CN209601765U - Vacuum coating transmission device - Google Patents
Vacuum coating transmission device Download PDFInfo
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- CN209601765U CN209601765U CN201822182118.7U CN201822182118U CN209601765U CN 209601765 U CN209601765 U CN 209601765U CN 201822182118 U CN201822182118 U CN 201822182118U CN 209601765 U CN209601765 U CN 209601765U
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- transmission
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- driving wheel
- vacuum coating
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Abstract
The utility model provides a kind of vacuum coating transmission device, including two transmission frames arranged in parallel, there are two transmission wheels for the opposite side setting of each transmission frame, transmission belt is wound in two transmission wheels of each transmission frame, and the transmission wheel on each transmission frame is rotated synchronously by transmission belt；More than one camshaft bearing follower for being used to support transmission belt is provided on transmission frame, camshaft bearing follower is set between the transmission wheel on each transmission frame；One side surface of each camshaft bearing follower and the common tangent of two transmission wheels are tangent.Installed in the utility model it is simple and convenient, by camshaft bearing follower reduce transmit process friction, in conjunction with U-shaped transmission frame and steel band, while saving space, transmission it is more efficient.
Description
Technical field
The utility model belongs to vacuum evaporation technology field more particularly to a kind of vacuum coating transmission device.
Background technique
Organic light emitting display, 0LED, i.e. Organic Light Emitting Diode (Organic Light-Emitting Diode), again
Referred to as Organic Electricity laser display (Organic Electroluminesence Display, 0ELD).Because having frivolous, power saving
Etc. characteristics, be widely used.OLED substrate needs effectively to transmit in vacuum cavity during being deposited, due to
For vacuum environment to the more demanding of transmission parts, most of kinetic energy loss are more, and configuration mostly uses in transfer structure design process
For nonstandard workpiece as transmission main component, abrasion condition is more frequent, it is easy to lead to the transfer structure later maintenance period
It is long, it is at high cost.Meanwhile excessive transmission step also results in the reduction of precision, increases the difficulty of transmission accuracy control.
Utility model content
In order to solve the deficiencies in the prior art, the utility model provides a kind of vacuum coating transmission device.
The purpose of this utility model is achieved through the following technical solutions:
A kind of vacuum coating transmission device, including two transmission frames arranged in parallel, each transmission frame it is opposite
Side setting there are two transmission wheel, be wound with transmission belt, and each biography in two transmission wheels of each transmission frame
Transmission wheel on defeated frame is rotated synchronously by transmission belt；It is provided with more than one on the transmission frame and is used to support the transmission belt
Camshaft bearing follower, the camshaft bearing follower is set between the transmission wheel on each transmission frame；It is each described convex
The transmission belt that the public affairs of the side surface of wheel bearing follower and two transmission wheels are cut is tangent.
Preferably, be additionally provided with synchronous drive mechanism on the transmission frame, including be arranged on each transmission frame
One driving wheel and the second driving wheel, and the drive rod of two transmission frames of connection, two first driving wheels are respectively set
In drive rod both ends；On each transmission frame, second driving wheel and transmission wheel described in one of them are coaxially connected；It is each described
On transmission frame, pass through transmission band connection between first driving wheel and the second driving wheel.
It preferably, further include having driving assembly, the driving component includes sequentially connected universal joint, magnet fluid sealing
Part and motor, the one end of the universal joint far from magnetic fluid seal are connect with first driving wheel or the second driving wheel.
Preferably, first driving wheel and the second driving wheel be sprocket wheel, the transmission belt and first driving wheel and
Second driving wheel is meshed.
Preferably, the drive rod is vertically arranged with the transmission frame, and there are two the drive rods, respectively in two institutes
The first drive rod and the second drive rod parallel between transmission frame are stated, the first driving wheel on two transmission frames is connected to
The both ends of first drive rod.
Preferably, the transmission wheel is respectively arranged at the both ends of transmission frame, second drive rod on each transmission frame
It is set to the end of transmission frame, and the both ends of second drive rod are coaxial with corresponding transmission wheel on two transmission frames respectively
Connection.
Preferably, miniature flange bearing is provided on the transmission frame, the drive rod passes through the miniature flange bearing
With the fixed position of the transmission frame.
Preferably, position sensor is set on the transmission frame.
Preferably, the transmission belt is transmission steel band.
Preferably, described device further includes having the tensioning wheel being arranged between two transmission wheels, and the transmission belt bypasses two
Transmission wheel and tensioning wheel are end to end.
The beneficial effects of the utility model are embodied in: installed in the utility model it is simple and convenient, it is servo-actuated by camshaft bearing
Device reduces the friction of transmit process, and the camshaft bearing follower is oil-free component, oil-free without carrying out in vacuum and environment
Processing, does not need to smear silicone grease after additionally deoiling again and reaches vacuum environment expected effect, shortens the time vacuumized, mentions
High working efficiency.
Detailed description of the invention
Fig. 1: the schematic perspective view of the utility model.
Fig. 2: the top view of the utility model Fig. 1.
Fig. 3: the utility model Fig. 2 cross-sectional view along line A-A.
Specific embodiment
It is specifically described the technical solution of the utility model with reference to embodiments, the utility model discloses a kind of Vacuum Deposition
Film transmission device, in conjunction with shown in Fig. 1-Fig. 3, including two transmission frames 1 arranged in parallel, each transmission frame 1 it is opposite
Side be provided with the first transmission wheel 23 and the second transmission wheel 24, two transmission wheels are respectively set to the both ends of each transmission frame 1.
And transmission belt 5 is wound in two transmission wheels of each transmission frame 1, the transmission wheel on each transmission frame 1 passes through biography
Defeated band 5 rotates synchronously, and transmission sample 8 will be transmitted by transmission belt 5.More than one is provided on the transmission frame 1 to be used for
Support the camshaft bearing follower 7 of the transmission belt 5, in the present embodiment, each 7 uniform intervals of camshaft bearing follower setting
Between the first transmission wheel 23 and the second transmission wheel 24 on each transmission frame 1, the side table of each camshaft bearing follower 7
The transmission belt that the public affairs of face and two transmission wheels on same transmission frame are cut is tangent.
The i.e. servo-actuated bearing of the camshaft bearing follower 7, cam guide can do idler wheel use.The utility model uses
Main component of the camshaft bearing follower as transmission, can substantially reduce cooperation and the friction problem of nonstandard workpiece, from
And resistance when friction and transmission is reduced, transmission efficiency is improved, cost can be preferably saved.The camshaft bearing follower 7 is
Oil-free component does not need to smear silicone grease after additionally deoiling again and reaches vacuum without carrying out without oil processing in vacuum and environment
Environment expected effect shortens the time vacuumized, improves work efficiency.
It is additionally provided with synchronous drive mechanism on the transmission frame 1, including the first transmission being arranged on each transmission frame 1
Wheel 21 and the second driving wheel 22, and the drive rod of two transmission frames 1 of connection.Miniature flange is provided on the transmission frame 1
Bearing 71, the drive rod are made by the miniature flange bearing 71 and the fixed position of the transmission frame 1, miniature flange bearing 71
The position precision for obtaining drive rod is guaranteed.Specifically, there are two drive rod settings, and vertical with the transmission frame 1 set
It sets, parallel the first drive rod 6 and the second drive rod 61 respectively between two transmission frames 1.Second drive rod, 61 both ends
Two transmission frames are each passed through, coaxially connected with the second transmission wheel 24 on two transmission frames, transmission belt is same on two transmission frames of guarantee
Step operating.
First driving wheel 21 is respectively arranged at 6 both ends of the first drive rod, and on each transmission frame 1, described second is passed
Driving wheel 22 and the first transmission wheel 23 are coaxially connected, are connected between first driving wheel 21 and the second driving wheel 22 by transmission belt 4
It connects.The transmission belt 4 is meshed with first driving wheel 21 and the second driving wheel 22.In the present embodiment, the first driving wheel 21
The both ends of first drive rod 6 are connected to, first driving wheel 21 and the second driving wheel 22 are sprocket wheel, the transmission
Band 5 is to keep its gearing friction small using the lesser steel belt of roughness, is driven more efficient.
The present apparatus further includes having driving assembly, and the driving component includes sequentially connected universal joint 3, magnet fluid sealing
Part and motor, the one end of the universal joint 3 far from magnetic fluid seal pass through connecting shaft 2 and first driving wheel 21 or the
The connection of two driving wheels 22.Specifically, the present apparatus is mainly used in vacuum evaporation equipment, and the motor setting is steamed in the vacuum
Outside coating apparatus, it is sequentially connected, is ensure that inside the vacuum evaporation equipment by the magnetic fluid seal and universal joint 3
Leakproofness.In the present embodiment figure, the universal joint 3 is connect with the first driving wheel 21, drive of the universal joint 3 in motor
Under dynamic, rotated, so that driving the first driving wheel 21 rotation, the operating of transmission wheel will be driven by transmission belt 4, so that
Transmission belt 5 does transport movement, and mutually during transmission, the camshaft bearing follower 7 will also be operated together therewith to cooperate
Transmission.The utility model utilizes the first driving wheel 21, the second driving wheel 22, the first drive rod 6, transmission belt 4 and the first transmission wheel
23 form U-shaped drive path, the transmission for avoiding transmission shaft position too rigid, the fluctuation of Yi Yinqi degree of disturbing and equipment damage.In order to
Position sensor is arranged on the transmission frame 1, by providing in conjunction with the position sensor in better auxiliary transmission and vapor deposition
Location information, the motor can operate by predetermined instruction, control driving wheel and transmission belt 5 can in transmission process according to
Demand carries out reciprocal, transport substrate back and forth, to reach the uniformity of film thickness on substrate when vapor deposition.
A kind of vacuum coating transmission device described in the present embodiment further includes having tensioning wheel (not shown), and the tensioning wheel is set
It sets between two transmission wheels, the transmission belt 5 is end to end around two transmission wheels and tensioning wheel, and the tensioning wheel is for increasing
Frictional force between transmission wheel and transmission belt 5 avoids skidding, it is ensured that accurate transmission.
In order to which in each component of confined space energy reasonable arrangement, preferably to save space, the transmission frame is concavely provided with
Mounting groove, the driving wheel and transmission belt are set in mounting groove, guarantee that its transmission is interference-free, transmission wheel is arranged in mounting groove
Outside, the lattice gear that transmission wheel and driving wheel are formed by the mounting groove of transmission frame itself carries out the differentiation and positioning of position.
Still there are many specific embodiments for certain the utility model, are just not listed one by one herein.It is all to use equivalent replacement
Or equivalent transformation and all technical solutions for being formed, within the scope of all falling within the requires of the utility model protection.
Claims (10)
1. a kind of vacuum coating transmission device, it is characterised in that: including two transmission frames arranged in parallel, each transmission
The opposite side setting of frame is wound with transmission belt in two transmission wheels of each transmission frame there are two transmission wheel, and every
Transmission wheel on a transmission frame is rotated synchronously by transmission belt；It is provided with more than one on the transmission frame and is used to support institute
The camshaft bearing follower of transmission belt is stated, the camshaft bearing follower is set between the transmission wheel on each transmission frame；Often
The transmission belt that the side surface of a camshaft bearing follower and the public affairs of two transmission wheels are cut is tangent.
2. vacuum coating transmission device as described in claim 1, it is characterised in that: be additionally provided with synchronous biography on the transmission frame
Motivation structure, including the first driving wheel and the second driving wheel being arranged on each transmission frame, and two transmission frames of connection
Drive rod, two first driving wheels are respectively arranged at drive rod both ends；On each transmission frame, second driving wheel
It is coaxially connected with transmission wheel described in one of them；On each transmission frame, lead between first driving wheel and the second driving wheel
Cross transmission band connection.
3. vacuum coating transmission device as claimed in claim 2, it is characterised in that: it further include having driving assembly, the driving
Component includes sequentially connected universal joint, magnetic fluid seal and motor, and the universal joint is far from magnetic fluid seal
One end is connect with first driving wheel or the second driving wheel.
4. vacuum coating transmission device as claimed in claim 2, it is characterised in that: first driving wheel and the second driving wheel
For sprocket wheel, the transmission belt is meshed with first driving wheel and the second driving wheel.
5. vacuum coating transmission device as claimed in claim 2, it is characterised in that: the drive rod is vertical with the transmission frame
Setting, and there are two the drive rods, parallel the first drive rod and the second drive rod respectively between two transmission frames,
The first driving wheel on two transmission frames is connected to the both ends of first drive rod.
6. vacuum coating transmission device as claimed in claim 5, it is characterised in that: the transmission wheel point on each transmission frame
It is not set to the both ends of transmission frame, second drive rod is set to the end of transmission frame, and the both ends of second drive rod
It is coaxially connected with corresponding transmission wheel on two transmission frames respectively.
7. vacuum coating transmission device as claimed in claim 2, it is characterised in that: be provided with miniature flange on the transmission frame
Bearing, the drive rod pass through the miniature flange bearing and the fixed position of the transmission frame.
8. vacuum coating transmission device as described in claim 1, it is characterised in that: be provided with position sensing on the transmission frame
Device.
9. vacuum coating transmission device as described in claim 1, it is characterised in that: the transmission belt is transmission steel band.
10. vacuum coating transmission device as described in claim 1, it is characterised in that: described device further includes having to be arranged two
Tensioning wheel between transmission wheel, the transmission belt are end to end around two transmission wheels and tensioning wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822182118.7U CN209601765U (en) | 2018-12-25 | 2018-12-25 | Vacuum coating transmission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822182118.7U CN209601765U (en) | 2018-12-25 | 2018-12-25 | Vacuum coating transmission device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209601765U true CN209601765U (en) | 2019-11-08 |
Family
ID=68397023
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822182118.7U Active CN209601765U (en) | 2018-12-25 | 2018-12-25 | Vacuum coating transmission device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209601765U (en) |
-
2018
- 2018-12-25 CN CN201822182118.7U patent/CN209601765U/en active Active
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