CN208038549U - A kind of novel evaporation film coating jig - Google Patents
A kind of novel evaporation film coating jig Download PDFInfo
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- CN208038549U CN208038549U CN201820386905.0U CN201820386905U CN208038549U CN 208038549 U CN208038549 U CN 208038549U CN 201820386905 U CN201820386905 U CN 201820386905U CN 208038549 U CN208038549 U CN 208038549U
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- film coating
- evaporation film
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Abstract
The utility model discloses a kind of novel evaporation film coating jigs, are mounted on coating machine vacuum cavity inner upper comprising track, connector, slewing equipment and four plating pots；Track is mounted on coating machine vacuum cavity internal upper part by connector suspension；Slewing equipment setting is in orbit, slewing equipment includes driving mechanism, revolution annulus, four wheels and four arms, driving mechanism is located at turn around above annulus and driving revolution annulus rotates horizontally, four arms are evenly distributed on revolution annulus, arm upper end is connected and fixed by bolt and revolution annulus, and arm lower end is provided with wheel；Four plating pots are mounted on by rotating shaft on four wheels respectively, and plating pot rotation is driven when rotating of wheel；Arm is movable adaptive adjusting arm there are one in four arms, and excess-three arm is fixing arm.By the above-mentioned means, the utility model can greatly increase single yield, improve production efficiency under conditions of not increasing vacuum coating equipment cavity size.
Description
Technical field
The utility model is related to vacuum coating equipment fields, more particularly to a kind of novel evaporation film coating jig.
Background technology
Industrially common vacuum coating equipment is evaporated plated film, with the film layer deposited required for completing substrate surface.Very
Empty evaporation coating needs certain vacuum condition and evaporation conditions, evaporation coating techniques develop in physical gas phase deposition technology compared with
It is early, and vacuum vapor plating equipment and technology is relatively simple, you can the very pure film layer of deposition, and can prepare with spy
The film layer of structure and property is determined, so vacuum coating equipment is widely used in the industries such as semiconductor, power device, LED.
Currently, loading the film coating jig of substrate in vacuum coating equipment generally using three plating pots.Using this kind
The single yield of the vacuum coating equipment of film coating jig is not high.In the case where country advocates the background of energy-saving and emission-reduction, how effectively to carry
High single yield is the direction that we study.
A kind of novel film coating jig of Patent No. CN205662594U, the jig of taper fills to be evenly distributed on model
A certain size material putting hole, the surrounding of jig dress model is equipped with the baffle that shape outward forms an angle, taper
There are upward connecting rod I, the upper end of connecting rod I to be fixed with clamping plate, pass through between clamping plate and fixture folder on jig dress model apex angle
Bolt is detachable, and fixture folder can be fastened by connecting rod II with vacuum coating equipment cavity to be connected.The film coating jig can be
In the case of not changing vacuum coating jig cavity volume, plated film while progress more than one piece material as much as possible；And pass through
Baffle is installed, as possible so that the coating materials to be plated of evaporation converges in the lower aspect of material, reduces the pollution for even avoiding material to be plated,
Improve product quality；Although the film coating jig can carry out plated film while more than one piece material, the list actually improved as far as possible
Secondary yield unobvious.
Patent No. CN 204198846U it is a kind of can rotation-revolution planetary film coating jig of following an example, film coating jig installation
In coating machine chamber inner upper, film coating jig includes mainly jig body, revolution system and self-rotating system, and jig body includes three
A jig disk, jig disk are umbrella shape, and connecting pole is provided at the tip in the middle part of umbrrlla jig plate；This can rotation-revolution star of following an example
Formula film coating jig utilizes the principle of planetary motion, makes jig disk in coating machine intracavitary according to the characteristics of motion of planetary rotation and revolution
The effect realized independent rotation and integrally revolved round the sun can achieve the purpose that the protection film layer uniform deposition of product surface when plated film,
And not only the main part of coated product can uniform coated, the edge and corner angle of coated product also can reach best plated film effect
Fruit realizes the uniformity of whole plated film；But it can not improve the single yield of substrate.
It is controlled so needing to design a kind of novel evaporation coating that can significantly improve single yield in order to solve the above problem
Tool.
Utility model content
The utility model can not increase very mainly solving the technical problems that a kind of novel evaporation film coating jig of offer
Under conditions of empty filming equipment cavity size, the quantity of pot and the structure of corresponding revolution jig are plated by change, to significantly
Increase single yield, improve production efficiency.
In order to solve the above technical problems, the technical solution that the utility model uses is：A kind of novel evaporation plating is provided
Film jig is mounted on coating machine vacuum cavity inner upper comprising：Track, connector, slewing equipment and four plating pots；Institute
It states track and coating machine vacuum cavity internal upper part is mounted on by connector suspension；The slewing equipment is arranged in the track
On, slewing equipment includes that driving mechanism, revolution annulus, four wheels and four arms, driving mechanism are located at turn around above annulus
And driving revolution annulus rotates horizontally, four arms are evenly distributed on revolution annulus, and arm upper end is connect with revolution annulus, hand
Arm lower end is provided with wheel；Four plating pots are mounted on by rotating shaft on four wheels respectively, and plating pot rotation is driven when rotating of wheel
Turn；Arm is movable adaptive adjusting arm there are one in four arms, and excess-three arm is fixing arm, is adjusted
Arm upper end and the adjustable connection of the revolution annulus, fixing arm upper end are fixedly connected with revolution annulus.
Preferably, the revolution annulus upper surface is provided with fixed block, the upper end for adjusting arm by pin with
Fixed block movably connects, and pin, which passes through, adjusts arm and fixed block；There are skies between the adjusting arm and the revolution annulus
Gap adjusts arm and turns round also by the bolt presses connection equipped with spring between annulus, and spring upper end is against the nut of bolt
On, lower spring end is against on the adjusting arm.
Preferably, pin buckle is inserted on the pin, pin buckle is located between fixed block and adjusting arm.
Preferably, gasket there are two being set on the spring, a gasket is between spring and nut, another gasket position
Between spring and adjusting arm.
Preferably, there are two the bolts, axis of two bolts perpendicular to pin.
Preferably, the local location for adjusting arm is corresponded on the revolution annulus to be of a straight line type.
Preferably, the fixing arm is located at the lower section of the revolution annulus.
Preferably, the fixing arm is screwed on the revolution annulus.
Preferably, the connector includes two cross bars and four montants, and two cross bars are fixed on the coating machine vacuum
Upper surface in cavity, four montants are fixedly connected perpendicular to the track, montant upper end with cross bar, and montant lower end is fixed with track
Connection；Correspondence is fixed with two montants on every cross bar.
The utility model has the beneficial effects that：The utility model can be in the item for not increasing vacuum coating equipment cavity size
Under part, the quantity of pot and the structure of corresponding revolution jig are plated by change, to greatly increase single yield, improve production effect
Rate promotes energy-saving and emission-reduction；In revolution will not because of imbalance and there is a situation where stuck or fall.
Description of the drawings
Fig. 1 is a kind of simplified pinciple structural schematic diagram of novel evaporation film coating jig of the utility model；
Fig. 2 is the partial enlarged view A of Fig. 1.
The label of each component is as follows in attached drawing：1, coating machine vacuum cavity；2, driving mechanism；3, pot is plated；4, rotating shaft；5,
Turn round annulus；6, track；7, fixing arm；8, arm is adjusted；81, fixed block；82, pin；83, pin buckle；84, bolt；85, bullet
Spring；86, gasket；9, wheel；10, connector.
Specific implementation mode
The preferred embodiment of the utility model is described in detail below in conjunction with the accompanying drawings, so that the advantages of the utility model
It can be easier to be readily appreciated by one skilled in the art with feature, it is apparent clear to be made to the scope of protection of the utility model
Define.
It please refers to Fig.1 and Fig. 2, the utility model embodiment includes：
A kind of novel evaporation film coating jig is mounted on 1 inner upper of coating machine vacuum cavity comprising：Track 6, connection
Part 10, slewing equipment and four plating pots 3；The track 6 is mounted on by the suspension of the connector 10 in coating machine vacuum cavity 1
Top；The connector 10 includes two cross bars and four montants, on two cross bars are fixed in the coating machine vacuum cavity 1
Surface, four montants are fixedly connected perpendicular to the track 6, montant upper end with cross bar, and montant lower end is fixedly connected with track 6；
Correspondence is fixed with two montants on every cross bar.Four montants can correspond to four-point supporting.The slewing equipment is arranged described
On track 6, slewing equipment includes that driving mechanism 2, revolution annulus 5, four wheels 9 and four arms, driving mechanism 2 are located at turn around
5 top of annulus and the driving revolution horizontal rotation of annulus 5, four arms, which are evenly distributed in, to turn round on annulus 5, arm upper end and revolution
Annulus 5 connects, and arm lower end is respectively arranged with wheel 9；Four plating pots 3 are mounted on by rotating shaft 4 on four wheels 9 respectively,
Plating pot 3 is driven to rotate when wheel 9 turns round；Plating pot 3 is mainly mounted on by wheel 9 on arm by rotating shaft 4, because of track 6
The track of opposite 3 plating pots increases size, and the fixed angle of plating pot 3 is also changed, thus in order to make plating pot 3 according to
It is so connected on track 6, is provided with rotating shaft 4, rotating shaft 4 is used for installing plating pot 3.There are one arms in four arms
For movable adaptive adjusting arm 8, excess-three arm is fixing arm 7, adjusts 8 upper end of arm and the revolution annulus 5
Adjustable connection, 7 upper end of fixing arm are fixedly connected with revolution annulus 5.If four arms all by the way of fixed tighten, by
In the uneven reason of 4 points of revolutions on track 6, stuck situation leads to not produce when will produce revolution；So will wherein one
A arm is set as adjusting arm 8, situations such as meeting obstructions in revolution, automatic adjusument can be carried out, to ensure to turn round
It is smooth.
Be fixed with fixed block 81 on 5 upper surface of revolution annulus, the upper end for adjusting arm 8 by pin 82 with
Fixed block 81 is rotatably connected, and pin 82, which passes through, adjusts arm 8 and fixed block 81；The adjusting arm 8 and the revolution annulus 5
Between there are gap, the gap be adjust adapt to space；Also by being equipped with bullet between the adjusting arm 8 and revolution annulus 5
The bolt 84 of spring 85 compresses connection；Spring 85 is set on bolt 84, and 85 upper end of spring is against on the nut of bolt 84, spring 85
Lower end is against on the adjusting arm 8.Arm 8 is adjusted under the action of dead weight and spring 85, can keep being relatively fixed；In bullet
Under the action of spring 85, adjusting can be with automatic adjusument, to achieve the purpose that smooth revolution when arm 8 meets obstructions.The pin
Pin buckle 83 is inserted on 82, between pin buckle 83 is located at fixed block 81 and adjusts arm 8, pin buckle 83 can be in use to avoid pin 82
Because situations such as vibrations slips, ensure the stability of structure.It is set on the spring there are two gasket 86, two gaskets 86 are set in
On bolt 84, wherein between spring 85 and nut, another gasket 86 is located at spring 85 and adjusts arm a gasket 86
Between 8, between spring 85 can be limited in nut well and adjust arm 8 by gasket 86, prevent spring 85 from bolt 84
Bolt 84 is popped up or be caught at nut and is adjusted in the gap between arm 8.The adjusting arm is corresponded on the revolution annulus 5
8 local location is of a straight line type, and can facilitate the adjustment for adjusting arm 8, while can not expand the big of coating machine vacuum cavity 1
It is small.There are two the bolts 84, and two bolts 84 can improve the stability of structure perpendicular to the axis of pin 82.
The fixing arm 7 is located at the lower section of the revolution annulus 5, it is possible to reduce the length of fixing arm 7 saves material
Material, and it is fixed easy.The fixing arm 7 is screwed on the revolution annulus 5, and fixation is simple and convenient.
The utility model can plate the number of pot 3 by change under conditions of not increasing vacuum coating equipment cavity size
Amount and the structure of corresponding revolution jig promote energy-saving and emission-reduction to greatly increase single yield, improve production efficiency；It solves
Occur technical barrier that is stuck or falling because of uneven in revolution.
The above description is only the embodiments of the present invention, and it does not limit the scope of the patent of the present invention, every
Equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, is applied directly or indirectly in
Other related technical areas are equally included in the patent within the scope of the utility model.
Claims (9)
1. a kind of novel evaporation film coating jig is mounted on coating machine vacuum cavity inner upper, which is characterized in that including：Track,
Connector, slewing equipment and four plating pots；The track is mounted on by connector suspension in coating machine vacuum cavity
Portion；On the track, slewing equipment includes driving mechanism, revolution annulus, four wheels and four for slewing equipment setting
Arm, driving mechanism is located at turn around above annulus and driving revolution annulus rotates horizontally, and four arms are evenly distributed in turning circle
On ring, arm upper end is connect with revolution annulus, and arm lower end is provided with wheel；Four plating pots are mounted on four by rotating shaft respectively
Plating pot rotation is driven on a wheel, when rotating of wheel；Arm is movable adaptive adjusting hand there are one in four arms
Arm, excess-three arm are fixing arm, adjust arm upper end and the adjustable connection of the revolution annulus, fixing arm upper end with time
Turn annulus to be fixedly connected.
2. a kind of novel evaporation film coating jig according to claim 1, it is characterised in that：The revolution annulus upper surface is set
It is equipped with fixed block, the upper end for adjusting arm is movably connect by pin with fixed block, and pin is across adjusting arm and admittedly
Determine block；There are gaps between the adjusting arm and the revolution annulus, adjust between arm and revolution annulus also by being equipped with
The bolt presses of spring connect, and spring upper end is against on the nut of bolt, and lower spring end is against on the adjusting arm.
3. a kind of novel evaporation film coating jig according to claim 2, it is characterised in that：It is inserted with pin buckle on the pin,
Pin buckle is located between fixed block and adjusting arm.
4. a kind of novel evaporation film coating jig according to claim 2, it is characterised in that：Pad there are two being set on the spring
Piece, between spring and nut, another gasket is located between spring and adjusting arm a gasket.
5. a kind of novel evaporation film coating jig according to claim 2, it is characterised in that：There are two the bolts, two
Axis of the bolt perpendicular to pin.
6. a kind of novel evaporation film coating jig according to claim 2, it is characterised in that：Institute is corresponded on the revolution annulus
The local location for stating adjusting arm is of a straight line type.
7. a kind of novel evaporation film coating jig according to claim 1 or 2, it is characterised in that：The fixing arm is located at
The lower section of the revolution annulus.
8. a kind of novel evaporation film coating jig according to claim 1 or 2, it is characterised in that：The fixing arm passes through
Screw is fixed on the revolution annulus.
9. a kind of novel evaporation film coating jig according to claim 1, it is characterised in that：The connector includes two cross
Bar and four montants, two cross bars are fixed on upper surface in the coating machine vacuum cavity, four montants perpendicular to the track,
Montant upper end is fixedly connected with cross bar, and montant lower end is fixedly connected with track；Correspondence is fixed with two montants on every cross bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820386905.0U CN208038549U (en) | 2018-03-21 | 2018-03-21 | A kind of novel evaporation film coating jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820386905.0U CN208038549U (en) | 2018-03-21 | 2018-03-21 | A kind of novel evaporation film coating jig |
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| Publication Number | Publication Date |
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| CN208038549U true CN208038549U (en) | 2018-11-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201820386905.0U Active CN208038549U (en) | 2018-03-21 | 2018-03-21 | A kind of novel evaporation film coating jig |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111206225A (en) * | 2018-11-21 | 2020-05-29 | 聚昌科技股份有限公司 | Revolution and rotation plating pot structure for 3D evaporation |
-
2018
- 2018-03-21 CN CN201820386905.0U patent/CN208038549U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111206225A (en) * | 2018-11-21 | 2020-05-29 | 聚昌科技股份有限公司 | Revolution and rotation plating pot structure for 3D evaporation |
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