CN106573831B - 用于减少显示器玻璃静电放电的有机表面处理 - Google Patents

用于减少显示器玻璃静电放电的有机表面处理 Download PDF

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Publication number
CN106573831B
CN106573831B CN201580043135.9A CN201580043135A CN106573831B CN 106573831 B CN106573831 B CN 106573831B CN 201580043135 A CN201580043135 A CN 201580043135A CN 106573831 B CN106573831 B CN 106573831B
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Prior art keywords
glass substrate
organic film
glass
less
coefficient
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Expired - Fee Related
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CN201580043135.9A
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English (en)
Chinese (zh)
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CN106573831A (zh
Inventor
J·P·汉米尔顿
R·G·曼利
J·M·米斯
W·J·瓦尔扎克
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Corning Inc
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Corning Inc
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06Forming glass sheets
    • C03B17/064Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B18/00Shaping glass in contact with the surface of a liquid
    • C03B18/02Forming sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/30Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02107Forming insulating materials on a substrate
    • H01L21/02109Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/60Protection against electrostatic charges or discharges, e.g. Faraday shields
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/11Deposition methods from solutions or suspensions
    • C03C2218/111Deposition methods from solutions or suspensions by dipping, immersion
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/152Deposition methods from the vapour phase by cvd
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/30Aspects of methods for coating glass not covered above
    • C03C2218/365Coating different sides of a glass substrate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/411Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by materials, geometry or structure of the substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Treatment Of Glass (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
CN201580043135.9A 2014-08-12 2015-08-07 用于减少显示器玻璃静电放电的有机表面处理 Expired - Fee Related CN106573831B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462036166P 2014-08-12 2014-08-12
US62/036,166 2014-08-12
PCT/US2015/044226 WO2016025320A1 (en) 2014-08-12 2015-08-07 Organic surface treatments for display glasses to reduce esd

Publications (2)

Publication Number Publication Date
CN106573831A CN106573831A (zh) 2017-04-19
CN106573831B true CN106573831B (zh) 2020-04-21

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CN201580043135.9A Expired - Fee Related CN106573831B (zh) 2014-08-12 2015-08-07 用于减少显示器玻璃静电放电的有机表面处理

Country Status (6)

Country Link
US (1) US10153268B2 (enExample)
JP (1) JP6734842B2 (enExample)
KR (1) KR20170041248A (enExample)
CN (1) CN106573831B (enExample)
TW (1) TWI687378B (enExample)
WO (1) WO2016025320A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI778019B (zh) * 2017-02-14 2022-09-21 美商康寧公司 併入積層基板的電子組件及其製造方法
JP2019081124A (ja) * 2017-10-30 2019-05-30 横浜油脂工業株式会社 ガラス基板に蓄積する静電気を低減させる洗浄方法
KR102662640B1 (ko) * 2018-03-07 2024-05-07 코닝 인코포레이티드 감소된 정전기 대전을 위한 텍스처된 유리 표면들
JP2020101616A (ja) * 2018-12-20 2020-07-02 日本電気硝子株式会社 電子デバイスの製造方法及びガラス基板
CN113527743B (zh) * 2021-07-26 2022-12-23 马鞍山东毅新材料科技有限公司 一种防静电转移的显示屏保护膜及其生产工艺

Citations (4)

* Cited by examiner, † Cited by third party
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US5985700A (en) * 1996-11-26 1999-11-16 Corning Incorporated TFT fabrication on leached glass surface
CN1445187A (zh) * 2002-03-14 2003-10-01 碧悠国际光电股份有限公司 平面显示器用的基板玻璃组成物
TWI225938B (en) * 2000-07-31 2005-01-01 Tomoegawa Paper Co Ltd Anti-static anti-reflective film
CN102414140A (zh) * 2009-05-07 2012-04-11 日本电气硝子株式会社 玻璃基板及其制造方法

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US3338696A (en) 1964-05-06 1967-08-29 Corning Glass Works Sheet forming apparatus
BE757057A (fr) 1969-10-06 1971-04-05 Corning Glass Works Procede et appareil de controle d'epaisseur d'une feuille de verre nouvellement etiree
US4102664A (en) 1977-05-18 1978-07-25 Corning Glass Works Method for making glass articles with defect-free surfaces
US4214886A (en) 1979-04-05 1980-07-29 Corning Glass Works Forming laminated sheet glass
US4880453A (en) 1988-12-19 1989-11-14 Corning Incorporated Method for making glass articles with defect-free surfaces and soluble glasses therefor
US5119258A (en) 1990-02-06 1992-06-02 Hmt Technology Corporation Magnetic disc with low-friction glass substrate
JP2720612B2 (ja) * 1991-02-27 1998-03-04 日本電気株式会社 薄膜トランジスタアレイ基板の製造方法
JPH0753948A (ja) * 1993-08-19 1995-02-28 Kao Corp 帯電防止材料およびこれを含む光記録媒体
US5792327A (en) 1994-07-19 1998-08-11 Corning Incorporated Adhering metal to glass
KR20000036175A (ko) 1996-09-17 2000-06-26 알프레드 엘. 미첼슨 텍스처화된 표면 및 이의 제조방법
US6099971A (en) 1998-09-09 2000-08-08 Plaskolite, Inc. Polysiloxane abrasion and static resistant coating
JP2002072922A (ja) 2000-06-13 2002-03-12 Asahi Glass Co Ltd ディスプレイ用ガラス基板およびその選別方法
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Publication number Priority date Publication date Assignee Title
US5985700A (en) * 1996-11-26 1999-11-16 Corning Incorporated TFT fabrication on leached glass surface
TWI225938B (en) * 2000-07-31 2005-01-01 Tomoegawa Paper Co Ltd Anti-static anti-reflective film
CN1445187A (zh) * 2002-03-14 2003-10-01 碧悠国际光电股份有限公司 平面显示器用的基板玻璃组成物
CN102414140A (zh) * 2009-05-07 2012-04-11 日本电气硝子株式会社 玻璃基板及其制造方法

Also Published As

Publication number Publication date
CN106573831A (zh) 2017-04-19
US10153268B2 (en) 2018-12-11
TW201612128A (en) 2016-04-01
TWI687378B (zh) 2020-03-11
WO2016025320A1 (en) 2016-02-18
JP6734842B2 (ja) 2020-08-05
JP2017524644A (ja) 2017-08-31
US20170222025A1 (en) 2017-08-03
KR20170041248A (ko) 2017-04-14

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