CN106757191A - 一种具有高择优取向的铜晶体颗粒及其制备方法 - Google Patents
一种具有高择优取向的铜晶体颗粒及其制备方法 Download PDFInfo
- Publication number
- CN106757191A CN106757191A CN201611037367.6A CN201611037367A CN106757191A CN 106757191 A CN106757191 A CN 106757191A CN 201611037367 A CN201611037367 A CN 201611037367A CN 106757191 A CN106757191 A CN 106757191A
- Authority
- CN
- China
- Prior art keywords
- copper
- crystal particle
- preferred orientation
- concentration
- sour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 91
- 239000010949 copper Substances 0.000 title claims abstract description 91
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 91
- 239000013078 crystal Substances 0.000 title claims abstract description 40
- 239000002245 particle Substances 0.000 title claims abstract description 32
- 238000002360 preparation method Methods 0.000 title claims abstract description 11
- 238000007747 plating Methods 0.000 claims abstract description 22
- 238000009713 electroplating Methods 0.000 claims abstract description 16
- 239000000654 additive Substances 0.000 claims abstract description 11
- 230000000996 additive effect Effects 0.000 claims abstract description 9
- 238000004070 electrodeposition Methods 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 16
- 239000003795 chemical substances by application Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 239000002253 acid Substances 0.000 claims description 7
- 239000000975 dye Substances 0.000 claims description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 6
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 6
- 241000370738 Chlorion Species 0.000 claims description 4
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 4
- 229910001431 copper ion Inorganic materials 0.000 claims description 4
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 claims description 3
- 239000011780 sodium chloride Substances 0.000 claims description 3
- 239000002202 Polyethylene glycol Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 125000001741 organic sulfur group Chemical group 0.000 claims description 2
- 229920001223 polyethylene glycol Polymers 0.000 claims description 2
- 150000003242 quaternary ammonium salts Chemical class 0.000 claims description 2
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 238000000137 annealing Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- BQJTUDIVKSVBDU-UHFFFAOYSA-L copper;sulfuric acid;sulfate Chemical compound [Cu+2].OS(O)(=O)=O.[O-]S([O-])(=O)=O BQJTUDIVKSVBDU-UHFFFAOYSA-L 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D219/00—Heterocyclic compounds containing acridine or hydrogenated acridine ring systems
- C07D219/02—Heterocyclic compounds containing acridine or hydrogenated acridine ring systems with only hydrogen, hydrocarbon or substituted hydrocarbon radicals, directly attached to carbon atoms of the ring system
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D311/00—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings
- C07D311/02—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings ortho- or peri-condensed with carbocyclic rings or ring systems
- C07D311/78—Ring systems having three or more relevant rings
- C07D311/80—Dibenzopyrans; Hydrogenated dibenzopyrans
- C07D311/82—Xanthenes
- C07D311/84—Xanthenes with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached in position 9
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D335/00—Heterocyclic compounds containing six-membered rings having one sulfur atom as the only ring hetero atom
- C07D335/04—Heterocyclic compounds containing six-membered rings having one sulfur atom as the only ring hetero atom condensed with carbocyclic rings or ring systems
- C07D335/10—Dibenzothiopyrans; Hydrogenated dibenzothiopyrans
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/704—Crystalline
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2311/00—Metals, their alloys or their compounds
- B32B2311/12—Copper
Abstract
Description
Claims (5)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201611037367.6A CN106757191B (zh) | 2016-11-23 | 2016-11-23 | 一种具有高择优取向的铜晶体颗粒及其制备方法 |
PCT/CN2017/103498 WO2018095132A1 (en) | 2016-11-23 | 2017-09-26 | Copper crystal particles having highly preferred orientation and preparation method thereof |
KR1020187009564A KR102095497B1 (ko) | 2016-11-23 | 2017-09-26 | 높은 우선 배향을 갖는 구리 결정 입자 및 그의 제조 방법 |
US15/745,685 US10604857B2 (en) | 2016-11-23 | 2017-09-26 | Copper crystal particles having a highly preferred orientation and a preparation method thereof |
TW107109648A TWI663296B (zh) | 2016-11-23 | 2018-03-21 | Electroplated copper layer with copper crystal particles and method for preparing copper crystal particles |
US16/803,967 US11613824B2 (en) | 2016-11-23 | 2020-02-27 | Bamboo-like copper crystal particles having a highly preferred orientation |
Applications Claiming Priority (1)
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CN201611037367.6A CN106757191B (zh) | 2016-11-23 | 2016-11-23 | 一种具有高择优取向的铜晶体颗粒及其制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN106757191A true CN106757191A (zh) | 2017-05-31 |
CN106757191B CN106757191B (zh) | 2019-10-01 |
Family
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Family Applications (1)
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CN201611037367.6A Active CN106757191B (zh) | 2016-11-23 | 2016-11-23 | 一种具有高择优取向的铜晶体颗粒及其制备方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US10604857B2 (zh) |
KR (1) | KR102095497B1 (zh) |
CN (1) | CN106757191B (zh) |
TW (1) | TWI663296B (zh) |
WO (1) | WO2018095132A1 (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108396344A (zh) * | 2018-03-19 | 2018-08-14 | 苏州昕皓新材料科技有限公司 | 具有扭曲带状无序缠绕微观结构的电解铜箔及其制备方法 |
CN108977860A (zh) * | 2018-06-19 | 2018-12-11 | 南开大学 | 一种通过电沉积法在Mo衬底上沉积高质量Cu薄膜的方法 |
CN109082697A (zh) * | 2018-09-12 | 2018-12-25 | 河北工业大学 | 一种柱状铜颗粒膜的制备方法 |
CN109112580A (zh) * | 2018-09-18 | 2019-01-01 | 苏州昕皓新材料科技有限公司 | 一种具有热力学各向异性的金属材料及其制备方法 |
CN116043286A (zh) * | 2022-12-29 | 2023-05-02 | 大连理工大学 | 一种镀铜层晶粒尺寸和取向可控的镀液及电镀方法 |
WO2023151029A1 (en) * | 2022-02-11 | 2023-08-17 | Suzhou Shinhao Materials Llc | Method for electroplating nanograined copper |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113802155A (zh) * | 2021-10-09 | 2021-12-17 | 南开大学 | 一种高晶面择优取向铜箔的室温电沉积制备方法 |
CN114086224B (zh) * | 2021-12-21 | 2023-04-28 | 中国科学院深圳先进技术研究院 | 一种孪晶铜材料及制备方法和用途 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108396344A (zh) * | 2018-03-19 | 2018-08-14 | 苏州昕皓新材料科技有限公司 | 具有扭曲带状无序缠绕微观结构的电解铜箔及其制备方法 |
CN108977860A (zh) * | 2018-06-19 | 2018-12-11 | 南开大学 | 一种通过电沉积法在Mo衬底上沉积高质量Cu薄膜的方法 |
CN109082697A (zh) * | 2018-09-12 | 2018-12-25 | 河北工业大学 | 一种柱状铜颗粒膜的制备方法 |
CN109082697B (zh) * | 2018-09-12 | 2020-05-19 | 河北工业大学 | 一种柱状铜颗粒膜的制备方法 |
CN109112580A (zh) * | 2018-09-18 | 2019-01-01 | 苏州昕皓新材料科技有限公司 | 一种具有热力学各向异性的金属材料及其制备方法 |
WO2020057060A1 (en) * | 2018-09-18 | 2020-03-26 | Suzhou Shinhao Materials Llc | A metal material with thermodynamic anisotropy and a method of preparing the same |
US11242607B2 (en) | 2018-09-18 | 2022-02-08 | Suzhou Shinhao Materials Llc | Metal material with thermodynamic anisotropy and a method of preparing the same |
US11802345B2 (en) | 2018-09-18 | 2023-10-31 | Suzhou Shinhao Materials Llc | Metal material with thermodynamic anisotropy and a method of preparing the same |
WO2023151029A1 (en) * | 2022-02-11 | 2023-08-17 | Suzhou Shinhao Materials Llc | Method for electroplating nanograined copper |
CN116043286A (zh) * | 2022-12-29 | 2023-05-02 | 大连理工大学 | 一种镀铜层晶粒尺寸和取向可控的镀液及电镀方法 |
Also Published As
Publication number | Publication date |
---|---|
CN106757191B (zh) | 2019-10-01 |
TWI663296B (zh) | 2019-06-21 |
US10604857B2 (en) | 2020-03-31 |
TW201915221A (zh) | 2019-04-16 |
US11613824B2 (en) | 2023-03-28 |
KR20180071256A (ko) | 2018-06-27 |
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US20190338432A1 (en) | 2019-11-07 |
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