CN115354282B - Preparation method of AlCrTiSiN nano composite coating plated alloy saw blade - Google Patents
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Abstract
The invention relates to the field of alloy saw blade preparation, in particular to a preparation method of an AlCrTiSiN nano composite coating plated alloy saw blade, which sequentially comprises the following steps: the AlCrTiSiN nano composite coating prepared by the method has good comprehensive performance, high hardness and high-temperature stability, can effectively prevent the problems of coating falling off, and prolongs the service life of a coated workpiece.
Description
Technical Field
The invention relates to the field of alloy saw blade preparation, in particular to a preparation method of an AlCrTiSiN nano composite coating plated alloy saw blade.
Background
Along with the development of science and technology and processing industry, higher requirements are put forward on the surface performance of the material, the application value of the surface performance of the material is extremely high, the surface compliance requirement of the material is developed into a subject, and the subject is a technical support subject for solving the surface performance of the material. The coating protection technology is increasingly widely applied in optimizing the surface performance, the deposition coating technology is rapidly developed, and the technology becomes a research hot spot in the fields of metallurgy, aviation, automobile parts and the like. The coating technology is greatly developed, the upgrading of the cutter industry is unprecedented, the modern industrial application puts higher requirements on the cutter performance, the single-layer coating cannot meet the requirements of the cutter on the performances of high hardness, high toughness, wear resistance, high-temperature oxidation resistance, crack growth and the like of the coating due to the fact that some high-speed upper cutting or dry cutting can not be realized. In order to prepare high-performance coatings, nano-multilayer coating technology is proposed to prepare coatings with ultra-high hardness and toughness.
CrN is a mature binary coatingThe layer is widely applied due to good film base binding force, oxidation resistance and wear resistance; the Al element is easy to form compact Al in a high-temperature service environment 2 O 3 The heat insulation protective layer prevents the coating from being oxidized at high temperature, and Cr element forms Cr 2 O 3 The layer can play a role in lubrication and friction reduction, so the CrAlN coating overcomes the defect of poor high-temperature oxidation resistance of the CrN coating; tiSiN coating a-Si 3 N 4 The nano composite coating for wrapping the fine-grain TiN has no change of the coating structure at the environmental temperature of 900 ℃ and can maintain good mechanical properties. Experiments in recent years show that the surface of the binary CrN coating, namely the ternary CrAlN coating and the TiSiN coating, is still poor in processing quality under high-speed cutting.
Disclosure of Invention
Based on the problems, the invention provides a preparation method of an AlCrTiSiN nano composite coating plated alloy saw blade.
The technical scheme of the invention is as follows:
the preparation method of the AlCrTiSiN nano composite coating plated alloy saw blade sequentially comprises the following steps:
(1) Confirmation of deposition technique:
plating AlCrTiSiN nano composite coating alloy saw blade by adopting a multi-arc ion plating technology;
(2) Confirmation of target and target quantity:
4 AlCr alloy targets and 4 TiSi alloy targets are adopted as cathode arc source targets, the AlCr alloy targets and the TiSi alloy targets are alternately arranged at arc source positions of the coating chamber walls at different heights and different positions, the purity of the targets reaches 99.95%, and the alloy targets are ensured to be started according to the process in the coating process;
(3) Selecting and preprocessing an alloy saw blade:
selecting an alloy saw blade as a coating substrate, placing the alloy saw blade in a coating chamber for coating operation, performing ultrasonic degreasing and decontamination treatment on the alloy saw blade by using a metal cleaning agent, and then drying at 90 ℃ for deposition;
(4) Placing an alloy saw blade:
adopting revolution and autorotation rotation modes, wherein the interval between the cover plates of the alloy saw blade is 29-40mm, and the upper and lower empty spaces of the hanger rod where the alloy saw blade is positioned are not more than 150mm;
(5) And (3) determining a coating process:
and (3) a substrate ion cleaning step: setting the temperature to 300-450 ℃ and the background vacuum of the coating chamber to be (1-5) multiplied by 10 -3 During Pa, the coating chamber is filled with argon gas to make the pressure reach (2-4) x 10 -1 Pa, starting two ion etching targets for ion cleaning, wherein the target current is set to be 130-150A, the negative bias voltage of the rotating frame is 40-150V, the pulse frequency is 10-70KHz, the pulse duty ratio is 40-95%, and the ion cleaning time is 110min;
preparing AlCrN film: filling 1300-1400sccm of N into the film plating chamber 2 Starting 4 AlCr targets, and depositing AlCrN on the substrate, wherein the target current of the AlCr targets is 130-150A, the negative bias voltage of the substrate is 35-80V, and the deposition time is 23min.
Preparing an AlCrTiSiN transition layer: keep 1300-1400sccm N in vacuum chamber 2 Under the condition of ensuring that 4 AlCr targets are normally started, 4 TiSi targets are started, alCrTiSiN is deposited on an AlCrN priming layer, the target current of the AlCr targets is uniformly reduced to 110-120A from 140-150A, the target current of the TiSi targets is uniformly increased to 140-150A from 110-120A, the negative bias voltage of a matrix is 30-65V, and the deposition time is 28min.
Preparing a TiSiN film layer: maintaining 1000-1100sccm of N in vacuum chamber 2 Only 4 TiSi targets are started, a TiSi film layer is deposited on the AlCrTiSiN layer, the target current is kept at 120-150A, the negative bias voltage of the substrate is kept at 30-65V, and the deposition time is 25min.
The preparation method of the AlCrTiSiN nano composite coating plated alloy saw blade comprises the following steps of: the atomic ratio of Cr is 70:30.
The preparation method of the AlCrTiSiN nano composite coating plated alloy saw blade comprises the following steps of: the atomic ratio of Si was 85:15.
The beneficial effects of the invention are as follows:
the alloy saw blade prepared by the invention has strong high-temperature stability and ultra-high hardness of 4000-4300HV, and can cut at high temperature at 950 ℃;
the method provided by the invention determines 4 AlCr alloy targets and 4 TiSi alloy targets as cathode arc source targets; the AlCrTiSiN nano composite coating is firmly combined on the surface of the alloy saw blade substrate in a stepped mode through the AlCrN film layer, the AlCrTiSiN transition layer and the TiSiN film layer, the bonding force intensity between the layers is greatly increased, the TiSi film layer is effectively prevented from falling off from the saw blade substrate, the coating thickness and the components are more uniform, the hardness of the nano composite coating is high, 4000-4300HV can be achieved, the high-temperature stability is high, and the service life of the alloy saw blade is prolonged.
The invention determines the preparation technology of the AlCrTiSiN nano composite coating alloy saw blade by multi-arc ion plating, determines the number of targets and targets, determines the selection and pretreatment process of the alloy saw blade, determines the placement mode of the alloy saw blade, and determines the coating process.
Drawings
FIG. 1 is a schematic layered illustration of an AlCrTiSiN nanocomposite coating;
FIG. 2 is a schematic illustration of a ball pit thickness measurement of AlCrTiSiN nanocomposite coatings;
FIG. 3 is a schematic representation of the Rockwell indentation morphology of AlCrTiSiN nanocomposite coatings.
Detailed Description
The invention will be described in detail with reference to the following examples:
the preparation method of the AlCrTiSiN nano composite coating plated alloy saw blade sequentially comprises the following steps: (1) confirmation of a deposition technology, (2) confirmation of target materials and the number of target materials, (3) selection and pretreatment processes of an alloy saw blade, (4) placement of the alloy saw blade, and (5) determination of a coating process.
The confirmation of the deposition technology refers to plating the AlCrTiSiN nano composite coating alloy saw blade by adopting a multi-arc ion plating technology;
the confirmation of the target materials and the number of the target materials means that 4 AlCr alloy targets and 4 TiSi alloy targets are adopted as cathode arc source targets, the AlCr alloy targets and the TiSi alloy targets are alternately arranged at the arc source positions of the wall of the film plating chamber at different heights and different positions, the purity of the target materials reaches 99.95%, the arc sources are ensured to be started according to the process in the film plating process, wherein the AlCr alloy targets comprise Al: cr is 70:30, and Ti of the TiSi alloy target is: si at an atomic ratio of 85:15;
selecting and preprocessing an alloy saw blade, namely selecting the alloy saw blade with the diameter of 360mm as a coating substrate, placing the alloy saw blade in a coating chamber for coating operation, performing ultrasonic degreasing and decontamination treatment on the alloy saw blade by using a metal cleaning agent, and then drying at 90 ℃ for deposition;
the placement of the alloy saw blade adopts a revolution and autorotation rotation mode, the interval between the cover plates of the alloy saw blade is 29-40mm, and the upper and lower empty spaces of a hanger rod where the alloy saw blade is positioned are not more than 150mm;
the determination of the coating process refers to the coating process adopted for obtaining the AlCrTiSiN nano composite coating on the alloy saw blade, and the operation steps are as follows:
and (3) a substrate ion cleaning step: setting the temperature to 300-450 ℃ and enabling the background vacuum of the coating chamber to reach (1-5) multiplied by 10 -3 During Pa, the coating chamber is filled with argon gas to make the pressure reach (2-4) x 10 -1 Pa, starting two ion etching targets for ion cleaning, wherein the target current is set to be 130-150A, the negative bias voltage of the rotating frame is 40-150V, the pulse frequency is 10-70KHz, the pulse duty ratio is 40-95%, and the ion cleaning time is 110min;
preparing AlCrN film: filling 1300-1400sccm of N into the film plating chamber 2 Starting 4 targets, depositing AlCrN on the substrate, wherein the target current of the AlCrN targets is 130-150A, the negative bias voltage of the substrate is 35-80V, and the deposition time is 23min.
Preparing an AlCrTiSiN transition layer: keep 1300-1400sccm N in vacuum chamber 2 Under the condition of ensuring that 4 AlCr targets are normally started, 4 TiSi targets are started, alCrTiSiN is deposited on an AlCrN priming layer, the target current of the AlCr targets is uniformly reduced to 120-110A from 140-150A, the target current of the TiSi targets is uniformly increased to 140-150A from 110-120A, the negative bias voltage of a substrate is 30-65V, and the deposition time is 28min.
Preparing a TiSiN film layer: maintaining a vacuum chamber 100N of 0-1100sccm 2 Only 4 TiSi targets are started, a TiSi film layer is deposited on the AlCrTiSi layer, the target current is kept at 120-150A, the negative bias voltage of the substrate is kept at 30-65V, and the deposition time is 25min.
The preparation method of the AlCrTiSiN nano composite coating plated alloy saw blade comprises the following steps of: the atomic ratio of Cr is 70:30.
The preparation method of the AlCrTiSiN nano composite coating plated alloy saw blade comprises the following steps of: the atomic ratio of Si was 85:15.
Example 1
Preparation of 75Cr1 alloy saw blade coated with AlCrTiSiN nano composite coating, the method is that
1) And determining a deposition technology, namely determining multi-arc ion plating as a preparation technology for preparing the AlCrTiSiN nano composite coating 75Cr1 alloy saw blade.
2) And determining target materials, namely adopting 4 AlCr alloy targets, wherein the atomic ratio of Al to Cr is 70:30, and 4 TiSi alloy targets, wherein the atomic ratio of Ti to Si is 85:15, taking the alloy targets as cathode arc source targets and alternately arranging the alloy targets at arc source positions of coating chamber walls at different heights and different positions, wherein the purity of the target materials reaches 99.95%, and starting the arc sources according to the process in the coating process.
3) Selecting and preprocessing an alloy saw blade: a75 Cr1 alloy saw blade with the commercial diameter of 360mm is selected as a coating matrix, and is subjected to ultrasonic degreasing and decontamination treatment by using a metal cleaning agent before being placed in a coating chamber for coating operation, and then is dried at 90 ℃ for deposition. When the alloy saw blade is placed and 48 sheets are hung, a revolution and autorotation rotation mode is adopted, the distance between the cover plates of the alloy saw blade is 35mm, and the upper and lower spaces of the hanger rod where the saw blade is positioned are 150mm.
4) The determination of a coating process refers to a coating process adopted for obtaining a 75Cr1 alloy saw blade coated with an AlCrTiSiN nano composite coating, and the first step of substrate ion cleaning: setting the temperature to 350 ℃, and enabling the background vacuum of the coating chamber to reach 1 multiplied by 10 -3 During Pa, the film plating chamber is filled with argon gas to reach the pressure of 3 multiplied by 10 -1 Pa, two targets are activated, ion cleaning is performed, target current is set to 130A,the negative bias voltage of the rotating frame is 150V, the pulse frequency is 30KHz, the pulse duty ratio is 70%, and the ion cleaning is carried out for 110min. Preparing an AlCrN film layer: filling 1350sccm N into the film plating chamber 2 Starting 4 targets, depositing AlCrN on the substrate, wherein the target current of the AlCrN targets is 146A, the negative bias of the substrate is 53V, and the deposition time is 23min. Thirdly, preparing an AlCrTiSiN transition layer: n maintaining 1350sccm in vacuum chamber 2 Under the condition of ensuring that 4 AlCr targets are normally started, 4 TiSi targets are started, an AlCrTiSiN layer is deposited on an AlCrN priming layer, the target current of the AlCr targets is uniformly reduced to 120A from 146A, the target current of the TiSi targets is uniformly increased to 146A from 120A, the negative bias voltage of a matrix is 43V, and the deposition time is 28min. Fourthly, preparing a TiSiN film layer: maintaining 1100sccm of N in a vacuum chamber 2 Only 4 TiSi targets are started, a TiSiN film layer is deposited on the AlCrTiSiN layer, the target current is kept at 146A, the negative bias voltage of the substrate is kept at 43V, and the deposition time is 25min.
The hardness of the 75Cr1 alloy saw blade coated with the AlCrTiSiN nano composite coating prepared by the method reaches 4300HV, and the saw blade can be used for processing a stainless steel rod 9m 2 。
Example 2
Preparation of 30CrMo alloy saw blade coated with AlCrTiSiN nano composite coating, the method is that
1) And determining a deposition technology, namely determining multi-arc ion plating as a preparation technology for preparing the AlCrTiSiN nano composite coating 30CrMo alloy saw blade.
2) And determining target materials, namely adopting 4 AlCr alloy targets, wherein the atomic ratio of Al to Cr is 70:30, and 4 TiSi alloy targets, wherein the atomic ratio of Ti to Si is 85:15, taking the alloy targets as cathode arc source targets and alternately arranging the alloy targets at arc source positions of coating chamber walls at different heights and different positions, wherein the purity of the target materials reaches 99.95%, and starting the arc sources according to the process in the coating process.
3) Selecting and preprocessing an alloy saw blade: a30 CrMo alloy saw blade with the commercial diameter of 360mm is selected as a coating matrix, and is subjected to ultrasonic degreasing and decontamination treatment by using a metal cleaning agent before being placed in a coating chamber for coating operation, and then is dried at 90 ℃ for deposition. When the alloy saw blade is placed and 48 sheets are hung, a revolution and autorotation rotation mode is adopted, the distance between the cover plates of the alloy saw blade is 35mm, and the upper and lower spaces of the hanger rod where the saw blade is positioned are 150mm.
4) The determination of a coating process refers to a coating process adopted for obtaining a 30CrMo alloy saw blade coated with an AlCrTiSiN nano composite coating, and the first step of substrate ion cleaning: setting the temperature to 350 ℃, and enabling the background vacuum of the coating chamber to reach 1 multiplied by 10 -3 During Pa, the film plating chamber is filled with argon gas to reach the pressure of 3 multiplied by 10 -1 Pa, two targets are started for ion cleaning, the target currents are respectively set at 130A, the negative bias voltage of the rotating frame is 150V, the pulse frequency is 30KHz, the pulse duty ratio is 70%, and the ion cleaning is carried out for 110min. Preparing an AlCrN film layer: filling 1350sccm N into the film plating chamber 2 Starting 4 targets, depositing AlCrN priming layer on the substrate, wherein the target current of the AlCrN target is 146A, the negative bias of the substrate is 53V, and the deposition time is 23min. Thirdly, preparing an AlCrTiSiN transition layer: n maintaining 1350sccm in vacuum chamber 2 Under the condition of ensuring that 4 AlCr targets are normally started, 4 TiSi targets are started, an AlCrTiSiN layer is deposited on an AlCrN priming layer, the target current of the AlCr targets is uniformly reduced to 120A from 146A, the target current of the TiSi targets is uniformly increased to 146A from 120A, the negative bias voltage of a matrix is 43V, and the deposition time is 28min. Fourthly, preparing a TiSiN film layer: maintaining 1100sccm of N in a vacuum chamber 2 Only 4 TiSi targets are started, a TiSiN film layer is deposited on the AlCrTiSiN layer, the target current is kept at 146A, the negative bias voltage of the substrate is kept at 43V, and the deposition time is 25min.
The hardness of the 30CrMo alloy saw blade coated with the AlCrTiSiN nano composite coating prepared by the method reaches 4000HV, and the saw blade can be used for processing a stainless steel rod of 7.8m 2 。
Claims (3)
1. The preparation method of the AlCrTiSiN nano composite coating plated alloy saw blade is characterized by comprising the following steps in sequence:
(1) Confirmation of deposition technique:
plating AlCrTiSiN nano composite coating alloy saw blade by adopting a multi-arc ion plating technology;
(2) Confirmation of target and target quantity:
4 AlCr alloy targets and 4 TiSi alloy targets are adopted as cathode arc source targets, the AlCr alloy targets and the TiSi alloy targets are alternately arranged at arc source positions of the coating chamber walls at different heights and different positions, the purity of the targets reaches 99.95%, and the alloy targets are ensured to be started according to the process in the coating process;
(3) Selecting and preprocessing an alloy saw blade:
selecting an alloy saw blade as a coating substrate, placing the alloy saw blade in a coating chamber for coating operation, performing ultrasonic degreasing and decontamination treatment on the alloy saw blade by using a metal cleaning agent, and then drying at 90 ℃ for deposition;
(4) Placing an alloy saw blade:
adopting revolution and autorotation rotation modes, wherein the interval between the cover plates of the alloy saw blade is 29-40mm, and the upper and lower empty spaces of the hanger rod where the alloy saw blade is positioned are not more than 150mm;
(5) And (3) determining a coating process:
and (3) a substrate ion cleaning step: setting the temperature to 300-450 ℃ and the background vacuum of the coating chamber to be (1-5) multiplied by 10 -3 During Pa, the coating chamber is filled with argon gas to make the pressure reach (2-4) x 10 -1 Pa, starting two ion etching targets for ion cleaning, wherein the target current is 130-150A, the negative bias voltage of the rotating frame is 40-150V, the pulse frequency is 10-70KHz, the pulse duty ratio is 40-95%, and the ion cleaning time is 110min;
preparing AlCrN film: filling 1300-1400sccm of N into the film plating chamber 2 Starting 4 AlCr targets, and depositing AlCrN on a substrate, wherein the target current of the AlCr targets is 130-150A, the negative bias voltage of the substrate is 35-80V, and the deposition time is 23min;
preparing an AlCrTiSiN transition layer: keep 1300-1400sccm N in vacuum chamber 2 Under the condition of ensuring that 4 AlCr targets are normally started, 4 TiSi targets are started, an AlCrTiSiN layer is deposited on an AlCrN priming layer, the target current of the AlCr targets is uniformly reduced to 110-120A from 140-150A, the target current of the TiSi targets is uniformly increased to 140-150A from 110-120A, the negative bias voltage of a substrate is 30-65V, and the deposition time is 28min;
preparing a TiSiN film layer: maintaining 1000-1100sccm of N in vacuum chamber 2 Only 4 TiSi targets are started, a TiSiN film layer is deposited on the AlCrTiSiN layer, the target current is kept at 120-150A, the negative bias voltage of the substrate is kept at 30-65V, and the deposition time is 25min.
2. The method for preparing the AlCrTiSiN nano composite coating plated alloy saw blade according to claim 1, wherein the AlCrTiSiN nano composite coating plated alloy saw blade comprises the following steps of: the atomic ratio of Cr is 70:30.
3. The method for preparing the AlCrTiSiN nano composite coating plated alloy saw blade according to claim 1, wherein the Ti of the TiSi alloy target is as follows: the atomic ratio of Si was 85:15.
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| CN105112858A (en) * | 2015-08-31 | 2015-12-02 | 科汇纳米技术（深圳）有限公司 | Nano composite cutting tool coating of multilayer structure |
| CN109295425A (en) * | 2018-09-28 | 2019-02-01 | 深圳市奥美特纳米科技有限公司 | Cr/CrN/CrAlSiN/CrAlTiSiN nanometer multilayer Gradient Film and preparation method thereof |
| CN111549322A (en) * | 2020-06-18 | 2020-08-18 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | AlCrTiSiN/AlCrTiSiON multilayer composite coating and preparation process thereof |
| CN111647856A (en) * | 2020-06-18 | 2020-09-11 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Preparation process of AlCrTiSiN/AlCrTiSiON multilayer composite coating |
| CN112962059A (en) * | 2021-02-04 | 2021-06-15 | 上海应用技术大学 | CrAlTiSiCN nano composite coating and preparation method thereof |
| CN113930722A (en) * | 2021-10-12 | 2022-01-14 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | High-red-hardness AlCrN/AlTiN nano multilayer coating and preparation method thereof |
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