CN106244993A - A kind of vacuum plating pivoted frame and vacuum coating equipment - Google Patents
A kind of vacuum plating pivoted frame and vacuum coating equipment Download PDFInfo
- Publication number
- CN106244993A CN106244993A CN201610822625.5A CN201610822625A CN106244993A CN 106244993 A CN106244993 A CN 106244993A CN 201610822625 A CN201610822625 A CN 201610822625A CN 106244993 A CN106244993 A CN 106244993A
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- Prior art keywords
- rotary table
- rotation
- fixed
- pivoted frame
- axis
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of vacuum plating pivoted frame and vacuum coating equipment, vacuum plating pivoted frame includes rotary table, rotary table can rotate around revolution center, rotary table is evenly distributed with the many axis of rotation around revolution center is rounded, rotating on the every axis of rotation it is provided with autorotation disk, autorotation disk is evenly distributed with many satellite axles around axis of rotation circle, the pawl dish for fixing product all it is equipped with on each satellite axle, the bottom of autorotation disk is fixed with driving gear, being fixed with fixed gear at revolution center, fixed gear engages with driving gear；During plated film, driving means drives rotary table to rotate, and autorotation disk is followed rotary table and rotated around revolution center, simultaneously drives gear and fixed gear engagement rotation, drives autorotation disk, satellite axle and the pawl coiling axis of rotation to rotate.Improving useful load and the production efficiency of product in vacuum plating pivoted frame, save Coating Materials, plated film is evenly.
Description
Technical field
The present invention relates to vacuum coating equipment, particularly relate to a kind of vacuum plating pivoted frame and vacuum coating equipment.
Background technology
Vacuum coating equipment can complete the plated film of product under higher vacuum, and vacuum coating equipment includes vacuum plating
Pivoted frame, existing vacuum plating pivoted frame as depicted in figs. 1 and 2, arranges planet axis 31 ' on rotary table 1 ', planet axis 31 ' sets
Putting pawl dish 32 ', be fixed with peg 33 ' between the protuberance 321 ' of two pawl dishes 32 ', peg 33 ' above mounts product 4 ', passes through
Driving means drives rotary table 1 ' to rotate, and drives planet axis 31 ', pawl dish 32 ' and peg 33 ' around the center of rotation of rotary table 1 '
Rotating, product 4 ' completes plated film in rotation process.Can only effectively utilize in each planet axis 31 ' of this kind of vacuum plating pivoted frame
One pawl dish 32 ', useful load is the least, and production efficiency ratio is relatively low.
Summary of the invention
The first object of the present invention is to propose a kind of vacuum plating pivoted frame, an axis of rotation can effectively utilize multiple
Pawl dish, useful load is big, and production efficiency improves, and has saved Coating Materials, and can form rotation, and plated film is uniform.
For reaching this purpose, the present invention by the following technical solutions:
A kind of vacuum plating pivoted frame, including rotary table, described rotary table can rotate around revolution center, and described rotary table is around public affairs
Turn that center is rounded is evenly distributed with the many axis of rotation, the rotating autorotation disk that is provided with on the every described axis of rotation, described from
Rotating disk is evenly distributed with many satellite axles around axis of rotation circle, and every described satellite axle is all equipped with the pawl for fixing product
Dish, the bottom of described autorotation disk is fixed with driving gear, is fixed with fixed gear at described revolution center, described fixed gear with
Described driving gear engages；During plated film, driving means drives rotary table to rotate, and described autorotation disk follows rotary table around revolution center
Rotate, simultaneously drive gear and fixed gear engagement rotation, drive autorotation disk, satellite axle and the pawl coiling axis of rotation to rotate.
Wherein, the quantity of described rotary table is two, and two described rotary tables are oppositely arranged and are fixed by fixing bar, institute
The two ends stating the axis of rotation are individually fixed in two described rotary tables, and the described axis of rotation is also equipped with rotating disk, described rotating disk
Being oppositely arranged with described autorotation disk, the two ends of described satellite axle are individually fixed in described autorotation disk and described rotating disk.
Wherein, described pawl dish includes the protuberance for connecting product that at least two is outwardly.
Wherein, described satellite axle is at least fixed with two described pawl dishes, two institutes of lie farthest away on same satellite axle
State and be fixed with the peg for mounting product between the corresponding protuberance of pawl dish.
Wherein, described peg being provided with multiple mounting part, described product is mounted on described mounting part.
Wherein, described protuberance is uniformly distributed around described satellite axle.
Wherein, described autorotation disk and described driving gear coaxially and are fixed by jackshaft, and described jackshaft is through described
Rotary table and being connected by bearing with described rotary table.
Wherein, described fixed gear and described driving gear are respectively positioned on the same side of described rotary table, described rotary table
Outer peripheral face is provided with gear, and driving means engages with the gear of the outer peripheral face of described rotary table, to drive described rotary table to rotate.
Wherein, the quantity of described satellite axle is 3-6 root, and the quantity of the described axis of rotation is 5-7 root.
The second object of the present invention is to propose a kind of vacuum coating equipment, and an axis of rotation can effectively utilize multiple pawl
Dish, useful load is big, and production efficiency improves, and has saved Coating Materials, and can form rotation, and plated film is uniform.
For reaching this purpose, the present invention by the following technical solutions:
A kind of vacuum coating equipment, including above-mentioned vacuum plating pivoted frame.
Beneficial effect: the invention provides a kind of vacuum plating pivoted frame and vacuum coating equipment.Vacuum plating pivoted frame includes public affairs
Rotating disk, described rotary table can rotate around revolution center, and described rotary table is evenly distributed with many rotations around revolution center is rounded
Axle, the rotating autorotation disk that is provided with on the every described axis of rotation, described autorotation disk is evenly distributed with many around axis of rotation circle
Satellite axle, every described satellite axle is all equipped with the pawl dish for fixing product, and the bottom of described autorotation disk is fixed with driving
Gear, is fixed with fixed gear at described revolution center, described fixed gear engages with described driving gear；During plated film, drive
Device drives rotary table to rotate, and described autorotation disk is followed rotary table and rotated around revolution center, simultaneously drives gear and fixed gear
Engagement rotation, drives autorotation disk, satellite axle and the pawl coiling axis of rotation to rotate.Every satellite axle can effectively utilize a pawl
Dish, by arranging many satellite axles, an axis of rotation can effectively utilize multiple pawl dish, improve the product in vacuum plating pivoted frame
The useful load of product and production efficiency, due to once can be to more product plated film, each Coating Materials consumption be constant, permissible
Saving Coating Materials, and satellite axle can rotate around the axis of rotation, autorotation disk can form rotation, drives product both to participate in revolving round the sun also
Participating in rotation, plated film is evenly.
Accompanying drawing explanation
Fig. 1 is the structural representation one of the vacuum plating pivoted frame that prior art provides.
Fig. 2 is the structural representation two of the vacuum plating pivoted frame that prior art provides.
Fig. 3 is the structural representation of the vacuum plating pivoted frame that embodiments of the invention 1 provide.
Fig. 4 is the part-structure schematic diagram of the vacuum plating pivoted frame that embodiments of the invention 1 provide.
Fig. 5 is the partial enlarged drawing at the A of Fig. 4.
Wherein:
1-rotary table, 11-fixes bar, the 21-axis of rotation, 22-autorotation disk, 23-rotating disk, 31-satellite axle, 32-pawl dish,
321-protuberance, 33-peg, 4-product, 1 '-rotary table, 11 '-fixing bar, 31 '-axis of rotation, 32 '-pawl dish, 321 '-protrude
Portion, 33 '-peg, 4 '-product.
Detailed description of the invention
Technical scheme and the technique effect reached for making to present invention solves the technical problem that, using are clearer, below
Technical scheme is further illustrated in conjunction with accompanying drawing and by detailed description of the invention.
Embodiment 1
As in Figure 3-5, present embodiments providing a kind of vacuum plating pivoted frame, including rotary table 1, rotary table 1 can be around public affairs
Turning center rotating, rotary table 1 is evenly distributed with the many axis of rotation 21 around revolution center is rounded, rotatable on the every axis of rotation 21
Be provided with autorotation disk 22, autorotation disk 22 is evenly distributed with many satellite axles 31 around the axis of rotation 21 circle, on each satellite axle 31
All being equipped with the pawl dish 32 for fixing product 4, pawl dish 32 includes the protrusion for connecting product 4 that at least two is outwardly
Portion 321, the bottom of autorotation disk 22 is fixed with driving gear, is fixed with fixed gear, fixed gear and driving tooth at revolution center
Wheel engagement；During plated film, driving means drives rotary table 1 to rotate, and autorotation disk 22 is followed rotary table 1 and rotated around revolution center, simultaneously
Drive gear and fixed gear engagement rotation, drive autorotation disk 22, satellite axle 31 and pawl dish 32 to rotate around the axis of rotation 21.This enforcement
In example, every satellite axle 31 can effectively utilize a pawl dish 32, and in prior art, and directly uniform pawl on rotary table 1 '
Dish 32 ' is compared, and by arranging the many axis of rotation 21, arranges many satellite axles 31 further around the axis of rotation 21, then at an axis of rotation 21
On can effectively utilize multiple pawl dish 32, and by adjusting size, an axis of rotation 21 and the satellite axle 31 arranged around it and pawl
Dish 32, the space occupied is not more more than pawl dish 32 ' of the prior art, even with smaller pawl dish 32, single pawl
The quantity fixing product 4 on dish 32 reduces, but owing to an axis of rotation 21 is provided around the many axis of rotation 31 and pawl dish 32,
The useful load of the most double product 4 improved in vacuum plating pivoted frame and production efficiency.Due to the most permissible
To more product 4 plated film, and each Coating Materials consumption is constant, prior art fails the Coating Materials used up all along with
Discharging and be wasted, after the useful load of product 4 of the plating pivoted frame of the present embodiment is double, the Coating Materials of the most same consumption can
To complete the plated film of more products, Coating Materials therefore can be saved.And satellite axle 31 can rotate around the axis of rotation 21, autorotation disk
22 can form rotation, and product 4, in coating process, on the one hand rotates around the axis of rotation 21 along with autorotation disk 22, constantly in revolution
The inner side and outer side circulation of dish 1, rotates along with rotary table 1 again simultaneously, moves to the diverse location of whole rotary table 1, through whole
After the circulation of individual revolution, evenly, and different products 4 is due to continuous cycle rotation, the one of its plated film for the plated film of single product 4
Cause property is the most fine.Specifically, the rotary table 1 of the present embodiment is provided with 6 autorotation disks 21, each autorotation disk 21 is provided with
4 satellite axles 31, each satellite axle 31 is provided with two pawl dishes 32, and pawl dish 32 is provided with 4 protuberances 321, i.e. these realities
Execute example and use 4 pawl pawl dishes, compared with the pawl dish 32 ' with 6 protuberances 321 ' of prior art, lack two protuberances
321, this is owing to, after an axis of rotation 21 arranges multiple pawl dish 32, in order to avoid interfering between each pawl dish 32, passing through
Reducing the quantity of protuberance 321, the size keeping total is basically identical.It is true that owing to product 4 is in the form of mounting,
Each satellite axle 31 can only effectively utilize a pawl dish 32, and remaining pawl dish 32 plays fixing effect, with existing 8 rotations
Axle, pawl dish 6 are provided with 6 protuberances 321 and compare, when not considering the quantity of the product 4 of carry on each protuberance 321, this
The useful load of the product 4 of embodiment is 6 × 4 × 4=96, and existing useful load is 8 × 6=48, and prior art is every
On individual protuberance 321, the quantity of the product of mounting is consistent with the quantity of the product of the protuberance 321 of the present embodiment.Therefore, at this
Total the taking up space and when taking up space consistent of existing structure of embodiment, useful load can be double, greatly improves
Production efficiency, has saved Coating Materials simultaneously, can reduce the input of equipment under the requirement of identical production task.
In the present embodiment, two rotary tables 1 are oppositely arranged and are fixed by fixing bar 11, and the two ends of the axis of rotation 21 are solid respectively
Due to two rotary tables 1, the axis of rotation 21 being also equipped with rotating disk 23, rotating disk 23 is oppositely arranged with autorotation disk 22, satellite axle
The two ends of 31 are individually fixed in autorotation disk 22 and rotating disk 23.Rotating disk 23, satellite axle 31 and autorotation disk 22 three are formed stable
Structure, rotating disk 23 need not be supported by other structures, simple and reliable for structure, at autorotation disk 22 time rotational, passes through satellite
Axle 31 is rotated dish 23 and rotates, stability of rotation.The two ends of satellite axle 31 all can be welded with autorotation disk 22, rotating disk 23 respectively
Fixing, it is also possible to be to be threaded connection or fixed by modes such as nuts.Two pawl dishes at least it are fixed with on satellite axle 31
32, same satellite axle 31 is fixed with for mounting product 4 between the corresponding protuberance 321 of two pawl dishes 32 of lie farthest away
Peg 33.It is provided with two pawl dishes 32 on the same satellite axle 31 of the present embodiment, respectively close to autorotation disk 22 and rotating disk 23,
If peg 33 is reinforced further, pawl dish 32 is also set in centre position again, the centre of peg 33 is reinforced further,
Improve its stability.Can be fixed by welding or the mode such as be threaded connection between peg 33 and protuberance 321.For
The pawl dish 32 reinforced in centre, as comparing preferred embodiment, can offer through hole on protuberance 321, hangs
It is threaded on bar 33, and is respectively provided with adjusting nut at the obverse and reverse of protuberance 321, regulated by adjusting nut, by convex
Going out after portion 321 is adjusted to position proper on peg 33, the adjusting nut of locking obverse and reverse, by protuberance 321
Position locks.Being provided with mounting part on peg 33, product 4 is mounted on mounting part, can be effectively improved the utilization in short transverse
Rate, this kind of hanging structure, the quantity of the product of the mounting of each protuberance 321 correspondence determines that, therefore, even if same satellite
Arranging multiple pawl dish 32 on axle 31, the most effectively utilize also only one of which, remaining pawl dish 32 is used for positioning and reinforce satellite axle 31.
Considering the restriction of the size of rotary table 1, the quantity of satellite axle 31 can be 3-6 root, the quantity of the axis of rotation 21
Can be 5-7 root, the quantity of protuberance 321 could be arranged to 3-5, and now structure is arranged relatively rationally, has taken into account production matter
Amount and production efficiency, reduce waste of material.Protuberance 321 is uniformly distributed around satellite axle 31, so that each protuberance 321 is right
The product 4 on peg 33 answered is heated unanimously, improves the concordance of product 4.
For the ease of driving autorotation disk 22 to rotate, autorotation disk 22 and driving gear coaxially and are fixed by jackshaft, middle
Axle through rotary table 1 and is connected by bearing with rotary table 1, drives gear to be positioned at the lower section of rotary table 1, does not affect rotary table 1
The plated film of the product 4 of top.Fixed gear and the same side driving gear to be respectively positioned on rotary table 1, i.e. the lower section of rotary table 1, public
The outer peripheral face of rotating disk 1 is provided with gear, and driving means engages with the gear of the outer peripheral face of rotary table 1, to drive rotary table 1 turn
Dynamic, the fixed gear of the present embodiment and driving gear may be contained within driving of the lower section of following rotary table 1, i.e. vacuum plating pivoted frame
Dynamic device is respectively positioned on the lower section of rotary table 1, does not affect the plated film of the product 4 divided on rotary table 1 and the motion of each motion.
Rotary table 1 hollow structure ringwise had both saved material, alleviated weight, also allows for the fixed gear to lower section and drives the inspections such as gear
Repair.
Embodiment 2
Present embodiments provide a kind of vacuum coating equipment, including above-mentioned vacuum plating pivoted frame.Every satellite axle 31 all may be used
Effectively to utilize a pawl dish 32, with prior art, directly on rotary table 1 ', uniform pawl dish 32 ' is compared, many by arranging
The root axis of rotation 21, arranges many satellite axles 31 further around the axis of rotation 21, then can effectively utilize multiple pawl dish on an axis of rotation 21
32, and by adjust size, an axis of rotation 21 and the satellite axle 31 arranged around it and pawl dish 32, the space occupied not than
Pawl dish 32 ' of the prior art is the most more, even with smaller pawl dish 32, single pawl dish 32 is fixed the quantity of product 4
Reduce, but owing to an axis of rotation 21 is provided around the many axis of rotation 31 and pawl dish 32, the most double carries
Rise useful load and the production efficiency of product 4 in vacuum plating pivoted frame,.Due to once can to more product 4 plated film, and
Each Coating Materials consumption is constant, and the Coating Materials failing in prior art to use up all is wasted along with discharge, this enforcement
After the useful load of product 4 of the plating pivoted frame of example is double, the Coating Materials of the most same consumption can complete the plating of more products
Film, therefore can save Coating Materials., and satellite axle 31 can rotate around the axis of rotation 21, autorotation disk 22 can form rotation, produces
Product 4, in coating process, on the one hand rotate around the axis of rotation 21 along with autorotation disk 22, and constantly the inner side and outer side at rotary table 1 is followed
Ring, rotates along with rotary table 1 again simultaneously, moves to the diverse location of whole rotary table 1, drives product both to participate in revolution and also assists in
Rotation, after the circulation of whole revolution, evenly, and different products 4 turns due to continuous circulation the plated film of single product 4
Dynamic, the concordance of its plated film is the most fine.
When actual job, the evaporation time of vacuum coating equipment is t1, and the time that rotary table rotates a circle is t2, autorotation disk
The time rotated a circle be the least common multiple of t3, t2 and t3 be t4, set t1=n × t4, wherein, n is whole not less than 1
Number.Now, in each evaporation time t1, complete revolution and rotation can be obtained, it is ensured that the operating condition of each product is identical,
Ensure that the concordance of product.
Above content is only presently preferred embodiments of the present invention, for those of ordinary skill in the art, according to the present invention's
Thought, the most all will change, and this specification content should not be construed as the present invention
Restriction.
Claims (10)
1. a vacuum plating pivoted frame, it is characterised in that include that rotary table (1), described rotary table (1) can turn around revolution center
Dynamic, described rotary table (1) is evenly distributed with the many axis of rotation (21), on the every described axis of rotation (21) around revolution center is rounded
The rotating autorotation disk (22) that is provided with, described autorotation disk (22) is evenly distributed with many satellite axles around the axis of rotation (21) circle
(31), every described satellite axle (31) is all equipped with the pawl dish (32) for fixing product (4), the end of described autorotation disk (22)
Portion is fixed with driving gear, is fixed with fixed gear at described revolution center, and described fixed gear engages with described driving gear；
During plated film, driving means drives rotary table (1) to rotate, and described autorotation disk (22) is followed rotary table (1) and rotated around revolution center, with
Time drive gear and fixed gear engagement rotation, drive autorotation disk (22), satellite axle (31) and pawl dish (32) around the axis of rotation (21)
Rotate.
2. vacuum plating pivoted frame as claimed in claim 1, it is characterised in that the quantity of described rotary table (1) is two, two
Described rotary table (1) is oppositely arranged and is fixed by fixing bar (11), and the two ends of the described axis of rotation (21) are individually fixed in two
Described rotary table (1), the described axis of rotation (21) is also equipped with rotating disk (23), described rotating disk (23) and described autorotation disk
(22) being oppositely arranged, the two ends of described satellite axle (31) are individually fixed in described autorotation disk (22) and described rotating disk (23).
3. vacuum plating pivoted frame as claimed in claim 2, it is characterised in that described pawl dish (32) includes at least two convex
The protuberance (321) for connecting product (4) gone out.
4. vacuum plating pivoted frame as claimed in claim 3, it is characterised in that be at least fixed with two on described satellite axle (31)
Described pawl dish (32), the corresponding protuberance (321) of two described pawl dishes (32) of the upper lie farthest away of same satellite axle (31) it
Between be fixed with the peg (33) for mounting product (4).
5. vacuum plating pivoted frame as claimed in claim 4, it is characterised in that described peg (33) is provided with multiple mounting
Portion, described product (4) is mounted on described mounting part.
6. the vacuum plating pivoted frame as described in any one of claim 3-5, it is characterised in that described protuberance (321) is around described
Satellite axle (31) is uniformly distributed.
7. the vacuum plating pivoted frame as described in any one of claim 1-5, it is characterised in that described autorotation disk (22) and described drive
Moving gear is coaxial and is fixed by jackshaft, and described jackshaft through described rotary table (1) and passes through axle with described rotary table (1)
Hold connection.
8. vacuum plating pivoted frame as claimed in claim 7, it is characterised in that described fixed gear and the described equal position of driving gear
In the same side of described rotary table (1), the outer peripheral face of described rotary table (1) is provided with gear, driving means and described rotary table
(1) the gear engagement of outer peripheral face, to drive described rotary table (1) to rotate.
9. the vacuum plating pivoted frame as described in any one of claim 1-5, it is characterised in that the quantity of described satellite axle (31) is
3-6 root, the quantity of the described axis of rotation (21) is 5-7 root.
10. a vacuum coating equipment, it is characterised in that include the vacuum plating pivoted frame described in any one of claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610822625.5A CN106244993B (en) | 2016-09-13 | 2016-09-13 | A kind of vacuum plating pivoted frame and vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610822625.5A CN106244993B (en) | 2016-09-13 | 2016-09-13 | A kind of vacuum plating pivoted frame and vacuum coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106244993A true CN106244993A (en) | 2016-12-21 |
| CN106244993B CN106244993B (en) | 2019-10-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610822625.5A Expired - Fee Related CN106244993B (en) | 2016-09-13 | 2016-09-13 | A kind of vacuum plating pivoted frame and vacuum coating equipment |
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| CN109023246A (en) * | 2017-12-08 | 2018-12-18 | 常州市知豆信息科技有限公司 | A kind of efficient OLED evaporated device |
| CN109371352A (en) * | 2018-11-15 | 2019-02-22 | 苏州奥曼恩自动化科技有限公司 | A kind of hot spray apparatus |
| CN109455005A (en) * | 2018-12-20 | 2019-03-12 | 江苏华辐光电科技有限公司 | A kind of film-covered iron metal can rotation solidification equipment |
| CN109852939A (en) * | 2019-03-29 | 2019-06-07 | 陕西理工大学 | A kind of tool plated film rotary frame device of high vacuum multi-Arc Ion Plating |
| CN110760810A (en) * | 2019-11-27 | 2020-02-07 | 中山凯旋真空科技股份有限公司 | Rotating frame and coating equipment with same |
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| CN109455005B (en) * | 2018-12-20 | 2023-10-20 | 江苏华辐光电科技有限公司 | Tectorial membrane iron metal tank rotation solidification equipment |
| CN109852939A (en) * | 2019-03-29 | 2019-06-07 | 陕西理工大学 | A kind of tool plated film rotary frame device of high vacuum multi-Arc Ion Plating |
| CN110760810A (en) * | 2019-11-27 | 2020-02-07 | 中山凯旋真空科技股份有限公司 | Rotating frame and coating equipment with same |
| CN114836735A (en) * | 2021-02-01 | 2022-08-02 | 江苏菲沃泰纳米科技股份有限公司 | ICP-based plasma coating device and method |
| CN114836735B (en) * | 2021-02-01 | 2024-01-19 | 江苏菲沃泰纳米科技股份有限公司 | Plasma coating device and method based on ICP |
| CN114150285A (en) * | 2021-12-13 | 2022-03-08 | 湖北扬子江光电仪器有限公司 | Optical lens piece support for coating machine |
| WO2023116182A1 (en) * | 2021-12-23 | 2023-06-29 | 江苏菲沃泰纳米科技股份有限公司 | One-way rotating device, feeding device, and vacuum coating apparatus |
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