WO2023116182A1 - Dispositif rotatif unidirectionnel, dispositif d'alimentation et appareil de revêtement sous vide - Google Patents

Dispositif rotatif unidirectionnel, dispositif d'alimentation et appareil de revêtement sous vide Download PDF

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Publication number
WO2023116182A1
WO2023116182A1 PCT/CN2022/127522 CN2022127522W WO2023116182A1 WO 2023116182 A1 WO2023116182 A1 WO 2023116182A1 CN 2022127522 W CN2022127522 W CN 2022127522W WO 2023116182 A1 WO2023116182 A1 WO 2023116182A1
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WO
WIPO (PCT)
Prior art keywords
way
spline
rotate
shaft
rotation
Prior art date
Application number
PCT/CN2022/127522
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English (en)
Chinese (zh)
Inventor
宗坚
王志军
Original Assignee
江苏菲沃泰纳米科技股份有限公司
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Application filed by 江苏菲沃泰纳米科技股份有限公司 filed Critical 江苏菲沃泰纳米科技股份有限公司
Publication of WO2023116182A1 publication Critical patent/WO2023116182A1/fr

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

Definitions

  • the invention relates to the technical field of vacuum coating, in particular to a unidirectional rotating device, a feeding device and vacuum coating equipment for vacuum coating.
  • the n small planetary turrets and the sun gear are meshed through gears, so the n small planetary turrets can only be linked with the entire feeding device, but cannot rotate freely. In some specific positions, the loading position will be blocked, making loading difficult and the efficiency of loading extremely low.
  • an embodiment of the present invention provides a one-way rotating device and a feeding device and a vacuum coating equipment including the one-way rotating device, through which the one-way rotating device is installed
  • the small material turntable can rotate freely, and the loading position can be adjusted at any time to achieve high-efficiency loading and increase production capacity.
  • a unidirectional rotating device which is used for rotating materials in vacuum coating equipment.
  • the one-way rotation device includes: a drive shaft for driving the rotation of the one-way rotation device; a spline assembly connected to the drive shaft and rotates with the rotation of the drive shaft; and a screw seat connected to to the spline assembly, and rotate with the rotation of the spline assembly; wherein, the spline assembly includes a spline shaft, and the spline shaft is provided with a plurality of one-way chucks, and the screw seat There are a plurality of one-way card slots matched with the plurality of one-way chucks, thereby allowing the screw seat to rotate in one direction relative to the spline shaft, and restricting the screw seat to rotate in the opposite direction rotate.
  • each one-way chuck of the spline shaft has a first arc surface
  • each one-way slot of the screw seat has a second arc that is slidably fitted with the first arc surface. shaped surface.
  • each one-way chuck of the spline shaft has a first stopper surface
  • each one-way clamping groove of the screw seat has a second stopper that is matched with the first stopper surface. stop surface.
  • a compression spring is provided between the spline shaft and the drive shaft.
  • the spline assembly further includes a spline sleeve mounted on the spline shaft, and the spline sleeve is fixedly connected to the drive shaft.
  • the spline sleeve is connected to the screw seat through a positioning sleeve.
  • the positioning sleeve is a Huff type positioning sleeve.
  • a feeding device which is used for rotating feeding in vacuum coating equipment.
  • the feeding device includes: a large turntable, on which a sun gear and a plurality of planetary gears meshed with the sun gear are installed, the large turntable can rotate relative to the sun gear, and the planetary wheels follow the rotation of the sun gear Rotated by the rotation of the large turret and rotates around the sun gear; a plurality of small turrets with brackets for supporting materials; and a one-way rotation device installed between the corresponding planetary wheels and the small turrets between.
  • the feeding device further includes a turntable for driving the large turntable to rotate.
  • the feeding device further includes a stop pin for limiting the rotation of the sun gear.
  • a vacuum coating device is provided.
  • the vacuum coating equipment includes: a cavity; and a feeding device arranged in the cavity.
  • the spline shaft is provided with a plurality of one-way clips
  • the screw seat is provided with a plurality of one-way clip slots matched with the plurality of one-way clips, thereby allowing the
  • the helical seat is rotatable in one direction relative to the splined shaft and constrained to rotate in the opposite direction.
  • a one-way rotation device is added to the design, and the small charging turret can rotate freely and independently in the direction of the joint rotation of the small planetary turret and the sun gear, achieving high-efficiency loading and improving equipment productivity.
  • Fig. 2 shows a schematic view of the structure of the spline shaft and the screw seat of the one-way rotation device in Fig. 1;
  • Fig. 3 shows a schematic structural view of a feeding device according to an embodiment of the present invention
  • Fig. 4 shows the structural representation of the small turntable and the one-way rotation device of the feeding device in Fig. 3;
  • Fig. 5 shows a partial enlarged view of the small turntable and the one-way rotating device of the feeding device in Fig. 3 .
  • the n small planetary turrets and the sun gear are meshed through gears, so the n small planetary turrets can only be linked with the entire feeding device, but It cannot rotate freely, and in some specific positions (such as the position near the center of the large turret on the small loading turret), it will block the loading position, making it difficult to load and extremely low in efficiency.
  • the embodiment of the present invention provides a unidirectional rotating device and a feeding device, which are used for rotating feeding in vacuum coating equipment.
  • the charging position can be adjusted at any time to realize high-efficiency charging and increase the production capacity.
  • FIG. 1 shows a schematic structural view of a one-way rotating device 100 according to an embodiment of the present invention
  • FIG. 2 shows a schematic structural view of a spline shaft and a screw seat of the one-way rotating device in FIG. 1 .
  • the one-way rotation device 100 includes a drive shaft 110 , a spline assembly 120 and a screw seat 130 .
  • the driving shaft 110 is used to drive the one-way rotating device 100 to rotate, for example, to drive the one-way rotating device 100 to rotate clockwise.
  • the spline assembly 120 includes a spline shaft 121 and a spline sleeve 122, the spline assembly 120 is connected to the drive shaft 110, and rotates with the rotation of the drive shaft 110, wherein the spline sleeve 122 is mounted on the spline shaft 121, the spline
  • the sleeve 122 is fixedly connected to the drive shaft 110 through, for example, a plurality of first bolts 141 .
  • a plurality of first bolts 141 are distributed along the circumferential direction, for example, four first bolts 141 are provided.
  • the spline sleeve 122 can slide axially relative to the spline shaft 121 and can rotate with the rotation of the spline shaft 121 .
  • the spline shaft 121 is provided with a spline groove along its axial direction
  • the spline sleeve 122 is provided with a rolling element, and the rolling element is partially stuck in the spline groove and can roll in the spline groove. , so that the spline sleeve 122 can slide axially relative to the spline shaft 121 and can rotate with the rotation of the spline shaft 121 .
  • the screw seat 130 is connected to the spline assembly 120 and rotates as the spline assembly 120 rotates.
  • the screw seat 130 is sleeved on the spline shaft 121 of the spline assembly 120, the spline shaft 121 is provided with a plurality of one-way chucks 1211, and the screw seat 130 is provided with a plurality of one-way chucks 1211 to match.
  • a plurality of one-way chucks 1211 are distributed along the circumferential direction of the spline shaft 121, and a plurality of one-way locking grooves 131 are distributed along the circumferential direction of the screw seat 130, and a plurality of one-way chucks 1211 and a plurality of one-way locking grooves 131
  • the specific number of can be set as required.
  • each one-way chuck 1211 of the spline shaft 121 has a first arc-shaped surface 12111
  • each one-way locking groove 131 of the screw seat 130 has a first arc-shaped surface 12111 that is slidably fitted.
  • Two curved surfaces 1311 Two curved surfaces 1311 .
  • each one-way clamp head 1211 of the spline shaft 121 has a first stop surface 12112, and each one-way card slot 131 of the screw seat 130 has a stop fit with the first stop surface 12112. Second stop surface 1312 .
  • a compression spring 150 is disposed between the spline shaft 121 and the drive shaft 110 .
  • the shaft end 1212 of the spline shaft 121 is inserted into the inner positioning hole 111 of the drive shaft 110, the compression spring 150 surrounds the shaft end 1212 of the spline shaft 121, one end of the compression spring 150 abuts against the drive shaft 110, and the other end abuts against the spline shaft 121.
  • the first arc-shaped surface 12111 of each one-way clip 1211 of the spline shaft 121 fits the second arc-shaped surface 1311 of each one-way locking groove 131 of the screw seat 130 .
  • the spline sleeve 122 is connected to the screw seat 130 through a positioning sleeve 160 .
  • the first arc-shaped surface 12111 of each one-way clip 1211 of the spline shaft 121 cooperates with the second arc-shaped surface 1311 of each one-way locking groove 131 of the screw seat 130 to be defined inside the positioning sleeve 160 .
  • the positioning sleeve 160 is a Hough type positioning sleeve.
  • the positioning sleeve 160 is fixedly connected to the spline sleeve 122 through a plurality of second bolts 142 , for example.
  • a plurality of second bolts 142 are distributed along the circumferential direction, for example, four second bolts 142 are provided.
  • the spline shaft 121 rotates clockwise along with the driving shaft 110 .
  • the first stop surface 12112 of each one-way chuck 1211 of the spline shaft 121 abuts against the second stop surface 1312 of each one-way slot 131 of the screw seat 130, so that the spline shaft 121 drives the screw seat 130 along the Rotate clockwise.
  • the second arc-shaped surface 1311 of each one-way locking groove 131 of the screw seat 130 can slide relative to the first arc-shaped surface 12111 of each one-way chuck 1211 of the spline shaft 121,
  • the screw seat 130 is allowed to continue to rotate clockwise relative to the spline shaft 121 , and the second stop surface 1312 of each one-way locking groove 131 of the screw seat 130 abuts each one-way clamping head 1211 of the spline shaft 121
  • the first stop surface 12112 restricts the rotation of the screw seat 130 relative to the spline shaft 121 in the counterclockwise direction.
  • the screw seat 130 may rotate clockwise at a higher rotation speed than the driving shaft 110 under the action of an external driving force.
  • the second arc-shaped surface 1311 of the one-way locking groove 131 corresponds to the first arc-shaped surface 12111 of the matched one-way chuck 1211 .
  • the shaft end 1212 of the spline shaft moves upward in the axial direction in the inner positioning hole 111 of the drive shaft 110;
  • the screw seat 130 turns to a certain angle, under the action of the compression spring 150 , the shaft end 1212 of the spline shaft 121 will move downward along the axial direction in the inner positioning hole 111 of the drive shaft 110.
  • the first arc-shaped surface 12111 of the one-way chuck 1211 cooperates, so that the spiral seat 130 can rotate freely relative to the driving shaft 110 in such a cycle.
  • Fig. 3 shows a schematic structural view of a feeding device 200 according to an embodiment of the present invention
  • Fig. 4 shows a schematic structural view of a small turntable and a one-way rotating device of the feeding device 200 in Fig. 3
  • Fig. 5 shows A partial enlarged view of the small turntable and the one-way rotating device of the feeding device 200 in FIG. 3 is shown.
  • the feeding device 200 may be arranged in the cavity of the vacuum coating equipment.
  • the large turntable 210 is rotatably disposed in the cavity of the coating equipment, and a plurality of small turntables 220 are respectively rotatably disposed on the large turntable 210 to form a planetary turntable.
  • a plurality of small turrets 220 are used to place the material 300 to be coated, so that the material 300 to be coated on the small turret 220 is driven by the small turret 220 to rotate around the rotation axis of the small turret 220
  • the large turntable 210 under the drive of the large turntable 210, it rotates around the revolution axis of the large turntable 210, that is to say, the material to be coated 300 placed on the small turntable 220 is in the cavity of the coating equipment. Carry out rotation and revolution again.
  • the feeding device 200 further includes a turntable for driving the large turntable 210 to rotate.
  • the feeding device 200 further includes a stop pin (not shown) for limiting the rotation of the sun gear 211 , and the stop pin fixes the sun gear 211 .
  • the sun gear 211 is implemented as a gear structure, and the sun gear 211 has a plurality of passages, wherein the stop pins pass through the passages of the sun gear 211 from top to bottom, so that the rotation of the sun gear 211 is controlled by the stop pins. limit.
  • the large turntable 210 rotates relative to the cavity, the sun gear 211 is restricted from rotating.
  • the planetary gear 212 located around the sun gear 211 can still rotate around the sun gear 211, and can also rotate around the rotation axis of the small turret 220 while rotating around the revolution axis of the large turret 210 . That is, when the turntable drives the large turntable 210 to rotate, the planetary gears 212 will revolve around the revolution axis of the large turntable 210 along with the large turntable 210, and at the same time the planetary wheels 212 will mesh and roll along the outer periphery of the sun gear 211, The small turntable 220 is driven to rotate synchronously, so that the small turntable 220 rotates on its own.
  • each small turntable 220 may include a plurality of supports 221 rotating around the rotation axis, wherein the plurality of supports 221 are stacked on the rotation axis at intervals, so that each layer or layers One or more materials to be coated 300 are placed on the bracket 221 , so that the bracket 221 drives a large amount of materials to be coated 300 to rotate and revolve in the coating chamber, so as to realize the coating process in batches.
  • the planetary gear 212 is installed at the end of the drive shaft 110 of the one-way rotation device 100 , for example, through the flat head and flat hole in the structure to realize simultaneous rotation and simultaneous stop.
  • the screw seat 130 of the one-way rotating device 100 is fixedly connected to the small turntable 220 through a plurality of third bolts 143 , for example.
  • the small turntable 220 is driven to rotate in the clockwise direction by the screw seat 130.
  • the small turntable 220 can only rotate clockwise, but not counterclockwise.
  • the small turntable 220 can rotate clockwise with a rotation speed greater than that of the planetary wheel 212 under the action of an external driving force, that is to say, the small turntable 220 can surpass the speed of the planetary wheel 212.
  • the rotation speed is unidirectional in the clockwise direction.
  • n small carousels 220 are installed on the big carousel 210
  • the sun gear 211 is installed on the big carousel 210
  • the sun gear 211 can rotate positively and negatively relative to the big carousel 210
  • the big carousel 210 is installed on the turntable, and generates frictional force with the turntable under the action of gravity of the big turntable 210 itself.
  • the turntable rotates, under the action of the friction force, the big turntable 210 also rotates accordingly.
  • the sun gear 211 passes through the top stop mechanism (for example, a stop pin) in the cavity so that the sun gear 211 cannot rotate positively and negatively relative to the cavity, and the turntable can rotate positively and negatively relative to the cavity under the action of the driving force inside the cavity. Since the sun gear 211 cannot rotate relative to the cavity, when the turntable is stationary, the n planetary gears 212 are locked and cannot rotate with the sun gear 211, and the n small turntables 220 can rotate clockwise when loading, which solves the problem of loading The problem of difficulty in loading the small material turntable 220 close to the center of the large turntable 210 improves the efficiency of loading and achieves the purpose of increasing the production capacity of the equipment.
  • a stop pin for example, a stop pin
  • the drive shaft 110 of the one-way rotating device 100 rotates in the clockwise direction, and the screw seat 130 can rotate in the clockwise direction relative to the spline shaft 121, and the screw seat 130 is restricted from rotating in the counterclockwise direction.
  • the n small turrets 220 can rotate clockwise when loading, but cannot rotate counterclockwise; in other embodiments, the drive shaft 110 of the one-way rotating device 100 rotates counterclockwise, and the screw seat 130 can rotate counterclockwise with respect to the spline shaft 121, and restrict the screw base 130 from rotating clockwise. At this time, the n small turntables 220 can rotate counterclockwise when loading materials, but not clockwise. rotate.
  • a one-way rotating device is added in the design, and it can freely rotate independently along the direction of the planetary small turret and the sun gear's joint rotation, so as to realize high-efficiency charging and improve the production capacity of the equipment.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Transmission Devices (AREA)
  • Specific Conveyance Elements (AREA)

Abstract

Selon la présente invention, on divulgue un dispositif rotatif unidirectionnel, un dispositif d'alimentation et un appareil de revêtement sous vide. Le dispositif rotatif unidirectionnel comprend : un arbre d'entraînement conçu pour entraîner le dispositif rotatif unidirectionnel en rotation ; un ensemble cannelure, qui est relié à l'arbre d'entraînement et tourne avec la rotation de l'arbre d'entraînement ; et une base en spirale, qui est reliée à l'ensemble cannelure et tourne avec la rotation de l'ensemble cannelure, l'ensemble cannelure comprenant un arbre cannelé ; l'arbre cannelé étant pourvu d'une pluralité de têtes de serrage unidirectionnelles, et la base en spirale étant pourvue d'une pluralité de fentes de serrage unidirectionnelles ajustées avec la pluralité de têtes de serrage unidirectionnelles, de telle sorte que la base en spirale peut tourner dans une direction par rapport à l'arbre cannelé, et la base en spirale est limitée en rotation dans une direction opposée. Le dispositif d'alimentation comprend un grand cadre rotatif, une pluralité de petits cadres rotatifs, et un dispositif rotatif unidirectionnel. Au moyen du dispositif rotatif unidirectionnel, une position de chargement peut être ajustée à tout moment, de telle sorte qu'un chargement à haut rendement est obtenu, ce qui permet d'améliorer la productivité de celui-ci.
PCT/CN2022/127522 2021-12-23 2022-10-26 Dispositif rotatif unidirectionnel, dispositif d'alimentation et appareil de revêtement sous vide WO2023116182A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202111591970.XA CN116334568A (zh) 2021-12-23 2021-12-23 单向旋转装置、上料装置以及真空镀膜设备
CN202111591970.X 2021-12-23

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WO2023116182A1 true WO2023116182A1 (fr) 2023-06-29

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PCT/CN2022/127522 WO2023116182A1 (fr) 2021-12-23 2022-10-26 Dispositif rotatif unidirectionnel, dispositif d'alimentation et appareil de revêtement sous vide

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CN (1) CN116334568A (fr)
TW (1) TWI827398B (fr)
WO (1) WO2023116182A1 (fr)

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CN117660914A (zh) * 2024-01-31 2024-03-08 山西贝创玻璃制品有限公司 一种红外线灯泡蒸铝镀膜装置

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JP2009051441A (ja) * 2007-08-29 2009-03-12 Nsk Ltd 電動式パワーステアリング装置
TW201020118A (en) * 2008-11-17 2010-06-01 Kinpo Elect Inc Unidirectional rotation device and unidirectional paper-feeding apparatus using the same
GB2490114A (en) * 2011-04-18 2012-10-24 Rolls Royce Plc Splined coupling having biasing elements to remove backlash
CN106244993A (zh) * 2016-09-13 2016-12-21 宇龙计算机通信科技(深圳)有限公司 一种真空电镀转架及真空镀膜机
CN206511652U (zh) * 2016-12-31 2017-09-22 深圳大宇精雕科技有限公司 吸取装置
CN111809160A (zh) * 2020-07-29 2020-10-23 北航歌尔(潍坊)智能机器人有限公司 工件架旋转系统以及真空镀膜设备

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CN101988187B (zh) * 2009-08-07 2012-11-07 沈阳科友真空技术有限公司 一种真空磁控溅射彩镀设备
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Publication number Priority date Publication date Assignee Title
JP2009051441A (ja) * 2007-08-29 2009-03-12 Nsk Ltd 電動式パワーステアリング装置
TW201020118A (en) * 2008-11-17 2010-06-01 Kinpo Elect Inc Unidirectional rotation device and unidirectional paper-feeding apparatus using the same
GB2490114A (en) * 2011-04-18 2012-10-24 Rolls Royce Plc Splined coupling having biasing elements to remove backlash
CN106244993A (zh) * 2016-09-13 2016-12-21 宇龙计算机通信科技(深圳)有限公司 一种真空电镀转架及真空镀膜机
CN206511652U (zh) * 2016-12-31 2017-09-22 深圳大宇精雕科技有限公司 吸取装置
CN111809160A (zh) * 2020-07-29 2020-10-23 北航歌尔(潍坊)智能机器人有限公司 工件架旋转系统以及真空镀膜设备

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117660914A (zh) * 2024-01-31 2024-03-08 山西贝创玻璃制品有限公司 一种红外线灯泡蒸铝镀膜装置
CN117660914B (zh) * 2024-01-31 2024-04-09 山西贝创玻璃制品有限公司 一种红外线灯泡蒸铝镀膜装置

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TW202325871A (zh) 2023-07-01
CN116334568A (zh) 2023-06-27

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