrasonic cleaning 4 ~ 8min in dehydrated alcohol, obtains pretreated goods substrate; (2) adopt non-balance magnetically controlled sputter method, by Cr layer at Cr target current 3 ~ 5A, substrate bias is deposit on pretreated goods substrate as bottom under-80 ~-120V condition; (3) logical nitrogen, at NiCr alloys target electric current 5 ~ 7A, substrate bias is under the condition of-40 ~-80V, bottom deposits NiCrN layer as transition layer; (4) finally NiCrN-CrN-AlN-TiN compound coating is prepared, logical nitrogen, at Cr target current 5-7A, NiCr alloys target electric current 4-6A, Ti target current 5-7A, Al target current 5-7A, under substrate bias is-50 ~-80V condition, NiCrN-CrN-AlN-TiN compound coating is deposited on transition layer, makes NiCrN-CrN-AlN-TiN compound coating thickness be 2 ~ 5 μm, make the goods containing CrNiTiAlN five yuan of coatings.
Further, step (1) described method is: by goods substrate ultrasonic cleaning 8min in 10g/L aqueous sodium hydroxide solution, then ultrasonic cleaning 9min in acetone, finally in dehydrated alcohol, after ultrasonic cleaning 8min, obtains pretreated goods substrate.
Further, step (1) described preprocessing process also comprises by substrate in dehydrated alcohol after ultrasonic cleaning 4 ~ 8min, then carries out Nitrizing Treatment or carbonitriding process.Described Nitrizing Treatment or carbonitriding process well known to a person skilled in the art method, and usual Nitrizing Treatment refers to die steel Nitrizing Treatment 8 hours at 570 DEG C in nitriding furnace; The process that carbon and nitrogen are infiltrated in the top layer of steel is simultaneously pointed in carbonitriding process.
Further, step (2) adopts non-balance magnetically controlled sputter method to be deposited to by Cr as bottom on pretreated goods substrate, and mode of deposition is: Cr target current 4A, substrate bias is-100V.
Further, NiCrN is deposited to as transition layer on bottom by step (3), and mode of deposition is: logical nitrogen, NiCr alloys target electric current 6A, substrate bias is-65V.
Further, NiCrN-CrN-AlN-TiN compound coating deposits on NiCrN transition layer and makes the goods that NiCrN-CrN-AlN-TiN five yuan of compound coating thickness are 2 ~ 5 μm by step (4), mode of deposition is: at Cr target current 6A, NiCr alloys target electric current 5A, Ti target current 6A, Al target current 6A, substrate bias is-65V.
Multi-layer nano gradient cladding is prepared in the present invention's design, to improve the film substrate bond strength of coating, the basis of CrTiAlN compound coating adds Ni element, and Ni element can improve coating toughness and thermostability to a great extent, and can reduce the wetness degree of mould and liquid plastic; Before plated film, increase nitridation process or carry out carbonitriding process.Workpiece running status in stove is that diaxon rotates, and namely around main shaft revolution, also completes rotation simultaneously.
Cr target of the present invention, Ti target, NiCr alloys target, Al target are pure metal, recommend purchased from ladder that coating company of Britain.
Compared with prior art, beneficial effect of the present invention is mainly reflected in:
(1) nitridation process before the present invention adopts multi-gradient design and plated film substantially increases the film substrate bond strength of coating, gradient cladding prepared by the present invention critical load in scratch test up to the general film substrate bond strength of 68N(at about 45N), be relatively higher than relevant coating prepared by other Method and process;
(2) due to the existence in the rich Ni district of disperse, in coating, dispersion-strengthened and stress reinforced effect strengthen the electric current by regulating NiCr alloys target, and the hardness of (NiCrN-CrN-AlN-TiN) compound coating five yuan of coatings can reach 2880HV;
(3) Ni element improves the toughness of coating to a great extent and improves the thermostability shown, can obtain optimum hardness/toughness combination by controlling preparation technology, the existence of Ni makes coated grains refinement, and porosity reduces, and compactness improves;
(4) (NiCrN-CrN-AlN-TiN) compound coating significantly improves impact-resistant abrasion-proof antifriction performance and the thermostability of mould and tool surface, and frictional coefficient and wear weight loss rate all significantly reduce;
(5) (NiCrN-CrN-AlN-TiN) NEW TYPE OF COMPOSITE five yuan of coatings substantially increase the wetting angle of die steel to organic solvent, show that this coating significantly can improve the demolding performace of mould.
(4) accompanying drawing explanation
Coating structure schematic diagram prepared by Fig. 1 the present invention.
The distribution of Fig. 2 target places schematic diagram with specimen holder.
Fig. 3 Teer-UDP850/4 type magnetic control sputtering device photo.
Fig. 4 is containing the scanning electron microscope (SEM) photograph of CrNiTiAlN five yuan of coated productss.
Fig. 5 is containing the wetting angle of CrNiTiAlN five yuan of coated products surface organic solvents.
Fig. 6 is not containing the wetting angle of coated products surface organic solvent.
(5) embodiment
Below in conjunction with specific embodiment, the present invention is described further, but protection scope of the present invention is not limited in this:
The Teer-UDP850/4 type closed field unbalanced magnetron sputtering ion plating equipment (Teer-UDP850/4 closed-filed unbalanced magnetron sputtering ion plating coater) selecting your coating company of Britain's ladder to manufacture prepares the goods containing CrNiTiAlN five yuan of coatings of the present invention, this equipment is made up of vacuum system, power-supply system, Controlling System, cooling system four part, and photo as shown in Figure 3.
Vacuum system is two-stage vacuum, and prime adopts mechanical pump slightly to take out, and rear class adopts diffusion pump essence to take out.As shown in Figure 2, vacuum wall is provided with four pieces of targets (a Cr target, a Ti target, NiCr alloys target, an Al target, all purchased from ladder that coating company of Britain).
Embodiment 1
(1) substrate pre-treatment: with H13 die steel for goods substrate, by goods substrate ultrasonic cleaning 8min in 10 g/L aqueous sodium hydroxide solutions, ultrasonic cleaning 9min, finally ultrasonic cleaning 8min in dehydrated alcohol in acetone again, obtains pretreated goods substrate.
(2) adopt the key step of Teer-UDP850/4 type closed field unbalanced magnetron sputtering ion plating equipment deposition (NiCrN-CrN-AlN-TiN) compound coating (coating structure schematic diagram is as shown in Figure 1) as follows:
1) start preheating, logical water coolant, opens mechanical pump and is evacuated to 4.0 × 10 -4pa, and vacuum chamber is heated to 100 DEG C;
2) pass into argon gas, regulate gas cylinder valve and under meter, adjustment vacuum chamber internal gas pressure makes target build-up of luminance;
3) Ion Cleaning: matrix is rotated, regulates substrate bias to-400V, cleans matrix surface 20min with Ar+, remove surface impurity, for formal plated film is prepared;
4) metal refining Cr bottoming: open Cr target, target current is 4A, adjustment substrate bias is-100V, and deposition one deck Cr, as bottom, to improve the bonding strength of coating and matrix;
5) deposit NiCrN transition layer: NiCr alloys target electric current is increased to 6 A, substrate bias-65V, open nitrogen valve, deposition layer of Ni CrN, as transition layer, to strengthen the bonding strength of coating and matrix further;
6) (NiCrN-CrN-AlN-TiN) compound coating is deposited: four targets (a Cr target, a Ti target, NiCr alloys target, an Al target) arrange by mode shown in Fig. 2, whole unlatching, logical nitrogen, Cr target current 6A, NiCr alloys target electric current 5A, Ti target current 6A, Al target current 6A, substrate bias is-65V.
7) plated film is complete: cool after 30 minutes, applying argon gas, blow-on, sampling, in goods, NiCrN-CrN-AlN-TiN compound coating thickness is 3 μm, namely obtains the goods containing CrNiTiAlN five yuan of coatings, and the goods containing CrNiTiAlN five yuan of coatings are carried out performance test as sample.Concrete processing parameter is shown in Table 1.
The preparation technology parameter of table 1 CrNiTiAlN five yuan of coatings
Adopt HMV-1T type microhardness tester, measure the microhardness value under 10g load, hold time is 10s.In order to reduce each sample measurement microhardness value of error five times, the arithmetical av getting five times is as the hardness value of this sample.The microhardness value of coating can reach 2660HV.
The thickness adopting CQY-18 type ball trace instrument survey calculation coating is 3 μm; Adopt the film substrate bond strength of WS-2004 type coating adhesion scratching instrument characterizing coating, the critical load in scratch test is 58N.
CrNiTiAlN prepared by the present invention five yuan of coatings have reasonable component gradient-structure, the structure design of coating is as shown in Figure 1: because Cr and steel matrix have generally acknowledged good sticking power, so first use Cr bottoming, then it is used NiCrN transition, finally deposition has (NiCrN-CrN-AlN-TiN) film of nano-multilayered structures.The membranous layer ingredient of this continuously smooth transition can make the physics of rete, chemical property and weave construction continuous transition gradually, alleviates the stress state of interface, thus can improve the over-all properties of film to a great extent.
Embodiment 2
By pretreated H13 die steel Nitrizing Treatment 8 hours at 570 DEG C in nitriding furnace, Teer-UDP850/4 type closed field unbalanced magnetron sputtering ion plating equipment is then adopted to prepare NiCrN ternary coating.Other operations and method are with embodiment 1, and in goods, NiCrN-CrN compound coating thickness is 3 μm, namely obtain the goods containing NiCrN ternary coating.
The VEGA-3-S type scanning electronic microscope adopting TESCAN company of Czech to produce is observed specimen surface pattern, the results are shown in Figure 4, shows the nanocrystalline pattern of CrNiTiAlN coatingsurface.
Adopt HMV-1T type microhardness tester, measure the microhardness value under 10g load, hold time is 10s.In order to reduce each sample measurement microhardness value of error five times, the arithmetical av getting five times is as the hardness value of this sample.The microhardness value of coating can reach 2880HV.
The thickness adopting CQY-18 type ball trace instrument survey calculation coating is 3 μm; Adopt the film substrate bond strength of WS-2004 type coating adhesion scratching instrument characterizing coating, the critical load in scratch test is 68N.
Adopting German moral luxuriant and rich with fragrance QCA35 type contact angle measurement to measure die steel surface C rNiTiAlN five yuan of coating organic solvent wetting angle is 108.8 degree (shown in Fig. 5), and without the wetting angle 78.3 degree (Fig. 6 shown in) of coating mold surface organic solvent, show that this coating significantly can improve the demolding performace of mould.

Claims (5)

1. the preparation method of the goods containing CrNiTiAlN five yuan of coatings, described goods with Cr layer for bottom, with NiCrN layer for transition layer, depositing several layers NiCrN-CrN-AlN-TiN compound coating on NiCrN transition layer, it is characterized in that described preparation method is: (1) pre-treatment: by goods substrate H13 die steel ultrasonic cleaning 5 ~ 10min in basic solution, ultrasonic cleaning 6 ~ 9min in acetone again, then ultrasonic cleaning 4 ~ 8min in dehydrated alcohol, finally carry out Nitrizing Treatment or carbonitriding process, obtain pretreated goods substrate; (2) adopt non-balance magnetically controlled sputter method, by Cr layer at Cr target current 3 ~ 5A, substrate bias is deposit on pretreated goods substrate as bottom under-80 ~-120V condition; (3) logical nitrogen, at NiCr target current 5 ~ 7A, substrate bias is under the condition of-40 ~-80V, bottom deposits NiCrN layer as transition layer; (4) finally NiCrN-CrN-AlN-TiN compound coating is prepared, logical nitrogen, at Cr target current 5 ~ 7A, NiCr alloys target electric current 4 ~ 6A, Ti target current 5 ~ 7A, Al target current 5 ~ 7A, under substrate bias is-50 ~-80V condition, NiCrN-CrN-AlN-TiN compound coating is deposited on transition layer, makes NiCrN-CrN-AlN-TiN compound coating thickness be 2 ~ 5 μm, make the goods containing CrNiTiAlN five yuan of coatings.
2. the preparation method of the goods as claimed in claim 1 containing CrNiTiAlN five yuan of coatings, it is characterized in that in step (1): by goods substrate ultrasonic cleaning 8min in 10g/L aqueous sodium hydroxide solution, ultrasonic cleaning 9min, then ultrasonic cleaning 8min in dehydrated alcohol in acetone again.
3. the preparation method of the goods as claimed in claim 1 containing CrNiTiAlN five yuan of coatings, it is characterized in that step (2) adopts non-balance magnetically controlled sputter method to be deposited to by Cr on pretreated goods substrate as bottom, mode of deposition is: Cr target current 4A, substrate bias is-100V.
4. the preparation method of the goods as claimed in claim 1 containing CrNiTiAlN five yuan of coatings, it is characterized in that NiCrN is deposited to as transition layer on bottom by step (3), mode of deposition is: logical nitrogen, NiCr alloys target electric current 6A, substrate bias is-65V.
5. the preparation method of the goods as claimed in claim 1 containing CrNiTiAlN five yuan of coatings, it is characterized in that NiCrN-CrN-AlN-TiN compound coating deposits on NiCrN transition layer by step (4) and make the goods that NiCrN-CrN-AlN-TiN five yuan of compound coating thickness are 2 ~ 5 μm, mode of deposition is: at Cr target current 6A, NiCr alloys target electric current 5A, Ti target current 6A, Al target current 6A, substrate bias is-65V.
CN201210529693.4A 2012-12-06 2012-12-06 Product containing CrNiTiAlN quinary coating and preparation method thereof Active CN103045998B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103981496B (en) * 2014-02-10 2016-11-02 常州大学 A kind of apparatus and method preparing TiAlCrN multi-element coating
CN104233185A (en) * 2014-08-21 2014-12-24 中国人民解放军空军工程大学 Integral integrating method of sensing element and metal substrate based on PVD
CN107151786B (en) * 2017-06-06 2019-02-26 南京林业大学 A kind of soft or hard composite coating wood cutter and preparation method thereof
CN109037708A (en) * 2018-09-17 2018-12-18 浙江工业大学 A kind of 20Cr steel bipolar plates material and preparation method thereof that surface is modified

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Surface free energy of non-stick coatings deposited using closed field unbalanced magnetron sputter ion plating;Chen-Cheng Sun, et al.;《applied surface science》;20061011;第253卷;第4095页 2.experimental details *
磁控溅射CrAlTiN镀层的微观结构研究;陈迪春 等;《西安理工大学学报》;20101231;第26卷(第4期);参见第399页1实验部分 *

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