CN106609353A - 气体脉冲反应溅射法制备Al2O3阻氚涂层的方法 - Google Patents
气体脉冲反应溅射法制备Al2O3阻氚涂层的方法 Download PDFInfo
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- CN106609353A CN106609353A CN201611200119.9A CN201611200119A CN106609353A CN 106609353 A CN106609353 A CN 106609353A CN 201611200119 A CN201611200119 A CN 201611200119A CN 106609353 A CN106609353 A CN 106609353A
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- sputtering
- coating
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- annealing
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0084—Producing gradient compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201611200119.9A CN106609353B (zh) | 2016-12-22 | 2016-12-22 | 气体脉冲反应溅射法制备Al2O3阻氚涂层的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201611200119.9A CN106609353B (zh) | 2016-12-22 | 2016-12-22 | 气体脉冲反应溅射法制备Al2O3阻氚涂层的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106609353A true CN106609353A (zh) | 2017-05-03 |
CN106609353B CN106609353B (zh) | 2019-03-05 |
Family
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Family Applications (1)
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CN201611200119.9A Expired - Fee Related CN106609353B (zh) | 2016-12-22 | 2016-12-22 | 气体脉冲反应溅射法制备Al2O3阻氚涂层的方法 |
Country Status (1)
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CN (1) | CN106609353B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107217281A (zh) * | 2017-05-26 | 2017-09-29 | 华中科技大学 | 一种新型复合阻氚涂层及其制备方法 |
CN109913828A (zh) * | 2019-04-01 | 2019-06-21 | 烟台艾睿光电科技有限公司 | 一种非制冷红外探测器的热敏薄膜及其制备方法 |
CN113265609A (zh) * | 2021-04-30 | 2021-08-17 | 北京科技大学 | 一种快速制备316l不锈钢铝化物阻氚涂层表面氧化铝的方法 |
CN114807854A (zh) * | 2022-04-14 | 2022-07-29 | 华南理工大学 | 一种硅基表面沉积α-氧化铝介质膜的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104561891A (zh) * | 2015-01-30 | 2015-04-29 | 四川大学 | 双成分梯度阻氢渗透涂层及其制备方法 |
CN104674164A (zh) * | 2015-03-24 | 2015-06-03 | 四川大学 | 成分振荡金属氮化物涂层的制备方法 |
CN104708863A (zh) * | 2013-12-11 | 2015-06-17 | 北京有色金属研究总院 | 氧化铬和氧化铝复合涂层及其制备方法 |
CN105729934A (zh) * | 2014-12-11 | 2016-07-06 | 北京有色金属研究总院 | 一种M/MOx复合阻氢涂层及其制备方法 |
-
2016
- 2016-12-22 CN CN201611200119.9A patent/CN106609353B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104708863A (zh) * | 2013-12-11 | 2015-06-17 | 北京有色金属研究总院 | 氧化铬和氧化铝复合涂层及其制备方法 |
CN105729934A (zh) * | 2014-12-11 | 2016-07-06 | 北京有色金属研究总院 | 一种M/MOx复合阻氢涂层及其制备方法 |
CN104561891A (zh) * | 2015-01-30 | 2015-04-29 | 四川大学 | 双成分梯度阻氢渗透涂层及其制备方法 |
CN104674164A (zh) * | 2015-03-24 | 2015-06-03 | 四川大学 | 成分振荡金属氮化物涂层的制备方法 |
Non-Patent Citations (5)
Title |
---|
SHUAI LIU ET AL.: ""Investigation of coating CLAM steel substrates with erbium oxide by a magnetron sputtering method"", 《FUSION ENGINEERING AND DESIGN》 * |
XINHUI MAO ET AL.: ""Deposition of aluminium oxide films by pulsed reactive sputtering"", 《J.MATER.SCI.TECHNOL》 * |
张桂凯等: ""FeAl/Al2O3阻氚层的制备新方法与性能"", 《稀有金属材料与工程》 * |
戴松元: "《薄膜太阳能电池关键科学和技术》", 31 January 2013, 上海科学技术出版社 * |
钱苗根等: "《现代表面技术》", 30 April 1999, 机械工业出版社 * |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107217281A (zh) * | 2017-05-26 | 2017-09-29 | 华中科技大学 | 一种新型复合阻氚涂层及其制备方法 |
CN109913828A (zh) * | 2019-04-01 | 2019-06-21 | 烟台艾睿光电科技有限公司 | 一种非制冷红外探测器的热敏薄膜及其制备方法 |
CN109913828B (zh) * | 2019-04-01 | 2021-05-04 | 烟台艾睿光电科技有限公司 | 一种非制冷红外探测器的热敏薄膜及其制备方法 |
CN113265609A (zh) * | 2021-04-30 | 2021-08-17 | 北京科技大学 | 一种快速制备316l不锈钢铝化物阻氚涂层表面氧化铝的方法 |
CN113265609B (zh) * | 2021-04-30 | 2022-04-19 | 北京科技大学 | 一种快速制备316l不锈钢铝化物阻氚涂层表面氧化铝的方法 |
CN114807854A (zh) * | 2022-04-14 | 2022-07-29 | 华南理工大学 | 一种硅基表面沉积α-氧化铝介质膜的方法 |
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Publication number | Publication date |
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CN106609353B (zh) | 2019-03-05 |
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