CN105355216B - 磁盘用玻璃基板和玻璃雏形的制造方法以及磁盘用玻璃基板和玻璃雏形 - Google Patents
磁盘用玻璃基板和玻璃雏形的制造方法以及磁盘用玻璃基板和玻璃雏形 Download PDFInfo
- Publication number
- CN105355216B CN105355216B CN201510845654.9A CN201510845654A CN105355216B CN 105355216 B CN105355216 B CN 105355216B CN 201510845654 A CN201510845654 A CN 201510845654A CN 105355216 B CN105355216 B CN 105355216B
- Authority
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- China
- Prior art keywords
- glass
- glass blank
- grinding
- blank
- mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011521 glass Substances 0.000 title claims abstract description 412
- 239000000758 substrate Substances 0.000 title claims abstract description 118
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title abstract description 81
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000003595 mist Substances 0.000 claims 1
- 238000000465 moulding Methods 0.000 abstract description 49
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 description 73
- 239000006060 molten glass Substances 0.000 description 59
- 230000008569 process Effects 0.000 description 59
- 239000006061 abrasive grain Substances 0.000 description 57
- 239000010410 layer Substances 0.000 description 42
- 238000005520 cutting process Methods 0.000 description 26
- 238000010586 diagram Methods 0.000 description 25
- 239000000463 material Substances 0.000 description 25
- 238000003754 machining Methods 0.000 description 23
- 229910003460 diamond Inorganic materials 0.000 description 17
- 239000010432 diamond Substances 0.000 description 17
- 238000005498 polishing Methods 0.000 description 17
- 230000003746 surface roughness Effects 0.000 description 17
- 239000002245 particle Substances 0.000 description 16
- 238000003825 pressing Methods 0.000 description 13
- 238000012545 processing Methods 0.000 description 13
- 238000003426 chemical strengthening reaction Methods 0.000 description 12
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- 230000012447 hatching Effects 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 238000001816 cooling Methods 0.000 description 8
- 239000005304 optical glass Substances 0.000 description 8
- 238000009826 distribution Methods 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- 239000002826 coolant Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000012360 testing method Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 239000005354 aluminosilicate glass Substances 0.000 description 4
- 229910000420 cerium oxide Inorganic materials 0.000 description 4
- 230000001050 lubricating effect Effects 0.000 description 4
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 4
- 239000004215 Carbon black (E152) Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 239000013256 coordination polymer Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- 239000005337 ground glass Substances 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 239000006082 mold release agent Substances 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- 238000007665 sagging Methods 0.000 description 3
- 239000000741 silica gel Substances 0.000 description 3
- 229910002027 silica gel Inorganic materials 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 229910001415 sodium ion Inorganic materials 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 208000032544 Cicatrix Diseases 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910001414 potassium ion Inorganic materials 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 239000005401 pressed glass Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 231100000241 scar Toxicity 0.000 description 1
- 230000037387 scars Effects 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/05—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing in machines with reciprocating moulds
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/088—Flat discs
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/12—Cooling, heating, or insulating the plunger, the mould, or the glass-pressing machine; cooling or heating of the glass in the mould
- C03B11/122—Heating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B7/00—Distributors for the molten glass; Means for taking-off charges of molten glass; Producing the gob, e.g. controlling the gob shape, weight or delivery tact
- C03B7/10—Cutting-off or severing the glass flow with the aid of knives or scissors or non-contacting cutting means, e.g. a gas jet; Construction of the blades used
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/05—Press-mould die materials
- C03B2215/06—Metals or alloys
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/70—Horizontal or inclined press axis
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Surface Treatment Of Glass (AREA)
- Magnetic Record Carriers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010082750 | 2010-03-31 | ||
| JP2010-082750 | 2010-03-31 | ||
| CN201180002677.3A CN102859595B (zh) | 2010-03-31 | 2011-03-31 | 磁盘用玻璃基板和玻璃雏形的制造方法以及磁盘用玻璃基板和玻璃雏形 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180002677.3A Division CN102859595B (zh) | 2010-03-31 | 2011-03-31 | 磁盘用玻璃基板和玻璃雏形的制造方法以及磁盘用玻璃基板和玻璃雏形 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105355216A CN105355216A (zh) | 2016-02-24 |
| CN105355216B true CN105355216B (zh) | 2017-10-03 |
Family
ID=44711808
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180002677.3A Expired - Fee Related CN102859595B (zh) | 2010-03-31 | 2011-03-31 | 磁盘用玻璃基板和玻璃雏形的制造方法以及磁盘用玻璃基板和玻璃雏形 |
| CN201510845654.9A Active CN105355216B (zh) | 2010-03-31 | 2011-03-31 | 磁盘用玻璃基板和玻璃雏形的制造方法以及磁盘用玻璃基板和玻璃雏形 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180002677.3A Expired - Fee Related CN102859595B (zh) | 2010-03-31 | 2011-03-31 | 磁盘用玻璃基板和玻璃雏形的制造方法以及磁盘用玻璃基板和玻璃雏形 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8973404B2 (enExample) |
| JP (3) | JP5431574B2 (enExample) |
| CN (2) | CN102859595B (enExample) |
| MY (1) | MY163806A (enExample) |
| PH (1) | PH12012501920A1 (enExample) |
| SG (2) | SG10201502549PA (enExample) |
| WO (1) | WO2011122054A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8806895B2 (en) * | 2010-12-09 | 2014-08-19 | Hoya Corporation | Manufacturing method for a glass substrate for magnetic disk |
| CN106430918B (zh) * | 2011-04-21 | 2019-05-14 | Hoya株式会社 | 磁盘用玻璃坯料的制造方法及磁盘用玻璃基板的制造方法、玻璃坯料、磁盘用玻璃基板 |
| CN103492328B (zh) * | 2011-04-27 | 2016-01-27 | Hoya株式会社 | 磁盘用玻璃毛坯的制造方法、磁盘用玻璃基板的制造方法、磁盘用玻璃毛坯 |
| JP2013140649A (ja) * | 2011-12-29 | 2013-07-18 | Hoya Corp | 磁気ディスク用ガラス基板の製造方法、磁気ディスク用ガラス基板、及び化学強化用かご |
| WO2014051053A1 (ja) * | 2012-09-28 | 2014-04-03 | Hoya株式会社 | 磁気ディスク用ガラスブランクの製造方法、磁気ディスク用ガラス基板の製造方法、及び磁気ディスク用ガラスブランク |
| CN110651327B (zh) * | 2017-09-29 | 2021-10-15 | Hoya株式会社 | 玻璃间隔件和硬盘驱动器装置 |
| DE102020111728B4 (de) * | 2020-04-29 | 2022-06-23 | Schott Ag | Elektro-optisches Wandlerbauteil mit einem Abstandhalter, sowie Abstandhalter-Wafer zur Herstellung eines elektro-optischen Wandlerbauteils |
| CN114296494B (zh) * | 2022-01-05 | 2023-01-10 | 信义玻璃工程(东莞)有限公司 | 温度控制方法、装置、设备和存储介质 |
Citations (4)
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|---|---|---|---|---|
| CN1934620A (zh) * | 2004-03-25 | 2007-03-21 | Hoya株式会社 | 磁盘用玻璃基板 |
| CN1947177A (zh) * | 2004-03-31 | 2007-04-11 | Hoya株式会社 | 磁盘用玻璃基板以及磁盘 |
| CN101009350A (zh) * | 2006-01-27 | 2007-08-01 | 日立电线株式会社 | Ⅲ-ⅴ族氮化物系半导体衬底、其制造方法及ⅲ-ⅴ族氮化物系发光元件 |
| CN101120055A (zh) * | 2005-02-18 | 2008-02-06 | 日本曹达株式会社 | 有机无机复合体 |
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| JPS63248727A (ja) | 1987-04-02 | 1988-10-17 | Olympus Optical Co Ltd | ガラス成形品の製造方法および製造装置 |
| JPH01133948A (ja) | 1987-11-18 | 1989-05-26 | Canon Inc | 光学素子の製造方法 |
| JPH01164738A (ja) | 1987-12-22 | 1989-06-28 | Canon Inc | 光学素子の成形装置 |
| JPH06171959A (ja) | 1992-12-10 | 1994-06-21 | Olympus Optical Co Ltd | 光学素子製造方法 |
| JP3148641B2 (ja) * | 1996-06-26 | 2001-03-19 | 日本碍子株式会社 | 磁気ディスク用結晶化ガラス基板のブランク材およびその製造方法 |
| US6442975B1 (en) * | 1996-12-26 | 2002-09-03 | Hoya Corporation | Method of manufacturing thin-plate glass article, method of manufacturing glass substrate for information recording medium, and method of manufacturing magnetic recording medium |
| JP3709033B2 (ja) | 1996-12-27 | 2005-10-19 | Hoya株式会社 | ガラス製品の製造方法 |
| JPH11228150A (ja) | 1998-02-16 | 1999-08-24 | Ngk Insulators Ltd | ガラス基板の作製方法 |
| JP3420192B2 (ja) | 2000-02-01 | 2003-06-23 | 株式会社オハラ | ガラスセラミックス |
| US20020009602A1 (en) * | 2000-03-13 | 2002-01-24 | Hoya Corporation | Method and apparatus of fabricating glass molded article, method of fabricating glass substrate, and information recording medium |
| JP4127974B2 (ja) * | 2001-01-29 | 2008-07-30 | Hoya株式会社 | 基板ブランク、基板および情報記録媒体それぞれの製造方法 |
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| JP2003030822A (ja) | 2001-07-13 | 2003-01-31 | Fuji Electric Co Ltd | 磁気ディスク用基板の加工方法 |
| US20030134734A1 (en) * | 2001-08-08 | 2003-07-17 | Shiro Nishimoto | Press molding method for glass and manufacturing method for glass substrate using this method |
| JP2003054965A (ja) | 2001-08-08 | 2003-02-26 | Minolta Co Ltd | ガラスのプレス成形方法および該方法を用いたハードディスク用ガラス基板の製造方法 |
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| US7395679B2 (en) * | 2004-03-19 | 2008-07-08 | Konica Minolta Opto, Inc. | Method of manufacturing glass substrate for information recording medium |
| JP4380379B2 (ja) | 2004-03-19 | 2009-12-09 | コニカミノルタオプト株式会社 | 情報記録媒体用ガラス基板の製造方法 |
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| JP2008174401A (ja) * | 2007-01-16 | 2008-07-31 | Konica Minolta Opto Inc | ガラス基板成形用金型、ガラス基板の製造方法、情報記録媒体用ガラス基板の製造方法及び情報記録媒体の製造方法 |
| JP2008174402A (ja) * | 2007-01-16 | 2008-07-31 | Konica Minolta Opto Inc | ガラス基板成形用金型、ガラス基板の製造方法、情報記録媒体用ガラス基板の製造方法及び情報記録媒体の製造方法 |
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| JP5170877B2 (ja) | 2008-03-05 | 2013-03-27 | 古河電気工業株式会社 | ガラス基板の製造方法 |
| JP2009269762A (ja) | 2008-04-30 | 2009-11-19 | Fuji Electric Device Technology Co Ltd | ガラス素材およびその成形用金型ならびに磁気ディスク用ガラス基板の製造方法 |
| US8806895B2 (en) * | 2010-12-09 | 2014-08-19 | Hoya Corporation | Manufacturing method for a glass substrate for magnetic disk |
| US20120247155A1 (en) * | 2011-03-30 | 2012-10-04 | Hoya Corporation | Method of manufacturing glass blank for magnetic recording medium glass substrate, method of manufacturing magnetic recording medium glass substrate, method of manufacturing magnetic recording medium, and apparatus for manufacturing glass blank for magnetic recording medium glass substrate |
-
2011
- 2011-03-31 MY MYPI2011006190A patent/MY163806A/en unknown
- 2011-03-31 SG SG10201502549PA patent/SG10201502549PA/en unknown
- 2011-03-31 US US13/379,803 patent/US8973404B2/en not_active Expired - Fee Related
- 2011-03-31 CN CN201180002677.3A patent/CN102859595B/zh not_active Expired - Fee Related
- 2011-03-31 JP JP2012508106A patent/JP5431574B2/ja not_active Expired - Fee Related
- 2011-03-31 CN CN201510845654.9A patent/CN105355216B/zh active Active
- 2011-03-31 PH PH1/2012/501920A patent/PH12012501920A1/en unknown
- 2011-03-31 SG SG2011095726A patent/SG176974A1/en unknown
- 2011-03-31 WO PCT/JP2011/001974 patent/WO2011122054A1/ja not_active Ceased
-
2012
- 2012-08-20 JP JP2012181867A patent/JP5666524B2/ja active Active
-
2013
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| CN1934620A (zh) * | 2004-03-25 | 2007-03-21 | Hoya株式会社 | 磁盘用玻璃基板 |
| CN1947177A (zh) * | 2004-03-31 | 2007-04-11 | Hoya株式会社 | 磁盘用玻璃基板以及磁盘 |
| CN101120055A (zh) * | 2005-02-18 | 2008-02-06 | 日本曹达株式会社 | 有机无机复合体 |
| CN101009350A (zh) * | 2006-01-27 | 2007-08-01 | 日立电线株式会社 | Ⅲ-ⅴ族氮化物系半导体衬底、其制造方法及ⅲ-ⅴ族氮化物系发光元件 |
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| US8973404B2 (en) | 2015-03-10 |
| CN102859595A (zh) | 2013-01-02 |
| JP2012232899A (ja) | 2012-11-29 |
| JPWO2011122054A1 (ja) | 2013-07-08 |
| CN102859595B (zh) | 2016-01-20 |
| SG10201502549PA (en) | 2015-05-28 |
| CN105355216A (zh) | 2016-02-24 |
| SG176974A1 (en) | 2012-02-28 |
| JP5431574B2 (ja) | 2014-03-05 |
| JP5666524B2 (ja) | 2015-02-12 |
| PH12012501920A1 (en) | 2013-02-04 |
| WO2011122054A1 (ja) | 2011-10-06 |
| JP5632027B2 (ja) | 2014-11-26 |
| US20120151967A1 (en) | 2012-06-21 |
| JP2013136513A (ja) | 2013-07-11 |
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