TWM509808U - Angled-adjustable coating apparatus - Google Patents

Description

Adjustable angle coating device

The invention relates to a coating device, in particular to a coating device with adjustable angle.

Currently, many industrial products are coated with a film to improve various properties of the surface of the product, for example, to increase the heat resistance, corrosion resistance, surface hardness or long service life of the substrate to be plated. The general coating methods mainly include thermal resistance vapor deposition, RF magnetron sputtering, electron beam thermal evaporation, chemical vapor deposition, molecular beam epitaxy, and ion plating, in which the coating materials are continuously The uniformity of the coating on the surface of the object to be plated, and significantly increase production and reduce costs, has become an important topic for researchers involved in this industry.

In the conventional vacuum coating device, the two substrates to be plated are mostly vacuum-coated, that is, only a film of a specific material is deposited on the surface. Although it can support multiple injection and angle-angle processes, it cannot be processed. The angular relationship between the substrate to be plated and the source of the coating is adjusted in real time. As for the common Oblique Angle Deposition (OAD), although the angle relationship between the substrate to be plated and the source of the coating can be adjusted, However, it is subject to the size of the substrate to be coated and the geometry of the system and cannot be mass produced. It can be seen that there is currently no coating device on the market that can adjust the tilt angle, can be rotated and coated, and can greatly increase the mass production. Therefore, related companies are seeking solutions.

Therefore, the present invention provides a variable angle coating device which utilizes a special lifting sleeve to connect the tilt modulation module and the rotation module, and can freely adjust the substrate carrier during the coating process. The angle of inclination also allows the substrate carrier to rotate. The fixed connection between the dip modulation module, the rotation module and the revolving module can realize the substrate carrier: first, the effect of uniformly coating on the surface of the substrate to be plated; The effect of growing a three-dimensional structure film on the surface of the substrate. Moreover, through the setting of the temperature rise and fall controller and the through bias controller, the substrate carrier can have the functions of lifting temperature and through bias, and the substrate to be plated can meet the requirements of various coating processes. In addition, the substrate carrier can accommodate a plurality of test pieces, which can greatly increase the yield.

One embodiment of the present invention is a variable angle coating device for placing at least one substrate to be plated, the adjustable angle coating device comprising at least one substrate carrier, a rotation module and an inclination Modulation module. Wherein the substrate carrier comprises a carrier surface. The rotation module includes a center shaft and a rotation motor. The central axis is connected to the substrate carrier, and the extending direction of the central axis intersects the extending direction of the carrying surface at an angle. The rotating motor rotates the central shaft to rotate the substrate carrier. Furthermore, the tilt modulation module includes at least one liter having a lift sleeve Drop down with a lift motor. The lifting sleeve is slidably sleeved with the central shaft, so that the lifting member is restricted to be displaced parallel to the extending direction of the central shaft, and the lifting member is connected to the substrate carrier. The lifting motor drives the lifting member to move and interlocks the substrate carrier, causing the angle to change.

Therefore, the novel variable angle coating device utilizes a special lifting sleeve to connect the tilt modulation module and the rotation module, and can not only modulate the inclination angle of the substrate carrier during the coating process. At the same time, the substrate carrier can be rotated.

According to other embodiments of the foregoing embodiments, the lift motor can be adjusted to have a smaller angle to cause the substrate carrier to move closer to the center axis, or the lift motor can be adjusted to have a larger angle to cause the substrate carrier to move away from the center axis. Furthermore, the substrate carrier may include a temperature rise and fall temperature controller, and the temperature rise and fall temperature controller may include an electric heating component, a uniform cooling component, and a temperature monitoring component. The electric heating component can heat the temperature of the substrate to be plated; the cooling component can cool the temperature of the substrate to be plated; and the temperature monitoring component can monitor the temperature of the substrate to be plated. Additionally, the substrate carrier can include a pass bias controller that controls the voltage of the substrate carrier. The substrate to be plated has a plurality of test pieces, and the substrate carrier can place the test pieces. In addition, the foregoing tilt modulation module may include a universal joint and a universal joint. The universal joint is fixed to the lifting sleeve, and the two ends of the universal joint are respectively connected with the universal joint and the substrate carrier. The rotation module may include a center shaft gear and a matching gear, the middle shaft gear is fixed to the center shaft, and the alignment gear is coupled to the center shaft gear and connected to the substrate carrier. The central shaft is rotated by the rotating motor to interlock the alignment gears, causing the substrate carrier to rotate.

With the above embodiment, the lifting temperature control is added to the substrate carrier The controller and the through-bias controller not only change the tilt angle of the substrate carrier, but also have the functions of lifting temperature and through bias, so that the substrate to be plated meets the requirements of various coating processes. Under this structure, the user can control the surface temperature of the substrate to be plated according to the process requirements, and the substrate carrier can also be used in various vacuum coating systems. Furthermore, a substrate carrier can accommodate a plurality of test pieces, which can greatly increase the yield. In addition, the dynamic connection design of the universal joint and the universal joint allows the entire mechanism to change the inclination angle of the substrate carrier in the up and down direction without affecting the swinging action of the substrate carrier rotation. In addition, the axle shaft structure of the center shaft gear combined with the aligning gear enables the rotating motor to synchronously drive the carrier pad of the substrate carrier to rotate, and the structure is simple and convenient to disassemble, and the user can configure according to requirements.

Another embodiment of the present invention is a variable angle coating device for placing a plurality of substrates to be plated. The adjustable angle coating device comprises a plurality of substrate carriers, a rotation module, a tilt modulation module and a revolution module. Each of the substrate carriers includes a carrier surface on which each substrate is to be plated. The rotation module includes a center shaft and a rotation motor. The central axis is connected to each substrate carrier, and the extending direction of the central axis intersects the extending direction of the carrying surface at an angle. Rotating the motor interlocks the center shaft to cause each substrate carrier to rotate. Furthermore, the tilt modulation module includes at least one lifting member and a lifting motor having a lifting sleeve. The lifting sleeve is slidably sleeved with the central shaft, so that the lifting member is displaced parallel to the extending direction of the central axis, and the lifting member is connected to each substrate carrier. The lifting motor drives the lifting member to move and interlocks the substrate carriers, so that the angle is changed. In addition, the revolution module includes a disc seat, a rotating shaft and a revolving motor. The disk holder is fixed to the rotating motor and the lifting motor. The shaft can be The conventional worm and worm gear structure has one end connected to a gear set on the disc holder. As for the revolution motor, the other end of the shaft is connected. The revolving motor is interlocked with the central shaft of the disc holder by the rotary worm horizontally rotating the disc holder, so that the substrate carriers revolve around the disc holder.

Therefore, the novel variable angle coating device utilizes a special lifting sleeve to connect the tilt modulation module and the rotation module, and can not only modulate the inclination angle of the substrate carrier during the coating process. At the same time, the substrate carrier can be rotated. The fixed connection between the dip modulation module, the rotation module and the revolving module can realize the substrate carrier: first, the effect of uniformly coating on the surface of the substrate to be plated; The effect of growing a three-dimensional structure film on the surface of the substrate.

According to other embodiments of the foregoing embodiments, the number of the substrate carriers may be two, four, six or eight. The substrate carrier may include a temperature rise and fall temperature controller, and the temperature rise and fall temperature controller may include a heating element, a uniform cooling piece and a temperature monitoring component. The electric heating member heats the temperature of the substrate to be plated, the cooling member cools the temperature of the substrate to be plated, and the temperature monitoring member monitors the temperature of the substrate to be plated. Additionally, the substrate carrier can include a pass bias controller that controls the voltage of the substrate carrier. The substrate to be plated has a plurality of test pieces, and the substrate carrier can place the test pieces. The foregoing tilt modulation module may include a plurality of universal joints and a plurality of universal joints. Each universal joint is fixed to the lifting sleeve. The two ends of each of the universal joints are respectively connected to one of the universal joints and one of the substrate carriers. Furthermore, the aforementioned rotation module may include a center shaft gear and a plurality of alignment gears. The center shaft gear is fixed to the center shaft, and each of the alignment gears meshes with the center shaft gear and is connected to one of the substrate carriers. The center shaft is rotated by the rotating motor to interlock the respective alignment gears, so that the substrate carriers rotate. The lifting motor can adjust the angle to be smaller to cause the substrate carrier to move closer to the center axis, or the lifting motor can adjust the angle to become larger, so that the substrate carrier is away from the center axis.

With the above embodiments, the number of substrate carriers can be adjusted according to different cavity sizes, the size of the substrate to be plated, or the size of the substrate carrier. Since the entire adjustable angle coating device can be provided with a plurality of substrate carriers and share one rotation module, one inclination modulation module and one revolution module, the cost can be reduced, and the output can be greatly improved.

100‧‧‧Adjustable angle coating device

200, 210, 610~640, 710~760, 810~880‧‧‧ substrate carrier

202, 212‧‧‧ carried

204, 214‧‧‧Pack

206, 216‧‧‧

300‧‧‧Rotary Module

310‧‧‧Axis

320‧‧‧Rotating motor

330‧‧‧Axle gear

340, 350‧‧‧ Alignment gears

342, 352‧‧‧ Alignment axle

360, 370, 430, 432, 450, 452‧‧‧ universal joints

362, 372‧‧‧ drive shaft

380‧‧‧ fixed seat

400, 600, 700, 800‧‧‧ dip modulation module

410‧‧‧lifting parts

412‧‧‧Transfer Department

414‧‧‧ lifting link

416‧‧‧lifting seat

420‧‧‧ Lift motor

422‧‧‧ Lifting shaft

440, 442‧‧‧ universal joint

500‧‧‧ revolution module

510‧‧A revolution motor

520‧‧‧ shaft

530‧‧‧ Socket

Θ‧‧‧ angle

1 is a side view showing a coating device with adjustable angles according to an embodiment of the present invention.

FIG. 2A is a schematic diagram showing the operation of the rotation module of FIG. 1 .

FIG. 2B is a schematic diagram showing the operation of the tilt modulation module of FIG. 1 .

Fig. 2C is a schematic view showing the operation of the revolution module of Fig. 1.

FIG. 3 is a plan view showing a tilt modulation module and a substrate carrier according to another embodiment of the present invention.

4 is a plan view showing a tilt modulation module and a substrate carrier according to still another embodiment of the present invention.

FIG. 5 is a plan view showing a tilt modulation module and a substrate carrier according to still another embodiment of the present invention.

Please refer to Figures 1 to 2C together. 1 is a side view showing a coating device 100 of an adjustable angle according to an embodiment of the present invention. FIG. 2A is a schematic diagram showing the operation of the rotation module 300 of FIG. 1 . FIG. 2B is a schematic diagram showing the operation of the tilt modulation module 400 of FIG. 1 . FIG. 2C is a schematic diagram showing the operation of the revolution module 500 of FIG. 1 . As shown in the figure, the adjustable angle coating device 100 is used for placing two substrates to be plated (not shown), and the variable angle coating device 100 comprises two substrate carriers 200, 210, a rotation module 300, a tilt modulation module 400, and a revolution module 500.

The substrate carrier 200 includes a carrier 202 and a carrier pad 204. The carrier 202 is fixed to one end of the carrier pad 204, and the other end of the carrier pad 204 has a carrier surface 206. The substrate carrier 210 includes a carrier 212 and a carrier pad 214. The carrier 212 is fixed to one end of the carrier pad 214, and the other end of the carrier pad 214 has a carrier surface 216. The carrier surface 206 and the carrier surface 216 can respectively be placed to connect the two substrates to be plated. Furthermore, the carrier 202, the carrier 212, the carrier pad 204, and the carrier pad 214 may be circular, square or other polygonal shapes to meet the requirements of various coating methods. The carrier 202 and the carrier 212 of the present embodiment have a square shape and the same size and shape, and the pad 204 and the carrier pad 214 have a circular shape and the same shape and size. In addition, a temperature rise and fall controller and a bias bias controller (not shown) may be disposed on the carrier 202 of the substrate carrier 200, and the temperature rise and fall controller and the through bias controller are electrically connected to the carrier pad. 204, 214. The temperature rise and fall temperature controller comprises an electric heating component, a constant cooling component and a temperature monitoring component. The heating element can heat the temperature of the substrate to be plated; the cooling piece can be The temperature of the substrate to be plated is cooled; the temperature monitoring member monitors the temperature of the substrate to be plated. Additionally, the pass bias controller can control the voltage of the corresponding pads 204, 214 in the substrate carriers 200, 210. By combining the above-mentioned temperature rise and fall controller with the on-bias controller, the novel variable angle coating device 100 can meet the requirements of a special coating process. Furthermore, the substrate to be plated may have a plurality of test pieces which may be placed on the corresponding carrier pads 204, 214 of the substrate carriers 200, 210 to be simultaneously coated to increase the yield.

The rotation module 300 includes a center shaft 310, a rotation motor 320, a center shaft gear 330, two alignment gears 340, 350, two universal joints 360, 370, and a fixing base 380. One end of the center shaft 310 is coupled to the rotation motor 320 and is a rotation shaft of the rotation motor 320. The other end of the center shaft 310 is coaxially fixed to the center shaft gear 330. Furthermore, the alignment gear 340 is coupled to the center shaft gear 330, and the alignment gear 340 is coupled to the alignment shaft 342. The alignment axle 342 is coupled to one end of the drive shaft 362 through a universal joint 360, and the other end of the drive shaft 362 is coupled to the carrier 202 of the substrate carrier 200. The carrier 204 is rotated inside the carrier 202 by means of a conventional worm gear to rotate the carrier 204 together with its carrier 206. In other words, the central shaft 310 is rotated by the rotating motor 320 to interlock the alignment gear 340, and then the worm and worm gear structure in the carrier 202 of the substrate carrier 200 is coupled via the combination of the alignment axle 342, the universal joint 360 and the transmission shaft 362. The interlocking causes the carrier pad 204 to rotate. Similarly, the alignment gear 350 is coupled to the center shaft gear 330, and the alignment gear 350 is coupled to the alignment shaft 352. The alignment axle 352 is coupled to one end of the drive shaft 372 through a universal joint 370, and the other end of the drive shaft 372 is coupled to the carrier 212 of the substrate carrier 210. Which contains Inside the seat 212, the carrier pad 214 is rotated by a conventional worm gear, so that the carrier pad 214 rotates together with its carrier surface 216, and its rotation direction is parallel to the extending direction of the carrier surface 216, and can be rotated clockwise or counterclockwise. That is to say, the middle shaft 310 is rotated by the rotation motor 320 to interlock the alignment gear 350, and then the combination of the alignment axle 352, the universal joint 370 and the transmission shaft 372 causes the worm and worm gear structures in the carrier 212 to interlock, thereby causing the carrier pad. 204 rotation. In addition, the alignment axles 342, 352 are pierced and limited to the fixing base 380. The fixing bracket 380 is disposed to not only stably connect the center shaft gear 330 to the tooth alignment gears 340 and 350, but also to the substrate carrier. 200, 210 operate steadily. Moreover, the mount 380 can prevent incident material vapor cloud clouds from entering the mechanically actuated area to create unnecessary contamination. In addition, the extending direction of the central axis 310 intersects with the extending direction of the carrying surface 206 by an angle θ, and the working range of the included angle θ is 74 degrees to 90 degrees. It is worth mentioning that the central axis 310 plays the role of multi-function, which not only can drive the substrate carriers 200, 210 to adjust the angle θ, but also allows the pads 204, 214 and the loading surfaces 206, 216 to rotate.

The tilt modulation module 400 includes a lifting member 410, an elevation motor 420, two universal joints 430, 432, two universal joints 440, 442, and two universal joints 450, 452. The lifting member 410 has a transferring portion 412, a lifting link 414 and a lifting sleeve 416. The hoist motor 420 has an elevation shaft 422, and the elevation shaft 422 is coupled to one end of the transfer portion 412. The lift motor 420 is fixed to the disk holder 530, and the lift shaft 422 is connected to the lift link 414 through the transfer portion 412. Further, one end of the lift link 414 is connected to the transfer portion 412. The transfer portion 412 can be a habit The worm gear structure is known to be reversed by the forward rotation of the lift motor 420 to cause the up and down movement of the lift link 414. The other end of the lifting link 414 is fixed to the outer side of the lifting sleeve 416. The lifting link 414 is L-shaped and rigid, and its displacement is coupled to drive the lifting sleeve 416. In addition, the lifting sleeve 416 is slidably sleeved on the central shaft 310, so that the lifting member 410 is restricted to be displaced parallel to the extending direction of the central shaft 310. The lifting sleeve 416 has a hollow cylindrical shape, and the inner diameter of the cylinder is larger than the axial diameter of the central shaft 310, so that the lifting sleeve 416 can smoothly slide up and down. Furthermore, the two ends of the lifting sleeve 416 are respectively provided with a universal joint 430 and a universal joint 432, and the universal joints 430, 432 are fixed to the outer wall of the lifting sleeve 416. The two ends of the universal joint 440 are respectively connected with a universal joint 430 and a universal joint 450, and the two ends of the universal joint 442 are respectively connected with a universal joint 432 and a universal joint 452. The 20,000 joints 450, 452 are fixed to the carriers 202, 212, respectively. It can be seen that the lifting member 410 is indirectly connected to the substrate carrier 200 through the universal joint 440 and the two-way joints 430, 450, and indirectly through the universal joint 442 and the two-way joints 432, 452. The substrate carrier 210 is attached. Since the rotation of the lifting motor 420 can displace the lifting link 414, the lifting motor 420 can drive the lifting member 410 to displace and simultaneously link the substrate carriers 200, 210 to adjust the angle θ. It is worth mentioning that the adjustment angle θ of the lifting motor 420 becomes smaller. At this time, the rotation of the lifting motor 420 causes the lifting sleeve 416 to be lifted upward, so that the substrate carriers 200, 210 are simultaneously close to the central axis 310. Conversely, the lifting motor 420 can adjust the angle θ to become larger. At this time, the lifting motor 420 rotates to lower the lifting sleeve 416, so that the substrate carriers 200 and 210 are away from the center shaft 310 at the same time, and the movement is like the folding of the umbrella. Expanded, with a two-way angle modulation.

The revolution module 500 includes a revolving motor 510, a disc holder 530, and a rotating shaft 520. The disk holder 530 is connected to the revolving motor 510 through the rotating shaft 520, and the disk holder 530 is penetrated by the center shaft 310, and the disk holder 530 is fixed to the rotating motor 320 and the lifting shaft 422. One end of the rotating shaft 520 may be a conventional worm gear structure, which is connected to the gear set of the disk holder 530, and the other end of the rotating shaft 520 is connected to the revolving motor 510, which is the rotating shaft of the revolving motor 510. Moreover, the lifting member 410 of the tilt modulation module 400 is connected to the disk holder 530 via the lifting link 414, and the rotation module 300 is connected to the disk holder 530 through the central axis 310. It can be seen that the revolving motor 510 rotates the disc holder 530 by the worm worm gear structure of the rotating shaft 520, thereby interlocking the rotating motor 320 and the center shaft 310 on the disc holder 530, so that the substrate carriers 200, 210 are synchronously wound in the same direction around the disc holder 530. Revolution.

3 is a plan view of a tilt modulation module 600 and substrate carriers 610-640 according to another embodiment of the present invention, which has four substrate carriers 610-640. 4 is a plan view of a tilt modulation module 700 and substrate carriers 710-760 according to still another embodiment of the present invention, which has six substrate carriers 710-760. FIG. 5 is a plan view of a tilt modulation module 800 and a substrate carrier 810-880 according to still another embodiment of the present invention, which has eight substrate carriers 810-880. As shown in FIG. 3, the substrate carrier 610 and the substrate carrier 630 correspond to each other, and the substrate carrier 620 and the substrate carrier 640 correspond to each other, so that there are two sets of corresponding substrate carrier groups. . Similarly, Figures 4 and 5 have three sets of substrate carrier groups corresponding to the four groups, respectively. In addition, the number of substrate carriers and the carrier surface can be different according to the cavity scale The plan is adjusted by the size of the substrate to be plated or the size of the substrate carrier. For example, a 4 inch wafer test piece can be placed on each surface or four 2 inch wafer test pieces can be placed through the transfer fixture. Of course, it can be placed larger than a 4 inch wafer. Test pieces to play the effect of mass production. In this way, a plurality of wafer test pieces can be placed through the substrate carrier, and a plurality of substrate carriers can be disposed in the entire adjustable angle coating device 100 and share one rotation module 300 and one tilt modulation module. 400 and a revolution module 500. Therefore, under the low-cost condition, the novel variable angle coating device 100 of the present invention can greatly increase the yield.

It can be seen from the above embodiments that the present invention has the following advantages: First, the special tilting socket is used to connect the tilt modulation module and the rotation module, and the substrate carrier can be freely modulated during the coating process. The angle of inclination also allows the substrate carrier to rotate. Secondly, by the fixed connection between the tilt modulation module, the rotation module and the revolution module, the substrate carrier can achieve two effects: the effect is that a uniform coating is formed on the surface of the substrate to be plated; Effect 2: A three-dimensional structure film is grown on the surface of the substrate to be plated. Thirdly, through the setting of the temperature rise controller and the through bias controller, the substrate carrier can have the functions of lifting temperature and through bias, and the substrate to be plated can meet the requirements of various coating processes. Fourth, the substrate carrier can be placed with a plurality of test pieces, which can greatly increase the yield. Fifthly, according to the configuration of different vacuum coating systems, the new type can be installed in six directions from top to bottom, left and right.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Any one skilled in the art can make various changes and retouchings without departing from the spirit and scope of the present invention. The scope of protection is subject to the definition of the scope of the patent application attached.

100‧‧‧Adjustable angle coating device

200, 210‧‧‧ substrate carrier

202, 212‧‧‧ carried

204, 214‧‧‧Pack

206, 216‧‧‧

300‧‧‧Rotary Module

310‧‧‧Axis

320‧‧‧Rotating motor

330‧‧‧Axle gear

340, 350‧‧‧ Alignment gears

342, 352‧‧‧ Alignment axle

360, 370, 430, 432, 450, 452‧‧‧ universal joints

362, 372‧‧‧ drive shaft

380‧‧‧ fixed seat

400‧‧‧ inclination modulation module

410‧‧‧lifting parts

412‧‧‧Transfer Department

414‧‧‧ lifting link

416‧‧‧lifting seat

420‧‧‧ Lift motor

422‧‧‧ Lifting shaft

440, 442‧‧‧ universal joint

500‧‧‧ revolution module

510‧‧A revolution motor

520‧‧‧ shaft

530‧‧‧ Socket

Θ‧‧‧ angle

Claims (15)

An adjustable angled coating device for arranging at least one substrate to be plated, the adjustable angle coating device comprising: at least one substrate carrier comprising a carrier surface; and a rotation module comprising: a central axis connecting the substrate carrier, the extending direction of the central axis intersecting an extending direction of the carrying surface; and a rotating motor for interlocking the central axis to rotate the substrate carrier; and a tilt modulation module, The invention comprises: at least one lifting member having a lifting sleeve, the lifting sleeve is slidably sleeved to the central shaft, the lifting member is restricted to be displaced parallel to the extending direction of the central shaft, and the lifting member is connected to the substrate carrier And a lifting motor that drives the lifting member to move the substrate carrier to cause the angle to be changed. The coating device of the variable angle according to claim 1, wherein the lifting motor adjusts the angle to become smaller so that the substrate carrier is close to the central axis, or the lifting motor adjusts the angle to become larger The substrate carrier is remote from the central axis. The coating device of the variable angle according to the first aspect of the invention, wherein the substrate carrier further comprises a temperature rise and fall temperature controller, wherein the temperature rise and fall controller can comprise a heating element, a uniform cooling piece and a temperature monitoring The heating element heats the temperature of the substrate to be plated, and the cooling member cools the The temperature of the substrate is plated, and the temperature monitoring member monitors the temperature of the substrate to be plated. The variable angle coating device of claim 1, wherein the substrate carrier further comprises a pass bias controller that controls the voltage of the substrate carrier. The coating device of the variable angle according to claim 1, wherein the substrate to be plated has a plurality of test pieces, and the substrate carrier can place the test pieces. The adjustable angle coating device of claim 1, wherein the tilt modulation module further comprises: a universal joint that fixes the lift sleeve; and a universal joint, the universal joint The two ends of the connecting rod are respectively connected to the universal joint and the substrate carrier. The coating device of the variable angle according to the first aspect of the invention, wherein the rotation module further comprises: a center shaft gear fixed to the center shaft; and an alignment gear that meshes the center shaft gear and connects the substrate The carrier is rotated by the rotating motor to interlock the alignment gear, so that the substrate carrier rotates. A variable angle coating device for placing a plurality of substrates to be plated, the adjustable angle coating device comprising: a plurality of substrate carriers, each of the substrate carriers comprising a carrier surface, wherein each of the carrier surfaces is disposed with one of the substrates to be plated; and a rotation module comprising: a central axis connecting the substrate carriers, The extending direction of the central axis intersects with the extending direction of the carrying surface; and a rotating motor interlocking the central shaft to rotate each of the substrate carriers; and a tilting modulation module comprising: at least one having a lifting sleeve a lifting member, the lifting sleeve is slidably sleeved to the central shaft, the lifting member is displaced parallel to the extending direction of the central shaft, and the lifting member is connected to each of the substrate carriers; and a lifting motor drives the lifting member to be displaced And interlocking the substrate carriers to cause the angle modulation; and a revolution module comprising: a disk holder fixed to the rotation motor and the lifting motor; and a rotating shaft, one end of the rotating shaft is connected to the disk holder; A rpm motor is coupled to the other end of the rotating shaft, and the revolving motor rotates the disc shaft horizontally by the rotating shaft to interlock the center shaft, so that each of the substrate carriers revolves around the disc holder. The coating device of the variable angle according to claim 8, wherein the number of the substrate carriers is two, four, six or eight. Adjustable angle as described in item 8 of the patent application The coating device further comprises a temperature rise and fall temperature controller, and the temperature rise and fall temperature controller comprises an electric heating member, a constant cooling member and a temperature monitoring member, wherein the heating element heats one of the substrates to be plated The temperature of the material, the cooling member cools the temperature of the substrate to be plated, and the temperature monitoring member monitors the temperature of the substrate to be plated. The coating device of the variable angle according to claim 8, wherein the substrate carrier further comprises a pass bias controller that controls the voltage of one of the substrate carriers. The coating device of the variable angle according to claim 8, wherein the substrate to be plated has a plurality of test pieces, and one of the substrate carriers can place the test pieces. The variable angle coating device of claim 8, wherein the tilt modulation module further comprises: a plurality of universal joints, each of the universal joints fixed to the lift sleeve; and a plurality of To the connecting rod, two ends of each of the universal joints are respectively connected to one of the universal joints and one of the substrate carriers. The adjustable angle coating device of claim 8, wherein the rotation module further comprises: a center shaft gear fixed to the center shaft; and a plurality of alignment gears, each of the alignment gear teeth meshing with the center shaft gear Connecting one of the substrate carriers, the central shaft being rotated by the rotating motor to interlock The gears are aligned so that each of the substrate carriers rotates. The coating device of the variable angle according to claim 8, wherein the lifting motor adjusts the angle to become smaller so that each of the substrate carriers is close to the central axis, or the lifting motor adjusts the angle to become larger Each of the substrate carriers is remote from the central axis.