CN203866381U - Planar megnetron sputtering coating translation mechanism - Google Patents
Planar megnetron sputtering coating translation mechanism Download PDFInfo
- Publication number
- CN203866381U CN203866381U CN201420241960.2U CN201420241960U CN203866381U CN 203866381 U CN203866381 U CN 203866381U CN 201420241960 U CN201420241960 U CN 201420241960U CN 203866381 U CN203866381 U CN 203866381U
- Authority
- CN
- China
- Prior art keywords
- rail
- translation mechanism
- supporting plate
- plated film
- support body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 35
- 238000013519 translation Methods 0.000 title claims abstract description 30
- 238000004544 sputter deposition Methods 0.000 title claims description 11
- 239000011248 coating agent Substances 0.000 title abstract description 6
- 238000000576 coating method Methods 0.000 title abstract description 6
- 239000011521 glass Substances 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims description 18
- 238000005192 partition Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000005452 bending Methods 0.000 abstract 1
- 238000001755 magnetron sputter deposition Methods 0.000 abstract 1
- 230000014616 translation Effects 0.000 description 21
- 238000000034 method Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a planar magnetron sputtering coating translation mechanism. A translation mechanism (4) is arranged at the bending point of a U-shaped conveying rail (1), and one outward side of glass is changed, so that the two sides of the glass can be outward and are coated, double-faced coating is achieved, and the production efficiency is greatly improved.
Description
Technical field
The utility model belongs to glass coating equipment field, relates in particular to a kind of planar magnetic control sputtering plated film translation mechanism.
Background technology
It is U-shaped that tradition is carried the delivery track of substrate frame, and substrate frame is transported on delivery track carries out filming process in vacuum chamber,
Realizing in process of the present utility model, contriver finds that prior art at least exists following problem: because substrate frame on delivery track is continuous, filming equipment is arranged on the outside of U-rail, filming equipment can only carry out plated film to the glass surface in outside, U-shaped inflection point, thereby film that can only glass plating one side, follow-up also needs glass turn-over, again send into delivery track and carry out plated film, complex operation, inefficiency.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of planar magnetic control sputtering plated film translation mechanism of realizing double-sided glass plated film.
In order to solve the problems of the technologies described above, the technical scheme that the utility model adopts is: a kind of planar magnetic control sputtering plated film translation mechanism, comprise the conveying substrate frame that is U-shaped delivery track, delivery track is separated into two-part partition wall, described partition wall one side is the vacuum chamber that glass is carried out to plated film, the inflection point of described U-rail is in vacuum chamber, the inflection point of U-rail is the translation mechanism that substrate frame is transported to opposite side from U-rail one side, and described translation mechanism comprises:
Connect the support body of U-rail both sides;
Be arranged on the guide rail on described support body;
Can slidably reciprocate in U-rail both sides by guide rail can supporting substrate frame supporting plate;
The driving mechanism that drives supporting plate to slidably reciprocate from U-rail both sides.
Described supporting plate is provided with the slide block suitable with guide rail.
Described driving mechanism is pinion and rack, and described tooth bar is fixedly mounted on supporting plate lower end, and described gear is arranged on the bearing support on support body by drive shaft.
Described slide block is arranged on the two ends of supporting plate, and described support body is provided with two guide rails.
A technical scheme tool in technique scheme has the following advantages or beneficial effect, makes linear conveyor track into translation mechanism, can realize the double-sided coating of substrate, and production capacity is double.
Brief description of the drawings
The structural representation that Fig. 1 is the planar magnetic control sputtering plated film translation mechanism that provides in the utility model embodiment;
Fig. 2 is the structural representation of translation mechanism in Fig. 1;
Fig. 3 is the partial enlarged drawing of Fig. 2 translation mechanism;
Mark in above-mentioned figure is: 1, delivery track, 2, partition wall, 3, vacuum chamber, 4, translation mechanism, 5, support body, 6, guide rail, 7, supporting plate, 71, slide block, 8, driving mechanism, 81, gear, 82, tooth bar, 9, substrate frame.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing, the utility model embodiment is described in further detail.
Referring to Fig. 1, a kind of planar magnetic control sputtering plated film translation mechanism, comprise the delivery track 1 of the conveying substrate frame 9 that is U-shaped, delivery track 1 is separated into two-part partition wall 2, partition wall 2 one sides are the vacuum chamber 3 that glass is carried out to plated film, the inflection point of U-rail is in vacuum chamber 3, the inflection point of U-rail is the translation mechanism 4 that substrate frame 9 is transported to opposite side from U-rail one side, and as shown in Figures 2 and 3, translation mechanism 4 comprises:
Connect the support body 5 of U-rail both sides;
Be arranged on the guide rail 6 on support body 5;
Can slidably reciprocate in U-rail both sides by guide rail 6 can supporting substrate frame 9 supporting plate 7;
The driving mechanism 8 that drives supporting plate 7 to slidably reciprocate from U-rail both sides.
Supporting plate 7 is provided with the slide block 71 suitable with guide rail 6.
Driving mechanism 8 is pinion and rack, and tooth bar 82 is fixedly mounted on supporting plate 7 lower ends, and gear 81 is arranged on the bearing support on support body 5 by drive shaft.Gear 81 is arranged on the drive shaft of magnetic current sealing, and vacuum-sealing realizes with magnetic fluid, utilizes rack-and-pinion transmission to realize reciprocal translation transmission in conjunction with rectilinear translation guide rail 6 simultaneously.Driving mechanism 8 also can adopt other types, such as air cylinder driven supporting plate 7 slidably reciprocates.
Slide block 71 is arranged on the two ends of supporting plate 7, and support body 5 is provided with two guide rails 6.Supporting plate 7 moves more steady, reliable.
When use, substrate frame 9 is in a lateral movement of U-rail, filming equipment in vacuum chamber 3 carries out plated film to a side of glass, while moving to translation mechanism 4, under the drive of supporting plate 7,9 translations of substrate frame are transported to the opposite side of U-rail, and continue motion in orbit, now, translation mechanism 4 has changed a glass side outwardly, make glass opposite side outwardly, thereby glass opposite side is carried out to plated film.Supporting plate 7 moves back and forth, and continues to carry other substrate frame 9 and glass.
Adopt after above-mentioned structure, use dexterously the U-shaped turning of U-rail, change a glass side outwardly, make vacuum rotating transmission rig into vacuum translation mechanism, can realize the double-sided coating of substrate, production capacity is double, and translation mechanism 4 is simple in structure, reliable simultaneously, improves line stability.
By reference to the accompanying drawings the utility model is exemplarily described above; obviously the utility model specific implementation is not subject to the restrictions described above; as long as adopted the improvement of the various unsubstantialities that method of the present utility model design and technical scheme carry out; or without improving, design of the present utility model and technical scheme are directly applied to other occasion, all within protection domain of the present utility model.
Claims (4)
1. a planar magnetic control sputtering plated film translation mechanism, comprise the conveying substrate frame (9) that is U-shaped delivery track (1), delivery track (1) is separated into two-part partition wall (2), described partition wall (2) one sides are the vacuum chamber (3) that glass is carried out to plated film, it is characterized in that, the inflection point of described U-rail is in vacuum chamber (3), the inflection point of U-rail is for being transported to substrate frame (9) translation mechanism (4) of opposite side from U-rail one side, described translation mechanism (4) comprising:
Connect the support body (5) of U-rail both sides;
Be arranged on the guide rail (6) on described support body (5);
Can slidably reciprocate in U-rail both sides by guide rail (6) can supporting substrate frame (9) supporting plate (7);
The driving mechanism (8) that drives supporting plate (7) to slidably reciprocate from U-rail both sides.
2. planar magnetic control sputtering plated film translation mechanism as claimed in claim 1, is characterized in that, described supporting plate (7) is provided with the slide block (71) suitable with guide rail (6).
3. planar magnetic control sputtering plated film translation mechanism as claimed in claim 1 or 2, it is characterized in that, described driving mechanism (8) is pinion and rack, described tooth bar (82) is fixedly mounted on supporting plate (7) lower end, and described gear (81) is arranged on the bearing support on support body (5) by drive shaft.
4. planar magnetic control sputtering plated film translation mechanism as claimed in claim 3, is characterized in that, described slide block (71) is arranged on the two ends of supporting plate (7), and described support body (5) is provided with two guide rails (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420241960.2U CN203866381U (en) | 2014-05-12 | 2014-05-12 | Planar megnetron sputtering coating translation mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420241960.2U CN203866381U (en) | 2014-05-12 | 2014-05-12 | Planar megnetron sputtering coating translation mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203866381U true CN203866381U (en) | 2014-10-08 |
Family
ID=51647352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420241960.2U Expired - Lifetime CN203866381U (en) | 2014-05-12 | 2014-05-12 | Planar megnetron sputtering coating translation mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203866381U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107572836A (en) * | 2017-10-25 | 2018-01-12 | 合肥微信片农业科技有限公司 | A kind of glass coating equipment |
| CN112239844A (en) * | 2020-10-19 | 2021-01-19 | 山西隆腾机电科技有限公司 | Coating device for producing low-emissivity coated glass and coating method thereof |
-
2014
- 2014-05-12 CN CN201420241960.2U patent/CN203866381U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107572836A (en) * | 2017-10-25 | 2018-01-12 | 合肥微信片农业科技有限公司 | A kind of glass coating equipment |
| CN112239844A (en) * | 2020-10-19 | 2021-01-19 | 山西隆腾机电科技有限公司 | Coating device for producing low-emissivity coated glass and coating method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20141008 |