CN207685342U - Tube-type chemical vapor deposition instrument and its stove gate device - Google Patents
Tube-type chemical vapor deposition instrument and its stove gate device Download PDFInfo
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- CN207685342U CN207685342U CN201721555866.4U CN201721555866U CN207685342U CN 207685342 U CN207685342 U CN 207685342U CN 201721555866 U CN201721555866 U CN 201721555866U CN 207685342 U CN207685342 U CN 207685342U
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- Prior art keywords
- guide member
- sliding part
- gate device
- displacement mechanism
- stove gate
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Abstract
The utility model discloses a kind of tube-type chemical vapor deposition instrument and its stove gate device, and stove gate device includes the first displacement mechanism, second displacement mechanism and oven door body.First displacement mechanism includes the first guide member and the first sliding part.First guide member is fixed on boiler tube and is located at nozzle side, and extends along perpendicular to the first level direction of plane where nozzle.The sliding of first sliding part drives set on the first guide member and by the first actuator.Second displacement mechanism includes the second guide member and the second sliding part.Second guide member is fixed on the first sliding part, and extends along the second horizontal direction perpendicular to first level direction.The sliding of second sliding part drives set on the second guide member and by the second actuator.Oven door body is fixedly connected on the second sliding part by fire door holder, and oven door body is solid construction.
Description
Technical field
The utility model is related to tube-type chemical vapor deposition instrument technical fields, in particular to a kind of tube-type chemical gas
Mutually deposition instrument and its stove gate device.
Background technology
The main flow of photovoltaic crystalline silicon manufacture of solar cells includes：Making herbs into wool, diffusion, wet etching, antireflection film
Preparation, screen printing electrode, sintering and testing, sorting.Wherein, the preparation of the photovoltaic solar cell antireflection film of industrialization,
Frequently with tubular type or the enhanced plasma activated chemical vapour deposition instrument of chain type (PECVD, Plasma Enhanced Chemical
Vapor Deposition), operation principle is to make the gas containing film composed atom by microwave or radio-frequency power supply etc.,
Vacuum drying oven intracavitary forms plasma, is gone out in deposition on substrate by chemical reaction using stronger plasma chemistry activity
Desired film.The deposition method has the advantages such as uniform production capacity height, film forming, high degree of automation, at low cost.
The fire door of existing tubular type PECVD instrument vacuum lumens has been typically provided with quartz observing window, the pumping of long-time multifrequency time
During vacuum work, three sealing rings at the small sealing ring, fire door at quartz observing window are (by extremely interior gradual change outside fire door
Greatly, bigger than sealing ring at observation window) it can be deformed because of boiler tube higher temperature (400-450 DEG C), lead to tubular type PECVD instrument
Vacuum chamber boiler tube air-tightness declines.Meanwhile quartz observing window sealing ring, in the deformation starting stage, vacuum chamber boiler tube air-tightness declines
Unobvious, thin-film deposition pressure change is little, and the appearance color indifference of antireflection film is seen on surface, but to deposition compact
Property antireflection film causes to perplex.In addition, in industrialization antireflection film preparation process, it is residual in boiler tube or on quartz observing window
White powder particle is stayed, needs periodic cleaning to keep clean.In addition, sealing ring and quartz glass are to use colloid at watch window
It sticks together, when replacing sealing ring, corresponding quartz window is also required to replace simultaneously.Furthermore it is provided with the stove of quartz observing window
Door carrys out work using rotation and two difference cylinders of straight line, and the used time is longer when especially rotary cylinder operates, and to can
The weight of the fire door of carrying has certain limitations.
Fire door design based on above-mentioned existing tubular type PECVD instrument vacuum lumens, can produce battery industry metaplasia and cause not
Profit influences.The leakproofness of fire door directly affects the vacuum-tightness of deposition instrument boiler tube.Numerous spare parts or easily-consumed products on fire door, such as
All models such as cylinder, sealing ring, sensor have it is different, can not be general mutually in single product.Equipment maintenance is given in the presence of observation window
It is long to cause consuming working hour.The use of rotary cylinder keeps the fire door ON/OFF used time longer, influences to produce production capacity, and to fire door weight
Amount has certain limitations
Utility model content
One main purpose of the utility model is to overcome at least one defect of the above-mentioned prior art, provide a kind of close
The stove gate device that sealing property is good, versatility is stronger and simple in structure.
Another main purpose of the utility model is to overcome at least one defect of the above-mentioned prior art, provides one kind
Tube-type chemical vapor deposition instrument with above-mentioned stove gate device.
To achieve the above object, the utility model adopts the following technical solution：
One side according to the present utility model provides a kind of stove gate device, is installed on tube-type chemical vapor deposition instrument
Boiler tube nozzle at.Wherein, the stove gate device includes the first displacement mechanism, second displacement mechanism and oven door body.Institute
It includes the first guide member and the first sliding part to state the first displacement mechanism.First guide member is fixed on the boiler tube and is located at institute
The side of nozzle is stated, and is extended along perpendicular to the first level direction of plane where the nozzle.The sliding of first sliding part is set to
First guide member and by the first actuator drive.The second displacement mechanism includes the second guide member and the second sliding part.
Second guide member is fixed on first sliding part, and extends along the second horizontal direction perpendicular to first level direction.
The second sliding part sliding drives set on second guide member and by the second actuator.The oven door body passes through fire door branch
Frame is fixedly connected on second sliding part, and the oven door body is solid construction.Wherein, the stove gate device passes through described
Two displacement mechanisms control the oven door body and are moved in the second horizontal direction, and by described in first displacement mechanism control
Oven door body moves on first level direction, to control the oven door body closing or open the nozzle.
One of embodiment according to the present utility model, first guide member are guide rod, first sliding part
For sliding sleeve, the sliding sleeve is sheathed on the guide rod.
One of embodiment according to the present utility model, first displacement mechanism include more guide rods, more institutes
Stating guide rod, parallel interval is arranged in the horizontal direction, is arranged with the sliding sleeve, second guiding on the every guide rod respectively
Part is fixed on multiple sliding sleeves.
One of embodiment according to the present utility model, first displacement mechanism further includes range sensor.Institute
It states range sensor and is set to first sliding part, to detect the relative distance of the oven door body and the nozzle, and will
Corresponding inductive signal is transferred to first actuator, so that first actuator adjusts the movement of first sliding part
State.
One of embodiment according to the present utility model, the second displacement mechanism be the linear guide, described second
Guide member is the guide rail of the linear guide, and second sliding part is the sliding block of the linear guide, and the oven door body is logical
It crosses the fire door holder and is fixedly connected on the sliding block.
One of embodiment according to the present utility model, the stove gate device further include track base.The track base
It is fixed on first sliding part, second guide member is fixed in the track base.
One of embodiment according to the present utility model, the second displacement mechanism further includes limit sensors.Institute
It states limit sensors and is set to the track base, to detect position of the oven door body in the second horizontal direction, and by phase
The inductive signal answered is transferred to second actuator, so that second actuator adjusts the movement shape of second sliding part
State.
One of embodiment according to the present utility model, the stove gate device further include fire door guiding mechanism.It is described
Fire door guiding mechanism includes third guide member and third sliding part.The third guide member be fixed on first sliding part and
It is oppositely arranged in parallel with second guide member.The third sliding part sliding is set on the third guide member and is connected to described
Fire door holder；Wherein, the oven door body is slided with second sliding part along second guide member by the fire door holder
When dynamic, the fire door holder drives the third sliding part to be slided along the third guide member, to be oriented to the oven door body.
One of embodiment according to the present utility model, the third sliding part are integrated knot with the fire door holder
Structure.
Other side according to the present utility model provides a kind of tube-type chemical vapor deposition instrument, including boiler tube, the stove
Pipe offers nozzle.Wherein, the tube-type chemical vapor deposition instrument further includes the stove gate device described in the respective embodiments described above.Institute
Oven door body is stated respectively by first displacement mechanism and second displacement mechanism driving and in first level direction and second
It is moved relative to the nozzle in horizontal direction, to control the oven door body closing or open the nozzle.
As shown from the above technical solution, the utility model proposes tube-type chemical vapor deposition instrument and its stove gate device it is excellent
Point and good effect are：
The utility model proposes tube-type chemical vapor deposition instrument and its stove gate device, pass through the first displacement mechanism and second
The design of displacement mechanism realizes that oven door body relative to the movement in the both direction of nozzle, can realize the stove of solid construction
The full closeding state of door body, to realize the closing of oven door body line up, favorable sealing property.In addition, this practicality is new
Type versatility is stronger and simple in structure, can be general mutually in single product, facilitates buying and fire door to repair, the fire door on/off operation used time
Shorten, improves production production capacity.
Description of the drawings
The following detailed description to preferred embodiments of the present invention is considered in conjunction with the accompanying drawings, the utility model
Various targets, feature and advantage will become apparent.Attached drawing is only the exemplary diagram of the utility model, not necessarily
It is drawn to scale.In the accompanying drawings, same reference numeral always shows same or similar component.Wherein：
Fig. 1 is a kind of structural schematic diagram of stove gate device shown according to an illustrative embodiments；
Fig. 2 is the vertical view of the stove gate device shown in Fig. 1.
Wherein, the reference numerals are as follows：
111. guide rod；
112. sliding sleeve；
121. guide rail；
122. sliding block；
131. oven door body；
132. fire door holder；
140. track base；
151. guided way；
210. boiler tube；
220. nozzle；
X. first level direction；
Y. the second horizontal direction.
Specific implementation mode
Embodying the exemplary embodiments of the utility model features and advantages will describe in detail in the following description.It should be understood that
Various variations can be had in different embodiments by being the utility model, all not depart from the scope of the utility model, and
Explanation therein and attached drawing are inherently illustrative, rather than to limit the utility model.
In being described below the different illustrative embodiments to the utility model, carried out with reference to attached drawing, the attached drawing
The part of the utility model is formed, and wherein shows many aspects of achievable the utility model by way of example not
Same example arrangement, system and step.It should be understood that other of component, structure, exemplary means, system and step can be used
Specified scheme, and structural and functional modification can be carried out without departing from the scope of the utility model.Although moreover, originally
Can be used in specification term " end ", " between ", " side " etc. the different example features and element of the utility model are described,
But these terms are in this article merely for convenient, such as with reference to the accompanying drawings described in exemplary direction.In this specification
Any content is not necessarily to be construed that the specific three dimensional direction of Structure of need is just fallen into the scope of the utility model.
Stove gate device embodiment
Refering to fig. 1, the structure that the stove gate device that can embody the principles of the present invention is representatively illustrated in Fig. 1 is shown
It is intended to.In the illustrative embodiments, the utility model proposes stove gate device be be applied to tube-type chemical vapor deposition
It is illustrated for instrument.It will be readily appreciated by those skilled in the art that other kinds of heavy for the stove gate device to be applied to
Product instrument or other equipment, and a variety of remodeling, addition, replacement, deletion or other variations are made to following specific implementation modes, this
A little variations still the utility model proposes stove gate device principle in the range of.
As shown in Figure 1, in the present embodiment, the utility model proposes stove gate device can be used for being mounted on tube-type chemical
At the nozzle 220 of the boiler tube 210 of vapor deposition instrument.Wherein, stove gate device includes mainly the first displacement mechanism, track base 140, the
Two displacement mechanisms, fire door guiding mechanism and oven door body 131.Cooperation is referring to Fig.2, representatively illustrated in Fig. 2 being capable of body
The stove gate device of existing the utility model principle adapts to vertical view when tube-type chemical vapor deposition instrument.Below in conjunction with above-mentioned attached
Figure, to the utility model proposes stove gate device the structure of each chief component, connection type and functional relationship carry out it is detailed
It describes in detail bright.
As shown in Figure 1, in the present embodiment, the first displacement mechanism includes mainly two guide rods 111 and two sliding sleeves
112.Specifically, two guide rods 111 are parallel in the horizontal direction and are oppositely arranged, one end of every guide rod 111 is fixedly connected
Tube-type chemical be vapor-deposited instrument boiler tube 210 and positioned at the side of nozzle 220, guide rod 111 is along flat where nozzle 220
The first level direction X in face extends.It is arranged respectively on every guide rod 111 there are one sliding sleeve 112, sliding sleeve 112 is driven by telescopic cylinder
It moves and can be slided in the extending direction of 111 upper edge guide rod 111 of guide rod.
It should be noted that guide rod 111 can be by other structures replacement and as the first guide member of the first displacement mechanism, example
Such as sliding rail.Sliding sleeve 112 can be by other structures replacement and as the first sliding part of the first displacement mechanism, such as sliding sleeve 112
Deng.Telescopic cylinder can also be substituted by other devices and as the first actuator of the first displacement mechanism, such as hydraulic cylinder etc..That is,
First displacement mechanism includes mainly the first guide member and the first sliding part.Specifically, the first guide member be fixed on boiler tube 210 and
Extend positioned at the side of nozzle 220 and along first level direction X.The sliding of first sliding part is driven set on the first guide member and by first
Moving part drives.By said structure design, the first displacement mechanism can realize oven door body 131 on the X of first level direction
It is mobile.
In other embodiments, the quantity of the first guide member is not limited to two, and can be one or more,
And first guide member quantity be it is multiple when, each first guide member is not limited to be respectively positioned in same level height, but should keep
It is parallel and be oppositely arranged.The quantity of first sliding part is also not limited to two, and can accordingly be adjusted according to the quantity of the first guide member
It is whole.Alternatively, when the first guide member is multiple, the quantity of the first sliding part can be less than the quantity of the first guide member, such as in
The sliding sleeve 112 of integral structure is set on more guide rods 111 simultaneously.Have in addition, the first displacement mechanism also may be selected to be other
Flexible or sliding function black box, such as telescoping cylinder, then one of the cylinder body of telescoping cylinder and cylinder rod are fixed on boiler tube
210 and as the first guide member, wherein another be then used as the first sliding part.
Further, as shown in Figure 1, in the present embodiment, the first displacement mechanism further includes range sensor.It is specific and
Speech, which is arranged on sliding sleeve 112, it can be used to detect the relative distance of oven door body 131 and nozzle 220,
And corresponding inductive signal is transferred to telescopic cylinder, so that telescopic cylinder adjusts the motion state of sliding sleeve 112.Preferably, away from
Magnetic sensor can be selected from sensor, but is not limited thereto.
As shown in Figure 1, in the present embodiment, track base 140 is fixed on two 112 tops of sliding sleeve, for second displacement
Mechanism is mounted in track base 140.Specifically, track base 140 is substantially in the straight slot structure of both ends open, along perpendicular to the
The second horizontal direction Y of one horizontal direction X extends.Also, cross section of the track base 140 on the X of first level direction is substantially in
" Qian " font, i.e., with horizontally disposed bottom plate and two blocks of side plates for being vertically arranged in bottom plate both sides.In other embodiments,
The structure of track base 140 is not limited to above-mentioned " Qian " font.Furthermore second displacement mechanism can be also set up directly on to sliding sleeve 112
On, and it is not provided with the structure of track base 140, it is not limited with present embodiment.
As shown in Figure 1, in the present embodiment, second displacement mechanism is the linear guide, include mainly guide rail 121 and cunning
Block 122.Specifically, guide rail 121 is fixed on along the second horizontal direction Y on the bottom plate of track base 140, sliding block 122 is by straight line gas
Cylinder drives and can be slided in the extending direction of 121 upper edge guide rail 121 of guide rail, and oven door body 131 is fixedly connected on sliding block 122
On.
It should be noted that the linear guide can be by other devices or composite structure replacement and as second displacement mechanism, i.e.,
Guide rail 121 can be substituted by other structures as the second guide member of second displacement mechanism, and sliding block 122 can be by other structures
Substitute and as the second sliding part of second displacement mechanism, straight line cylinder can also be substituted by other devices and as second telephone-moving
Second actuator of structure.That is, second displacement mechanism includes mainly the second guide member and the second sliding part.Specifically, second leads
Draw part to be fixed in track base 140, when track base 140 is not arranged, the second guide member can be directly anchored to each first sliding part
On, and the second guide member extends along the second horizontal direction Y.The sliding of second sliding part is set on the second guide member and by the second actuator
Driving.By said structure design, second displacement mechanism can realize movement of the oven door body 131 on the second horizontal direction Y.
Further, as shown in Figure 1, in the present embodiment, second displacement mechanism further includes limit sensors.It is specific and
Speech, the limit sensors are arranged on track base 140, further may be provided on the wherein side plate of track base 140, and limit passes
Sensor can be used in detecting position of the oven door body 131 on the second horizontal direction Y, and corresponding inductive signal is transferred to directly
Line cylinder, so that the motion state of straight line cylinder adjusting slider 122.Preferably, magnetic sensor also can be selected in range sensor,
But it is not limited thereto.
Further, as shown in Figure 1, in the present embodiment, second displacement mechanism further includes locating part.The locating part is set
It sets on the predeterminated position on guide rail 121, for limiting sliding scale of the sliding block 122 on guide rail 121, to oven door body
131 movement on the second horizontal direction Y is limited.
As shown in Figure 1, in the present embodiment, oven door body 131 is fixedly connected on sliding block 122 by fire door holder 132
On.Accordingly, stove gate device can be moved by second displacement mechanism controls oven door body 131 on the second horizontal direction Y, and be led to
It crosses the first displacement mechanism control oven door body 131 to move on the X of first level direction, to control oven door body 131 for pipe
The closing or unlatching of mouth 220.
Further, in the present embodiment, oven door body 131 using no quartz window closed solid structure, to
Enhance the air-tightness in the vacuum chamber of boiler tube 210, maintenance frequency is greatly decreased, extends the service life of oven door sealing circle, simultaneously
It ensure that the quality for preparing battery surface antireflection film, saved production cost.
As shown in Figure 1, in the present embodiment, fire door guiding mechanism includes mainly guided way 151.Specifically, being oriented to
Rail 151 is fixed on along the second horizontal direction Y on the floor of track base 140, and is spaced relatively with the guide rail of second displacement mechanism 121
Setting.While fire door holder 132 is fixedly connected on sliding block 122 of second displacement mechanism, part of it structure extends to guiding
It is slidably matched on rail 151 and with guided way 151.By said structure design, when oven door body 131 by fire door holder 132 with
When sliding block 122 is slided along guide rail 121, fire door holder 132 is slided along guided way 151 simultaneously, is existed to oven door body 131 to realize
Guiding in its moving process.
It should be noted that guided way 151 can be by other structures replacement and as the third guide member of fire door guiding mechanism.
Furthermore it is possible to be separately set in the third sliding part that third guide member is slidably matched, and third sliding part is connected to fire door branch
Frame 132 and both make synchronizing moving.Furthermore in the present embodiment, fire door holder 132 extends to guided way 151 and is slided with it
The part of dynamic cooperation also can be considered third sliding part, i.e., it is one that the third sliding part in present embodiment, which is with fire door holder 132,
Body structure.
It should be noted here that being shown in attached drawing and the stove gate device that describes in the present specification is only can use this reality
With an example in many kinds of stove gate devices of new principle.It should be clearly understood that the principles of the present invention are absolutely not only
It is limited to show in attached drawing or any details of stove gate device described in this specification or any part of stove gate device.
Tube-type chemical vapor deposition instrument embodiment
In conjunction with it is above-mentioned to the utility model proposes stove gate device an embodiment exemplary illustration, while coordinating ginseng
Read Fig. 1 and Fig. 2, it is introduced below the utility model proposes tube-type chemical be vapor-deposited illustrative embodiments of instrument.
As depicted in figs. 1 and 2, in the present embodiment, the utility model proposes tube-type chemical vapor deposition instrument it is main
Including boiler tube 210 and the utility model proposes stove gate device.Wherein, boiler tube 210 offers nozzle 220.Stove gate device
Oven door body 131 is respectively by the first displacement mechanism and the driving of second displacement mechanism and in first level direction X and the second level side
It is moved on Y relative to nozzle 220, to control closing and unlatching of the oven door body 131 relative to nozzle 220.
It should be noted here that shown in attached drawing and describe in the present specification tube-type chemical vapor deposition instrument be only energy
Enough use an example in many kinds of tube-type chemicals vapor deposition instrument of the utility model principle.It should be clearly understood that this
The principle of utility model be only limitted to show in attached drawing absolutely not or tube-type chemical described in this specification vapor deposition instrument it is any
Any part of details or tube-type chemical vapor deposition instrument.
In conclusion the utility model proposes tube-type chemical vapor deposition instrument and its stove gate device advantageous effect at least
Including：By the design of the first displacement mechanism and second displacement mechanism, realize oven door body relative in the both direction of nozzle
Movement, can realize the full closeding state of the oven door body of solid construction, to realize the closing of oven door body line up,
Favorable sealing property., can be general mutually in single product in addition, the utility model versatility is stronger and simple in structure, facilitate buying and
Fire door repairs, and the fire door on/off operation used time shortens, and improves production production capacity.
It is described in detail above and/or illustrate the utility model proposes tube-type chemical vapor deposition instrument and its fire door dress
The illustrative embodiments set.But the embodiment of the utility model is not limited to particular implementation as described herein, on the contrary,
The component part and/or step of each embodiment can be independent with other component parts as described herein and/or step and be divided
Open use.Each component part of one embodiment and/or each step also can be with other composition portions of other embodiment
Divide and/or step is used in combination.Introduce it is described here and/or diagram element/component part/wait whens, term "one",
" one " and " above-mentioned " etc. to indicate there are one or more elements/component part/etc..Term "comprising", " comprising " and " tool
Have " it can also be deposited other than waiting to indicate the open meaning being included and refer to element/component part/in addition to listing
Other element/component part/etc..In addition, the term " first " and " second " etc. in claims and specification are only made
It is used for label, is not the numerical limit to its object.
Although according to different specific embodiments to the utility model proposes tube-type chemical vapor deposition instrument and its stove
Door gear is described, but it will be recognized by those skilled in the art can be in the spirit and scope of the claims to this practicality
Novel implementation is modified.
Claims (10)
1. a kind of stove gate device is installed at the nozzle of the boiler tube of tube-type chemical vapor deposition instrument, which is characterized in that the fire door
Device includes：
First displacement mechanism comprising：
First guide member is fixed on the boiler tube and the side positioned at the nozzle, and along perpendicular to plane where the nozzle
First level direction extend；And
First sliding part, sliding drive set on first guide member and by the first actuator；
Second displacement mechanism comprising：
Second guide member is fixed on first sliding part, and extends along the second horizontal direction perpendicular to first level direction；
And
Second sliding part, sliding drive set on second guide member and by the second actuator；And
Oven door body is fixedly connected on second sliding part by fire door holder, and the oven door body is solid construction；
Wherein, the stove gate device is moved up by oven door body described in the second displacement mechanism controls in the second horizontal direction
It is dynamic, and the oven door body is controlled by first displacement mechanism and is moved on first level direction, to control the stove
The nozzle is closed or opened to door body.
2. stove gate device according to claim 1, which is characterized in that first guide member is guide rod, and described first slides
Moving part is sliding sleeve, and the sliding sleeve is sheathed on the guide rod.
3. stove gate device according to claim 2, which is characterized in that first displacement mechanism includes more guide rods, more
Parallel interval is arranged guide rod described in root in the horizontal direction, is arranged with the sliding sleeve on the every guide rod respectively, and described second
Guide member is fixed on multiple sliding sleeves.
4. stove gate device according to claim 1, which is characterized in that first displacement mechanism further includes：
Range sensor is set to first sliding part, to detect the relative distance of the oven door body and the nozzle, and
Corresponding inductive signal is transferred to first actuator, so that first actuator adjusts the fortune of first sliding part
Dynamic state.
5. stove gate device according to claim 1, which is characterized in that the second displacement mechanism is the linear guide, described
Second guide member is the guide rail of the linear guide, and second sliding part is the sliding block of the linear guide, the fire door sheet
Body is fixedly connected on the sliding block by the fire door holder.
6. stove gate device according to claim 1, which is characterized in that the stove gate device further includes：
Track base, is fixed on first sliding part, and second guide member is fixed in the track base.
7. stove gate device according to claim 6, which is characterized in that the second displacement mechanism further includes：
Limit sensors are set to the track base, to detect position of the oven door body in the second horizontal direction, and will
Corresponding inductive signal is transferred to second actuator, so that second actuator adjusts the movement of second sliding part
State.
8. stove gate device according to claim 1, which is characterized in that the stove gate device further includes fire door guiding mechanism,
It includes：
Third guide member is fixed on first sliding part and is oppositely arranged in parallel with second guide member；And
Third sliding part, sliding is set on the third guide member and is connected to the fire door holder；
Wherein, when the oven door body is slided with second sliding part along second guide member by the fire door holder,
The fire door holder drives the third sliding part to be slided along the third guide member, to be oriented to the oven door body.
9. stove gate device according to claim 8, which is characterized in that the third sliding part is one with the fire door holder
Body structure.
The instrument 10. a kind of tube-type chemical is vapor-deposited, including boiler tube, the boiler tube offer nozzle, which is characterized in that the tubular type
Chemical vapor deposition instrument further includes：
Such as claim 1~9 any one of them stove gate device, the oven door body is respectively by first displacement mechanism and institute
It states the driving of second displacement mechanism and is moved relative to the nozzle on first level direction and the second horizontal direction, to control
It states oven door body closing or opens the nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721555866.4U CN207685342U (en) | 2017-11-20 | 2017-11-20 | Tube-type chemical vapor deposition instrument and its stove gate device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721555866.4U CN207685342U (en) | 2017-11-20 | 2017-11-20 | Tube-type chemical vapor deposition instrument and its stove gate device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207685342U true CN207685342U (en) | 2018-08-03 |
Family
ID=62998594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721555866.4U Expired - Fee Related CN207685342U (en) | 2017-11-20 | 2017-11-20 | Tube-type chemical vapor deposition instrument and its stove gate device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207685342U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109374393A (en) * | 2018-09-25 | 2019-02-22 | 浙江绿舟科技有限公司 | Intelligent loading microwave test furnace |
| CN112563162A (en) * | 2019-07-30 | 2021-03-26 | 深圳市拉普拉斯能源技术有限公司 | Semiconductor processing equipment based on novel electrode structure |
| CN112563162B (en) * | 2019-07-30 | 2024-05-03 | 拉普拉斯新能源科技股份有限公司 | Semiconductor processing equipment based on novel electrode structure |
-
2017
- 2017-11-20 CN CN201721555866.4U patent/CN207685342U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109374393A (en) * | 2018-09-25 | 2019-02-22 | 浙江绿舟科技有限公司 | Intelligent loading microwave test furnace |
| CN112563162A (en) * | 2019-07-30 | 2021-03-26 | 深圳市拉普拉斯能源技术有限公司 | Semiconductor processing equipment based on novel electrode structure |
| CN112563162B (en) * | 2019-07-30 | 2024-05-03 | 拉普拉斯新能源科技股份有限公司 | Semiconductor processing equipment based on novel electrode structure |
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