CN210030885U

CN210030885U - Array type multi-furnace-tube PECVD equipment

Info

Publication number: CN210030885U
Application number: CN201822215255.6U
Authority: CN
Inventors: 郭艳; 李明
Original assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Current assignee: Hunan Red Sun Photoelectricity Science and Technology Co Ltd
Priority date: 2018-12-27
Filing date: 2018-12-27
Publication date: 2020-02-07
Anticipated expiration: 2028-12-27

Abstract

The utility model discloses a many boiler tubes PECVD equipment of array, including the furnace body cabinet, be equipped with the boiler tube that a plurality of arrays were arranged in the furnace body cabinet, including the furnace gate headstock gear, the furnace gate headstock gear includes furnace gate, rotary driving mechanism, and rotary driving mechanism links to each other with the furnace gate, is used for driving the furnace gate and realizes that the furnace gate is opened and close around vertical direction is rotatory. The utility model discloses a boiler tube is arranged to array, has greatly improved space utilization height, has made the equipment productivity higher.

Description

Array type multi-furnace-tube PECVD equipment

Technical Field

The utility model relates to a PEVCD equipment in the photovoltaic field of making, in particular to many stoves of array pipe PECVD equipment.

Background

With the increasing environmental pollution and energy shortage, the development of new energy has become a necessary trend in the development of human society. Solar energy has attracted attention as an inexhaustible clean energy source. The crystal silicon solar cell in the market mainstream at present directly converts light energy into electric energy through a photoelectric effect.

PECVD (plasma enhanced chemical vapor deposition) equipment is indispensable equipment in the field of photovoltaic manufacturing, and with the rapid development of the photovoltaic industry in China, the requirement on the productivity of the equipment is continuously improved, the conventional equipment is increased from 2 furnace tubes to 5 furnace tubes along the height direction, and if the furnace tubes are continuously increased in the height direction to expand the productivity of a single equipment, the stability of the integral structure of the equipment is greatly influenced, so that the equipment has the potential risk of easy dumping; meanwhile, the increase of the equipment height increases the processing difficulty of auxiliary components such as a rack, the manufacturing cost of the equipment is increased, the equipment is influenced by the height of a factory building, and the height of the PECVD equipment is also limited.

SUMMERY OF THE UTILITY MODEL

To the technical problem that prior art exists, the utility model provides a better, the higher array multi-furnace pipe PECVD equipment of productivity of space utilization of equipment stability.

In order to solve the technical problem, the utility model discloses a following technical scheme:

an array type multi-furnace-tube PECVD device comprises a furnace body cabinet, wherein a plurality of furnace tubes arranged in an array are arranged in the furnace body cabinet.

As a further improvement of the utility model: the furnace door opening and closing device comprises a furnace door and a rotary driving mechanism, wherein the rotary driving mechanism is connected with the furnace door and is used for driving the furnace door to rotate in the vertical direction to open and close the furnace door.

As a further improvement of the utility model: the rotary driving mechanism is a swing cylinder.

As a further improvement of the utility model: the boat pushing device comprises a horizontal moving guide rail assembly, a vertical moving guide assembly and a driving mechanism, and can respectively move horizontally and vertically along the horizontal moving guide rail assembly and the vertical moving guide assembly under the driving of the driving mechanism.

As a further improvement of the utility model: the boat pushing device pushes the sample boat loaded with the silicon wafers into the furnace tube under the driving of the driving assembly.

As a further improvement of the utility model: the horizontal moving guide rail component is a belt device or a guide rail.

As a further improvement of the utility model: the vertical guide assembly is a screw rod assembly.

As a further improvement of the utility model: the furnace also comprises a vacuum and pressure system, wherein the vacuum and pressure system comprises a vacuum pump for pumping out gas in the furnace pipe.

As a further improvement of the utility model: the system also comprises a radio frequency system, wherein the radio frequency system is a radio frequency power supply with a multi-output function.

As a further improvement of the utility model: the gas pipeline system comprises multiple paths of different gas pipelines, each path of gas pipeline is provided with multiple branch pipelines, and the branch pipelines are in butt joint with the furnace tubes.

Compared with the prior art, the utility model has the advantages of:

the utility model adopts a plurality of furnace tubes arranged in array, changes the original mode of increasing the furnace tubes from the height direction into the mode of increasing the furnace tubes from the width direction, fully utilizes the inner space of the furnace body cabinet, reduces the potential risk that the whole equipment is easy to topple over, improves the stability of the whole structure of the equipment, can greatly improve the productivity of the equipment and bring considerable economic benefit; the furnace door of the furnace tube is opened and closed in a mode of rotating around the vertical direction, so that the width size of the equipment can be effectively reduced, and the whole floor area of the equipment is reduced.

Drawings

Fig. 1 is a schematic view of the structure of the present invention.

Fig. 2 is a schematic side view of the furnace door opening and closing device of the present invention.

Fig. 3 is a schematic view of the top view structure of the furnace door opening and closing device of the present invention.

Fig. 4 is a schematic side view of the boat pushing device of the present invention.

Illustration of the drawings:

1. a furnace tube; 2. a furnace door opening and closing device; 21. a furnace door; 22. a rotation driving mechanism; 3. a horizontally moving guide rail assembly; 4. a vertical movement guide assembly; 5. a drive mechanism.

Detailed Description

The invention will be described in further detail with reference to the drawings and specific examples.

As shown in fig. 1 to 4, the utility model relates to an array type multi-furnace PECVD equipment, which comprises a furnace body cabinet, wherein a plurality of array arranged furnace tubes 1 are arranged in the furnace body cabinet. By adopting the arrangement mode of the array type, the original height direction increasing furnace tube 1 is changed into the width direction increasing furnace tube 1, the utilization rate of the space can be effectively improved, meanwhile, the stability of the equipment is prevented from being influenced by the overall overhigh height of the equipment, and the potential risk that the equipment is easy to dump due to the overhigh height is reduced. In this embodiment, the oven door opening and closing device 2 is further included, the oven door opening and closing device 2 includes an oven door 21 and a rotary driving mechanism 22, the rotary driving mechanism 22 is connected to the oven door 21, and the rotary driving mechanism 22 is used for driving the oven door 21 to rotate around the vertical direction to open and close the oven door 21. The opening and closing of the furnace door 21 are changed from the original linear movement opening and closing mode to the rotation opening and closing around the vertical direction, so that the width size of the equipment can be effectively reduced, and the integral floor area of the equipment is reduced.

As preferred embodiment, the utility model provides a rotary driving mechanism 22 is swing cylinder, and furnace gate headstock gear 2 passes through solenoid valve control swing cylinder for furnace gate 21 can realize that furnace gate 21 opens around the rotatory certain angle of vertical direction.

As the preferred embodiment, the utility model discloses still including pushing away the boat device, pushing away the boat device and including horizontal migration guide rail set spare 3, vertical migration direction subassembly 4 and actuating mechanism 5, pushing away the boat device and can do horizontal migration and vertical migration respectively along horizontal migration guide rail set spare 3 and vertical migration direction subassembly 4 under actuating mechanism 5's drive. The original boat pushing device of the single-row furnace tube 1 is changed from up-down movement to up-down movement and can move horizontally along the multiple rows of furnace tubes 1, so that the graphite boat loaded with silicon wafers is pushed into each furnace tube 1 by one boat pushing device shared by the multiple rows of furnace tubes 1, multiple sets of boat pushing devices are not needed, and the cost of the equipment can be effectively reduced.

In the preferred embodiment, the driving mechanism 5 comprises a speed reducer and a motor, so that the boat pushing device can reliably and stably move up, down, left and right, and has an adjustable speed.

As preferred embodiment, the utility model discloses a horizontal migration guide rail set spare 3 is belt device or guide rail, and vertical migration direction subassembly 4 is the lead screw subassembly.

The utility model discloses still include vacuum and pressure system, vacuum and pressure system keep specific pressure environment including being used for taking out gaseous vacuum pump in the boiler tube 1, pressure system makes in the boiler tube 1, through increasing pipeline and valve, can realize one set of vacuum and pressure system of multiseriate boiler tube 1 sharing.

The utility model discloses still include the radio frequency system, the radio frequency power supply of radio frequency system for having many output function can realize one set of radio frequency system of multiseriate boiler tube sharing, can effectively reduce the cost of equipment.

The utility model discloses still include the gas circuit system, the gas circuit system includes the different gas pipeline of multichannel, and every way gas pipeline is equipped with many branch pipelines, divides pipeline butt joint boiler tube 1, through increasing pipeline and valve, realizes one set of gas circuit system of a plurality of boiler tubes sharing, can effectively improve gaseous rate of utilization, reduces manufacturing cost. As a preferred embodiment, the gas path system is divided into four different gas pipelines of ammonia gas, silane, laughing gas and nitrogen gas.

Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, a plurality of modifications and decorations without departing from the principle of the present invention should be considered as the protection scope of the present invention.

Claims

1. The array type multi-furnace tube PECVD equipment comprises a furnace body cabinet and is characterized in that a plurality of furnace tubes (1) arranged in an array mode are arranged in the furnace body cabinet, and the array type multi-furnace tube PECVD equipment further comprises a boat pushing device, wherein the boat pushing device comprises a horizontal moving guide rail component (3), a vertical moving guide component (4) and a driving mechanism (5), and the boat pushing device can respectively move horizontally and vertically along the horizontal moving guide rail component (3) and the vertical moving guide component (4) under the driving of the driving mechanism (5).

2. The array type multi-furnace tube PECVD equipment as recited in claim 1, further comprising a furnace door opening and closing device (2), wherein the furnace door opening and closing device (2) comprises a furnace door (21) and a rotary driving mechanism (22), and the rotary driving mechanism (22) is connected with the furnace door (21) and is used for driving the furnace door (21) to rotate around a vertical direction to realize the opening and closing of the furnace door (21).

3. The array-type multi-furnace tube PECVD apparatus of claim 2, wherein the rotary driving mechanism (22) is a swing cylinder.

4. The array type multi-furnace tube PECVD apparatus of claim 1, wherein the boat pushing device pushes the silicon wafer-loaded sample boat into the furnace tube (1) under the driving of the driving mechanism (5).

5. The array-type multi-furnace tube PECVD apparatus of claim 1, wherein the horizontal moving guide rail assembly (3) is a belt device or a guide rail.

6. The array type multi-furnace tube PECVD apparatus of claim 1, wherein the vertical motion guide assembly (4) is a screw assembly.

7. The array multi-furnace PECVD apparatus of any one of claims 1-6, further comprising a vacuum and pressure system comprising a vacuum pump for evacuating gas from within the furnace.

8. The array-type multi-furnace PECVD apparatus of any one of claims 1-6, further comprising a radio frequency system, wherein the radio frequency system is a radio frequency power supply with multi-output function.

9. The array type multi-furnace tube PECVD apparatus of any one of claims 1-6, further comprising a gas path system, wherein the gas path system comprises a plurality of different gas pipelines, each gas pipeline is provided with a plurality of branch pipelines, and the branch pipelines are butted with the furnace tubes (1).