CN109881148A - A kind of AlCrTiSiN high-entropy alloy nitride coatings of single phase solid solution structure and its preparation method and application - Google Patents
A kind of AlCrTiSiN high-entropy alloy nitride coatings of single phase solid solution structure and its preparation method and application Download PDFInfo
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Abstract
The present invention relates to AlCrTiSiN high-entropy alloy nitride coatings of a kind of single phase solid solution structure and its preparation method and application.The AlCrTiSiN high-entropy alloy nitride coatings include AlCrTiSiN face-centred cubic structure single phase solid solution working lining of the AlCrTiSiN of columnar crystal structure towards cubic single phase solid solution prime coat and face-centred cubic structure from bottom to up.AlCrTiSiN high-entropy alloy nitride coatings provided by the invention have high rigidity and toughness, and thermal stability is more than 1000 DEG C, and film-base junction resultant force, high temperature oxidation resistance are excellent；When as hard alloy cutter coating, which has excellent cutting ability.
Description
Technical field
The invention belongs to nitride hard coating fields, and in particular to a kind of AlCrTiSiN high of single phase solid solution structure
Entropy alloy nitride coating and its preparation method and application.
Background technique
With the fast development of modern manufacturing industry, more and more products need cutting, milling, drilling etc. to machine.I
For state's various cutter consumption every year at 20,000,000,000 yuan or more, cutting performance directly affects the quality of product and the service life of cutter.Currently,
In hard alloy cutter process, the cutting force of tool face Lingao and cutting vibration, tool tip cutting edge and workpiece to be machined
Between there are severe friction abrasion and high wind-warm syndrome, tool tip cutting edge processing temperature lead to cutter up to 1000 DEG C or more
Matrix softening, accelerates cutter adhesion wear and chemical abrasion, significantly reduces product processing quality and cutter life.Therefore, to knife
Tool cutting edge, which goes out, proposes the performance requirements such as high red hardness, thermal stability, toughness.
Physical vapour deposition (PVD) (PVD) coating has high surface hardness, good thermal stability and wearability, significantly improves
The service life of high-speed steel tool reduces production cost and guarantees the quality of converted products.Existing market mainstream cutter coat
Are as follows: three constituent element such as AlCrN, TiSiN, CrTiN, AlCrSiN or four constituent element medium entropy alloy nitride coatings, these medium entropy alloy nitrogen
Compound coating internal stress is high, brittleness is big, and coating thermal stability is not good enough, it is difficult to meet the typical difficult processing material such as stainless steel, hardened steel
Expect the requirement of High-speed machining.Even if having the five constituent element high-entropy alloy nitride coatings such as a small amount of AlCrTiSiN, but these coatings
It is made of the nano composite structure that Nanocrystals Embedded noncrystal substrate forms, coating heat resistance is poor, it is difficult to 800 DEG C of high temperature are born,
Otherwise cutter coat performance is significantly degenerated.AlCrTiSiN thermal stability is closely related with Al content and its TiFe_xM_y alloy.Al in coating
Content has a significant impact proposition performance, and coating compactness, thermal stability and high temperature oxidation resistance can be improved in suitable Al,
But excessive Al will lead to and hcp-AlN is precipitated in coating, and coating performance reduces；TiFe_xM_y alloy is excessively high, and AlCrTiSiN solid solution is unstable
It is fixed, spinodal decomposition occurs, forms nano composite structure.Therefore, in AlCrTiSiN high-entropy alloy nitride coatings Al content and
The regulation of its TiFe_xM_y alloy is the problem of must be taken into consideration of AlCrTiSiN high-entropy alloy nitride coatings for preparing single phase solid solution.
In addition, in order to improve coating and basal body binding force, it will usually deposit prime coat and transition between coating and matrix
Layer.These prime coats may be metal (Cr or AlCr etc.) or its nitride (CrN, AlCrN etc.).However, it has been found that
CrN resolves into brittle Cr at 700 DEG C2N phase, and AlCrN at 800 DEG C amorphous at brittle Cr2N and hcp-AlN, causes
Coating binding force significantly reduces.Increase prime coat constituent element content, is conducive to the thermal stability for improving coating.
Therefore, it develops a kind of with 800 DEG C of high temperature with excellent mechanics and thermal stability, can be born and binding force is strong
New coating has important research significance and application value.
Summary of the invention
It is an object of the invention to overcome AlCrTiSiN coating thermostabilization in the prior art bad, binding force is poor to be lacked
It falls into and insufficient, a kind of AlCrTiSiN high-entropy alloy nitride coatings of phase solid solution structure is provided.It is provided by the invention
AlCrTiSiN high-entropy alloy nitride coatings include the prime coat and working lining of single phase solid solution, and wherein prime coat is column crystal
Structure can dramatically increase thermal stability, binding force and the bearing capacity of coating；And working lining is face-centred cubic structure, be can be improved
Coating thermal stability, surface hardness, wearability, high temperature oxidation resistance, self-lubricating function etc. are not by Nanocrystals Embedded amorphous
The nano composite structure of matrix；By the cooperation of prime coat and working lining, which has high rigidity and toughness, and thermal stability is super
1000 DEG C are crossed, film-base junction resultant force, high temperature oxidation resistance are excellent.When as hard alloy cutter coating, which has
Excellent cutting ability.
Another object of the present invention is to provide the preparation methods of above-mentioned AlCrTiSiN high-entropy alloy nitride coatings.
Another object of the present invention is to provide above-mentioned AlCrTiSiN high-entropy alloy nitride coatings to prepare hard alloy
Application in product.
For achieving the above object, the present invention adopts the following technical scheme:
A kind of AlCrTiSiN high-entropy alloy nitride coatings of single phase solid solution structure, the AlCrTiSiN high-entropy alloy
Nitride coatings include the AlCrTiSiN of columnar crystal structure towards cubic single phase solid solution prime coat and face-centered cubic from bottom to up
The AlCrTiSiN face-centred cubic structure single phase solid solution working lining of structure.
AlCrTiSiN high-entropy alloy nitride coatings provided by the invention include prime coat and the work of single phase solid solution
Layer, wherein prime coat is columnar crystal structure, can dramatically increase thermal stability, the binding force, bearing capacity of coating；Working lining is face
Heart cubic structure can be improved coating surface hardness, wearability, high temperature oxidation resistance and play self-lubricating function, without nanocrystalline
Inlay the nano composite structure of noncrystal substrate composition.By the cooperation of prime coat and working lining, which has high rigidity and tough
Property, thermal stability is more than 1000 DEG C, and film-base junction resultant force, high temperature oxidation resistance are excellent；As hard alloy cutter coating
When, which has excellent cutting ability.
Preferably, AlCrTiSiN is towards cubic single phase solid solution prime coat with a thickness of 200~1000nm；It is described
AlCrTiSiN face-centred cubic structure single phase solid solution working lining with a thickness of 2~5 μm.
Preferably, the AlCrTiSiN includes the component of following atomic percentage towards cubic single phase solid solution prime coat:
Al20~30%, Cr10~20%, Ti10~20%, Si 3~8%, N40~50%；The AlCrTiSiN face-centered cubic knot
Structure single phase solid solution working lining includes the component of following atomic percentage: Al20~30%, Cr10~20%, Ti10~20%,
Si 3~8%, N40~50%.
Too high or too low Al content will lead to the reduction of AlCrTiSiN solid solution thermal stability, and coating is with cold cooling procedure
In decompose, be transformed into nano composite structure, coating properties also decrease.
Preferably, the AlCrTiSiN is towards cubic single phase solid solution prime coat and AlCrTiSiN face-centred cubic structure list
Phase solid solution working lining further includes O, and the atomic percent of the O is not more than 0.1%.
The preparation method of above-mentioned AlCrTiSiN high-entropy alloy nitride coatings, includes the following steps:
S1: substrate is subjected to argon ion cleaning；
S2: the PVD technique depositing Al CrTiSiN being co-deposited using composition target is towards cubic single phase solid solution prime coat: control
Sample bias processed is -250~-150V, is passed through nitrogen, and control pressure is kept for 420-450 DEG C of sample temperature in 1.0~3.0Pa,
160~180A of target current, 0.5~1.5h of deposition obtain the AlCrTiSiN of columnar crystal structure towards cubic single phase solid solution bottoming
Layer；
S3: the PVD technique depositing Al CrTiSiN face-centred cubic structure single phase solid solution body running of composition target alternating deposit is utilized
Layer: control sample bias is -120~-80V, is passed through nitrogen, control pressure in 2.0~3.0Pa, holding sample temperature 420~
450 DEG C, 160~180A of target current, 0.5~1.5h of deposition obtains the AlCrTiSiN face-centred cubic structure list of nano-multilayered structures
Phase solid solution working lining to get arrive the AlCrTiSiN high-entropy alloy nitride coatings.
Preferably, the process that argon ion cleans in S1 are as follows: vacuum degree is less than 1 × 10-3When Pa, it is passed through argon gas and controls flow
In 50~200sccm, air pressure is 0~2Pa, 400~450 DEG C of sample temperature, back bias voltage -500~-900V, bombardment time 20~
30min。
Preferably, it is -200V that sample bias is controlled in S2, is passed through nitrogen, and control pressure keeps sample temperature in 2.0Pa
420 DEG C, target current 160A, deposition 1h obtains AlCrTiSiN towards cubic single phase solid solution prime coat.
Preferably, it is -110V that sample bias is controlled in S3, is passed through nitrogen, and control pressure keeps sample temperature in 2.0Pa
420 DEG C, target current 160A, 1h is deposited up to AlCrTiSiN face-centred cubic structure single phase solid solution working lining.
Preferably, the target in S2 and S3 is AlCr target and TiSi target.
It is further preferable that the AlCr target is Al70Cr30；The TiSi target is Ti82Si18Target.
Preferably, the substrate is hard alloy.
Preferably, the substrate is hard alloy cutter.
It is further preferable that the substrate is the high-speed steel coated cutting tool of nitriding.
Preferably, the cutter further includes blasting treatment, ultrasonic cleaning step before carrying out argon ion cleaning.
Above-mentioned AlCrTiSiN high-entropy alloy nitride coatings are preparing the application in hart metal product also in protection scope
It is interior.
AlCrTiSiN high-entropy alloy nitride coatings provided by the invention have excellent thermal stability and binding force, can
Coated on hart metal product, especially hard alloy, assigning its more excellent stability.
Compared with prior art, the invention has the following beneficial effects:
AlCrTiSiN high-entropy alloy nitride coatings provided by the invention include prime coat and the work of single phase solid solution
Layer, wherein prime coat is columnar crystal structure, can dramatically increase thermal stability, bearing capacity and the binding force of coating；Working lining is
Face-centred cubic structure can be improved coating surface hardness, wearability, high temperature oxidation resistance and play self-lubricating function, is free of nanometer
Crystalline substance inlays the nano composite structure of noncrystal substrate.By the cooperation of prime coat and working lining, which has high rigidity and toughness,
Thermal stability is more than 1000 DEG C, and film-base junction resultant force, high temperature oxidation resistance are excellent.When as hard alloy cutter coating,
The cutter has excellent cutting ability.
Detailed description of the invention
Fig. 1 is the AlCrTiSiN high-entropy alloy nitride coatings XRD spectrum that embodiment 1 provides；
Fig. 2 is the AlCrTiSiN high-entropy alloy nitride coatings cross section TEM that embodiment 1 provides；
Fig. 3 is AlCrTiSiN high-entropy alloy nitride coatings film-base junction resultant force that embodiment 1 provides；
Fig. 4 is that the AlCrTiSiN high-entropy alloy nitride coatings that embodiment 1 provides are moved back through 800 DEG C, 900 DEG C and 1000 DEG C
Fire treated XRD spectrum；
Fig. 5 is the AlCrTiSiN high-entropy alloy nitride coatings XRD spectrum that embodiment 2 and 3 provides；
Fig. 6 is the AlCrTiSiN high-entropy alloy nitride coatings cross section TEM that embodiment 2 and 3 provides；
Fig. 7 is AlCrTiSiN high-entropy alloy nitride coatings film-base junction resultant force that embodiment 2 and 3 provides.
Specific embodiment
Below with reference to embodiment, the present invention is further explained.These embodiments are merely to illustrate the present invention rather than limitation
The scope of the present invention.Test method without specific conditions in lower example embodiment usually according to this field normal condition or is pressed
The condition suggested according to manufacturer；Used raw material, reagent etc., unless otherwise specified, being can be from the business such as conventional market
The raw materials and reagents that approach obtains.The variation for any unsubstantiality that those skilled in the art is done on the basis of the present invention
And replacement belongs to scope of the present invention.
Embodiment 1
The present embodiment provides a kind of AlCrTiSiN high-entropy alloy nitride coatings of single phase solid solution structure.By as follows
Method is prepared.
(1) hard metal tip cutter is subjected to dry sandblast, is then cleaned by ultrasonic, dried up, subsequent metallography microscope
Mirror tests to alloy sheet after processing, unless there are the sample of obvious shortcoming, the high-quality coupons of retention surface in surface.
(2) hard alloy cutter after above-mentioned cleaning is put into PVD furnace, carries out argon ion cleaning: when the vacuum of PVD furnace
The background vacuum of room is less than 1 × 10-3When Pa, it is passed through argon gas and controls flow in 50~200sccm, air pressure 0.3Pa,
420 DEG C of sample temperature, back bias voltage 800V, 20~30min of bombardment time.
(3) AlCr (Al is opened simultaneously70Cr30, similarly hereinafter) and TiSi target (Ti82Si18Target, similarly hereinafter), and nitrogen switch is opened,
The AlCrTiSiN of columnar crystal structure is deposited towards cubic single phase solid solution prime coat, condition are as follows: vacuum conditions 2.0Pa, simultaneously
AlCr target and TiSiN target are opened, sample bias -200V is kept, is passed through nitrogen, control pressure keeps sample temperature in 2.0Pa
420 DEG C, target current 160A, deposit 1.0h.
(4) continue the AlCrTiSiN face-centred cubic structure single phase solid solution working lining of deposition nano-multilayered structures, condition
Are as follows: vacuum conditions 2.0Pa opens pivoted frame, alternately opens AlCr target and TiSiN target, keeps sample bias -110V, be passed through nitrogen
Gas, control pressure are kept for 420 DEG C of sample temperature, target current 160A in 2.0Pa, deposit 1.0h.
Fig. 1 is the AlCrTiSiN high-entropy alloy nitride coatings XRD spectrum that embodiment 1 provides.From figure it is found that
AlCrTiSiN high-entropy alloy nitride coatings are only made of the single phase solid solution of face-centred cubic structure.
Fig. 2 is the AlCrTiSiN high-entropy alloy nitride coatings cross section TEM that embodiment 1 provides, from figure it is found that coating
Cross section can be divided into the AlCrTiSiN of the inside columnar crystal structure towards cubic single phase solid solution prime coat and nano surface multilayer knot
The AlCrTiSiN single phase solid solution of structure forms.
Fig. 3 is AlCrTiSiN high-entropy alloy nitride coatings film-base junction resultant force that embodiment 1 provides.Binding force, which uses, draws
The test of trace instrument, application load are 120N, and scriber diameter 0.2mm, time load rate 60N/min. can be with parameters, i.e., from figure
Make under 120N extraneous load, do not occur apparent disbonding phenomenon around scratch, this illustrates that coating binding force is higher than
120N。
Fig. 4 is that the AlCrTiSiN high-entropy alloy nitride coatings that embodiment 1 provides are moved back through 800 DEG C, 900 DEG C and 1000 DEG C
Fire treated XRD spectrum.Annealing experiment is carried out in the tube furnace of nitrogen protection, and anneal soaking time 2h, then furnace cooling.
From figure it is found that 900 DEG C of following temperature are annealed when 2h, coating is still kept towards cubic structure, when 1000 DEG C of annealing keep the temperature 1h, coating
In fcc-AlCrTiSiN Solid solution decomposition at the object phase towards cubic structure of rich Al and richness Ti, be not found hexagonal knot
The Cr of structure2The phases such as N, this illustrates that the thermal stability of AlCrTiSiN coating is more than 1000 DEG C.
Embodiment 2
The present embodiment provides a kind of AlCrTiSiN high-entropy alloy nitride coatings of single phase solid solution structure.By as follows
Method is prepared.
(1) hard metal tip cutter is subjected to dry sandblast, is then cleaned by ultrasonic, dried up, subsequent metallography microscope
Mirror tests to alloy sheet after processing, unless there are the sample of obvious shortcoming, the high-quality coupons of retention surface in surface.
(2) hard alloy cutter after above-mentioned cleaning is put into PVD furnace, carries out argon ion cleaning: when the vacuum of PVD furnace
The background vacuum of room is less than 1 × 10-3When Pa, it is passed through argon gas and controls flow in 50~200sccm, air pressure 0.3Pa,
420 DEG C of sample temperature, back bias voltage 800V, 20~30min of bombardment time.
(3) AlCr and TiSi target is opened simultaneously, and opens nitrogen switch, depositing Al CrTiSiN is dissolved towards cubic single phase
Body prime coat, condition are as follows: vacuum conditions 2.0Pa opens pivoted frame, opens simultaneously Al70Cr30Target and Ti82Si18Target keeps sample
Bias -200V, is passed through nitrogen, and control pressure is kept for 420 DEG C of sample temperature, target current 160A in 2.0Pa, deposits 0.8h.
(4) continue depositing Al CrTiSiN face-centred cubic structure single phase solid solution working lining, condition are as follows: vacuum conditions are
2.0Pa opens pivoted frame, opens simultaneously AlCr target and TiSiN target, keeps sample bias -50V, is passed through nitrogen, control pressure exists
2.0Pa is kept for 420 DEG C of sample temperature, target current 160A, deposits 1.5h.
Fig. 5 is the AlCrTiSiN high-entropy alloy nitride coatings XRD spectrum that embodiment 2 provides.From figure it is found that
AlCrTiSiN high-entropy alloy nitride coatings are only made of the single phase solid solution of face-centred cubic structure.In addition, being carried out to coating
800 DEG C, 900 DEG C and 1000 DEG C high annealing experiments, XRD spectrum is similar to the XRD in Fig. 4, this also further illustrates its tool
There is high thermal stability.
Fig. 6 is the AlCrTiSiN high-entropy alloy nitride coatings cross section TEM that embodiment 2 provides, from figure it is found that coating
Cross section can be divided into the AlCrTiSiN of the inside columnar crystal structure towards cubic single phase solid solution prime coat and nano surface multilayer knot
The AlCrTiSiN single phase solid solution of structure forms.
Fig. 7 is AlCrTiSiN high-entropy alloy nitride coatings film-base junction resultant force that embodiment 2 provides.Binding force, which uses, draws
The test of trace instrument, applications load are 120N, scriber diameter 0.2mm, time load rate 60N/min. from figure can with parameter,
Occurs apparent disbonding phenomenon under 87N extraneous load, around scratch, this illustrates that coating binding force is 87N.
Embodiment 3
The present embodiment provides a kind of AlCrTiSiN high-entropy alloy nitride coatings of single phase solid solution structure.By as follows
Method is prepared.
(1) hard metal tip cutter is subjected to dry sandblast, is then cleaned by ultrasonic, dried up, subsequent metallography microscope
Mirror tests to alloy sheet after processing, unless there are the sample of obvious shortcoming, the high-quality coupons of retention surface in surface.
(2) hard alloy cutter after above-mentioned cleaning is put into PVD furnace, carries out argon ion cleaning: when the vacuum of PVD furnace
The background vacuum of room is less than 1 × 10-3When Pa, it is passed through argon gas and controls flow in 50~200sccm, air pressure 0.3Pa,
420 DEG C of sample temperature, back bias voltage 800V, 20~30min of bombardment time.
(3) AlCr and TiSi target is opened simultaneously, and opens nitrogen switch, depositing Al CrTiSiN is dissolved towards cubic single phase
Body prime coat, condition are as follows: vacuum conditions 2.0Pa opens pivoted frame, opens simultaneously Al70Cr30Target and Ti82Si18Target keeps sample
Bias -200V, is passed through nitrogen, and control pressure is kept for 420 DEG C of sample temperature, target current 160A in 2.0Pa, deposits 1h.
(4) continue depositing Al CrTiSiN face-centred cubic structure single phase solid solution working lining, condition are as follows: vacuum conditions are
2.0Pa opens pivoted frame, opens simultaneously AlCr target and TiSiN target, keeps sample bias -80V, is passed through nitrogen, control pressure exists
2.0Pa is kept for 420 DEG C of sample temperature, target current 160A, deposits 2h.
Fig. 5 is the AlCrTiSiN high-entropy alloy nitride coatings XRD spectrum that embodiment 3 provides.From figure it is found that
AlCrTiSiN high-entropy alloy nitride coatings are only made of the single phase solid solution of face-centred cubic structure.In addition, being carried out to coating
800 DEG C, 900 DEG C and 1000 DEG C high annealing experiments, XRD spectrum is similar to the XRD in Fig. 4, this also further illustrates its tool
There is high thermal stability.
Fig. 6 is the AlCrTiSiN high-entropy alloy nitride coatings cross section TEM that embodiment 3 provides, from figure it is found that coating
Cross section can be divided into the AlCrTiSiN of the inside columnar crystal structure towards cubic single phase solid solution prime coat and nano surface multilayer knot
The AlCrTiSiN single phase solid solution of structure forms.
Fig. 7 is AlCrTiSiN high-entropy alloy nitride coatings film-base junction resultant force that embodiment 3 provides.Binding force, which uses, draws
The test of trace instrument, applications load are 120N, scriber diameter 0.2mm, time load rate 60N/min. from figure can with parameter,
Occurs apparent disbonding phenomenon under 98N extraneous load, around scratch, this illustrates that coating binding force is 98N.
Above-described specific embodiment has carried out further the purpose of the present invention, technical scheme and beneficial effects
It is described in detail, it should be understood that being not intended to limit the present invention the foregoing is merely a specific embodiment of the invention
Protection scope, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of AlCrTiSiN high-entropy alloy nitride coatings of single phase solid solution structure, which is characterized in that described
Supreme under AlCrTiSiN high-entropy alloy nitride coatings includes being dissolved by the AlCrTiSiN of columnar crystal structure towards cubic single phase
The AlCrTiSiN face-centred cubic structure single phase solid solution working lining of body prime coat and nano-multilayered structures.
2. AlCrTiSiN high-entropy alloy nitride coatings according to claim 1, which is characterized in that the face AlCrTiSiN
To cubic single phase solid solution prime coat with a thickness of 200~1000nm；The AlCrTiSiN face-centred cubic structure single phase solid solution
Working lining with a thickness of 2~5 μm.
3. AlCrTiSiN high-entropy alloy nitride coatings according to claim 1, which is characterized in that the face AlCrTiSiN
Include the component of following atomic percentage to cubic single phase solid solution prime coat: Al20~30%, Cr10~20%, Ti10~
20%, Si 3~8%, N40~50%；The AlCrTiSiN face-centred cubic structure single phase solid solution working lining includes following former
The component of sub- percentage: Al20~30%, Cr10~20%, Ti10~20%, Si 3~8%, N40~50%.
4. AlCrTiSiN high-entropy alloy nitride coatings according to claim 1, which is characterized in that the face AlCrTiSiN
It further include O to cubic single phase solid solution prime coat and AlCrTiSiN face-centred cubic structure single phase solid solution working lining, the O
Atomic percent be not more than 0.1%.
5. the preparation method of any AlCrTiSiN high-entropy alloy nitride coatings of Claims 1 to 4, which is characterized in that packet
Include following steps:
S1: substrate is subjected to argon ion cleaning；
S2: the PVD technique depositing Al CrTiSiN being co-deposited using composition target is towards cubic single phase solid solution prime coat: control sample
Product bias is -250~-150V, is passed through nitrogen, and control pressure is kept for 420~450 DEG C of sample temperature, target in 1.0~3.0Pa
160~180A of electric current, 0.5~1.5h of deposition obtain the AlCrTiSiN of columnar crystal structure towards cubic single phase solid solution prime coat；
S3: the PVD technique depositing Al CrTiSiN face-centred cubic structure single phase solid solution working lining of composition target alternating deposit is utilized:
Control sample bias is -120~-80V, is passed through nitrogen, and control pressure keeps sample temperature 420~450 in 2.0~3.0Pa
DEG C, 160~180A of target current, 0.5~1.5h of deposition obtains AlCrTiSiN face-centred cubic structure single phase solid solution working lining, i.e.,
Obtain the AlCrTiSiN high-entropy alloy nitride coatings.
6. preparation method according to claim 5, which is characterized in that the process that argon ion cleans in S1 are as follows: vacuum degree is less than 1
×10-3When Pa, it is passed through argon gas and controls flow in 50~200sccm, air pressure is 0~2Pa, 400~450 DEG C of sample temperature, is born
Bias -500~-900V, 20~30min of bombardment time.
7. preparation method according to claim 5, which is characterized in that it is -200V that sample bias is controlled in S2, is passed through nitrogen,
Control pressure is kept for 420 DEG C of sample temperature, target current 160A, deposition 1h obtains AlCrTiSiN single phase solid solution and beats in 2.0Pa
Bottom.
8. preparation method according to claim 5, which is characterized in that it is -110V that sample bias is controlled in S3, is passed through nitrogen,
Control pressure is kept for 420 DEG C of sample temperature, target current 160A, deposition 1h obtains AlCrTiSiN face-centred cubic structure in 2.0Pa
Single phase solid solution working lining to get arrive the AlCrTiSiN high-entropy alloy nitride coatings.
9. preparation method according to claim 5, which is characterized in that the target in S2 and S3 is AlCr target and TiSi target.
10. any AlCrTiSiN high-entropy alloy nitride coatings of Claims 1 to 4 are in preparing hart metal product
Using.
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| CN112981321A (en) * | 2021-02-04 | 2021-06-18 | 中国科学院兰州化学物理研究所 | Single-phase structure (CrZrVTiAl) N high-entropy ceramic coating and preparation method thereof |
| CN113235041A (en) * | 2021-04-08 | 2021-08-10 | 广东工业大学 | AlCrTiSiWMoN high-entropy alloy nitride coating and preparation method and application thereof |
| CN114107900A (en) * | 2021-12-08 | 2022-03-01 | 中国科学院兰州化学物理研究所 | Corrosion-resistant BCSiAlCrNxHigh-entropy nitride film and preparation method thereof |
| CN114875271A (en) * | 2022-05-05 | 2022-08-09 | 广东工业大学 | Non-stick coating and application and preparation method thereof |
| US20230183851A1 (en) * | 2021-12-14 | 2023-06-15 | Lanzhou Institute Of Chemical Physics, Chinese Academy Of Sciences | High-entropy carbide ceramic material, carbide ceramic coating and preparation methods and use thereof |
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