CN107919266A - 一种量子点结构的制作方法 - Google Patents
一种量子点结构的制作方法 Download PDFInfo
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- CN107919266A CN107919266A CN201610876764.6A CN201610876764A CN107919266A CN 107919266 A CN107919266 A CN 107919266A CN 201610876764 A CN201610876764 A CN 201610876764A CN 107919266 A CN107919266 A CN 107919266A
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- 239000002096 quantum dot Substances 0.000 title claims abstract description 107
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 230000001681 protective effect Effects 0.000 claims abstract description 57
- 238000000034 method Methods 0.000 claims abstract description 40
- 238000000137 annealing Methods 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims description 24
- 229920002120 photoresistant polymer Polymers 0.000 claims description 15
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical group O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 13
- 238000001259 photo etching Methods 0.000 claims description 12
- 238000012545 processing Methods 0.000 claims description 9
- 230000012010 growth Effects 0.000 claims description 7
- 229910005542 GaSb Inorganic materials 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 6
- 229910002370 SrTiO3 Inorganic materials 0.000 claims description 6
- 238000000609 electron-beam lithography Methods 0.000 claims description 6
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
- 229910000673 Indium arsenide Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims description 4
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 3
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 claims description 2
- 229910052906 cristobalite Inorganic materials 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 229910052682 stishovite Inorganic materials 0.000 claims description 2
- 229910052905 tridymite Inorganic materials 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 56
- 238000005516 engineering process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 239000003292 glue Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 238000001451 molecular beam epitaxy Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02395—Arsenides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02546—Arsenides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02587—Structure
- H01L21/0259—Microstructure
- H01L21/02601—Nanoparticles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
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- H—ELECTRICITY
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
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- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/341—Structures having reduced dimensionality, e.g. quantum wires
- H01S5/3412—Structures having reduced dimensionality, e.g. quantum wires quantum box or quantum dash
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0025—Processes relating to coatings
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Composite Materials (AREA)
- Semiconductor Lasers (AREA)
- Physical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (10)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610876764.6A CN107919266B (zh) | 2016-10-08 | 2016-10-08 | 一种量子点结构的制作方法 |
US16/340,108 US10665749B2 (en) | 2016-10-08 | 2016-12-30 | Manufacturing method of quantum dot structure |
PCT/CN2016/113894 WO2018064869A1 (zh) | 2016-10-08 | 2016-12-30 | 一种量子点结构的制作方法 |
JP2019518435A JP6845926B2 (ja) | 2016-10-08 | 2016-12-30 | 量子ドット構造の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610876764.6A CN107919266B (zh) | 2016-10-08 | 2016-10-08 | 一种量子点结构的制作方法 |
Publications (2)
Publication Number | Publication Date |
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CN107919266A true CN107919266A (zh) | 2018-04-17 |
CN107919266B CN107919266B (zh) | 2020-04-10 |
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CN201610876764.6A Active CN107919266B (zh) | 2016-10-08 | 2016-10-08 | 一种量子点结构的制作方法 |
Country Status (4)
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US (1) | US10665749B2 (zh) |
JP (1) | JP6845926B2 (zh) |
CN (1) | CN107919266B (zh) |
WO (1) | WO2018064869A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108751254A (zh) * | 2018-06-01 | 2018-11-06 | 苏州大学 | 原位无损剥离量子点的方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107919266B (zh) * | 2016-10-08 | 2020-04-10 | 青岛翼晨镭硕科技有限公司 | 一种量子点结构的制作方法 |
US10840676B2 (en) * | 2018-05-10 | 2020-11-17 | X Development Llc | Optoelectronic devices having spatially varying distribution of quantum confined nanostructures |
US11880139B2 (en) | 2021-09-23 | 2024-01-23 | Honeywell Federal Manufacturing & Technologies, Llc | Photolithography system including selective light array |
Citations (7)
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JPH08288480A (ja) * | 1995-04-12 | 1996-11-01 | Sony Corp | シリコン量子ドットの製造方法 |
US6265329B1 (en) * | 1998-03-09 | 2001-07-24 | Motorola, Inc. | Quantum deposition distribution control |
KR20060103357A (ko) * | 2005-03-26 | 2006-09-29 | 재단법인서울대학교산학협력재단 | 나노 와이어 또는 나노 튜브의 선택적 성장을 위한 촉매물질 양자점 배열방법 |
US20070054426A1 (en) * | 2005-09-06 | 2007-03-08 | Institute Of Nuclear Energy Research | A method for preparing an optical active layer with 1~10 nm distributed silicon quantum dots |
CN1929154A (zh) * | 2005-09-08 | 2007-03-14 | 中国科学院半导体研究所 | 铟砷/镓砷量子点的分子束外延生长方法 |
JP2013051318A (ja) * | 2011-08-31 | 2013-03-14 | Fujifilm Corp | 量子ドット構造体の製造方法、波長変換素子および光電変換装置 |
CN105319765A (zh) * | 2015-11-16 | 2016-02-10 | 深圳市华星光电技术有限公司 | 量子点显示面板的制作方法 |
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JP2006269886A (ja) * | 2005-03-25 | 2006-10-05 | Advanced Telecommunication Research Institute International | 量子ドットの形成方法、それを用いた半導体発光素子の製造方法およびその方法により形成された半導体発光素子 |
JP5095260B2 (ja) * | 2006-05-15 | 2012-12-12 | 富士通株式会社 | 半導体発光装置の製造方法 |
JP2008098299A (ja) * | 2006-10-10 | 2008-04-24 | Mitsubishi Electric Corp | 半導体光素子及びその製造方法 |
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JP5125195B2 (ja) * | 2007-04-13 | 2013-01-23 | トヨタ自動車株式会社 | 量子ドットの製造方法 |
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CN101413110A (zh) | 2008-05-12 | 2009-04-22 | 长春理工大学 | 1.3微米波段InAs量子点材料的制备方法 |
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CN101752482B (zh) | 2008-12-17 | 2011-08-31 | 中国科学院半导体研究所 | 宽光谱自组织量子点材料的生长方法 |
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CN107919266B (zh) * | 2016-10-08 | 2020-04-10 | 青岛翼晨镭硕科技有限公司 | 一种量子点结构的制作方法 |
-
2016
- 2016-10-08 CN CN201610876764.6A patent/CN107919266B/zh active Active
- 2016-12-30 WO PCT/CN2016/113894 patent/WO2018064869A1/zh active Application Filing
- 2016-12-30 US US16/340,108 patent/US10665749B2/en active Active
- 2016-12-30 JP JP2019518435A patent/JP6845926B2/ja active Active
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JPH08288480A (ja) * | 1995-04-12 | 1996-11-01 | Sony Corp | シリコン量子ドットの製造方法 |
US6265329B1 (en) * | 1998-03-09 | 2001-07-24 | Motorola, Inc. | Quantum deposition distribution control |
KR20060103357A (ko) * | 2005-03-26 | 2006-09-29 | 재단법인서울대학교산학협력재단 | 나노 와이어 또는 나노 튜브의 선택적 성장을 위한 촉매물질 양자점 배열방법 |
US20070054426A1 (en) * | 2005-09-06 | 2007-03-08 | Institute Of Nuclear Energy Research | A method for preparing an optical active layer with 1~10 nm distributed silicon quantum dots |
CN1929154A (zh) * | 2005-09-08 | 2007-03-14 | 中国科学院半导体研究所 | 铟砷/镓砷量子点的分子束外延生长方法 |
JP2013051318A (ja) * | 2011-08-31 | 2013-03-14 | Fujifilm Corp | 量子ドット構造体の製造方法、波長変換素子および光電変換装置 |
CN105319765A (zh) * | 2015-11-16 | 2016-02-10 | 深圳市华星光电技术有限公司 | 量子点显示面板的制作方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108751254A (zh) * | 2018-06-01 | 2018-11-06 | 苏州大学 | 原位无损剥离量子点的方法 |
Also Published As
Publication number | Publication date |
---|---|
CN107919266B (zh) | 2020-04-10 |
US10665749B2 (en) | 2020-05-26 |
WO2018064869A1 (zh) | 2018-04-12 |
JP2020500416A (ja) | 2020-01-09 |
JP6845926B2 (ja) | 2021-03-24 |
US20200028026A1 (en) | 2020-01-23 |
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