A kind of goods and preparation method containing NiCrN ternary coating
(1) technical field
The present invention relates to a kind of novel PVD ternary coating, be used for improving cutter, die surface hardness, Modificati on and shock-resistant polishing machine, significantly improve cutter, mold use life-span; Improve the demolding performace of die surface, improve working of plastics formed product precision, be i.e. a kind of goods and preparation method containing NiCrN tri compound coating.
(2) background technology
Along with developing rapidly of auto industry, the demand of automobile accessories part increases considerably.Wherein, the quality of workpiece, output and production cost often depend on quality and the Acceptable life of mould.But under extremely severe working condition, often there is early stage surface failure in mould steel.For preventing mould generation initial failure, extend the mold use life-span, the most effective most economical mode carries out surface treatment to mould exactly.PVD magnetic sputtering coating effectively can improve the surface property such as hardness, antiwear and antifriction of matrix.Wherein, CrTiN tri compound coating obtains the extensive concern of domestic and international researcher with the mechanical performance of its excellence.CrTiN tri compound coating has better hardness, film/film-substrate binding strength than current most widely used TiN and CrN.The application of CrTiN coating on the instrument such as drill bit, lathe tool is extensively approved, but for mould, the application of this coating is but restricted.This is mainly because the working environment of cutter and mould steel is extremely severe, and CrTiN coating self performance also exists larger defect, and such as its toughness is poor, is easy to cracking, peels off under shock loading.For optimizing properties of coating further and improving film substrate bond strength, the present invention introduces Ni element on the basis of CrTiN coating, is intended to develop a kind of novel NiCrN ternary coating.
(3) summary of the invention
The object of the invention is to provide a kind of goods containing NiCrN ternary coating and preparation method, improves the film substrate bond strength of NiCrN composite coating further, and the size controlling each layer tissue crystal grain within the scope of nanoscale and evenly; The layer thickness of every one deck is also within the scope of nanoscale; Coating structure voidage is low, dense structure, makes coating have best hardness/toughness combination, optimizes the shock-resistant polishing machine of coating, antifriction performance and Modificati on, improve the demolding performace of mould.
The technical solution used in the present invention is:
The invention provides a kind of goods containing NiCrN ternary coating, described goods are with Cr layer for bottom, and with NiCrN layer for transition zone, on NiCrN transition zone, depositing several layers NiCrN-CrN composite coating makes the thickness of composite coating reach 2 ~ 5 μm.Usually on NiCrN transition zone, deposit NiCrN-CrN composite coating 2 ~ 2.5h can make the thickness of composite coating reach 2 ~ 5 μm.
The present invention also provides a kind of described preparation method containing NiCrN ternary coating goods, described method is: (1) pretreatment: by goods substrate ultrasonic cleaning 5 ~ 10min in alkaline solution, ultrasonic cleaning 6 ~ 9min in acetone again, finally ultrasonic cleaning 4 ~ 8min in absolute ethyl alcohol, obtains pretreated goods substrate; (2) adopt non-balance magnetically controlled sputter method, by Cr layer at Cr target current 3 ~ 5A, substrate bias is deposit on pretreated goods substrate as bottom under-80 ~-120V condition; (3) logical nitrogen, at NiCr alloys target electric current 5 ~ 7A, substrate bias is under the condition of-40 ~-80V, bottom deposits NiCrN layer as transition zone; (4) finally NiCrN-CrN composite coating is prepared, logical nitrogen, at Cr target current 5-7A, substrate bias is-50 ~-80V, NiCr alloys target electric current 4 ~ 6A, substrate bias is under-50 ~-80V condition, is deposited to by NiCrN-CrN composite coating on transition zone and makes NiCrN-CrN composite coating thickness be 2 ~ 5 μm, namely obtains the goods containing NiCrN ternary coating.
Further, step (1) described method is: by goods substrate ultrasonic cleaning 8min in alkaline solution, then ultrasonic cleaning 9min, finally ultrasonic cleaning 8min in absolute ethyl alcohol in acetone, obtains pretreated goods substrate; Described alkaline solution is 10g/L alkaline aqueous solution, and described alkaline aqueous solution neutral and alkali material is NaOH.
Further, step (1) described preprocessing process also comprises by goods substrate in absolute ethyl alcohol after ultrasonic cleaning 4 ~ 8min, then carries out Nitrizing Treatment or carbo-nitriding process.Nitrizing Treatment or carbo-nitriding process well known to a person skilled in the art method, and usual Nitrizing Treatment refers to mould steel Nitrizing Treatment 8 hours at 570 DEG C in nitriding furnace; The process that carbon and nitrogen are infiltrated in the top layer of steel is simultaneously pointed in carbo-nitriding process.
Further, step (2) adopts non-balance magnetically controlled sputter method to be deposited to by Cr as bottom on pretreated goods substrate, and sedimentary condition is: Cr target current 3 ~ 5A, substrate bias is-100V.
Further, step (3) adopts magnetron sputtering method to be deposited to by NiCrN as transition zone on Cr bottom, and sedimentary condition is: logical nitrogen, NiCr alloys target electric current 6A, substrate bias is-65V.
Further, step (4) adopts non-balance magnetically controlled sputter method NiCrN-CrN composite coating to be deposited to goods NiCrN transition zone made and contains (NiCrN-CrN) complex ternary coating, sedimentary condition is: at Cr target current 6A, substrate bias is-65V, NiCr alloys target electric current 5A, substrate bias is-65V.Wherein (NiCrN-CrN) composite coating deposition is with the deposition basis of transition zone.
Multi-layer nano gradient coating is prepared in the present invention's design, to improve the film substrate bond strength of coating, with Ni element substitution Ti on the basis of CrTiN composite coating, Ni element can improve coating toughness and heat endurance to a great extent, and can reduce the wetness degree of mould and liquid plastic; Before plated film, increase nitridation process or carry out carbo-nitriding process.Workpiece running status in stove is that diaxon rotates, and namely around main shaft revolution, also completes rotation simultaneously.
Cr target of the present invention, NiCr alloys target is high pure metal, recommends purchased from ladder that coating company of Britain.
Compared with prior art, beneficial effect of the present invention is mainly reflected in:
(1) nitridation process before the present invention adopts multi-gradient design and plated film substantially increases the film substrate bond strength of coating, gradient coating prepared by the present invention critical load in scratch test up to the general film substrate bond strength of 75N(at about 45N), far above relevant coating prepared by other Method and process;
(2) due to the existence in the rich Ni district of disperse, in coating, dispersion-strengtherning and stress reinforced effect strengthen the electric current by regulating NiCr alloys target, make the hardness containing NiCrN ternary coating goods reach 2780HV;
(3) Ni element improves the toughness of coating to a great extent, and can obtain optimum hardness/toughness combination by controlling preparation technology, the existence of Ni makes coated grains refinement, and porosity reduces, and compactness improves;
(4) NiCrN ternary coating significantly improves impact-resistant abrasion-proof antifriction performance and the heat endurance of mould and tool surface, and coefficient of friction and wear weight loss rate all significantly reduce;
(5) NiCrN ternary coating substantially increases the angle of wetting of mould steel to organic solvent, shows that this coating significantly can improve the demolding performace of mould.
(4) accompanying drawing explanation
Coating structure schematic diagram prepared by Fig. 1 the present invention.
The distribution of Fig. 2 target places schematic diagram with specimen holder.
Fig. 3 Teer-UDP850/4 type magnetic control sputtering device photo.
Fig. 4 is containing the scanning electron microscope (SEM) photograph of NiCrN ternary coating product surface.
Fig. 5 is containing the angle of wetting of NiCrN ternary coating goods organic solvent.
Fig. 6 is without the angle of wetting of coated article surface organic solvent.
(5) detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described further, but protection scope of the present invention is not limited in this:
The Teer-UDP850/4 type closed field unbalanced magnetron sputtering ion plating equipment (Teer-UDP850/4 closed-filed unbalanced magnetron sputtering ion plating coater) selecting your coating company of Britain's ladder to manufacture prepares the goods containing CrNiN ternary coating of the present invention, this equipment is made up of vacuum system, power-supply system, control system, cooling system four part, and photo as shown in Figure 3.
Vacuum system is two-stage vacuum, and prime adopts mechanical pump slightly to take out, and rear class adopts diffusion pump essence to take out.As shown in Figure 2, vacuum wall is provided with four pieces of targets (2 Cr targets, 2 NiCr alloys target, all purchased from ladder that coating company of Britain).
Embodiment 1
(1) substrate pretreatment: with H13 mould steel for goods substrate, by goods substrate ultrasonic cleaning 8min in 10 g/L sodium hydrate aqueous solutions, ultrasonic cleaning 9min, finally ultrasonic cleaning 8min in absolute ethyl alcohol in acetone again, obtains pretreated goods substrate.
(2) Teer-UDP850/4 type closed field unbalanced magnetron sputtering ion plating equipment is adopted to prepare the key step of NiCrN ternary coating (coating structure schematic diagram is as shown in Figure 1) as follows:
1) start preheating, logical cooling water, opens mechanical pump and is evacuated to 4.0 × 10
-4pa, and vacuum chamber is heated to 100 DEG C;
2) pass into argon gas, regulate gas cylinder valve and flowmeter, adjustment vacuum chamber internal gas pressure makes target build-up of luminance;
3) Ion Cleaning: matrix is rotated, regulates substrate bias to 400V, cleans matrix surface 20min with Ar+, remove surface impurity, for formal plated film is prepared;
4) plated metal Cr bottoming: open Cr target, target current is 4A, adjustment substrate bias is-100V, and deposition one deck Cr, as bottom, to improve the bond strength of coating and matrix;
5) deposit NiCrN transition zone: NiCr alloys target electric current is increased to 6 A, substrate bias-65V, open nitrogen valve, deposition layer of Ni CrN, as transition zone, to strengthen the bond strength of coating and matrix further;
6) deposit (NiCrN-CrN) composite coating: four targets (2 Cr targets, 2 NiCr alloys target) arrange by shown in Fig. 2, all open, logical nitrogen, Cr target current is 6A, and substrate bias-65V, NiCr alloys target electric current is 5A, substrate bias-65V.
7) plated film is complete: cool after 30 minutes, applying argon gas, blow-on, sampling, and in goods, NiCrN-CrN composite coating thickness is 3 μm, namely obtains the goods containing NiCrN ternary coating, and the goods containing NiCrN ternary coating are carried out performance test as sample.Concrete technological parameter is shown in Table 1.
The preparation technology parameter of table 1 CrNiN ternary coating
Adopt HMV-1T type microhardness testers, measure the microhardness value under 10g load, hold time is 10s.In order to reduce each sample measurement microhardness value of error five times, the arithmetic mean of instantaneous value getting five times is as the hardness number of this sample.Microhardness value containing NiCrN ternary coating can reach 2580HV.
CQY-18 type ball trace instrument survey calculation is adopted to be 3 μm containing the thickness of NiCrN ternary coating goods floating coat; Adopt the film substrate bond strength of WS-2004 type coating adhesion scratching instrument characterizing coating, the critical load in scratch test is 60N.
NiCrN ternary coating prepared by the present invention has rational component gradient structure, the structural design of coating is as shown in Figure 1: because Cr and steel matrix have generally acknowledged good adhesive force, so first use Cr bottoming, then it is used NiCrN transition, finally deposition has the NiCrN-CrN multiple layer film of nano-multilayered structures.The membranous layer ingredient of this continuously smooth transition can make the physics of rete, chemical property and institutional framework continuous transition gradually, alleviates the stress state of interface, thus can improve the combination property of film to a great extent.
Embodiment 2
By pretreated H13 mould steel Nitrizing Treatment 8 hours at 570 DEG C in nitriding furnace, Teer-UDP850/4 type closed field unbalanced magnetron sputtering ion plating equipment is then adopted to prepare NiCrN ternary coating.Other operations and method are with embodiment 1, and in goods, NiCrN-CrN composite coating thickness is 3 μm, namely obtain the goods containing NiCrN ternary coating, and the goods containing NiCrN ternary coating are carried out performance test as sample.
The VEGA-3-S type SEM adopting TESCAN company of Czech to produce is observed specimen surface pattern, the results are shown in Figure shown in 4.Fig. 4 shows NiCrN ternary coating nano surface crystalline form looks.
Adopt HMV-1T type microhardness testers, measure the microhardness value under 10g load, hold time is 10s.In order to reduce each sample measurement microhardness value of error five times, the arithmetic mean of instantaneous value getting five times is as the hardness number of this sample.The microhardness value of coating can reach 2780HV.
The thickness adopting CQY-18 type ball trace instrument survey calculation coating is 3 μm; Adopt the film substrate bond strength of WS-2004 type coating adhesion scratching instrument characterizing coating, the critical load in scratch test is 75N.
Adopting German moral luxuriant and rich with fragrance QCA35 type contact angle measurement to measure mould steel surface NiCrN ternary coating organic solvent angle of wetting is 101.9 degree (Fig. 5), and without coating mold surface organic solvent angle of wetting 78.3 degree (Fig. 6), show that this coating significantly can improve the demolding performace of mould.