CN103978748A - Intermediate-high-temperature self-lubricating multi-arc ion-plated multiple-unit gradient tool coating and preparation method thereof - Google Patents
Intermediate-high-temperature self-lubricating multi-arc ion-plated multiple-unit gradient tool coating and preparation method thereof Download PDFInfo
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Abstract
The invention discloses an AlCrTiSiN/AlCrN multiple-unit gradient tool coating, belonging to the technical field of material surface coating. The intermediate-high-temperature self-lubricating multiple-unit gradient coating is prepared by virtue of a multi-arc iron-plating technique and is in a three-layer gradient structure including a CrN layer, an AlCrN gradient transition layer and an AlCrTiSiN working layer, wherein the thickness of the AlCrN gradient transition layer is 0.84-1.09 microns, and the thickness of the AlCrTiSiN working layer is 1.61-2.36 microns; the AlCrTiSiN working layer comprises the following components in percentage by weight: 50%-70% of (Al,Cr)N solid solution and 30%-50% of (Al,Ti)N solid solution. The coating has excellent frictional wear performance due to a self-lubricating effect at an intermediate-high temperature (500 DEG C), a novel method is provided for developing similar high-end products by virtue of the multi-arc iron-plating technique, and the coating has good application prospect in high-speed cutting tools.
Description
Technical field
The invention belongs to material surface coating technique field, be specifically related to a kind of high-speed cutting tool surfaces plated film strengthening treatment process, relate in particular to the polynary gradient tool coating of high-temperature self-lubrication in a kind of AlCrTiSiN/AlCrN, the invention still further relates to the preparation method of this polynary gradient coating.
Background technology
Manufacturing industry has critical effect and status in Chinese national economy development, and powerful manufacturing industry is to realize the important foundation of the modernization of industry.Along with modernization manufacturing industry to fast, efficient, environmental protection and the aspect development such as energy-conservation, its requirement to cutting tool is also more and more higher, and coating technology is to improve the important method of tool sharpening performance and used life.
Cutting-Tool Coating Technology refers to that improving its wearability at cutting tool surface coating last layer ganoine thin film increases its service life to reach, this hard coat not only has very high hardness, and has high temperature oxidation resistance, corrosion resistance and good frictional behaviour.These advantages make coating improve to a great extent the life-span of cutting tool, have reduced maintenance cost, have reduced the down time causing because of tool failure.And for some valuable cutters, due to coating repeatedly, increased it to reuse, there is very large economic benefit.
TiN coating as first generation coating owing to thering is high rigidity, low wearing and tearing and good chemical stability and be widely used in the coating of cutter, mould and element part.But the antioxygenic property that TiN coating is poor and lower hot red hardness (500 DEG C time its hardness just start sharply to decline), limited its application under harsh conditions.The TiAlN and the TiCrN superhard film that on TiN coating basis, develop show the performance that is much better than TiN.Compared with TiN rete, TiAlN film has the hardness of better non-oxidizability, wearability and Geng Gao; TiCrN rete has lower surface roughness, high heat endurance and wearability, thereby TiAlN and TiCrN coating replace gradually TiN and become second generation coating.
Since Veprek successfully prepares superhard nc-TiN/a-Si
3h
4since coating, multi-element compounds and multi-layer composite coatings thereof become a focus of hard coat research.Aspect the composite coating or five yuan of compound coats of quaternary compound, CrAlTiN, AlTiSiN and TiSiCN coating all have lower friction factor and excellent heat endurance.
In this patent, on AlCrN basis, prepare the many first gradient tool coatings of AlCrTiSiN/AlCrN by multi-arc ion coating mode.And in document now, the document of research AlCrTiSiN coating is comparatively rare, and research direction concentrates in the mechanical property and high temperature oxidation resistance of this coating, the self-lubricating phenomenon about the many first gradient tool coatings of AlCrTiSiN/AlCrN under middle high temperature there is not yet report.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, polynary gradient tool coating of high-temperature self-lubrication multi-arc ion coating and preparation method thereof in one is provided, has made the polynary gradient tool coating of high-temperature self-lubrication in AlCrTiSiN/AlCrN be able to industrial applications on high-speed cutting instrument.
In order to realize above-mentioned technical purpose, the present invention is achieved by the following technical programs.
The invention provides the polynary gradient tool coating of high-temperature self-lubrication multi-arc ion coating in one, this coating is three layers of gradient-structure, is respectively CrN prime coat, AlCrN gradient transitional lay and AlCrTiSiN working lining as thin as a wafer; Described AlCrN gradient transition layer thickness is 0.84～1.09 μ m, and AlCrTiSiN working lining thickness is 1.61～2.36 μ m; In described AlCrTiSiN working lining, contain (Al, Cr) N solid solution of 50～70% and (Al, Ti) N solid solution of 30～50%.
The present invention provides the preparation method of the polynary gradient tool coating of a kind of above-mentioned middle high-temperature self-lubrication multi-arc ion coating simultaneously, comprises the following steps:
(1) in vacuum chamber, symmetric position is placed respectively the first arc source, the second arc source and the 3rd arc source, by Ar and N
2in gas access vacuum chamber; The target of described the first arc source is made up of simple substance Cr, purity 99.99%; The target of the second arc source is made up of AlCr powder metallurgy, and the atomic percent of Al and Cr is 70:30, and the purity of AlCr target is 99.99%; The 3rd arc source is made up of AlTiSi powder metallurgy, and the atomic percent of Al, Ti and Si is 60:30:10, and the purity of AlTiSi target is 99.99%;
(2), polishing, cleaned workpiece are clamped with fixture on the pivoted frame being fixed in vacuum chamber; Described workpiece rotating frame rotating speed is 3rpm, and vacuum degree in vacuum chamber is 5.0 × 10
-2pa, heating-up temperature is 430 DEG C;
(3), workpiece deposition plating goes to and in vacuum chamber, passes into Ar gas, biasing carries out Ar icon bombardment cleaning to remove adsorbate and the oxide of remained on surface to surface of the work, closes Ar gas;
(4), pass into N
2gas, regulates N
2strong and the bias voltage of air pressure, rising vacuum indoor temperature, starts the first arc source and is used for depositing CrN prime coat; N when described deposition CrN prime coat
2gas dividing potential drop is 0.8Pa, bias voltage 200V, 450 DEG C of depositing temperatures, sedimentation time 4min;
(5), regulate N
2strong and the bias voltage of air pressure, starts the second arc source, depositing Al CrN gradient transitional lay ground floor together with the first arc source; When described depositing Al CrN gradient transitional lay ground floor, N
2gas dividing potential drop is 1.5Pa, bias voltage 100V, sedimentation time 3.3min;
(6), regulate N
2strong and the bias voltage of air pressure, closes the first arc source, only Yus the second arc source depositing Al CrN gradient transitional lay second layer; When the described depositing Al CrN gradient transitional lay second layer, N
2gas dividing potential drop is 3Pa, bias voltage 80V, sedimentation time 120min;
(7), regulate N
2strong and the bias voltage of air pressure, starts the 3rd arc source, depositing Al CrTiSiN working lining together with the second arc source; When described depositing Al CrTiSiN working lining, N
2gas dividing potential drop is 2～4Pa, bias voltage 50～120V, sedimentation time 90min;
(8), coating process finishes, workpiece cools to room temperature with the furnace.
As one optimization, the N in described step (7)
2gas dividing potential drop is 3Pa, and bias voltage is 80V, and the polynary gradient tool coating of now preparing possesses more excellent friction and wear behavior.
Compared with prior art, the present invention has following technique effect:
1, CrN layer, AlCrN layer and three layers of distribution gradient of AlCrTiSiN layer have realized composition diversification and the structure multiple stratification of coating, improve internal stress distribution, make this polynary gradient coating evenly fine and close, have high rigidity and fabulous film-substrate cohesion;
2, when middle high temperature (500 DEG C), because self-lubricating possesses very excellent friction and wear behavior, (coefficient of friction is 0.025～0.107 to coating of the present invention, wear rate is (1.601～2.81) × 10
-16m
3/ Nm, this is coefficient of friction (0.514～0.535) and the wear rate (5.24～7.08 × 10 at 25 DEG C of room temperatures lower than this rete
-16m
3/ Nm, also coefficient of friction (0.354～0.376) and the wear rate (2.61～5.04 × 10 500 DEG C time far below traditional AlCrN coating
-14m
3/ Nm));
3, the exploitation that coating of the present invention is prepared similar high-end product for multi-arc ion coating provides new method, and has good application prospect on high-speed cutting instrument.
Brief description of the drawings
Fig. 1 is the structural representation of vacuum chamber of the present invention;
Wherein: 1, vacuum chamber; 2, arc source; 3, fixture; 4, pivoted frame; A, vacuumize; B, pulsed bias.
Fig. 2 is process chart of the present invention.
Fig. 3 is the transmission picture in the many first gradient coatings of AlCrTiSiN/AlCrN of the present invention cross section.
Fig. 4 is the schematic diagram that the many first gradient coating hardness of AlCrTiSiN/AlCrN prepared of the embodiment of the present invention 1,2,3 changes with substrate bias.
Fig. 5 is that the many first gradient coating hardness of AlCrTiSiN/AlCrN prepared of the embodiment of the present invention 1,4,5 is with N
2the schematic diagram that dividing potential drop changes.
Fig. 6 is the schematic diagram that the many first gradient coating bond strengths of AlCrTiSiN/AlCrN prepared of the embodiment of the present invention 1,2,3 change with substrate bias.
Fig. 7 is that the many first gradient coating bond strengths of AlCrTiSiN/AlCrN prepared of the embodiment of the present invention 1,4,5 are with N
2the schematic diagram that dividing potential drop changes.
Fig. 8 is the schematic diagram that the coefficient of friction curve of the many first gradient coatings of AlCrTiSiN/AlCrN prepared of the embodiment of the present invention 1,2,3 at 500 DEG C changes with substrate bias.
Fig. 9 is that the coefficient of friction curve of the many first gradient coatings of AlCrTiSiN/AlCrN prepared of the embodiment of the present invention 1,4,5 at 500 DEG C is with N
2the schematic diagram that dividing potential drop changes.
Figure 10 is the schematic diagram that the wear rate of the many first gradient coatings of AlCrTiSiN/AlCrN prepared of the embodiment of the present invention 1,2,3 at 500 DEG C changes with substrate bias.
Figure 11 is that the wear rate of the many first gradient coatings of AlCrTiSiN/AlCrN prepared of the embodiment of the present invention 1,4,5 at 500 DEG C is with N
2the schematic diagram that dividing potential drop changes.
Figure 12 is the many first gradient coatings of AlCrTiSiN/AlCrN of the present invention and the traditional AlCrN coating coefficient of friction curve comparison figure at room temperature (25 DEG C) and 500 DEG C respectively.
Figure 13 is the many first gradient coatings of AlCrTiSiN/AlCrN of the present invention and the traditional AlCrN coating wear rate comparison diagram at room temperature (25 DEG C) and 500 DEG C respectively.
Figure 14 is the working durability comparison diagram of the many first gradient coatings of AlCrTiSiN/AlCrN of the present invention and traditional AlCrN coating.
Specific embodiments
Below in conjunction with drawings and Examples in detail the present invention is described in detail, but the present invention is not limited to following embodiment.
Embodiment 1
As depicted in figs. 1 and 2, the preparation method of the polynary gradient tool coating of a kind of middle high-temperature self-lubrication multi-arc ion coating of the present embodiment, comprises the following steps:
(1), place respectively the first arc source 2, the second arc source 2 and the 3rd arc source 2 in the inner symmetric position of vacuum chamber 1, by Ar and N
2in gas access vacuum chamber 1.Wherein, the target of the first arc source is made up of simple substance Cr, purity 99.99%; The target of the second arc source is made up of AlCr powder metallurgy, and the atomic percent of Al and Cr is 70:30, and the purity of AlCr target is 99.99%; The 3rd arc source is made up of AlTiSi powder metallurgy, and the atomic percent of Al, Ti and Si is 60:30:10, and the purity of AlTiSi target is 99.99%;
(2), choose monocrystalline silicon piece as workpiece, workpiece size is 20mm × 10mm × 0.54mm, workpiece after polishing is used to acetone and the each 15min of alcohol Ultrasonic Cleaning successively, after drying, clamp on the pivoted frame 4 being fixed in vacuum chamber 1 with fixture 3, vacuum chamber 1 is vacuumized, make vacuum reach 5.0 × 10
-2pa, temperature is heated to 430 DEG C, and it is 3rpm that workpiece rotating frame rotating speed is set;
(3), workpiece deposition plating goes in vacuum chamber 1 and passes into Ar gas, making the pressure in vacuum chamber 1 is 1Pa, adds back bias voltage 900V surface of the work is carried out to Ar icon bombardment cleaning 20min, to remove adsorbate and the oxide of remained on surface, closes Ar gas;
(4), pass into N
2gas, makes N
2gas differential pressure drop is to 0.8Pa, and bias voltage is down to 200V, and vacuum indoor temperature rises to 450 DEG C, starts the first arc source and is used for depositing CrN prime coat, work 4min;
(5), add and fill N
2gas is to 1.5Pa, and bias voltage is down to 100V, starts the second arc source, depositing Al CrN gradient transitional lay ground floor together with the first arc source, work 3.3min;
(6), add and fill N
2gas is to 3Pa, and bias voltage is down to 80V, closes the first arc source, only Yus the second arc source depositing Al CrN gradient transitional lay second layer, work 120min;
(7), keep N
2gas dividing potential drop is 3Pa, and bias voltage is that 80V is constant, starts the 3rd arc source, depositing Al CrTiSiN working lining together with the second arc source, work 90min;
(8), coating process finishes, vacuum chamber 1 is cooled to room temperature, opens fire door, takes out workpiece.
The total coating thickness preparing is 3.10 μ m, and wherein AlCrN gradient transition layer thickness is 1.07 μ m, and AlCrTiSiN working lining thickness is 2.03 μ m.
Embodiment 2
As depicted in figs. 1 and 2, the preparation method of the polynary gradient tool coating of a kind of middle high-temperature self-lubrication multi-arc ion coating of the present embodiment, comprises the following steps:
(1)～(6), identical with step (1)～(6) in embodiment 1;
(7), keep N
2gas dividing potential drop is that 3Pa is constant, and bias voltage is reduced to 50V, starts the 3rd arc source, depositing Al CrTiSiN working lining together with the second arc source, work 90min;
(8), coating process finishes, vacuum chamber 1 is cooled to room temperature, opens fire door, takes out workpiece.
The total coating thickness preparing is 2.45 μ m, and wherein AlCrN gradient transition layer thickness is 0.84 μ m, and AlCrTiSiN working lining thickness is 1.61 μ m.
Embodiment 3
As depicted in figs. 1 and 2, the preparation method of the polynary gradient tool coating of a kind of middle high-temperature self-lubrication multi-arc ion coating of the present embodiment, comprises the following steps:
(1)～(6), identical to (6) with step (1) in embodiment 1;
(7), keep N
2gas dividing potential drop is that 3Pa is constant, and bias voltage increases to 120V, starts the 3rd arc source, depositing Al CrTiSiN working lining together with the second arc source, work 90min;
(8), coating process finishes, vacuum chamber 1 is cooled to room temperature, opens fire door, takes out workpiece.
The total coating thickness preparing is 3.13 μ m, and wherein AlCrN gradient transition layer thickness is 1.09 μ m, and AlCrTiSiN working lining thickness is 2.04 μ m.
Embodiment 4
As depicted in figs. 1 and 2, the preparation method of the polynary gradient tool coating of a kind of middle high-temperature self-lubrication multi-arc ion coating of the present embodiment, comprises the following steps:
(1)～(6), identical to (6) with step (1) in embodiment 1;
(7), reduce N
2gas divides and is depressed into 2Pa, and keeping bias voltage is that 80V is constant, starts the 3rd arc source, depositing Al CrTiSiN working lining together with the second arc source, work 90min;
(8), coating process finishes, vacuum chamber 1 is cooled to room temperature, opens fire door, takes out workpiece.
The total coating thickness preparing is 3.39 μ m, and wherein AlCrN gradient transition layer thickness is 1.03 μ m, and AlCrTiSiN working lining thickness is 2.36 μ m.
Embodiment 5
As depicted in figs. 1 and 2, the preparation method of the polynary gradient tool coating of a kind of middle high-temperature self-lubrication multi-arc ion coating of the present embodiment, comprises the following steps:
(1)～(6), identical to (6) with step (1) in embodiment 1;
(7), add and fill N
2gas, makes N
2gas dividing potential drop is increased to 4Pa, and keeping bias voltage is that 80V is constant, starts the 3rd arc source, depositing Al CrTiSiN working lining together with the second arc source, work 90min;
(8), coating process finishes, vacuum chamber 1 is cooled to room temperature, opens fire door, takes out workpiece.
The total coating thickness preparing is 2.41 μ m, and wherein AlCrN gradient transition layer thickness is 0.98 μ m, and AlCrTiSiN working lining thickness is 1.43 μ m.
As shown in Figure 4 and Figure 5, comparative example 1～embodiment 5, analyzes by the hardness of the polynary gradient tool coating of Using Nanoindentation centering high-temperature self-lubrication multi-arc ion coating, and coating hardness all exceedes 30GPa, and increases with the increase of bias voltage, with N
2the increase of dividing potential drop and reducing.At bias voltage 120V, N
2dividing potential drop 3Pa and bias voltage 80V, N
2under two deposition parameters of dividing potential drop 2Pa, obtain close maximum hardness value 45.4GPa.
As shown in Figure 6 and Figure 7, comparative example 1～embodiment 5, analyze by the bond strength of the polynary gradient tool coating of scarification centering high-temperature self-lubrication multi-arc ion coating, the Lc2 value (the second critical load, corresponding load when coating and matrix occur to peel off in a large number) of characterizing coating bond strength is with bias voltage and N
2the increase of dividing potential drop and reducing.In the time that being bias voltage 80V, 2Pa, deposition parameter obtains the highest Lc2 value 67N.
As shown in Fig. 8～Figure 11, comparative example 1～embodiment 5, use pin dish fretting wear instrument measure in the coefficient of friction of the polynary gradient tool coating of high-temperature self-lubrication multi-arc ion coating at 500 DEG C calculate wear rate.Can find that coating coefficient of friction and wear rate are all with bias voltage and N
2the increase of dividing potential drop and first fall rear increasing, in the time that deposition parameter is bias voltage 80V, 3Pa, coefficient of friction and wear rate are all minimum, are respectively 0.0025 and 1.60 × 10
-16m
3/ Nm, polishing machine optimum.
As shown in Figure 12 and Figure 13, to embodiment 1, use pin dish fretting wear instrument to measure by film-coating workpiece the coefficient of friction under room temperature (25 DEG C) and middle high temperature (500 DEG C), calculate wear rate and make comparisons with traditional AlCrN coating.Can see that the coefficient of friction of the many first gradient coatings of this AlCrTiSiN/AlCrN at 500 DEG C and wear rate are all far below the numerical value under room temperature.Although simultaneously can find coefficient of friction and the wear rate a little higher than AlCrN coating of AlCrTiSiN/AlCrN coating when the room temperature by contrast in Figure 13, but 500 DEG C time, the coefficient of friction of AlCrTiSiN/AlCrN coating and wear rate are far below AlCrN coating, and be more or less the same from coefficient of friction under the high temperature of AlCrN coating and wear rate is different higher than the situation of wear rate under room temperature, AlCrTiSiN/AlCrN coating at 500 DEG C coefficient of friction and wear rate all far below numerical value under room temperature.This is to generate sull because oxidation reaction at high temperature occurs this polynary gradient tool coating, has served as the lubricant between coating and abrading-ball, coefficient of friction is declined to a great extent and far below wear rate under room temperature, thereby possesses excellent polishing machine.Therefore the many first gradient superhard films of AlCrTiSiN/AlCrN have very excellent polishing machine when middle high temperature (500 DEG C).
As shown in figure 14, traditional AlCrN coating and the many first gradient coatings processing high-speed cutting cutter heads of AlCrTiSiN/AlCrN are made comparisons, the tool flank wear of the high-speed cutting cutter head of the polynary gradient tool coating of the middle high-temperature self-lubrication multi-arc ion coating processing in the present embodiment is starkly lower than AlCrN coating and processed the wear extent of cutter head, thereby significantly increased the service life of high-speed cutting cutter head.This is also because the high-speed cutting cutter head of the present embodiment processing has due to excellent middle high-temperature wear behavior.
Claims (3)
1. the polynary gradient tool coating of high-temperature self-lubrication multi-arc ion coating in, is characterized in that: this coating is three layers of gradient-structure, is respectively CrN prime coat, AlCrN gradient transitional lay and AlCrTiSiN working lining; Described AlCrN gradient transition layer thickness is 0.84～1.09 μ m, and AlCrTiSiN working lining thickness is 1.61～2.36 μ m; In described AlCrTiSiN working lining, contain (Al, Cr) N solid solution of 50～70% and (Al, Ti) N solid solution of 30～50%.
2. in, a preparation method for the polynary gradient tool coating of high-temperature self-lubrication multi-arc ion coating, is characterized in that comprising the steps:
(1) in vacuum chamber, symmetric position is placed respectively the first arc source, the second arc source and the 3rd arc source, by Ar and N
2in gas access vacuum chamber; The target of described the first arc source is made up of simple substance Cr, purity 99.99%; The target of the second arc source is made up of AlCr powder metallurgy, and the atomic percent of Al and Cr is 70:30, and the purity of AlCr target is 99.99%; The 3rd arc source is made up of AlTiSi powder metallurgy, and the atomic percent of Al, Ti and Si is 60:30:10, and the purity of AlTiSi target is 99.99%;
(2) polishing, cleaned workpiece are clamped with fixture on the pivoted frame being fixed in vacuum chamber; Described workpiece rotating frame rotating speed is 3rpm, and vacuum degree in vacuum chamber is 5.0 × 10
-2pa, heating-up temperature is 430 DEG C;
(3) workpiece deposition plating goes in vacuum chamber and passes into Ar gas, and biasing carries out Ar icon bombardment cleaning to remove adsorbate and the oxide of remained on surface to surface of the work, closes Ar gas;
(4) pass into N
2gas, regulates N
2strong and the bias voltage of air pressure, rising vacuum indoor temperature, starts the first arc source and is used for depositing CrN prime coat; N when described deposition CrN prime coat
2gas dividing potential drop is 0.8Pa, bias voltage 200V, 450 DEG C of depositing temperatures, sedimentation time 4min;
(5) regulate N
2strong and the bias voltage of air pressure, starts the second arc source, depositing Al CrN gradient transitional lay ground floor together with the first arc source; When described depositing Al CrN gradient transitional lay ground floor, N
2gas dividing potential drop is 1.5Pa, bias voltage 100V, sedimentation time 3.3min;
(6) regulate N
2strong and the bias voltage of air pressure, closes the first arc source, only Yus the second arc source depositing Al CrN gradient transitional lay second layer; When the described depositing Al CrN gradient transitional lay second layer, N
2gas dividing potential drop is 3Pa, bias voltage 80V, sedimentation time 120min;
(7) regulate N
2strong and the bias voltage of air pressure, starts the 3rd arc source, depositing Al CrTiSiN working lining together with the second arc source; When described depositing Al CrTiSiN working lining, N
2gas dividing potential drop is 2～4Pa, bias voltage 50～120V, sedimentation time 90min;
(8) coating process finishes, and workpiece cools to room temperature with the furnace.
3. the preparation method of the polynary gradient tool coating of a kind of middle high-temperature self-lubrication multi-arc ion coating as claimed in claim 2, is characterized in that, the N in described step (7)
2gas dividing potential drop is 3Pa, and bias voltage is 80V.
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| CN109881148A (en) * | 2019-03-13 | 2019-06-14 | 广东工业大学 | A kind of AlCrTiSiN high-entropy alloy nitride coatings of single phase solid solution structure and its preparation method and application |
| WO2019128904A1 (en) * | 2017-12-29 | 2019-07-04 | 安徽工业大学 | Alcrsin coating with enhanced ion source and gradient-changed si content and ion size |
| CN112524116A (en) * | 2020-11-12 | 2021-03-19 | 江苏徐工工程机械研究院有限公司 | Hydraulic piston rod, surface composite functional coating thereof and preparation method |
| CN115354282A (en) * | 2022-09-05 | 2022-11-18 | 沈阳乐贝真空技术有限公司 | Preparation method of AlCrTiSiN nano composite coating plated alloy saw blade |
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| WO2019128904A1 (en) * | 2017-12-29 | 2019-07-04 | 安徽工业大学 | Alcrsin coating with enhanced ion source and gradient-changed si content and ion size |
| CN108118301B (en) * | 2017-12-29 | 2020-01-21 | 安徽多晶涂层科技有限公司 | AlCrSiN coating with intermediate layer with gradient change of Si content and preparation method |
| US10941479B2 (en) | 2017-12-29 | 2021-03-09 | Anhui DuojinTuceng Technology Co. Ltd. | Ion source enhanced AlCrSiN coating with gradient Si content and gradient grain size |
| CN109881148A (en) * | 2019-03-13 | 2019-06-14 | 广东工业大学 | A kind of AlCrTiSiN high-entropy alloy nitride coatings of single phase solid solution structure and its preparation method and application |
| CN112524116A (en) * | 2020-11-12 | 2021-03-19 | 江苏徐工工程机械研究院有限公司 | Hydraulic piston rod, surface composite functional coating thereof and preparation method |
| DE102022113731A1 (en) | 2022-05-31 | 2023-11-30 | Hartmetall-Werkzeugfabrik Paul Horn Gmbh | Coated tool part and coating process |
| CN115354282A (en) * | 2022-09-05 | 2022-11-18 | 沈阳乐贝真空技术有限公司 | Preparation method of AlCrTiSiN nano composite coating plated alloy saw blade |
| CN115354282B (en) * | 2022-09-05 | 2023-09-22 | 沈阳乐贝真空技术有限公司 | Preparation method of AlCrTiSiN nano composite coating plated alloy saw blade |
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