CN105225971B - 半导体装置的制造方法 - Google Patents

半导体装置的制造方法 Download PDF

Info

Publication number
CN105225971B
CN105225971B CN201510363009.3A CN201510363009A CN105225971B CN 105225971 B CN105225971 B CN 105225971B CN 201510363009 A CN201510363009 A CN 201510363009A CN 105225971 B CN105225971 B CN 105225971B
Authority
CN
China
Prior art keywords
cylindrical electrode
tubular electrode
substrate
electrode
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510363009.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN105225971A (zh
Inventor
吉松直树
内田清宏
鹿野武敏
新饲雅芳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of CN105225971A publication Critical patent/CN105225971A/zh
Application granted granted Critical
Publication of CN105225971B publication Critical patent/CN105225971B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H10W70/093
    • H10W70/658
    • H10W74/01
    • H10W74/114
    • H10W90/701
    • H10W95/00
    • H10W40/255
    • H10W70/479
    • H10W72/073
    • H10W72/07336
    • H10W72/075
    • H10W72/352
    • H10W72/5363
    • H10W72/5445
    • H10W72/884
    • H10W74/00
    • H10W90/734
    • H10W90/754

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
CN201510363009.3A 2014-06-27 2015-06-26 半导体装置的制造方法 Active CN105225971B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014132430A JP6249892B2 (ja) 2014-06-27 2014-06-27 半導体装置の製造方法
JP2014-132430 2014-06-27

Publications (2)

Publication Number Publication Date
CN105225971A CN105225971A (zh) 2016-01-06
CN105225971B true CN105225971B (zh) 2018-12-04

Family

ID=54839996

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510363009.3A Active CN105225971B (zh) 2014-06-27 2015-06-26 半导体装置的制造方法

Country Status (4)

Country Link
US (1) US9437460B2 (enExample)
JP (1) JP6249892B2 (enExample)
CN (1) CN105225971B (enExample)
DE (1) DE102015210603B4 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017159505A1 (ja) 2016-03-18 2017-09-21 富士電機株式会社 半導体装置、金属電極部材および半導体装置の製造方法
US10062621B2 (en) * 2016-04-30 2018-08-28 Ixys, Llc Power semiconductor device module having mechanical corner press-fit anchors
US10347549B2 (en) * 2016-04-30 2019-07-09 Littelfuse, Inc. Power semiconductor device module having mechanical corner press-fit anchors
WO2018135176A1 (ja) * 2017-01-17 2018-07-26 富士電機株式会社 半導体装置
US11244836B2 (en) * 2017-06-21 2022-02-08 Mitsubishi Electric Corporation Semiconductor apparatus, power conversion device, and method for manufacturing semiconductor apparatus
CN107946273A (zh) * 2017-12-22 2018-04-20 江苏宏微科技股份有限公司 一种插接功率模块封装装置
JP7107120B2 (ja) * 2018-09-14 2022-07-27 富士電機株式会社 半導体装置、半導体装置の製造方法
JP7279354B2 (ja) * 2018-12-17 2023-05-23 富士電機株式会社 半導体素子及び半導体素子の識別方法
JP7293936B2 (ja) 2019-07-19 2023-06-20 富士電機株式会社 半導体装置及び半導体装置の製造方法
JP7404834B2 (ja) * 2019-12-06 2023-12-26 富士電機株式会社 半導体装置及び半導体装置の製造方法
CN111769090A (zh) * 2020-07-21 2020-10-13 无锡利普思半导体有限公司 塑封功率模块、塑封模具及塑封方法
JP7666045B2 (ja) * 2021-03-19 2025-04-22 富士電機株式会社 半導体装置
JP7692720B2 (ja) * 2021-04-06 2025-06-16 三菱重工業株式会社 パワーモジュール、及びパワーモジュールの製造方法
JP7484800B2 (ja) * 2021-04-08 2024-05-16 三菱電機株式会社 半導体装置および半導体装置の製造方法
US12494418B2 (en) * 2021-07-26 2025-12-09 Infineon Technologies Ag Power module with press-fit contacts
US11901273B2 (en) * 2021-07-26 2024-02-13 Infineon Technologies Ag Power module with press-fit contacts
DE102021121797A1 (de) * 2021-08-23 2023-02-23 Infineon Technologies Ag Leistungshalbleitermodul mit buchse oder einpresspin und verfahren zu seiner herstellung
US12438068B2 (en) 2022-01-18 2025-10-07 Infineon Technologies Austria Ag Stacked module arrangement
US20240170378A1 (en) * 2022-11-17 2024-05-23 Semiconductor Components Industries, Llc Power module package with molded via and dual side press-fit pin
WO2024110052A1 (en) * 2022-11-25 2024-05-30 Huawei Digital Power Technologies Co., Ltd. Molded power module
DE102024202665A1 (de) * 2024-03-20 2025-09-25 Volkswagen Aktiengesellschaft Verfahren zur Herstellung einer leistungselektronischen Einrichtung, leistungselektronische Einrichtung und Kraftfahrzeug

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102263194A (zh) * 2011-04-13 2011-11-30 日月光半导体制造股份有限公司 半导体封装与制造半导体封装的方法
CN103824821A (zh) * 2014-03-11 2014-05-28 湖南进芯电子科技有限公司 一种塑料密闭封装的开关电源模块及其制备方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5118027A (en) * 1991-04-24 1992-06-02 International Business Machines Corporation Method of aligning and mounting solder balls to a substrate
JP4626098B2 (ja) * 2001-06-15 2011-02-02 イビデン株式会社 プリント配線板の製造方法
JP5358077B2 (ja) * 2007-09-28 2013-12-04 スパンション エルエルシー 半導体装置及びその製造方法
DE102008005547B4 (de) * 2008-01-23 2013-08-29 Infineon Technologies Ag Leistungshalbleitermodul und Schaltungsanordnung mit einem Leistungshalbleitermodul
DE102008029829B4 (de) * 2008-06-25 2012-10-11 Danfoss Silicon Power Gmbh Vertikal nach oben kontaktierender Halbleiter und Verfahren zu dessen Herstellung
JP5101467B2 (ja) * 2008-11-26 2012-12-19 三菱電機株式会社 電力用半導体モジュール
JP5012772B2 (ja) 2008-11-28 2012-08-29 三菱電機株式会社 半導体装置の製造方法および半導体装置
JP5245880B2 (ja) * 2009-02-04 2013-07-24 三菱電機株式会社 電力用半導体モジュールとその製造方法
JP5262793B2 (ja) 2009-02-13 2013-08-14 三菱電機株式会社 電力用半導体装置とその製造方法
JP5268786B2 (ja) * 2009-06-04 2013-08-21 三菱電機株式会社 半導体モジュール
JP2011187819A (ja) 2010-03-10 2011-09-22 Mitsubishi Electric Corp 樹脂封止型パワーモジュールおよびその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102263194A (zh) * 2011-04-13 2011-11-30 日月光半导体制造股份有限公司 半导体封装与制造半导体封装的方法
CN103824821A (zh) * 2014-03-11 2014-05-28 湖南进芯电子科技有限公司 一种塑料密闭封装的开关电源模块及其制备方法

Also Published As

Publication number Publication date
US9437460B2 (en) 2016-09-06
CN105225971A (zh) 2016-01-06
JP2016012604A (ja) 2016-01-21
DE102015210603B4 (de) 2019-05-23
JP6249892B2 (ja) 2017-12-20
DE102015210603A1 (de) 2015-12-31
US20150380274A1 (en) 2015-12-31

Similar Documents

Publication Publication Date Title
CN105225971B (zh) 半导体装置的制造方法
EP2963684B1 (en) Power semiconductor device
CN103972198B (zh) 半导体装置及半导体装置的制造方法
US9349709B2 (en) Electronic component with sheet-like redistribution structure
US10262948B2 (en) Semiconductor module having outflow prevention external terminals
EP2597675B1 (en) Encapsulated semiconductor device and method for producing same
US9570380B2 (en) Electronic device provided with an encapsulation structure with improved electric accessibility and method of manufacturing the electronic device
EP2775524B1 (en) Method for manufacturing a semiconductor device
CN107078127A (zh) 电力用半导体装置及其制造方法
US8901721B1 (en) Lead frame based semiconductor die package
JP2018170348A (ja) 半導体装置とその製造方法
US20170127567A1 (en) Electronic device equipped with a heat sink
JP2012199436A (ja) 半導体装置及びその製造方法
CN112382576A (zh) 半导体装置及其制造方法
JP2011187819A (ja) 樹脂封止型パワーモジュールおよびその製造方法
CN104823277A (zh) 用于制造开关模块及所属的格栅模块的方法及所属的格栅模块和相应的电子的标准组件
US8866296B2 (en) Semiconductor device comprising thin-film terminal with deformed portion
JP2012238737A (ja) 半導体モジュール及びその製造方法
CN109087903B (zh) 电子装置、用于电子装置的引线框架以及制造电子装置和引线框架的方法
CN104882386B (zh) 半导体器件格栅阵列封装
JP4887346B2 (ja) 半導体装置
JP2009065201A (ja) 半導体装置の製造方法
CN201608177U (zh) 发光二极管引线架结构
JP2012174748A (ja) 半導体モジュールの構造およびその製造方法
EP4425537A2 (en) Hybrid multi-die qfp-qfn package

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant