CN117672933A

CN117672933A - Feeding assembly and OLED evaporation packaging equipment

Info

Publication number: CN117672933A
Application number: CN202311544490.7A
Authority: CN
Inventors: 史延锋; 粗鲁
Original assignee: Kunshan Hetai Intelligent Technology Development Co ltd
Current assignee: Kunshan Hetai Intelligent Technology Development Co ltd
Priority date: 2023-11-20
Filing date: 2023-11-20
Publication date: 2024-03-08

Abstract

The invention discloses a feeding assembly and OLED evaporation packaging equipment, which belong to the technical field of OLED packaging, and comprise sealing plates arranged on two sides of an evaporation working device; the inner cavity of the rotating hole is rotationally connected with a threaded pipe through a rotating assembly; the surface of the hollow threaded rod is in threaded connection with the inner wall of the threaded pipe; according to the invention, through the arrangement of the feeding component, a plurality of groups of OLED substrates can be sequentially fed into the evaporation working device for evaporation, and the driving component can drive the OLED substrates to move, so that the OLED substrates to be evaporated enter the evaporation working device, the OLED substrates subjected to evaporation in the evaporation working device are moved out and taken out from the positioning component, and then the OLED substrates which are not subjected to evaporation are put into the positioning ring again for evaporation, so that the purpose of continuously evaporating the OLED substrates can be realized through the arrangement of the device.

Description

Feeding assembly and OLED evaporation packaging equipment

Technical Field

The invention belongs to the technical field of OLED packaging, and particularly relates to a feeding assembly and OLED evaporation packaging equipment.

Background

OLEDs are also known as organic laser displays and organic light emitting semiconductors. The organic light-emitting device is mainly applied to various mechanical equipment, digital equipment and other electronic products. In some smaller electronic products, the packaging process of the OLED device is strict, and the packaging process includes inorganic film packaging and organic film packaging, and the packaging process is usually performed by adopting evaporation equipment when the inorganic film packaging is performed.

Chinese patent with the authority (bulletin) number CN107805784B discloses an OLED evaporation device, which comprises an evaporation working device and an OLED substrate feeding device, wherein the evaporation working device and the OLED substrate feeding device are respectively arranged in front and back along the horizontal direction, the OLED substrate feeding device is provided with a hollow motor outer seat fixedly connected with a separation ring, a hollow rotating cup is arranged at the center of the hollow motor outer seat, the front end of the hollow rotating cup is rotationally connected with an inner ring of the separation ring, a rotating end cover is arranged at the center of the hollow rotating cup, and an OLED substrate fixing device is arranged at the front end of the rotating end cover. This patent has utilized centrifugal principle and hollow shaft motor structure's advantage, changes original design to basic tiling formula arrangement, becomes the arrangement of annular tube-shape for can hold more OLED base plates in the single vacuum chamber, produce the effect similar to centrifugation through the rotation of OLED base plate simultaneously, make the dynamics of the interior evaporation coating material molecule striking base plate of vacuum chamber show and promote, can also promote the even degree of coating film when production efficiency increases, overall structure seal is good, the leakage of pollution is reduced.

When the OLED evaporation equipment is used, the OLED substrate is fed into the evaporation working device through the OLED substrate feeding device, the OLED substrate can be evaporated only once, the processing efficiency is low, the next group of OLED substrates can be evaporated after the evaporation is finished by taking out the OLED substrate, and the processing continuity is poor.

Disclosure of Invention

The invention aims to provide a feeding component and an OLED evaporation packaging device, which are used for solving the problems that in the prior art, when the OLED evaporation device is used, an OLED substrate is fed into an evaporation working device through an OLED substrate feeding device, only one group of OLED substrates can be evaporated at a time, the processing efficiency is low, the next group of OLED substrates can be evaporated after the evaporation is finished, and the processing continuity is poor.

In order to achieve the above purpose, the invention adopts the following technical scheme:

the feeding assembly comprises sealing plates arranged at two sides of the evaporation working device; the inner cavity of the rotating hole is rotationally connected with a threaded pipe through a rotating assembly; the surface of the hollow threaded rod is in threaded connection with the inner wall of the threaded pipe; the positioning components are equidistantly arranged inside the hollow threaded rod and used for fixing the OLED substrate to be evaporated; the overturning assembly is arranged at one end of the hollow threaded rod and used for driving the OLED substrate to overturn after positioning so as to improve the evaporation uniformity of the OLED substrate; and the mounting frame is arranged at the bottom of the evaporation working device, a driving assembly for driving the threaded pipe to rotate is arranged on the mounting frame, and the threaded pipe rotates to drive the hollow threaded rod to move so as to drive the OLED substrate in the hollow threaded rod to move into the evaporation working device for evaporation.

Preferably, the driving assembly includes: a first gear rotatably connected to the surface of the sealing plate; the second gear is fixedly arranged on the surface of the threaded pipe, and the top of the first gear is meshed with the bottom of the second gear; and the power structure is arranged at the top of the mounting frame and used for driving the first gear to rotate.

Preferably, the power structure includes: the first driving motor is arranged on the surface of the mounting frame; a synchronous wheel I arranged on an output shaft of the driving motor I; and the synchronizing wheel II is arranged on one side of the gear I, and the synchronizing wheel I and the synchronizing wheel II are in transmission connection through a synchronous belt.

Preferably, the device further comprises a fixing frame fixedly arranged on the surface of the mounting frame, wherein the bottom of the first driving motor is fixedly connected with the top of the fixing frame, and the first driving motor is fixedly connected with the mounting frame through the fixing frame.

Preferably, the positioning assembly comprises: a plurality of groups of positioning rings arranged in the inner cavity of the hollow threaded rod; an arc groove arranged on the inner ring of the positioning ring; the arc-shaped positioning plate is connected to the inner cavity of the arc-shaped groove in a sliding manner; the connecting rod is arranged at one side of the arc-shaped positioning plate, and one end of the connecting rod, which is far away from the arc-shaped positioning plate, sequentially penetrates through the arc-shaped groove and the positioning ring and extends to the outside of the positioning ring; and the elastic connecting component is connected with one end of the connecting rod, which is positioned outside the positioning ring, and is arranged on the surface of the positioning ring.

Preferably, the elastic connection assembly includes: the fixed pipe is fixedly arranged on the surface of the positioning ring; the sliding plate is slidably arranged in the inner cavity of the fixed pipe, and one end of the connecting rod is fixedly connected with the surface of the sliding plate; and one end of the compression spring, which is far away from the sliding plate, is fixedly connected with the inner wall of the fixed pipe.

Preferably, still including locating spacing subassembly between hollow threaded rod and the closing plate, spacing subassembly includes: limiting plates fixedly arranged at two ends of the hollow threaded rod; a limiting rod is fixedly arranged between the two groups of limiting plates and positioned at two sides of the hollow threaded rod; and the limiting hole is formed in the surface of the sealing plate, and the surface of the limiting rod is in sliding connection with the inner wall of the limiting hole.

Preferably, the flipping assembly includes: the second driving motor is fixedly arranged on the surface of one group of the limiting plates, and an output shaft of the second driving motor sequentially penetrates through the limiting plates and the hollow threaded rod and extends to the inner cavity of the hollow threaded rod; the connecting shafts are used for fixedly connecting two adjacent groups of positioning rings together, an output shaft of the driving motor II is fixedly connected with one end of one group of connecting shafts, and one end of one group of connecting shafts, far away from the positioning rings, is rotationally connected with the inner wall of the hollow threaded rod; and a sealing block mounted to a surface of each set of the connection shafts.

Preferably, the rotating assembly includes: a rotating ring fixedly arranged on the surface of the threaded pipe; and the rotating groove is formed in the inner wall of the rotating hole, and the surface of the rotating ring is in sliding connection with the inner wall of the rotating groove.

OLED evaporation packaging equipment, including foretell feeding assembly, still including the bottom plate of locating the mounting bracket below, the top fixed mounting of bottom plate has two sets of slides, the sliding sleeve corresponding with the slide is installed to the bottom of mounting bracket, the inner wall of sliding sleeve and the surface sliding connection of slide.

The invention has the technical effects and advantages that: compared with the prior art, the feeding assembly and the OLED evaporation packaging equipment provided by the invention have the following advantages:

1. according to the invention, through the arrangement of the feeding component, a plurality of groups of OLED substrates can be sequentially fed into the evaporation working device for evaporation, and the driving component can drive the OLED substrates to move, so that the OLED substrates to be evaporated enter the evaporation working device, the OLED substrates subjected to evaporation in the evaporation working device are moved out and taken out from the positioning component, and then the OLED substrates which are not subjected to evaporation are put into the positioning ring again for evaporation, so that the aim of continuously evaporating a plurality of groups of OLED substrates can be realized through the arrangement of the device;

2. according to the invention, the OLED substrate in evaporation can be rotated through the arrangement of the turnover assembly so as to improve the uniformity of evaporation, the OLED substrate to be evaporated can be fixed in the inner cavity of the positioning ring through the arrangement of the positioning assembly, the threaded pipe and the sealing plate can be rotationally connected together through the arrangement of the rotation assembly, and the rotation assembly and the sealing block can be matched for sealing the rotation hole.

Drawings

FIG. 1 is a schematic diagram of a feeding assembly and an OLED vapor deposition packaging device in an embodiment of the present invention;

FIG. 2 is a schematic diagram of a driving assembly according to an embodiment of the present invention;

FIG. 3 is a schematic diagram of a rotating assembly according to an embodiment of the present invention;

FIG. 4 is a schematic view of a turnover assembly according to an embodiment of the present invention;

FIG. 5 is a schematic view of a positioning assembly according to an embodiment of the present invention;

fig. 6 is a schematic structural diagram of an elastic connection assembly according to an embodiment of the present invention.

In the figure: 1. a sealing plate; 2. a turning hole; 3. a threaded tube; 4. a hollow threaded rod; 5. a mounting frame; 6. a first gear; 7. a second gear; 8. driving a first motor; 9. a first synchronous wheel; 10. a second synchronous wheel; 11. a synchronous belt; 12. a fixing frame; 13. a positioning ring; 14. an arc-shaped groove; 15. an arc-shaped positioning plate; 16. a connecting rod; 17. a fixed tube; 18. a slide plate; 19. a compression spring; 20. a limiting plate; 21. a limit rod; 22. a limiting hole; 23. a second driving motor; 24. a connecting shaft; 25. a sealing block; 26. a rotating ring; 27. a rotating groove; 28. a bottom plate; 29. a slide; 30. and a sliding sleeve.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Referring to fig. 1-6, the invention discloses a feeding assembly, which comprises sealing plates 1 arranged at two sides of an evaporation working device; a rotating hole 2 arranged at the center of the sealing plate 1, wherein the inner cavity of the rotating hole 2 is rotationally connected with a threaded pipe 3 through a rotating assembly; a hollow threaded rod 4 arranged along the center line of the evaporation working device, wherein the surface of the hollow threaded rod 4 is in threaded connection with the inner wall of the threaded tube 3; the positioning components are equidistantly arranged inside the hollow threaded rod 4 and used for fixing the OLED substrate to be evaporated; the turnover assembly is arranged at one end of the hollow threaded rod 4 and used for driving the OLED substrate to turn over after positioning so as to improve the evaporation uniformity of the OLED substrate; and the mounting frame 5 is arranged at the bottom of the evaporation working device, a driving component for driving the threaded pipe 3 to rotate is arranged on the mounting frame 5, and the threaded pipe 3 rotates to drive the hollow threaded rod 4 to move so as to drive the OLED substrate in the hollow threaded rod 4 to move into the evaporation working device for evaporation.

According to the embodiment, the feeding assembly can sequentially send a plurality of groups of OLED substrates into the evaporation working device for evaporation, the driving assembly can drive the OLED substrates to move, so that the OLED substrates to be evaporated enter the evaporation working device, the OLED substrates subjected to evaporation in the evaporation working device are moved out and taken out from the positioning assembly, and then the OLED substrates which are not subjected to evaporation are placed into the positioning ring 13 again for evaporation, so that the purpose of continuously evaporating the OLED substrates can be achieved.

Specifically, the driving assembly includes a first gear 6 rotatably connected to the surface of the sealing plate 1; the second gear 7 is fixedly arranged on the surface of the threaded pipe 3, and the top of the first gear 6 is meshed with the bottom of the second gear 7; and a power structure which is arranged at the top of the mounting frame 5 and is used for driving the first gear 6 to rotate. The power structure comprises a first driving motor 8 arranged on the surface of the mounting frame 5; a first synchronizing wheel 9 arranged on the output shaft of the first driving motor 8; and a second synchronizing wheel 10 arranged on one side of the first gear 6, and the first synchronizing wheel 9 and the second synchronizing wheel 10 are in transmission connection through a synchronizing belt 11.

Through the setting of drive assembly, can put into the evaporation plating working device with the OLED base plate after the outside location and carry out the evaporation plating. Specifically, the first driving motor 8 is opened through the external controller by a user, the output shaft of the first driving motor 8 can drive the first synchronizing wheel 9 to rotate, the rotation of the first synchronizing wheel 9 can drive the second synchronizing wheel 10 to rotate through the synchronous belt 11, then the first gear 6 drives the second gear 7 to rotate, the rotation of the second gear 7 can drive the threaded pipe 3 to rotate, and then the hollow threaded rod 4 is driven to move, so that the external OLED substrate is driven to enter the evaporation working device for evaporation.

In addition, still include fixed mounting in mount 12 on mounting bracket 5 surface, the bottom of driving motor 8 and the top fixed connection of mount 12, driving motor 8 is in the same place through mount 12 and mounting bracket 5 fixed connection, through the setting of mount 12, can install the position of use of driving motor 8 fixedly to install driving motor 8 fixedly on mounting bracket 5.

Preferably, the positioning assembly comprises a plurality of groups of positioning rings 13 arranged in the inner cavity of the hollow threaded rod 4; arc-shaped grooves 14 arranged on the inner ring of the positioning ring 13; the arc-shaped positioning plate 15 is connected to the inner cavity of the arc-shaped groove 14 in a sliding manner; the connecting rod 16 is arranged at one side of the arc-shaped positioning plate 15, and one end of the connecting rod 16, which is far away from the arc-shaped positioning plate 15, sequentially penetrates through the arc-shaped groove 14 and the positioning ring 13 and extends to the outside of the positioning ring 13; and an elastic connection assembly connected with one end of the connecting rod 16 located outside the positioning ring 13, the elastic connection assembly being mounted on the surface of the positioning ring 13. Specifically, the elastic connection assembly comprises a fixed pipe 17 fixedly arranged on the surface of the positioning ring 13; the sliding plate 18 is slidably arranged in the inner cavity of the fixed pipe 17, and one end of the connecting rod 16 is fixedly connected with the surface of the sliding plate 18; and a compression spring 19 mounted on one side of the slide plate 18, wherein one end of the compression spring 19 away from the slide plate 18 is fixedly connected with the inner wall of the fixed tube 17.

Through setting up of locating component, can treat the OLED base plate of coating by vaporization and fix in the inside of hollow threaded rod 4. Specifically, when the OLED substrate to be evaporated is installed, a user can clamp the OLED substrate into the positioning ring 13, the arc-shaped positioning plate 15 can be extruded in the process that the OLED substrate is clamped into the inner cavity of the positioning ring 13, the compression springs 19 can be extruded through the connecting rods 16 and the sliding plates 18 when the arc-shaped positioning plate 15 moves, and the reaction force generated by shrinkage of the compression springs 19 can push the arc-shaped positioning plate 15 to the direction of the OLED substrate so as to extrude and fix the OLED substrate in the positioning ring 13. When the OLED substrate subjected to evaporation is disassembled, the OLED substrate can be directly pulled out.

It is worth to say that the device also comprises a limiting component arranged between the hollow threaded rod 4 and the sealing plate 1, wherein the limiting component comprises limiting plates 20 fixedly arranged at two ends of the hollow threaded rod 4; a limiting rod 21 is fixedly arranged between the two groups of limiting plates 20 and positioned on two sides of the hollow threaded rod 4; and a limiting hole 22 arranged on the surface of the sealing plate 1, wherein the surface of the limiting rod 21 is in sliding connection with the inner wall of the limiting hole 22.

Through the setting of spacing subassembly, can play spacing effect to hollow threaded rod 4 to prevent that it from following screwed pipe 3 and rotate, hollow threaded rod 4 can drive the inner chamber slip of gag lever post 21 at spacing hole 22 through limiting plate 20 when removing.

Further, the overturning assembly comprises a second driving motor 23 fixedly installed on the surface of one group of limiting plates 20, and an output shaft of the second driving motor 23 sequentially penetrates through the limiting plates 20 and the hollow threaded rod 4 and extends to the inner cavity of the hollow threaded rod 4; the connecting shafts 24 are used for fixedly connecting two adjacent groups of positioning rings 13 together, the output shaft of the driving motor II 23 is fixedly connected with one end of one group of connecting shafts 24, and one end of one group of connecting shafts 24, which is far away from the positioning rings 13, is rotationally connected with the inner wall of the hollow threaded rod 4; and a sealing block 25 mounted to a surface of each set of the connection shafts 24.

Through the setting of upset subassembly, can overturn OLED base plate evaporation in to its evaporation's homogeneity is promoted. Specifically, a user can open the second driving motor 23 through the external controller, and the output shaft of the second driving motor 23 drives the connecting shaft 24 to rotate, so that the OLED substrate is driven to turn over through the positioning assembly. By the arrangement of the sealing block 25, the inner ring of the threaded pipe 3 can be plugged, so that the sealing performance of the sealing plate 1 is improved.

Further, the rotating assembly includes a rotating ring 26 fixedly mounted on the surface of the threaded tube 3; and a rotating groove 27 arranged on the inner wall of the rotating hole 2, and the surface of the rotating ring 26 is in sliding connection with the inner wall of the rotating groove 27.

By the arrangement of the rotating assembly, the threaded tube 3 and the sealing plate 1 can be rotationally connected together. Specifically, the threaded tube 3 drives the rotating ring 26 on the surface to rotate in the inner cavity of the rotating ring 26 when rotating. In addition, the sealing property between the threaded pipe 3 and the rotary hole 2 can be improved by the cooperation of the rotary ring 26 and the rotary groove 27.

OLED coating by vaporization encapsulation equipment, including foretell feeding assembly, still including locating the bottom plate 28 of mounting bracket 5 below, the top fixed mounting of bottom plate 28 has two sets of slide 29, the sliding sleeve 30 corresponding with slide 29 is installed to the bottom of mounting bracket 5, the inner wall of sliding sleeve 30 and the surface sliding connection of slide 29, through the cooperation use of sliding sleeve 30 and slide 29, can remove the regulation to the position of use of coating by vaporization working device, it is to be noted that, still should be provided with on mounting bracket 5 and be used for carrying out the locking subassembly of locking fixed to the position of use of coating by vaporization working device, the locking subassembly that any one kind can be realized carrying out locking location to coating by vaporization working device can be selected to the person skilled in the art, do not do the restriction here.

In other embodiments, the OLED vapor deposition packaging device further includes a base capable of moving back and forth, and a limiting sealing ring, an assembly ring and a separation ring are sequentially arranged on the base in a horizontal direction in a straight shape, so that the requirements of different sizes are met in view of convenience in manufacturing and processing.

The assembly ring is formed by arranging a first assembly ring, a second assembly ring and a third assembly ring side by side, vacuumizing pipe connectors are arranged on the side walls of the first assembly ring, the second assembly ring and the third assembly ring, the assembly ring can be arranged at the optimal position determined by test, a plurality of isosceles trapezoid spacing blocks are rotatably arranged on the front end face of the assembly ring by taking the central axis of the separation ring as the center, the smaller end of each isosceles trapezoid spacing block faces the central axis direction, evaporation source installation sliding rails are arranged between two adjacent isosceles trapezoid spacing blocks, one end of each evaporation source installation sliding rail is embedded between the two adjacent isosceles trapezoid spacing blocks, the maximum radial limiting position can be smoothly clamped in through two trapezoid structures, and the other end of each evaporation source installation sliding rail penetrates through the assembly ring and is fixedly connected with the limiting sealing ring.

An installation cavity is formed between two adjacent evaporation source installation sliding rails, an electromagnetic heating device is arranged in each installation cavity, each electromagnetic heating device is provided with an electromagnetic heating rod, a limiting connecting flange head is arranged at the end part of each electromagnetic heating rod and is installed on the end face of each limiting sealing ring, the ingenious cavity positions formed by the arrangement of the limiting connecting flange heads in a spaced mode are used for placing the heating devices, obviously the heating devices are not limited to the electromagnetic heating devices, other heating excitation structures can be adopted, power supply sources can uniformly run from the end face of each limiting sealing ring, and the line structures are prevented from directly entering the vacuum cavity.

The vapor deposition source installation sliding rail is provided with sliding grooves extending along the axial direction, the vapor deposition source device is installed in the sliding grooves, the center of the limiting sealing ring is provided with a sealing end cover driven by the oil cylinder, the vapor deposition source device is connected with the inner side surface of the sealing end cover, and when the vapor deposition source device needs to be replaced, the sealing end cover is directly driven to move outwards, and the vapor deposition source device is taken out along the axial direction.

In order to improve the universality of the equipment, a T-shaped slider can be arranged between the separation ring and the evaporation source mounting slide rail for the standard of the same equipment manufacture, and the T-shaped slider can reciprocate along the radial direction for correcting the radial gap so as to adapt to the requirements of different processes.

Finally, it should be noted that: the foregoing description is only illustrative of the preferred embodiments of the present invention, and although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements or changes may be made without departing from the spirit and principles of the present invention.

Claims

1. A feed assembly, comprising:

sealing plates (1) arranged at two sides of the evaporation working device;

the rotating hole (2) is formed in the center of the sealing plate (1), and the inner cavity of the rotating hole (2) is rotationally connected with the threaded pipe (3) through the rotating assembly;

a hollow threaded rod (4) is arranged along the center line of the evaporation working device, and the surface of the hollow threaded rod (4) is in threaded connection with the inner wall of the threaded tube (3);

the positioning components are equidistantly arranged inside the hollow threaded rod (4) and used for fixing the OLED substrate to be evaporated;

the overturning assembly is arranged at one end of the hollow threaded rod (4) and used for driving the OLED substrate to overturn after positioning so as to improve the evaporation uniformity of the OLED substrate; and

install in mounting bracket (5) of coating by vaporization working device bottom, install on mounting bracket (5) and be used for driving screwed pipe (3) rotatory drive assembly, screwed pipe (3) rotate and drive hollow threaded rod (4) remove and then drive OLED base plate in hollow threaded rod (4) and remove to the coating by vaporization working device in carry out the coating by vaporization.

2. The feed assembly of claim 1, wherein: the drive assembly includes:

a first gear (6) rotatably connected to the surface of the sealing plate (1);

the second gear (7) is fixedly arranged on the surface of the threaded pipe (3), and the top of the first gear (6) is meshed with the bottom of the second gear (7); and

the power structure is arranged at the top of the mounting frame (5) and used for driving the first gear (6) to rotate.

3. The feed assembly of claim 2, wherein: the power structure comprises:

the first driving motor (8) is arranged on the surface of the mounting frame (5);

a first synchronous wheel (9) arranged on the output shaft of the first driving motor (8); and

and the synchronous wheel II (10) is arranged on one side of the gear I (6), and the synchronous wheel I (9) and the synchronous wheel II (10) are in transmission connection through a synchronous belt (11).

4. A feed assembly as claimed in claim 3, wherein: the motor driving device is characterized by further comprising a fixing frame (12) fixedly arranged on the surface of the mounting frame (5), wherein the bottom of the first driving motor (8) is fixedly connected with the top of the fixing frame (12), and the first driving motor (8) is fixedly connected with the mounting frame (5) through the fixing frame (12).

5. The feed assembly of claim 1, wherein: the positioning assembly includes:

a plurality of groups of positioning rings (13) arranged in the inner cavity of the hollow threaded rod (4);

an arc-shaped groove (14) which is arranged on the inner ring of the positioning ring (13);

the arc-shaped positioning plate (15) is connected to the inner cavity of the arc-shaped groove (14) in a sliding manner;

the connecting rod (16) is arranged at one side of the arc-shaped positioning plate (15), and one end of the connecting rod (16) far away from the arc-shaped positioning plate (15) sequentially penetrates through the arc-shaped groove (14) and the positioning ring (13) and extends to the outside of the positioning ring (13); and

and the elastic connecting component is connected with one end of the connecting rod (16) positioned outside the positioning ring (13), and is arranged on the surface of the positioning ring (13).

6. The feed assembly of claim 5, wherein: the elastic connection assembly includes:

a fixed pipe (17) fixedly arranged on the surface of the positioning ring (13);

a sliding plate (18) which is slidably arranged in the inner cavity of the fixed pipe (17), and one end of the connecting rod (16) is fixedly connected with the surface of the sliding plate (18); and

and a compression spring (19) arranged on one side of the sliding plate (18), wherein one end of the compression spring (19) far away from the sliding plate (18) is fixedly connected with the inner wall of the fixed pipe (17).

7. The feed assembly of claim 5, wherein: still including locating spacing subassembly between hollow threaded rod (4) and closing plate (1), spacing subassembly includes:

limiting plates (20) fixedly arranged at two ends of the hollow threaded rod (4);

a limiting rod (21) is fixedly arranged between the two groups of limiting plates (20) and positioned at two sides of the hollow threaded rod (4); and

and the limiting hole (22) is formed in the surface of the sealing plate (1), and the surface of the limiting rod (21) is in sliding connection with the inner wall of the limiting hole (22).

8. The feed assembly of claim 7, wherein: the flip assembly includes:

the second driving motor (23) is fixedly arranged on the surface of one group of the limiting plates (20), and an output shaft of the second driving motor (23) sequentially penetrates through the limiting plates (20) and the hollow threaded rod (4) and extends to the inner cavity of the hollow threaded rod (4);

the connecting shafts (24) are used for fixedly connecting two adjacent groups of positioning rings (13) together, the output shaft of the driving motor II (23) is fixedly connected with one end of one group of connecting shafts (24), and one end of one group of connecting shafts (24) far away from the positioning rings (13) is rotatably connected with the inner wall of the hollow threaded rod (4); and

and sealing blocks (25) are arranged on the surfaces of each group of connecting shafts (24).

9. The feed assembly of claim 1, wherein: the rotating assembly includes:

a rotating ring (26) fixedly arranged on the surface of the threaded pipe (3); and

and the rotating groove (27) is formed in the inner wall of the rotating hole (2), and the surface of the rotating ring (26) is in sliding connection with the inner wall of the rotating groove (27).

10. An OLED vapor deposition packaging apparatus, characterized in that: the feeding assembly according to any one of claims 1 to 9, further comprising a bottom plate (28) arranged below the mounting frame (5), wherein two groups of sliding seats (29) are fixedly arranged at the top of the bottom plate (28), sliding sleeves (30) corresponding to the sliding seats (29) are arranged at the bottom of the mounting frame (5), and the inner walls of the sliding sleeves (30) are in sliding connection with the surfaces of the sliding seats (29).