CN107805784B - A kind of OLED evaporated device - Google Patents
A kind of OLED evaporated device Download PDFInfo
- Publication number
- CN107805784B CN107805784B CN201711291603.1A CN201711291603A CN107805784B CN 107805784 B CN107805784 B CN 107805784B CN 201711291603 A CN201711291603 A CN 201711291603A CN 107805784 B CN107805784 B CN 107805784B
- Authority
- CN
- China
- Prior art keywords
- oled
- mounting ring
- vapor deposition
- ring
- stripper loop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 230000008020 evaporation Effects 0.000 claims abstract description 31
- 238000001704 evaporation Methods 0.000 claims abstract description 31
- 238000007740 vapor deposition Methods 0.000 claims abstract description 24
- 238000009434 installation Methods 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 16
- 125000006850 spacer group Chemical group 0.000 claims description 12
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 238000005086 pumping Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 14
- 239000000463 material Substances 0.000 abstract description 14
- 238000013461 design Methods 0.000 abstract description 9
- 238000005119 centrifugation Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 17
- 238000007789 sealing Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 8
- 230000003319 supportive effect Effects 0.000 description 7
- 239000010410 layer Substances 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 4
- 239000000084 colloidal system Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229920001621 AMOLED Polymers 0.000 description 1
- 241000826860 Trapezium Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (4)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201811204519.6A CN109112487A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device with high stability oled substrate feeder |
CN201811204504.XA CN109023245B (en) | 2017-12-08 | 2017-12-08 | High stability OLED evaporation equipment |
CN201811204513.9A CN109023288B (en) | 2017-12-08 | 2017-12-08 | OLED evaporation equipment with high-efficient evaporation equipment |
CN201811204495.4A CN109207928A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device with quick oled substrate conveying capacity |
CN201711291603.1A CN107805784B (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device |
CN201811204514.3A CN109023246B (en) | 2017-12-08 | 2017-12-08 | High-efficient OLED evaporation equipment |
CN201811205201.XA CN109182975A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device for capableing of quick-replaceable evaporation source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711291603.1A CN107805784B (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device |
Related Child Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811205201.XA Division CN109182975A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device for capableing of quick-replaceable evaporation source |
CN201811204513.9A Division CN109023288B (en) | 2017-12-08 | 2017-12-08 | OLED evaporation equipment with high-efficient evaporation equipment |
CN201811204504.XA Division CN109023245B (en) | 2017-12-08 | 2017-12-08 | High stability OLED evaporation equipment |
CN201811204495.4A Division CN109207928A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device with quick oled substrate conveying capacity |
CN201811204519.6A Division CN109112487A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device with high stability oled substrate feeder |
CN201811204514.3A Division CN109023246B (en) | 2017-12-08 | 2017-12-08 | High-efficient OLED evaporation equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107805784A CN107805784A (en) | 2018-03-16 |
CN107805784B true CN107805784B (en) | 2018-12-21 |
Family
ID=61579548
Family Applications (7)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811204519.6A Pending CN109112487A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device with high stability oled substrate feeder |
CN201811204504.XA Active CN109023245B (en) | 2017-12-08 | 2017-12-08 | High stability OLED evaporation equipment |
CN201711291603.1A Active CN107805784B (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device |
CN201811205201.XA Withdrawn CN109182975A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device for capableing of quick-replaceable evaporation source |
CN201811204495.4A Withdrawn CN109207928A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device with quick oled substrate conveying capacity |
CN201811204514.3A Active CN109023246B (en) | 2017-12-08 | 2017-12-08 | High-efficient OLED evaporation equipment |
CN201811204513.9A Active CN109023288B (en) | 2017-12-08 | 2017-12-08 | OLED evaporation equipment with high-efficient evaporation equipment |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811204519.6A Pending CN109112487A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device with high stability oled substrate feeder |
CN201811204504.XA Active CN109023245B (en) | 2017-12-08 | 2017-12-08 | High stability OLED evaporation equipment |
Family Applications After (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201811205201.XA Withdrawn CN109182975A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device for capableing of quick-replaceable evaporation source |
CN201811204495.4A Withdrawn CN109207928A (en) | 2017-12-08 | 2017-12-08 | A kind of OLED evaporated device with quick oled substrate conveying capacity |
CN201811204514.3A Active CN109023246B (en) | 2017-12-08 | 2017-12-08 | High-efficient OLED evaporation equipment |
CN201811204513.9A Active CN109023288B (en) | 2017-12-08 | 2017-12-08 | OLED evaporation equipment with high-efficient evaporation equipment |
Country Status (1)
Country | Link |
---|---|
CN (7) | CN109112487A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109609914A (en) * | 2019-02-27 | 2019-04-12 | 昆山国显光电有限公司 | A kind of crucible and its method for heating and controlling, evaporated device |
CN114308586A (en) * | 2021-12-30 | 2022-04-12 | 上海创功通讯技术有限公司 | Ceramic-like composite material and preparation method and application thereof |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6357759A (en) * | 1986-08-26 | 1988-03-12 | Sumitomo Heavy Ind Ltd | Method and apparatus for surface treatment in vacuum |
CN102234767A (en) * | 2010-04-30 | 2011-11-09 | 鸿富锦精密工业(深圳)有限公司 | Coating device and coating method |
CN203307428U (en) * | 2013-06-24 | 2013-11-27 | 芜湖真空科技有限公司 | Vacuum chamber rotary conveying mechanism of vacuum film coating machine |
CN203794974U (en) * | 2014-03-26 | 2014-08-27 | 东莞新能源科技有限公司 | Vapor deposition device |
CN104073764A (en) * | 2014-06-17 | 2014-10-01 | 京东方科技集团股份有限公司 | Rotary evaporation source device used for evaporation of OLED (organic light emitting diode) |
Family Cites Families (16)
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US4151064A (en) * | 1977-12-27 | 1979-04-24 | Coulter Stork U.S.A., Inc. | Apparatus for sputtering cylinders |
EP0409451A1 (en) * | 1989-07-18 | 1991-01-23 | Optical Coating Laboratory, Inc. | Process for depositing optical thin films on both planar and non-planar substrates |
JPH0572784A (en) * | 1991-09-12 | 1993-03-26 | Fuji Electric Co Ltd | Vapor deposition device |
JP2002363733A (en) * | 2001-06-04 | 2002-12-18 | Nippon Sheet Glass Co Ltd | Method of forming coating film |
US8123862B2 (en) * | 2003-08-15 | 2012-02-28 | Semiconductor Energy Laboratory Co., Ltd. | Deposition apparatus and manufacturing apparatus |
TWI384086B (en) * | 2004-03-15 | 2013-02-01 | Ulvac Inc | Film forming apparatus and thin film forming method |
KR100651258B1 (en) * | 2004-10-11 | 2006-11-29 | 두산디앤디 주식회사 | Multi-nozzle crucible assembly for OLED deposition process |
AT501722B1 (en) * | 2005-07-12 | 2006-11-15 | Miba Gleitlager Gmbh | COATING PROCESS |
KR100750654B1 (en) * | 2006-09-15 | 2007-08-20 | 한국전기연구원 | Long tape deposition apparatus |
JP2010095745A (en) * | 2008-10-15 | 2010-04-30 | Sumitomo Electric Ind Ltd | Film-forming method and film-forming apparatus |
DE102008062332A1 (en) * | 2008-12-15 | 2010-06-17 | Gühring Ohg | Device for surface treatment and / or coating of substrate components |
JP5715802B2 (en) * | 2010-11-19 | 2015-05-13 | 株式会社半導体エネルギー研究所 | Deposition equipment |
CN202898524U (en) * | 2012-10-31 | 2013-04-24 | 四川虹视显示技术有限公司 | Substrate rotation device for butt connection between organic matter evaporator and passivation layer evaporator |
CN104746007A (en) * | 2015-04-01 | 2015-07-01 | 浙江阳天包装材料有限公司 | Vacuum aluminizing machine |
CN106244993B (en) * | 2016-09-13 | 2019-10-11 | 宇龙计算机通信科技(深圳)有限公司 | A kind of vacuum plating pivoted frame and vacuum coating equipment |
CN107254661A (en) * | 2017-08-01 | 2017-10-17 | 河源耀国电子科技有限公司 | Flexible OLED evaporated device and its technique |
-
2017
- 2017-12-08 CN CN201811204519.6A patent/CN109112487A/en active Pending
- 2017-12-08 CN CN201811204504.XA patent/CN109023245B/en active Active
- 2017-12-08 CN CN201711291603.1A patent/CN107805784B/en active Active
- 2017-12-08 CN CN201811205201.XA patent/CN109182975A/en not_active Withdrawn
- 2017-12-08 CN CN201811204495.4A patent/CN109207928A/en not_active Withdrawn
- 2017-12-08 CN CN201811204514.3A patent/CN109023246B/en active Active
- 2017-12-08 CN CN201811204513.9A patent/CN109023288B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6357759A (en) * | 1986-08-26 | 1988-03-12 | Sumitomo Heavy Ind Ltd | Method and apparatus for surface treatment in vacuum |
CN102234767A (en) * | 2010-04-30 | 2011-11-09 | 鸿富锦精密工业(深圳)有限公司 | Coating device and coating method |
CN203307428U (en) * | 2013-06-24 | 2013-11-27 | 芜湖真空科技有限公司 | Vacuum chamber rotary conveying mechanism of vacuum film coating machine |
CN203794974U (en) * | 2014-03-26 | 2014-08-27 | 东莞新能源科技有限公司 | Vapor deposition device |
CN104073764A (en) * | 2014-06-17 | 2014-10-01 | 京东方科技集团股份有限公司 | Rotary evaporation source device used for evaporation of OLED (organic light emitting diode) |
Also Published As
Publication number | Publication date |
---|---|
CN109023246B (en) | 2020-08-14 |
CN109023245A (en) | 2018-12-18 |
CN109182975A (en) | 2019-01-11 |
CN109023288A (en) | 2018-12-18 |
CN109207928A (en) | 2019-01-15 |
CN109023288B (en) | 2020-10-13 |
CN107805784A (en) | 2018-03-16 |
CN109023246A (en) | 2018-12-18 |
CN109112487A (en) | 2019-01-01 |
CN109023245B (en) | 2020-04-03 |
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Effective date of registration: 20181106 Address after: Room 2207, Fulong Garden No. 1 Commercial and Residential Building, Houhai Village, Baiqi Township, Quanzhou City, Fujian Province, 362000 Applicant after: QUANZHOU PAITENG NEW MATERIAL TECHNOLOGY CO.,LTD. Address before: 213100 8 16, 16 Tianan Digital City, 588 Changwu Road, Wujin District, Changzhou, Jiangsu Applicant before: CHANGZHOU ZHIDOU INFORMATION TECHNOLOGY CO.,LTD. |
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Effective date of registration: 20190926 Address after: 030500 No. 8 Xinkai Road, Jiaocheng County, Luliang City, Shanxi Province Patentee after: Xue Xiaohui Address before: Room 2207, Fulong Garden No. 1 Commercial and Residential Building, Houhai Village, Baiqi Township, Quanzhou City, Fujian Province, 362000 Patentee before: QUANZHOU PAITENG NEW MATERIAL TECHNOLOGY CO.,LTD. |
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Effective date of registration: 20191205 Address after: 610000 Room 303, floor 3, No. 151, Tianxin Road, Chengdu hi tech Zone, Chengdu, Sichuan Province Patentee after: Chengdu Hongrui Photoelectric Technology Co.,Ltd. Address before: 030500 No. 8 Xinkai Road, Jiaocheng County, Luliang City, Shanxi Province Patentee before: Xue Xiaohui |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: An OLED evaporation plating equipment Effective date of registration: 20230817 Granted publication date: 20181221 Pledgee: Chengdu Rural Commercial Bank Co.,Ltd. high tech sub branch Pledgor: Chengdu Hongrui Photoelectric Technology Co.,Ltd. Registration number: Y2023510000198 |
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