CN201729872U - Planetary workpiece carrier - Google Patents
Planetary workpiece carrier Download PDFInfo
- Publication number
- CN201729872U CN201729872U CN2010202141938U CN201020214193U CN201729872U CN 201729872 U CN201729872 U CN 201729872U CN 2010202141938 U CN2010202141938 U CN 2010202141938U CN 201020214193 U CN201020214193 U CN 201020214193U CN 201729872 U CN201729872 U CN 201729872U
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- motor
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- planet
- sun
- planetary
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Abstract
The utility model relates to a planetary workpiece carrier, which comprises a motor, a movable sealing device, a central gear, a planetary carrier, a workpiece disk, a planetary gear and a planetary gear part. The planetary workpiece carrier is characterized in that the motor includes a first motor and a second motor, the first motor connected with the planetary carrier is used for driving the planetary carrier, the planetary carrier coaxially rotating along with the first motor is connected with the planetary gear by the aid of the planetary gear part, rotation of the planetary carrier drives the planetary gear to rotate, the second motor connected with a fixed gear drives the second fixed gear, the fixed gear coaxially rotating with the second motor meshes with the central gear, rotation of the fixed gear drives the central gear to rotate, and the planetary gear meshes with the central gear. The planetary carrier can move in a planetary manner, or only revolve, or rotate at a certain fixed point, and rotating speed can be regulated and controlled.
Description
Technical field
The utility model relates to a kind of work rest, relates in particular to a kind of planet work rest.
Background technology
In vacuum coating film equipment, often use the planet work rest.The planet work rest is a kind of form of work rest.The workpiece that is fixed on the planet work rest is also done revolution motion around the center of work rest when doing spinning motion around self center, this compound motion can improve the one-tenth film uniformity of workpiece to be plated effectively.
As shown in Figure 1, in the vacuum plating process, the planet work rest that adopts mainly comprises usually: motor 11, dynamic sealing device 22, sun-wheel 33, planet carrier 44, sun and planet gear 55.Work rest is fixed on the sun and planet gear 55, and motor 11 places atmospheric environment (non-vacuum environment), drives planet carriers 44 rotations by shaft coupling and the dynamic sealing device 22 with spinfunction, and planet carrier 44 drives sun and planet gear 55 and does revolution motion; Simultaneously, sun-wheel 33 maintains static, because sun and planet gear 55 and sun-wheel 33 engagements, sun and planet gear 55 carries out spinning motion, that is to say, sun and planet gear 55 also carries out spinning motion when carrying out revolution motion.This is a kind of typical epicyclic train structure, but there is following shortcoming in this planet work rest: 1. work rest can only keep planetary motion (revolution motion adds spinning motion), and can not only keep revolution motion, can not remain on a certain point of fixity carries out spinning motion; 2. the revolution rotating speed of work rest and rotation rotating speed are the certain proportion value, and this depends on the gear ratio of train, and this ratio is non-adjustable, that is to say that when one timing of revolution rotating speed, the rotation rotating speed is immutable, because the restriction of vacuum chamber structure often can not be adopted ideal rotation rotating speed in coating process.
In vacuum coating film equipment, usually be equipped with a plurality of deposition sources, if workpiece is still done the high purity deposition material that the planet rotation can be wasted a large amount of preciousnesses when only using a deposition source, therefore need a kind of planet work rest can make workpiece plate above single deposition source, do spinning motion, thereby save deposition material greatly.Because coating process is different, needs to regulate the rotation rotating speed sometimes, or between revolution and rotation function, switch.
The utility model content
(1) technical problem that will solve
The technical problems to be solved in the utility model is: overcome existing planet carrier and can only do planetary motion, the rotation of can not fixing a point, rotation rotating speed be immutable, can not only carry out deficiency such as revolution motion.
(2) technical scheme
For solving the problems of the technologies described above, the utility model provides a kind of planet work rest, comprise motor, dynamic sealing device, sun-wheel, planet carrier, workpiece plate, sun and planet gear and planetary gear member, it is characterized in that: described motor comprises first motor and second motor; Described first motor is connected with described planet carrier, is used to drive described planet carrier, and described planet carrier and described first motor coaxle are rotated; Described planet carrier is connected with described sun and planet gear by described planetary gear member, and the rotation by described planet carrier drives described sun and planet gear rotation; Described second motor is connected with fixed gear, by the described fixed gear of described second electric motor driving, the fixed gear and second motor coaxle is rotated; The engagement of described fixed gear and described sun-wheel drives described sun-wheel by the rotation of described fixed gear and rotates; Described sun and planet gear and the engagement of described sun-wheel.
Wherein, described first motor is connected with gear reducer, and described gear reducer carries out variable frequency regulating speed control to described second motor.
Wherein, described second motor is connected with gear reducer, and described gear reducer carries out variable frequency regulating speed control to described second motor.
(3) beneficial effect
The utility model planet work rest can be done planetary motion or only do revolution motion or do spinning motion at a certain point of fixity, and the rotation rotating speed is adjustable controlled, simple in structure, light, and inside need not to use loaded down with trivial details supporting structure.
Description of drawings
Fig. 1 is the overall construction drawing of traditional planet work rest;
Fig. 2 is the overall construction drawing of the utility model planet work rest.
Wherein: 11: motor; 22: dynamic sealing device; 33: sun-wheel; 44: planet carrier; 55: sun and planet gear; 1: the first motor; 2: the second motors; 3: dynamic sealing device; 4: sun-wheel; 5: fixed gear; 6: planet carrier; 7: workpiece plate; 8: sun and planet gear; 9: planetary gear member.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail.Following examples only are used to illustrate the utility model, but are not used for limiting the scope of the utility model protection.
As shown in Figure 2, be the overall construction drawing of the utility model planet work rest.As can be seen from Figure, planet work rest of the present utility model comprises motor, dynamic sealing device 3, sun-wheel 4, planet carrier 6, workpiece plate 7, sun and planet gear 8 and planetary gear member 9, and described motor comprises first motor 1 and second motor 2; Described first motor 1 is connected with described planet carrier 6, is used to drive described planet carrier 6, makes described planet carrier 6 and described first motor, 1 coaxial rotation; Described planet carrier 6 is connected with described sun and planet gear 8 by described planetary gear member 9, and the rotation by described planet carrier 6 drives described sun and planet gear 8 rotations; Described second motor 2 is connected with fixed gear 5, drives described fixed gear 5 by described second motor 2, makes fixed gear 5 and second motor, 2 coaxial rotation; Described fixed gear 5 and described sun-wheel 4 engagements drive described sun-wheel 4 by the rotation of described fixed gear 5 and rotate; Described sun and planet gear 8 and described sun-wheel 4 engagements.
Described first motor 1 is connected with gear reducer, and described gear reducer carries out variable frequency regulating speed control to described second motor 1.
Described second motor 2 is connected with gear reducer, and described gear reducer carries out variable frequency regulating speed control to described second motor 2.
The utility model planet work rest can be realized multiple function, comprising:
Planetary motion: locked second motor 2, thereby locked fixed gear 5, because sun-wheel 4 and fixed gear 5 engagements, sun-wheel 4 is also motionless thereupon; Open first motor 1, because first motor 1 is connected with planet carrier 6, first motor 1 drives planet carrier 6 and carries out coaxial rotation with it, is connected with sun and planet gear 8 owing to planet carrier 6 passes through planetary gear member 9, so planet carrier 6 drives sun and planet gear 8 and rotates, promptly planet gear 8 is done revolution motion; Because sun and planet gear 8 and sun-wheel 4 engagements so sun and planet gear 8 is done spinning motion when doing revolution motion, are done planetary motion thereby drive workpiece plate 7.
The fixed point spinning motion: locked first motor 1, thereby locked planet carrier 6, sun and planet gear 8 is also motionless along with planet carrier 6, thereby has fixed the position of scratch diskette 7; Open second motor 2, because second motor 2 is connected with fixed gear 5, second motor 2 drives fixed gear 5 and carries out coaxial rotation with it, because fixed gear 5 and sun-wheel 4 engagements, so sun-wheel 4 rotates under the effect of fixed gear 5, because sun-wheel 4 and sun and planet gear 8 engagements, so sun and planet gear 8 rotates under the effect of sun-wheel 4, be that planet gear 8 is done spinning motion, do the fixed point spinning motion thereby drive workpiece plate 7.As the circumferential position at need adjustment workpiece plate 7 places, can open first electric motor 1 and regulate.
Regulate the rotation rotating speed: in the planetary motion process, open second motor 2, by regulating the rotating speed of second motor 2, thereby regulate the rotation rotating speed of workpiece plate 7.
Revolution motion: in the process of above-mentioned adjusting rotation rotating speed, the rotational velocity of the revolution speed of first motor, 1 control and 2 controls of second motor can produce negative function, as long as calculate ratio value, just can realize that workpiece plate 7 only does revolution motion, and not carry out spinning motion.
The utility model planet work rest can be applicable to different mechanical fields.Be applied in the vacuum plating field, first motor 1, second motor 2 and dynamic sealing device 3 place atmospheric environment, and remaining part places vacuum environment and adopts the suitable seal mode to connect, so that carry out coating operation under vacuum environment.
Above embodiment only is used to illustrate the utility model; and be not to restriction of the present utility model; the those of ordinary skill in relevant technologies field; under the situation that does not break away from spirit and scope of the present utility model; can also make various variations and modification; therefore all technical schemes that are equal to also belong to category of the present utility model, and scope of patent protection of the present utility model should be defined by the claims.
Claims (3)
1. a planet work rest comprises motor, dynamic sealing device (3), sun-wheel (4), planet carrier (6), workpiece plate (7), sun and planet gear (8) and planetary gear member (9), it is characterized in that:
Described motor comprises first motor (1) and second motor (2);
Described first motor (1) is connected with described planet carrier (6), is used to drive described planet carrier (6), makes described planet carrier (6) and described first motor (1) coaxial rotation;
Described planet carrier (6) is connected with described sun and planet gear (8) by described planetary gear member (9), and the rotation by described planet carrier (6) drives described sun and planet gear (8) rotation;
Described second motor (2) is connected with fixed gear (5), drives described fixed gear (5) by described second motor (2), makes fixed gear (5) and second motor (2) coaxial rotation;
The engagement of described fixed gear (5) and described sun-wheel (4) drives described sun-wheel (4) by the rotation of described fixed gear (5) and rotates;
Described sun and planet gear (8) and described sun-wheel (4) engagement.
2. planet work rest according to claim 1 is characterized in that, described first motor (1) is connected with gear reducer, and described gear reducer carries out variable frequency regulating speed control to described first motor (1).
3. planet work rest according to claim 1 is characterized in that, described second motor (2) is connected with gear reducer, and described gear reducer carries out variable frequency regulating speed control to described second motor (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202141938U CN201729872U (en) | 2010-05-25 | 2010-05-25 | Planetary workpiece carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010202141938U CN201729872U (en) | 2010-05-25 | 2010-05-25 | Planetary workpiece carrier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201729872U true CN201729872U (en) | 2011-02-02 |
Family
ID=43521031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010202141938U Expired - Lifetime CN201729872U (en) | 2010-05-25 | 2010-05-25 | Planetary workpiece carrier |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201729872U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290382A (en) * | 2013-05-15 | 2013-09-11 | 宁波韵升股份有限公司 | Planetary workpiece frame of vacuum coating machine |
| CN103361616A (en) * | 2012-04-11 | 2013-10-23 | 庞厚星 | Vacuum ion plating triaxial constant speed successive rotating coating film device |
| CN107671686A (en) * | 2017-09-28 | 2018-02-09 | 东莞市佳顺达自动化精密机械有限公司 | One kind efficiently clears off machine |
| CN108642455A (en) * | 2018-05-17 | 2018-10-12 | 宁波大红鹰学院 | Vacuum coating sample stage |
| CN110722445A (en) * | 2019-11-01 | 2020-01-24 | 东莞冠熹精密五金制品有限公司 | Automatic fluid polishing machine |
-
2010
- 2010-05-25 CN CN2010202141938U patent/CN201729872U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103361616A (en) * | 2012-04-11 | 2013-10-23 | 庞厚星 | Vacuum ion plating triaxial constant speed successive rotating coating film device |
| CN103361616B (en) * | 2012-04-11 | 2015-09-09 | 庞厚星 | Vacuum ion plating three axle at the uniform velocity connects and turns film coating apparatus |
| CN103290382A (en) * | 2013-05-15 | 2013-09-11 | 宁波韵升股份有限公司 | Planetary workpiece frame of vacuum coating machine |
| CN103290382B (en) * | 2013-05-15 | 2015-09-09 | 宁波韵升股份有限公司 | The planetary work rest of a kind of vacuum plating unit |
| CN107671686A (en) * | 2017-09-28 | 2018-02-09 | 东莞市佳顺达自动化精密机械有限公司 | One kind efficiently clears off machine |
| CN108642455A (en) * | 2018-05-17 | 2018-10-12 | 宁波大红鹰学院 | Vacuum coating sample stage |
| CN108642455B (en) * | 2018-05-17 | 2020-04-07 | 宁波大学科学技术学院 | Vacuum coating sample table |
| CN110722445A (en) * | 2019-11-01 | 2020-01-24 | 东莞冠熹精密五金制品有限公司 | Automatic fluid polishing machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20110202 |
|
| CX01 | Expiry of patent term |