CN204589295U - The film coating apparatus of adjustable varied angle - Google Patents
The film coating apparatus of adjustable varied angle Download PDFInfo
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- CN204589295U CN204589295U CN201520215012.6U CN201520215012U CN204589295U CN 204589295 U CN204589295 U CN 204589295U CN 201520215012 U CN201520215012 U CN 201520215012U CN 204589295 U CN204589295 U CN 204589295U
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Abstract
The utility model discloses a kind of film coating apparatus of adjustable varied angle, for placing base material to be plated, the film coating apparatus of varied angle that this is adjustable comprises substrate carrier, rotation module and inclination angle modulating module.Wherein substrate carrier comprises section.Rotation module comprises axis and rotation motor.Axis connects substrate carrier, and the bearing of trend of axis angle crossing with the bearing of trend of section.Rotation motor interlock axis and make substrate carrier rotation.Inclination angle modulating module then comprises the lifters and lift motor with lifting block set.Wherein be elevated block set and be socketed axis movablely, make the limited bearing of trend displacement being parallel to axis of lifters.Lift motor drives lifters displacement and interlock substrate carrier, causes angle modulation.According to the film coating apparatus of adjustable varied angle of the present utility model, it immediately can adjust angle in the process of technique, and allows substrate carrier rotation and revolution simultaneously.
Description
Technical field
The utility model relates to a kind of film coating apparatus, particularly relates to a kind of film coating apparatus of adjustable varied angle.
Background technology
Current, many Industrial products surface is all coated with film to improve the various performances of product surface, such as: increase heat-resisting, anti-corrosion, the surface hardness of base material to be plated or increase the service life.General film coating method mainly comprises TR vapour deposition method, radio frequency magnetron sputtering method, the hot vapour deposition method of electron beam, chemical Vapor deposition process, molecular beam epitaxy and ion plating method, wherein how coating raw material is coated on the surface of plated body in the uniform mode of continuity, and significantly increase yield and reducing costs, become the important topic that the stakeholder that is engaged in the industry studies.
In traditional vacuum coater, general base material to be plated adopts two-dimentional formula Vacuum Coating method mostly, namely only be the film of surface deposition specific materials, although multi-disc sample introduction can be supported and determine angle process operation, in technological process, immediately cannot adjust the angular relation between base material to be plated and coating source.As for common rake angle plating method (Oblique Angle Deposition, OAD), although the angular relation between adjustable base material to be plated and coating source, be limited by the size of base material to be plated and system geometric size and cannot produce in a large number.It can thus be appreciated that, lack in the market a kind of can immediately adjust angle of inclination, can public rotation plated film and significantly can increase the film coating apparatus of volume production, so correlative study person is seeking its solution.
Utility model content
Therefore, the purpose of this utility model is the film coating apparatus providing a kind of adjustable varied angle, it utilizes special lifting block set to link inclination angle modulating module and rotation module, not only can in the process of plated film the angle of inclination of freely modulation substrate carrier, also can allow substrate carrier rotation simultaneously.By inclination angle modulating module, rotation module and revolution, module is triangular is fixedly connected with, and can realize at this substrate carrier: the effect one, producing uniform coated at substrate surface to be plated; Two, in the effect of substrate surface growth 3-D solid structure film to be plated.Moreover, by the setting of heating and cooling controller and logical substrate bias controller, substrate carrier can be made to have the function of heating and cooling and logical bias voltage concurrently, and then allow base material to be plated meet the demand of various coating process.In addition, substrate carrier can place multiple test piece, can improve output significantly.
An embodiment of the present utility model is a kind of film coating apparatus of adjustable varied angle, and for placing at least one base material to be plated, the film coating apparatus of varied angle that this is adjustable comprises at least one substrate carrier, rotation module and inclination angle modulating module.Wherein substrate carrier comprises section.Rotation module then comprises axis and rotation motor.Axis connects substrate carrier, and the bearing of trend of axis is crossing with the bearing of trend of section angle.Rotation motor interlock axis and make substrate carrier rotation.Moreover inclination angle modulating module comprises at least one lifters and lift motor with lifting block set.Wherein be elevated block set and be socketed axis movablely, make the limited bearing of trend displacement being parallel to axis of lifters, and lifters connects substrate carrier.Lift motor then drives lifters displacement and interlock substrate carrier, causes angle modulation.
Whereby, the film coating apparatus of adjustable varied angle of the present utility model utilizes special lifting block set to link inclination angle modulating module and rotation module, not only can in the process of plated film the angle of inclination of freely modulation substrate carrier, also can allow substrate carrier rotation simultaneously.
As follows according to other embodiments of aforementioned embodiments: aforementioned lift motor adjustable angle diminishes and causes substrate carrier to draw close axis, or aforementioned lift motor adjustable angle becomes large and causes substrate carrier away from axis.Moreover aforementioned substrates carrier can comprise heating and cooling controller, this heating and cooling controller can comprise electrothermal piece, cooling component and monitoring temperature part.Wherein electrothermal piece can heat the temperature of base material to be plated; Cooling component can cool the temperature of base material to be plated; Monitoring temperature part then can monitor the temperature of base material to be plated.In addition, aforementioned substrates carrier can comprise logical substrate bias controller, and this logical substrate bias controller controls the voltage of substrate carrier.Aforementioned base material to be plated has multiple test piece, and substrate carrier can place these test pieces.In addition, aforementioned inclination angle modulating module can comprise universal joint and Universal linking lever.The wherein affixed lifting block set of universal joint, the two ends of Universal linking lever then connect universal joint and substrate carrier respectively.Aforementioned rotation module can comprise middle shaft gear and orientation gear, the affixed axis of middle shaft gear, orientation gear then meshing middle shaft gear and connect substrate carrier.Axis is rotated and interlock orientation gear by rotation motor, causes substrate carrier rotation.
By above-described embodiment, substrate carrier installs heating and cooling controller and logical substrate bias controller additional, the angle of inclination of substrate carrier not only can be made to change, also have the function of heating and cooling and logical bias voltage simultaneously concurrently, and then allow base material to be plated meet the demand of various coating process.Under such configuration, substrate carrier, except controlling except the surface temperature of base material to be plated by its process requirements, also can be used in various vacuum coating system by user.Moreover a substrate carrier can place multiple test piece, can improve output significantly.In addition, the dynamic link design of universal joint and Universal linking lever can allow whole mechanism when the angle of inclination of modulation substrate carrier above-below direction, can not affect the action that swings of substrate carrier rotation.In addition, what middle shaft gear can make rotation motor synchronously drive substrate carrier in conjunction with the wheel shaft structure of orientation gear carries pad rotation, and its structure is simple and tear prescription open just, and user can configure according to demand.
Another embodiment of the present utility model is a kind of film coating apparatus of adjustable varied angle, for placing multiple base material to be plated.The film coating apparatus of varied angle that this is adjustable comprises multiple substrate carrier, rotation module, inclination angle modulating module and revolution module.Wherein each substrate carrier comprises section, and each section places base material to be plated.And rotation module comprises axis and rotation motor.Wherein axis connects each substrate carrier, and the bearing of trend of axis is crossing with the bearing of trend of section angle.Rotation motor then interlock axis and make each substrate carrier rotation.Moreover inclination angle modulating module comprises at least one lifters and lift motor with lifting block set.Wherein be elevated block set and be socketed axis movablely, make lifters be parallel to the bearing of trend displacement of axis, and lifters connects each substrate carrier.Lift motor then drives lifters displacement and each substrate carrier of interlock, causes angle modulation.In addition, the module that revolves round the sun comprises dish seat, rotating shaft and revolution motor.The affixed rotation motor of its mid-game seat and lift motor.Rotating shaft can be known worm and wormwheel structure, the gear unit on its one end terminal pad seat.As for the other end of revolution motor then connection rotating shaft.By rotating shaft worm screw level, to rolling disc seat, interlock locks in the axis of dish seat to revolution motor admittedly, causes each substrate carrier around the revolution of dish seat.
Whereby, the film coating apparatus of adjustable varied angle of the present utility model utilizes special lifting block set to link inclination angle modulating module and rotation module, not only can in the process of plated film the angle of inclination of freely modulation substrate carrier, also can allow substrate carrier rotation simultaneously.By inclination angle modulating module, rotation module and revolution, module is triangular is fixedly connected with, and can realize at this substrate carrier: the effect one, producing uniform coated at substrate surface to be plated; Two, in the effect of substrate surface growth 3-D solid structure film to be plated.
As follows according to other embodiments of aforementioned embodiments: the quantity of aforementioned substrates carrier can be 2,4,6 or 8.Aforementioned substrates carrier can comprise heating and cooling controller, and this heating and cooling controller can comprise electrothermal piece, cooling component and monitoring temperature part.Wherein electrothermal piece heats the temperature of base material to be plated, and cooling component cools the temperature of base material to be plated, and monitoring temperature part then monitors the temperature of base material to be plated.In addition, aforementioned substrates carrier can comprise logical substrate bias controller, and this logical substrate bias controller can control the voltage of substrate carrier.Aforementioned base material to be plated has multiple test piece, and substrate carrier can place these test pieces.Aforementioned inclination angle modulating module can comprise multiple universal joint and multiple Universal linking lever.The affixed lifting block set of each universal joint.The two ends of each Universal linking lever connect one of them universal joint and one of them substrate carrier respectively.Moreover aforementioned rotation module can comprise middle shaft gear and multiple orientation gear.The affixed axis of middle shaft gear, and shaft gear and connect one of them substrate carrier in each orientation gear mesh.Axis is rotated and each orientation gear of interlock by rotation motor, causes each substrate carrier rotation.Aforementioned lift motor adjustable angle diminishes and causes substrate carrier to draw close axis, or lift motor adjustment angle becomes large and causes substrate carrier away from axis.
By above-described embodiment, the quantity of substrate carrier can carry out revised planning according to different cavity sizes, the size of base material to be plated or the size of substrate carrier.Multiple substrate carrier can be set in the film coating apparatus due to whole adjustable varied angle and share a rotation module, an inclination angle modulating module and a revolution module, not only can reduce costs, output can also be improved significantly.
Accompanying drawing explanation
Fig. 1 is the side-view of the film coating apparatus of the adjustable varied angle of the utility model embodiment.
Fig. 2 A is the action schematic diagram of the rotation module of Fig. 1.
Fig. 2 B is the action schematic diagram of the inclination angle modulating module of Fig. 1.
Fig. 2 C is the action schematic diagram of the revolution module of Fig. 1.
Fig. 3 is the inclination angle modulating module of another embodiment of the utility model and the vertical view of substrate carrier.
Fig. 4 is the inclination angle modulating module of another embodiment of the utility model and the vertical view of substrate carrier.
Fig. 5 is the inclination angle modulating module of the utility model yet another embodiment and the vertical view of substrate carrier.
Embodiment
See also Fig. 1 to Fig. 2 C.Fig. 1 is the side-view of the film coating apparatus 100 of the adjustable varied angle of the utility model embodiment.Fig. 2 A is the action schematic diagram of the rotation module 300 of Fig. 1.Fig. 2 B is the action schematic diagram of the inclination angle modulating module 400 of Fig. 1.Fig. 2 C is the action schematic diagram of the revolution module 500 of Fig. 1.As shown in the figure, the film coating apparatus 100 of varied angle that this is adjustable for placing two base materials to be plated (not shown), and the film coating apparatus 100 of this adjustable varied angle comprise two substrate carrier 200,210, rotation module 300, inclination angle modulating module 400 and revolution module 500.
Substrate carrier 200 comprises year seat 202 and carries a pad 204, carries one end of seat 202 affixed year pad 204, and the other end of year pad 204 has section 206.Substrate carrier 210 then comprises year seat 212 and carries a pad 214, carries one end of seat 212 affixed year pad 214, and the other end of year pad 214 has section 216.Section 206 and section 216 can place link two base materials to be plated respectively.Moreover the shape of carrying seat 202, year seat 212, year pad 204 and year pad 214 can be circle, square or other Polygonss, to meet the demand of various film coating method.And the seat 202 of carrying of the present embodiment is square with the shape of carrying seat 212 and shape size is mutually the same, carries pad 204 and be circle with the shape of carrying pad 214 and shape size is mutually the same.In addition, heating and cooling controller and logical substrate bias controller (not shown) can be set carrying on seat 202 of substrate carrier 200, and heating and cooling controller and logical substrate bias controller are all electrically connected a year pad 204,214.Wherein heating and cooling controller comprises electrothermal piece, cooling component and monitoring temperature part.Electrothermal piece can heat the temperature of base material to be plated; Cooling component can cool the temperature of base material to be plated; Monitoring temperature part can monitor the temperature of base material to be plated.In addition, logical substrate bias controller can control the voltage carrying pad 204,214 corresponding in substrate carrier 200,210.Be combined with the lift-launch of logical substrate bias controller by above-mentioned heating and cooling controller, can make the film coating apparatus 100 of adjustable varied angle of the present utility model can in response to the demand of special coating process.Moreover base material to be plated can have multiple test piece, the plated film while that these test pieces can being placed on year pad 204,214 corresponding in substrate carrier 200,210, with increase yield.
Rotation module 300 comprises axis 310, rotation motor 320, middle shaft gear 330, two orientation gears 340,350, two universal joints 360,370 and permanent seat 380.One end connection of rotating motor 320 of axis 310, and be the rotation axis of rotation motor 320.The other end then coaxial affixed middle shaft gear 330 of axis 310.Moreover, shaft gear 330 in the meshing connection of orientation gear 340, and orientation gear 340 connects orientation wheel shaft 342.Orientation wheel shaft 342 is by one end of universal joint 360 connection for transmission axle 362, and the other end of transmission shaft 362 then connects year seat 202 of substrate carrier 200.Wherein carry seat 202 inside and rotate a year pad 204 by the mode of known worm and wormwheel, order is carried a pad 204 and is rotated together with its section 206.In other words, axis 310 is rotated and interlock orientation gear 340 by rotation motor 320, then the combination via orientation wheel shaft 342, universal joint 360 and transmission shaft 362 is arranged in pairs or groups, and makes the worm and wormwheel structure interlock carried in seat 202 of substrate carrier 200, and then causes carrying pad 204 rotation.In like manner, shaft gear 330 in the meshing connection of orientation gear 350, and orientation gear 350 connects orientation wheel shaft 352.Orientation wheel shaft 352 is by one end of universal joint 370 connection for transmission axle 372, and the other end of transmission shaft 372 then connects year seat 212 of substrate carrier 210.Wherein carry seat 212 inside and rotate a year pad 214 by the mode of known worm and wormwheel, order is carried a pad 214 and is rotated together with its section 216, and its sense of rotation is parallel to the bearing of trend of section 216, can clockwise or be rotated counterclockwise.That is, axis 310 is rotated and interlock orientation gear 350 by rotation motor 320, and the combination then via orientation wheel shaft 352, universal joint 370 and transmission shaft 372 is arranged in pairs or groups, and makes to carry the worm and wormwheel structure interlock in seat 212, and then causes carrying pad 204 rotation.In addition, orientation wheel shaft 342,352 cross-under and be limited on permanent seat 380, by the setting of permanent seat 380, not only can make middle shaft gear 330 stably connect meshing orientation gear 340,350, also can allow substrate carrier 200,210 stably action.Moreover permanent seat 380 can avoid incident material vapor cloud cluster enter mechanical operating space and produce unnecessary pollution.In addition, the bearing of trend of axis 310 is crossing with the bearing of trend of section 206 angle theta, and the working range of this angle theta is 74 degree to 90 degree.It is worth mentioning that, axis 310 plays the part of multi-functional role, and it not only can drive substrate carrier 200,210 to carry out the adjustment of angle theta, also can allow and carry pad 204,214 and section 206,216 rotation.
Inclination angle modulating module 400 comprises lifters 410, lift motor 420, two universal joints 430,432, two Universal linking levers 440,442 and two universal joints 450,452.Wherein lifters 410 has transfer portion 412, lifting linking member 414 and lifting block set 416.Lift motor 420 has lift shaft 422, and the one end in this lift shaft 422 handoff portion 412.Lift motor 420 is fixed on dish seat 530, and lift shaft 422 connects lifting linking member 414 by transfer portion 412.Moreover one end of lifting linking member 414 is connected to transfer portion 412.Transfer portion 412 can be known worm and wormwheel structure, and its clockwise reverse by lift motor 420 causes the upper and lower displacement of lifting linking member 414.The other end of lifting linking member 414 is then fixed in the outside of lifting block set 416.Lifting linking member 414 is L-shaped and be rigid, and its displacement can link and drives lifting block set 416.In addition, lifting block set 416 is socketed on axis 310 movablely, makes the limited bearing of trend displacement being parallel to axis 310 of lifters 410.This lifting block set 416 is in hollow cylindrical, and the internal diameter of its cylinder is greater than the diameter of axle of axis 310, and lifting block set 416 can be made to slide up and down displacement swimmingly.Moreover the two ends of lifting block set 416 are respectively equipped with universal joint 430 and universal joint 432, and universal joint 430,432 is all fixed in the outer wall of lifting block set 416.The two ends of Universal linking lever 440 connect universal joint 430 and universal joint 450 respectively, and the two ends of Universal linking lever 442 then connect universal joint 432 and universal joint 452 respectively.Two universal joints 450,452 are fixedly arranged on respectively and carry on seat 202,212.It can thus be appreciated that lifters 410 is connected substrate carrier 200 by Universal linking lever 440 indirectly with two universal joints 430,450, and be indirectly connected substrate carrier 210 by Universal linking lever 442 with two universal joints 432,452.Rotation due to lift motor 420 can allow lifting linking member 414 displacement, so lift motor 420 can drive lifters 410 displacement and simultaneous linkage substrate carrier 200,210, and then adjustment changes angle theta.It is worth mentioning that, lift motor 420 adjusts angle theta and diminishes, and now lift motor 420 rotates and makes lifting block set 416 upwards promote, and causes substrate carrier 200,210 to draw close axis 310 simultaneously.On the contrary, lift motor 420 adjustable angle theta becomes large, and now lift motor 420 rotates order lifting block set 416 to decline, causes substrate carrier 200,210 simultaneously away from axis 310, and its action, as the folding of umbrella and expansion, has possessed the modulation of two-way angle.
Revolution module 500 comprises revolution motor 510, dish seat 530 and rotating shaft 520.Its mid-game seat 530 connects revolution motor 510 by rotating shaft 520 and dish seat 530 is run through by axis 310, and coils the affixed rotation motor 320 of seat 530 and lift shaft 422.One end of rotating shaft 520 can be known worm and wormwheel structure, the gear unit of its terminal pad seat 530, and the other end of rotating shaft 520 then connects revolution motor 510, and this rotating shaft 520 is the rotation axis of revolution motor 510.Moreover the lifters 410 of inclination angle modulating module 400 is connected on dish seat 530 by lifting linking member 414, and rotation module 300 is connected on dish seat 530 by axis 310.It can thus be appreciated that revolution motor 510 is by the worm and wormwheel structure rolling disc seat 530 of rotating shaft 520, and then rotation motor 320 on interlock dish seat 530 and axis 310, cause that substrate carrier 200,210 is synchronously equidirectional to revolve round the sun around dish seat 530.
Fig. 3 is the inclination angle modulating module 600 of another embodiment of the utility model and the vertical view of substrate carrier 610 ~ 640, and it has four substrate carrier 610 ~ 640.Fig. 4 is the inclination angle modulating module 700 of another embodiment of the utility model and the vertical view of substrate carrier 710 ~ 760, and it has six substrate carrier 710 ~ 760.Fig. 5 is the inclination angle modulating module 800 of the utility model yet another embodiment and the vertical view of substrate carrier 810 ~ 880, and it has eight substrate carrier 810 ~ 880.As shown in Figure 3, substrate carrier 610 and substrate carrier 630 correspond to each other, and substrate carrier 620 and substrate carrier 640 correspond to each other, and therefore have the substrate carrier group that two groups corresponding.In like manner, Fig. 4 and Fig. 5 has three groups of substrate carrier groups corresponding with four groups respectively.In addition, substrate carrier can carry out revised planning according to different cavity sizes, the size of base material to be plated or the size of substrate carrier from the quantity of section.Such as: each section can be placed a slice 4 inch wafer test piece or place four 2 inch wafer test pieces by adapting fixture, certainly, also can place the test piece larger than 4 inch wafer, to play the effect of volume production.So can place multiple wafer test piece by substrate carrier, and multiple substrate carrier can be set in the film coating apparatus 100 of whole adjustable varied angle and share a rotation module 300, inclination angle modulating module 400 and a revolution module 500.Therefore, under the condition of low cost, the film coating apparatus 100 of adjustable varied angle of the present utility model can improve output significantly.
From above-mentioned embodiment, the utility model has following advantages: one, utilize special lifting block set to link inclination angle modulating module and rotation module, not only can in the process of plated film the angle of inclination of freely modulation substrate carrier, also can allow substrate carrier rotation simultaneously.Its two, by inclination angle modulating module, rotation module and revolution, module is triangular is fixedly connected with, and can realize two kinds of effects at this substrate carrier: effect one, produce uniform coated at substrate surface to be plated; Effect two, at substrate surface growth 3-D solid structure film to be plated.Its three, by the setting of heating and cooling controller and logical substrate bias controller, substrate carrier can be made to have the function of heating and cooling and logical bias voltage concurrently, and then allow base material to be plated meet the demand of various coating process.Its four, substrate carrier can place multiple test piece, can improve output significantly.Its five, can according to the configuration of different vacuum coating system, from 6 directions before and after up and down, this utility model is installed.
Although the utility model with embodiment openly as above; so it is not intended to limit the utility model; any those skilled in the art; not departing from spirit and scope of the present utility model; can do various different selection and amendment, therefore protection domain of the present utility model limited by claims and equivalents thereof.
Claims (15)
1. a film coating apparatus for adjustable varied angle, for placing at least one base material to be plated, is characterized in that, the film coating apparatus of described adjustable varied angle comprises:
At least one substrate carrier, it comprises section;
Rotation module, it comprises:
Axis, it connects described substrate carrier, and the bearing of trend of described axis is crossing with the bearing of trend of described section angle; And
Rotation motor, axis described in its interlock and make described substrate carrier rotation; And
Inclination angle modulating module, it comprises:
Have at least one lifters of lifting block set, described lifting block set is socketed described axis movablely, make the bearing of trend displacement that described lifters is being parallel to described axis be restricted, and described lifters connects described substrate carrier; And
Lift motor, it drives described lifters displacement and substrate carrier described in interlock, causes described angle modulation.
2. the film coating apparatus of adjustable varied angle as claimed in claim 1, it is characterized in that, described lift motor adjusts described angle and diminishes and cause described substrate carrier to draw close described axis, or described lift motor adjusts described angle and becomes large and cause described substrate carrier away from described axis.
3. the film coating apparatus of adjustable varied angle as claimed in claim 1, it is characterized in that, described substrate carrier also comprises heating and cooling controller, described heating and cooling controller can comprise electrothermal piece, cooling component and monitoring temperature part, the temperature of the described base material to be plated of described electrothermal piece heating, the temperature of the described base material to be plated of described cooling component cooling, the temperature of the described base material to be plated of described monitoring temperature part monitoring.
4. the film coating apparatus of adjustable varied angle as claimed in claim 1, is characterized in that, described substrate carrier also comprises logical substrate bias controller, and described logical substrate bias controller controls the voltage of described substrate carrier.
5. the film coating apparatus of adjustable varied angle as claimed in claim 1, is characterized in that, described base material to be plated has multiple test piece, and described substrate carrier prodigiosin places described multiple test piece.
6. the film coating apparatus of adjustable varied angle as claimed in claim 1, is characterized in that, described inclination angle modulating module also comprises:
Universal joint, its affixed described lifting block set; And
Universal linking lever, the two ends of described Universal linking lever connect described universal joint and described substrate carrier respectively.
7. the film coating apparatus of adjustable varied angle as claimed in claim 1, is characterized in that, described rotation module also comprises:
Middle shaft gear, its affixed described axis; And
Orientation gear, its meshing described middle shaft gear and connect described substrate carrier, described axis is rotated and orientation gear described in interlock by described rotation motor, causes described substrate carrier rotation.
8. a film coating apparatus for adjustable varied angle, for placing multiple base material to be plated, is characterized in that, the film coating apparatus of described adjustable varied angle comprises:
Multiple substrate carrier, each described substrate carrier comprises section, and each described section places base material to be plated described in one of them;
Rotation module, it comprises:
Axis, it connects each described substrate carrier, and the bearing of trend of described axis is crossing with the bearing of trend of described section angle; And
Rotation motor, axis described in its interlock and make each described substrate carrier rotation;
Inclination angle modulating module, it comprises:
Have at least one lifters of lifting block set, described lifting block set is socketed described axis movablely, makes described lifters be parallel to the bearing of trend displacement of described axis, and described lifters connects each described substrate carrier; And
Lift motor, it drives described lifters displacement and each described substrate carrier of interlock, causes described angle modulation; And
Revolution module, it comprises:
Dish seat, its affixed described rotation motor and described lift motor;
Rotating shaft, one end of described rotating shaft connects described dish seat; And
Revolution motor, it connects the other end of described rotating shaft, and described revolution motor horizontally rotates axis described in described dish seat and interlock by described rotating shaft, causes each described substrate carrier to revolve round the sun around described dish seat.
9. the film coating apparatus of adjustable varied angle as claimed in claim 8, is characterized in that, the quantity of described multiple substrate carrier is 2,4,6 or 8.
10. the film coating apparatus of adjustable varied angle as claimed in claim 8, it is characterized in that, described substrate carrier also comprises heating and cooling controller, and described heating and cooling controller comprises electrothermal piece, cooling component and monitoring temperature part, described electrothermal piece heats the temperature of base material to be plated described in one of them, the temperature of the described base material to be plated of described cooling component cooling, the temperature of the described base material to be plated of described monitoring temperature part monitoring.
The film coating apparatus of 11. adjustable varied angle as claimed in claim 8, it is characterized in that, described substrate carrier also comprises logical substrate bias controller, and described logical substrate bias controller controls the voltage of substrate carrier described in one of them.
The film coating apparatus of 12. adjustable varied angle as claimed in claim 8, is characterized in that, described base material to be plated has multiple test piece, and substrate carrier prodigiosin described in one of them places described multiple test piece.
The film coating apparatus of 13. adjustable varied angle as claimed in claim 8, is characterized in that, described inclination angle modulating module also comprises:
Multiple universal joint, the affixed described lifting block set of each described universal joint; And
Multiple Universal linking lever, the two ends of each described Universal linking lever connect universal joint described in one of them and substrate carrier described in one of them respectively.
The film coating apparatus of 14. adjustable varied angle as claimed in claim 8, is characterized in that, described rotation module also comprises:
Middle shaft gear, its affixed described axis; And
Multiple orientation gear, shaft gear and connect substrate carrier described in one of them in described in each described orientation gear mesh, described axis is rotated and each described orientation gear of interlock by described rotation motor, causes each described substrate carrier rotation.
The film coating apparatus of 15. adjustable varied angle as claimed in claim 8, it is characterized in that, described lift motor adjusts described angle and diminishes and cause each described substrate carrier to draw close described axis, or described lift motor adjusts described angle and becomes large and cause each described substrate carrier away from described axis.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520215012.6U CN204589295U (en) | 2015-04-10 | 2015-04-10 | The film coating apparatus of adjustable varied angle |
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| CN201520215012.6U CN204589295U (en) | 2015-04-10 | 2015-04-10 | The film coating apparatus of adjustable varied angle |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105369208A (en) * | 2015-10-10 | 2016-03-02 | 江苏新思达电子有限公司 | Evaporating-coating self revoluting jig |
| CN106563608A (en) * | 2016-11-04 | 2017-04-19 | 三峡大学 | Method and device for preparing anti-reflection self-cleaning film on glass |
| CN109652780A (en) * | 2018-12-12 | 2019-04-19 | 上海航天控制技术研究所 | A kind of control method improving special-shaped part plating film uniformity |
| CN112359337A (en) * | 2020-11-12 | 2021-02-12 | 昆山英利悦电子有限公司 | Portable coating machine carrier with regulatory function |
-
2015
- 2015-04-10 CN CN201520215012.6U patent/CN204589295U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105369208A (en) * | 2015-10-10 | 2016-03-02 | 江苏新思达电子有限公司 | Evaporating-coating self revoluting jig |
| CN106563608A (en) * | 2016-11-04 | 2017-04-19 | 三峡大学 | Method and device for preparing anti-reflection self-cleaning film on glass |
| CN109652780A (en) * | 2018-12-12 | 2019-04-19 | 上海航天控制技术研究所 | A kind of control method improving special-shaped part plating film uniformity |
| CN112359337A (en) * | 2020-11-12 | 2021-02-12 | 昆山英利悦电子有限公司 | Portable coating machine carrier with regulatory function |
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Inventor after: Li Jinzhao Inventor after: Liu Yujie Inventor after: Huang Defeng Inventor before: Li Jinzhao Inventor before: Liu Yujie |
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