CN108372722B - 元件基板及液体喷出头 - Google Patents

元件基板及液体喷出头 Download PDF

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Publication number
CN108372722B
CN108372722B CN201810154140.2A CN201810154140A CN108372722B CN 108372722 B CN108372722 B CN 108372722B CN 201810154140 A CN201810154140 A CN 201810154140A CN 108372722 B CN108372722 B CN 108372722B
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China
Prior art keywords
heating resistance
resistance element
electrical connection
wiring layer
region
Prior art date
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Active
Application number
CN201810154140.2A
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English (en)
Chinese (zh)
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CN108372722A (zh
Inventor
葛西亮
平山信之
樱井将贵
梅田谦吾
和秀宪
高木诚
乡田达人
佐久间贞好
铃木伸幸
江藤徹
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN108372722A publication Critical patent/CN108372722A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/05—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers produced by the application of heat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN201810154140.2A 2015-01-27 2016-01-22 元件基板及液体喷出头 Active CN108372722B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2015013197 2015-01-27
JP2015-013197 2015-01-27
JP2015233689A JP6598658B2 (ja) 2015-01-27 2015-11-30 液体吐出ヘッドの素子基板及び液体吐出ヘッド
JP2015-233689 2015-11-30
CN201610045927.6A CN105818537B (zh) 2015-01-27 2016-01-22 元件基板及液体喷出头

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201610045927.6A Division CN105818537B (zh) 2015-01-27 2016-01-22 元件基板及液体喷出头

Publications (2)

Publication Number Publication Date
CN108372722A CN108372722A (zh) 2018-08-07
CN108372722B true CN108372722B (zh) 2020-04-21

Family

ID=56559802

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201810154140.2A Active CN108372722B (zh) 2015-01-27 2016-01-22 元件基板及液体喷出头
CN201610045927.6A Active CN105818537B (zh) 2015-01-27 2016-01-22 元件基板及液体喷出头

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201610045927.6A Active CN105818537B (zh) 2015-01-27 2016-01-22 元件基板及液体喷出头

Country Status (5)

Country Link
JP (1) JP6598658B2 (enrdf_load_stackoverflow)
CN (2) CN108372722B (enrdf_load_stackoverflow)
RU (1) RU2645565C2 (enrdf_load_stackoverflow)
SG (1) SG10201600629QA (enrdf_load_stackoverflow)
TW (1) TWI610820B (enrdf_load_stackoverflow)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018130942A (ja) * 2017-02-17 2018-08-23 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
WO2018150830A1 (en) 2017-02-17 2018-08-23 Canon Kabushiki Kaisha Liquid discharge head substrate, method of manufacturing the same, liquid discharge head, and liquid discharge apparatus
JP7037334B2 (ja) 2017-02-17 2022-03-16 キヤノン株式会社 液体吐出ヘッド用基板、その製造方法、液体吐出ヘッド及び液体吐出装置
US10300698B2 (en) 2017-06-05 2019-05-28 Canon Kabushiki Kaisha Liquid ejection head
JP6625158B2 (ja) * 2017-06-05 2019-12-25 キヤノン株式会社 液体吐出ヘッド
JP6942537B2 (ja) * 2017-06-29 2021-09-29 キヤノン株式会社 液体吐出ヘッド
EP3470228B1 (en) * 2017-10-11 2021-06-30 Canon Kabushiki Kaisha Element substrate, manufacturing method thereof, printhead, and printing apparatus
JP7005376B2 (ja) 2018-02-15 2022-01-21 キヤノン株式会社 素子基板、記録ヘッド、及び記録装置
JP6701255B2 (ja) 2018-04-12 2020-05-27 キヤノン株式会社 液体吐出ヘッド基板、液体吐出ヘッド、液体吐出装置、および、液体吐出ヘッド基板の製造方法
JP7114380B2 (ja) * 2018-07-20 2022-08-08 キヤノン株式会社 素子基板および液体吐出ヘッド
CN112703597B (zh) * 2018-09-24 2024-12-24 惠普发展公司，有限责任合伙企业 连接的场效应晶体管
JP7171426B2 (ja) * 2018-12-27 2022-11-15 キヤノン株式会社 液体吐出ヘッドおよびその製造方法と液体吐出装置
JP7344669B2 (ja) 2019-04-23 2023-09-14 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置
JP7328787B2 (ja) 2019-04-23 2023-08-17 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置
JP7465096B2 (ja) * 2020-01-20 2024-04-10 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置
JP2021187121A (ja) 2020-06-03 2021-12-13 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置
JP7543096B2 (ja) * 2020-11-13 2024-09-02 キヤノン株式会社 液体吐出ヘッド用基板、及び液体吐出ヘッド
JP2022078883A (ja) 2020-11-13 2022-05-25 キヤノン株式会社 液体吐出ヘッド用基板、及び液体吐出ヘッド
JP2023037261A (ja) 2021-09-03 2023-03-15 キヤノン株式会社 素子基板および記録ヘッド

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02125743A (ja) * 1988-07-26 1990-05-14 Canon Inc 液体噴射記録ヘッド用素子基板，液体噴射記録ヘッド，ヘッドカートリッジおよび記録装置
EP0924080A2 (en) * 1997-12-22 1999-06-23 Canon Kabushiki Kaisha Ink jet recording head, substrate used for such a head, ink jet head cartridge, and ink jet recording apparatus
CN1919605A (zh) * 2005-08-27 2007-02-28 三星电子株式会社 喷墨打印头及其制造方法
CN101844442A (zh) * 2009-03-25 2010-09-29 佳能株式会社 记录元件基板、制造该记录元件基板的方法和液体喷射头

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6382782B1 (en) * 2000-12-29 2002-05-07 Eastman Kodak Company CMOS/MEMS integrated ink jet print head with oxide based lateral flow nozzle architecture and method of forming same
JP2005067164A (ja) * 2003-08-28 2005-03-17 Sony Corp 液体吐出ヘッド、液体吐出装置及び液体吐出ヘッドの製造方法
JP2005205891A (ja) * 2003-12-26 2005-08-04 Canon Inc インクジェットヘッド用の基体、インクジェットヘッド、該インクジェットヘッドの駆動方法およびインクジェット記録装置
KR100553914B1 (ko) * 2004-01-29 2006-02-24 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
JP2008307828A (ja) * 2007-06-15 2008-12-25 Canon Inc 記録ヘッド
JP2010023397A (ja) * 2008-07-23 2010-02-04 Canon Finetech Inc 液体吐出ヘッド
JP5328608B2 (ja) * 2008-12-15 2013-10-30 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド及びそれらの製造方法
JP5606213B2 (ja) * 2009-09-04 2014-10-15 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
JP6222968B2 (ja) * 2013-04-09 2017-11-01 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドのクリーニング方法、液体吐出装置
JP6289234B2 (ja) * 2014-04-15 2018-03-07 キヤノン株式会社 記録素子基板及び液体吐出装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02125743A (ja) * 1988-07-26 1990-05-14 Canon Inc 液体噴射記録ヘッド用素子基板，液体噴射記録ヘッド，ヘッドカートリッジおよび記録装置
EP0924080A2 (en) * 1997-12-22 1999-06-23 Canon Kabushiki Kaisha Ink jet recording head, substrate used for such a head, ink jet head cartridge, and ink jet recording apparatus
CN1919605A (zh) * 2005-08-27 2007-02-28 三星电子株式会社 喷墨打印头及其制造方法
CN101844442A (zh) * 2009-03-25 2010-09-29 佳能株式会社 记录元件基板、制造该记录元件基板的方法和液体喷射头

Also Published As

Publication number Publication date
RU2645565C2 (ru) 2018-02-21
SG10201600629QA (en) 2016-08-30
RU2016102322A (ru) 2017-08-01
JP6598658B2 (ja) 2019-10-30
CN108372722A (zh) 2018-08-07
TWI610820B (zh) 2018-01-11
CN105818537A (zh) 2016-08-03
JP2016137705A (ja) 2016-08-04
TW201632362A (zh) 2016-09-16
CN105818537B (zh) 2018-03-06

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