WO2023116182A1

WO2023116182A1 - One-way rotating device, feeding device, and vacuum coating apparatus

Info

Publication number: WO2023116182A1
Application number: PCT/CN2022/127522
Authority: WO
Inventors: 宗坚; 王志军
Original assignee: 江苏菲沃泰纳米科技股份有限公司
Priority date: 2021-12-23
Filing date: 2022-10-26
Publication date: 2023-06-29
Also published as: CN116334568A; TW202325871A; TWI827398B

Abstract

Disclosed in the present invention are a one-way rotating device, a feeding device, and a vacuum coating apparatus. The one-way rotating device comprises: a driving shaft configured to drive the one-way rotating device to rotate; a spline assembly, which is connected to the driving shaft and rotates with the rotation of the driving shaft; and a spiral base, which is connected to the spline assembly and rotates with the rotation of the spline assembly, wherein the spline assembly comprises a spline shaft; the spline shaft is provided with a plurality of one-way clamping heads, and the spiral base is provided with a plurality of one-way clamping slots fitted with the plurality of one-way clamping heads, so that the spiral base can rotate in one direction relative to the spline shaft, and the spiral base is limited to rotating in an opposite direction. The feeding device comprises a large rotating frame, a plurality of small rotating frames, and a one-way rotating device. By means of the one-way rotating device, a loading position can be adjusted at any time, so that high-efficiency loading is achieved, thereby improving the productivity thereof.

Description

One-way rotating device, feeding device and vacuum coating equipment

technical field

The invention relates to the technical field of vacuum coating, in particular to a unidirectional rotating device, a feeding device and vacuum coating equipment for vacuum coating.

Background technique

In the existing feeding device for vacuum coating, the n small planetary turrets and the sun gear are meshed through gears, so the n small planetary turrets can only be linked with the entire feeding device, but cannot rotate freely. In some specific positions, the loading position will be blocked, making loading difficult and the efficiency of loading extremely low.

Contents of the invention

In order to solve the technical problems existing in the prior art, an embodiment of the present invention provides a one-way rotating device and a feeding device and a vacuum coating equipment including the one-way rotating device, through which the one-way rotating device is installed The small material turntable can rotate freely, and the loading position can be adjusted at any time to achieve high-efficiency loading and increase production capacity.

According to one aspect of the present invention, a unidirectional rotating device is provided, which is used for rotating materials in vacuum coating equipment. The one-way rotation device includes: a drive shaft for driving the rotation of the one-way rotation device; a spline assembly connected to the drive shaft and rotates with the rotation of the drive shaft; and a screw seat connected to to the spline assembly, and rotate with the rotation of the spline assembly; wherein, the spline assembly includes a spline shaft, and the spline shaft is provided with a plurality of one-way chucks, and the screw seat There are a plurality of one-way card slots matched with the plurality of one-way chucks, thereby allowing the screw seat to rotate in one direction relative to the spline shaft, and restricting the screw seat to rotate in the opposite direction rotate.

Optionally, each one-way chuck of the spline shaft has a first arc surface, and each one-way slot of the screw seat has a second arc that is slidably fitted with the first arc surface. shaped surface.

Optionally, each one-way chuck of the spline shaft has a first stopper surface, and each one-way clamping groove of the screw seat has a second stopper that is matched with the first stopper surface. stop surface.

Optionally, a compression spring is provided between the spline shaft and the drive shaft.

Optionally, the spline assembly further includes a spline sleeve mounted on the spline shaft, and the spline sleeve is fixedly connected to the drive shaft.

Optionally, the spline sleeve is connected to the screw seat through a positioning sleeve.

Optionally, the positioning sleeve is a Huff type positioning sleeve.

According to another aspect of the present invention, a feeding device is provided, which is used for rotating feeding in vacuum coating equipment. The feeding device includes: a large turntable, on which a sun gear and a plurality of planetary gears meshed with the sun gear are installed, the large turntable can rotate relative to the sun gear, and the planetary wheels follow the rotation of the sun gear Rotated by the rotation of the large turret and rotates around the sun gear; a plurality of small turrets with brackets for supporting materials; and a one-way rotation device installed between the corresponding planetary wheels and the small turrets between.

Optionally, the feeding device further includes a turntable for driving the large turntable to rotate.

Optionally, the feeding device further includes a stop pin for limiting the rotation of the sun gear.

According to still another aspect of the present invention, a vacuum coating device is provided. The vacuum coating equipment includes: a cavity; and a feeding device arranged in the cavity.

Compared with the prior art, the technical solutions of the embodiments of the present invention have the following beneficial effects:

According to an embodiment of the present invention, the spline shaft is provided with a plurality of one-way clips, and the screw seat is provided with a plurality of one-way clip slots matched with the plurality of one-way clips, thereby allowing the The helical seat is rotatable in one direction relative to the splined shaft and constrained to rotate in the opposite direction.

A one-way rotation device is added to the design, and the small charging turret can rotate freely and independently in the direction of the joint rotation of the small planetary turret and the sun gear, achieving high-efficiency loading and improving equipment productivity.

Description of drawings

Other features and advantages of the present invention will be better understood through the following optional embodiments described in detail in conjunction with the accompanying drawings, in which the same symbols represent the same or similar components, wherein:

Fig. 1 shows a schematic structural diagram of a one-way rotating device according to an embodiment of the present invention;

Fig. 2 shows a schematic view of the structure of the spline shaft and the screw seat of the one-way rotation device in Fig. 1;

Fig. 3 shows a schematic structural view of a feeding device according to an embodiment of the present invention;

Fig. 4 shows the structural representation of the small turntable and the one-way rotation device of the feeding device in Fig. 3;

Fig. 5 shows a partial enlarged view of the small turntable and the one-way rotating device of the feeding device in Fig. 3 .

Detailed ways

The making and using of the embodiments are discussed in detail below. It should be understood, however, that the specific embodiments discussed are merely illustrative of specific ways to make and use the invention, and do not limit the scope of the invention. The expression of the structural position of each component such as up, down, top, bottom, etc. in the description is not absolute, but relative. These directional expressions are appropriate when the various components are arranged as shown in the drawings, but when the positions of the various components in the drawings are changed, these directional expressions are also changed accordingly.

As mentioned in the background technology, in the existing feeding device, the n small planetary turrets and the sun gear are meshed through gears, so the n small planetary turrets can only be linked with the entire feeding device, but It cannot rotate freely, and in some specific positions (such as the position near the center of the large turret on the small loading turret), it will block the loading position, making it difficult to load and extremely low in efficiency.

For this reason, the embodiment of the present invention provides a unidirectional rotating device and a feeding device, which are used for rotating feeding in vacuum coating equipment. Through the one-way rotating device, the charging position can be adjusted at any time to realize high-efficiency charging and increase the production capacity.

FIG. 1 shows a schematic structural view of a one-way rotating device 100 according to an embodiment of the present invention; FIG. 2 shows a schematic structural view of a spline shaft and a screw seat of the one-way rotating device in FIG. 1 .

As shown in FIGS. 1 and 2 , the one-way rotation device 100 includes a drive shaft 110 , a spline assembly 120 and a screw seat 130 . The driving shaft 110 is used to drive the one-way rotating device 100 to rotate, for example, to drive the one-way rotating device 100 to rotate clockwise. The spline assembly 120 includes a spline shaft 121 and a spline sleeve 122, the spline assembly 120 is connected to the drive shaft 110, and rotates with the rotation of the drive shaft 110, wherein the spline sleeve 122 is mounted on the spline shaft 121, the spline The sleeve 122 is fixedly connected to the drive shaft 110 through, for example, a plurality of first bolts 141 . A plurality of first bolts 141 are distributed along the circumferential direction, for example, four first bolts 141 are provided.

In some embodiments, the spline sleeve 122 can slide axially relative to the spline shaft 121 and can rotate with the rotation of the spline shaft 121 . For example, the spline shaft 121 is provided with a spline groove along its axial direction, and the spline sleeve 122 is provided with a rolling element, and the rolling element is partially stuck in the spline groove and can roll in the spline groove. , so that the spline sleeve 122 can slide axially relative to the spline shaft 121 and can rotate with the rotation of the spline shaft 121 .

The screw seat 130 is connected to the spline assembly 120 and rotates as the spline assembly 120 rotates. Wherein, the screw seat 130 is sleeved on the spline shaft 121 of the spline assembly 120, the spline shaft 121 is provided with a plurality of one-way chucks 1211, and the screw seat 130 is provided with a plurality of one-way chucks 1211 to match. There are two unidirectional slots 131, so as to allow the helical seat 130 to rotate in one direction relative to the spline shaft 121, and restrict the helical seat 130 to rotate in the opposite direction. A plurality of one-way chucks 1211 are distributed along the circumferential direction of the spline shaft 121, and a plurality of one-way locking grooves 131 are distributed along the circumferential direction of the screw seat 130, and a plurality of one-way chucks 1211 and a plurality of one-way locking grooves 131 The specific number of can be set as required.

In some embodiments, each one-way chuck 1211 of the spline shaft 121 has a first arc-shaped surface 12111, and each one-way locking groove 131 of the screw seat 130 has a first arc-shaped surface 12111 that is slidably fitted. Two curved surfaces 1311 .

In some embodiments, each one-way clamp head 1211 of the spline shaft 121 has a first stop surface 12112, and each one-way card slot 131 of the screw seat 130 has a stop fit with the first stop surface 12112. Second stop surface 1312 .

In some embodiments, a compression spring 150 is disposed between the spline shaft 121 and the drive shaft 110 . The shaft end 1212 of the spline shaft 121 is inserted into the inner positioning hole 111 of the drive shaft 110, the compression spring 150 surrounds the shaft end 1212 of the spline shaft 121, one end of the compression spring 150 abuts against the drive shaft 110, and the other end abuts against the spline shaft 121. Under the action of the compression spring 150 , the first arc-shaped surface 12111 of each one-way clip 1211 of the spline shaft 121 fits the second arc-shaped surface 1311 of each one-way locking groove 131 of the screw seat 130 .

In some embodiments, the spline sleeve 122 is connected to the screw seat 130 through a positioning sleeve 160 . The first arc-shaped surface 12111 of each one-way clip 1211 of the spline shaft 121 cooperates with the second arc-shaped surface 1311 of each one-way locking groove 131 of the screw seat 130 to be defined inside the positioning sleeve 160 . For example, the positioning sleeve 160 is a Hough type positioning sleeve. The positioning sleeve 160 is fixedly connected to the spline sleeve 122 through a plurality of second bolts 142 , for example. A plurality of second bolts 142 are distributed along the circumferential direction, for example, four second bolts 142 are provided.

When the driving shaft 110 is driven to rotate clockwise, the spline shaft 121 rotates clockwise along with the driving shaft 110 . The first stop surface 12112 of each one-way chuck 1211 of the spline shaft 121 abuts against the second stop surface 1312 of each one-way slot 131 of the screw seat 130, so that the spline shaft 121 drives the screw seat 130 along the Rotate clockwise. When the drive shaft 110 is locked and stationary, the second arc-shaped surface 1311 of each one-way locking groove 131 of the screw seat 130 can slide relative to the first arc-shaped surface 12111 of each one-way chuck 1211 of the spline shaft 121, The screw seat 130 is allowed to continue to rotate clockwise relative to the spline shaft 121 , and the second stop surface 1312 of each one-way locking groove 131 of the screw seat 130 abuts each one-way clamping head 1211 of the spline shaft 121 The first stop surface 12112 restricts the rotation of the screw seat 130 relative to the spline shaft 121 in the counterclockwise direction. When the driving shaft 110 rotates clockwise, the screw seat 130 may rotate clockwise at a higher rotation speed than the driving shaft 110 under the action of an external driving force.

More specifically, when the screw base 130 rotates clockwise relative to the drive shaft 110 , the second arc-shaped surface 1311 of the one-way locking groove 131 corresponds to the first arc-shaped surface 12111 of the matched one-way chuck 1211 . Sliding clockwise, the shaft end 1212 of the spline shaft moves upward in the axial direction in the inner positioning hole 111 of the drive shaft 110; when the screw seat 130 turns to a certain angle, under the action of the compression spring 150 , the shaft end 1212 of the spline shaft 121 will move downward along the axial direction in the inner positioning hole 111 of the drive shaft 110. The first arc-shaped surface 12111 of the one-way chuck 1211 cooperates, so that the spiral seat 130 can rotate freely relative to the driving shaft 110 in such a cycle.

Fig. 3 shows a schematic structural view of a feeding device 200 according to an embodiment of the present invention; Fig. 4 shows a schematic structural view of a small turntable and a one-way rotating device of the feeding device 200 in Fig. 3; Fig. 5 shows A partial enlarged view of the small turntable and the one-way rotating device of the feeding device 200 in FIG. 3 is shown. The feeding device 200 may be arranged in the cavity of the vacuum coating equipment.

As shown in FIGS. 3 to 5 , the feeding device 200 includes a one-way rotating device 100 , a large turntable 210 and a plurality of small turntables 220 . The large turntable 210 is equipped with a sun gear 211 and a plurality of planetary gears 212 meshed with the sun gear 211, the large turntable 210 can rotate relative to the sun gear 211, and a plurality of planetary gears 212 rotate with the rotation of the large turntable 210 , and rotate around the sun gear 211. Each small turntable 220 has a bracket 221 for supporting the material 300 to be coated, and the one-way rotation device 100 is installed between a corresponding planetary wheel 212 and a small turntable 220 .

Specifically, the large turntable 210 is rotatably disposed in the cavity of the coating equipment, and a plurality of small turntables 220 are respectively rotatably disposed on the large turntable 210 to form a planetary turntable. Wherein a plurality of small turrets 220 are used to place the material 300 to be coated, so that the material 300 to be coated on the small turret 220 is driven by the small turret 220 to rotate around the rotation axis of the small turret 220 At the same time, under the drive of the large turntable 210, it rotates around the revolution axis of the large turntable 210, that is to say, the material to be coated 300 placed on the small turntable 220 is in the cavity of the coating equipment. Carry out rotation and revolution again.

In some embodiments, the feeding device 200 further includes a turntable for driving the large turntable 210 to rotate. In some embodiments, the feeding device 200 further includes a stop pin (not shown) for limiting the rotation of the sun gear 211 , and the stop pin fixes the sun gear 211 . Specifically, the sun gear 211 is implemented as a gear structure, and the sun gear 211 has a plurality of passages, wherein the stop pins pass through the passages of the sun gear 211 from top to bottom, so that the rotation of the sun gear 211 is controlled by the stop pins. limit. When the large turntable 210 rotates relative to the cavity, the sun gear 211 is restricted from rotating. The planetary gear 212 located around the sun gear 211 can still rotate around the sun gear 211, and can also rotate around the rotation axis of the small turret 220 while rotating around the revolution axis of the large turret 210 . That is, when the turntable drives the large turntable 210 to rotate, the planetary gears 212 will revolve around the revolution axis of the large turntable 210 along with the large turntable 210, and at the same time the planetary wheels 212 will mesh and roll along the outer periphery of the sun gear 211, The small turntable 220 is driven to rotate synchronously, so that the small turntable 220 rotates on its own.

In some embodiments, each small turntable 220 may include a plurality of supports 221 rotating around the rotation axis, wherein the plurality of supports 221 are stacked on the rotation axis at intervals, so that each layer or layers One or more materials to be coated 300 are placed on the bracket 221 , so that the bracket 221 drives a large amount of materials to be coated 300 to rotate and revolve in the coating chamber, so as to realize the coating process in batches.

As shown in FIG. 4 to FIG. 5 , the planetary gear 212 is installed at the end of the drive shaft 110 of the one-way rotation device 100 , for example, through the flat head and flat hole in the structure to realize simultaneous rotation and simultaneous stop. The screw seat 130 of the one-way rotating device 100 is fixedly connected to the small turntable 220 through a plurality of third bolts 143 , for example. When the planetary wheel 212 rotates in the clockwise direction under the action of the driving force, the small turntable 220 is driven to rotate in the clockwise direction by the screw seat 130. When the planetary gear 212 is locked and stationary, the small turntable 220 can only rotate clockwise, but not counterclockwise. When the planetary wheel 212 rotates clockwise, the small turntable 220 can rotate clockwise with a rotation speed greater than that of the planetary wheel 212 under the action of an external driving force, that is to say, the small turntable 220 can surpass the speed of the planetary wheel 212. The rotation speed is unidirectional in the clockwise direction.

During use, n (for example, 5) small carousels 220 are installed on the big carousel 210, and the sun gear 211 is installed on the big carousel 210, and the sun gear 211 can rotate positively and negatively relative to the big carousel 210, and the big carousel 210 is installed on the turntable, and generates frictional force with the turntable under the action of gravity of the big turntable 210 itself. When the turntable rotates, under the action of the friction force, the big turntable 210 also rotates accordingly. The sun gear 211 passes through the top stop mechanism (for example, a stop pin) in the cavity so that the sun gear 211 cannot rotate positively and negatively relative to the cavity, and the turntable can rotate positively and negatively relative to the cavity under the action of the driving force inside the cavity. Since the sun gear 211 cannot rotate relative to the cavity, when the turntable is stationary, the n planetary gears 212 are locked and cannot rotate with the sun gear 211, and the n small turntables 220 can rotate clockwise when loading, which solves the problem of loading The problem of difficulty in loading the small material turntable 220 close to the center of the large turntable 210 improves the efficiency of loading and achieves the purpose of increasing the production capacity of the equipment.

In the above embodiment, the drive shaft 110 of the one-way rotating device 100 rotates in the clockwise direction, and the screw seat 130 can rotate in the clockwise direction relative to the spline shaft 121, and the screw seat 130 is restricted from rotating in the counterclockwise direction. , the n small turrets 220 can rotate clockwise when loading, but cannot rotate counterclockwise; in other embodiments, the drive shaft 110 of the one-way rotating device 100 rotates counterclockwise, and the screw seat 130 can rotate counterclockwise with respect to the spline shaft 121, and restrict the screw base 130 from rotating clockwise. At this time, the n small turntables 220 can rotate counterclockwise when loading materials, but not clockwise. rotate.

According to the embodiment of the present invention, a one-way rotating device is added in the design, and it can freely rotate independently along the direction of the planetary small turret and the sun gear's joint rotation, so as to realize high-efficiency charging and improve the production capacity of the equipment.

The technical contents and technical characteristics of the present invention have been disclosed above, but it can be understood that under the creative idea of the present invention, those skilled in the art can make various changes and improvements to the above-mentioned disclosed concept, but all belong to the protection scope of the present invention . The description of the above embodiments is illustrative rather than restrictive, and the protection scope of the present invention is determined by the claims.

Claims

A unidirectional rotary device, used for rotary feeding in vacuum coating equipment, is characterized in that it includes:

a drive shaft, used to drive the one-way rotation device to rotate;

a spline assembly connected to the drive shaft and rotates with rotation of the drive shaft; and

a screw seat connected to the spline assembly and rotates with the rotation of the spline assembly;

Wherein, the spline assembly includes a spline shaft, the spline shaft is provided with a plurality of one-way chucks, and the screw seat is provided with a plurality of one-way card slots matched with the plurality of one-way chucks , thereby allowing the helical seat to rotate in one direction relative to the spline shaft, and restricting the helical seat to rotate in the opposite direction.
The one-way rotation device according to claim 1, wherein each one-way chuck of the spline shaft has a first arc surface, and each one-way groove of the screw seat has a shape corresponding to the The second arcuate surface is slidingly engaged with the first arcuate surface.
The one-way rotation device according to claim 1, wherein each one-way chuck of the spline shaft has a first stop surface, and each one-way clamping groove of the screw seat has a The first stop surface stops and cooperates with the second stop surface.
The one-way rotation device according to any one of claims 1 to 3, characterized in that a compression spring is provided between the spline shaft and the drive shaft.
The one-way rotation device according to any one of claims 1 to 3, wherein the spline assembly further includes a spline sleeve mounted on the spline shaft, and the spline sleeve is connected to the spline shaft. The drive shaft is fixedly connected.
The one-way rotation device according to claim 5, wherein the spline sleeve is connected to the screw seat through a positioning sleeve.
The one-way rotation device according to claim 6, wherein the positioning sleeve is a Huff type positioning sleeve.
A feeding device, used for rotary feeding in vacuum coating equipment, is characterized in that it includes:

The big carousel is equipped with a sun gear and a plurality of planetary gears meshed with the sun gear, the big carousel can rotate relative to the sun gear, and the planetary gears rotate with the rotation of the big carousel rotate and revolve around said sun gear;

multiple small turrets with brackets for supporting materials; and

The one-way rotating device according to any one of claims 1 to 7, which is installed between the corresponding planetary wheel and the small turntable.
The feeding device according to claim 8, further comprising a turntable for driving the big turntable to rotate.
The feeding device according to claim 8, further comprising a stop pin for limiting the rotation of the sun gear.
A kind of vacuum coating equipment, is characterized in that, comprises:

cavities; and

The feeding device according to any one of claims 8 to 10 is arranged in the cavity.