CN104507686B - 喷嘴板、喷嘴板制造方法、喷墨头和喷墨打印装置 - Google Patents

喷嘴板、喷嘴板制造方法、喷墨头和喷墨打印装置 Download PDF

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Publication number
CN104507686B
CN104507686B CN201380040170.6A CN201380040170A CN104507686B CN 104507686 B CN104507686 B CN 104507686B CN 201380040170 A CN201380040170 A CN 201380040170A CN 104507686 B CN104507686 B CN 104507686B
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CN
China
Prior art keywords
nozzle
substrate
discharge port
nozzle plate
denoted
Prior art date
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Active
Application number
CN201380040170.6A
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English (en)
Chinese (zh)
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CN104507686A (zh
Inventor
植田尚之
中村有希
安部由希子
松本真二
曾根雄司
高田美树子
早乙女辽
早乙女辽一
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Ricoh Co Ltd
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Ricoh Co Ltd
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Publication of CN104507686A publication Critical patent/CN104507686A/zh
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/16—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass plates with holes of very small diameter, e.g. for spinning or burner nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Coating Apparatus (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Nozzles (AREA)
CN201380040170.6A 2012-07-31 2013-07-19 喷嘴板、喷嘴板制造方法、喷墨头和喷墨打印装置 Active CN104507686B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012170502A JP6048794B2 (ja) 2012-07-31 2012-07-31 ノズルプレート、ノズルプレートの製造方法、インクジェットヘッド及びインクジェット印刷装置
JP2012-170502 2012-07-31
PCT/JP2013/070255 WO2014021200A1 (en) 2012-07-31 2013-07-19 Nozzle plate, method of manufacturing nozzle plate, inkjet head, and inkjet printing apparatus

Publications (2)

Publication Number Publication Date
CN104507686A CN104507686A (zh) 2015-04-08
CN104507686B true CN104507686B (zh) 2017-03-15

Family

ID=50027878

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380040170.6A Active CN104507686B (zh) 2012-07-31 2013-07-19 喷嘴板、喷嘴板制造方法、喷墨头和喷墨打印装置

Country Status (8)

Country Link
US (1) US9481173B2 (enExample)
EP (1) EP2879879B1 (enExample)
JP (1) JP6048794B2 (enExample)
KR (1) KR101690893B1 (enExample)
CN (1) CN104507686B (enExample)
IN (1) IN2014KN02996A (enExample)
TW (1) TWI592312B (enExample)
WO (1) WO2014021200A1 (enExample)

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CN106415744B (zh) * 2014-06-25 2018-12-11 英特尔公司 用于形成集成无源器件的技术
EP3000602B1 (en) * 2014-09-26 2020-07-22 Agfa Nv High viscosity jetting method
JP6575102B2 (ja) 2015-03-27 2019-09-18 株式会社リコー 液滴吐出装置
CH711295B1 (fr) * 2015-07-06 2019-11-29 Cartier Int Ag Procédé de fixation par assemblage anodique.
EP3125296B1 (en) 2015-07-30 2020-06-10 Ricoh Company, Ltd. Field-effect transistor, display element, image display device, and system
JP6607013B2 (ja) 2015-12-08 2019-11-20 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
US10600916B2 (en) 2015-12-08 2020-03-24 Ricoh Company, Ltd. Field-effect transistor, display element, image display device, and system
JP6701835B2 (ja) 2016-03-11 2020-05-27 株式会社リコー 電界効果型トランジスタ、表示素子、画像表示装置、及びシステム
CN105750848B (zh) * 2016-05-18 2017-10-17 昆山精诚得精密五金模具有限公司 相贯面带微细孔的金属喷嘴套的加工方法
US12399150B2 (en) 2019-05-02 2025-08-26 The Board Of Trustees Of The University Of Illinois Atomic-to-nanoscale matter emission / flow regulation device
KR102474000B1 (ko) * 2022-03-07 2022-12-05 주식회사피에스디이 나노 임프린팅을 위한 디스펜서 및 그 제조 방법
JP2023167238A (ja) * 2022-05-11 2023-11-24 日本発條株式会社 マルチノズルと、マルチノズルを用いた流動体の塗布方法
KR20240017222A (ko) * 2022-07-28 2024-02-07 삼성디스플레이 주식회사 잉크젯 헤드 및 이를 포함하는 잉크젯 프린팅 장치

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JP2004314619A (ja) * 2003-03-31 2004-11-11 Kitakyushu Foundation For The Advancement Of Industry Science & Technology 静電誘引式液滴ノズルおよびその製造方法
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Publication number Priority date Publication date Assignee Title
EP0495663B1 (en) * 1991-01-18 1997-04-23 Canon Kabushiki Kaisha Liquid jet unit with orifices and recording apparatus using the same
JPH1034365A (ja) * 1996-07-26 1998-02-10 Seiko Epson Corp レーザー微小穿孔方法、及びレーザー微小穿孔装置
JP2002001944A (ja) * 2000-06-20 2002-01-08 Konica Corp 剪断モード型インクジェットヘッド
CN1684834A (zh) * 2002-09-24 2005-10-19 柯尼卡美能达控股株式会社 静电吸引式液体喷射头的制造方法,喷嘴板的制造方法,静电吸引式液体喷射头的驱动方法,静电吸引式液体喷射装置以及液体喷射装置
JP2004314619A (ja) * 2003-03-31 2004-11-11 Kitakyushu Foundation For The Advancement Of Industry Science & Technology 静電誘引式液滴ノズルおよびその製造方法
JP2005074635A (ja) * 2003-08-29 2005-03-24 Sharp Corp ノズルプレートおよびその製造方法
WO2005021269A1 (ja) * 2003-08-29 2005-03-10 Sharp Kabushiki Kaisha ノズルプレートおよびその製造方法
JP2007090862A (ja) * 2005-08-29 2007-04-12 Fujifilm Corp ノズル板の製造方法、液体吐出ヘッドの製造方法、および、ノズル板製造用の母型構造
JP2007098888A (ja) * 2005-10-07 2007-04-19 Seiko Epson Corp ノズル基板の製造方法、液滴吐出ヘッドの製造方法及び液滴吐出装置の製造方法
JP2007335460A (ja) * 2006-06-12 2007-12-27 Canon Inc デバイスパターン形成方法、デバイスパターン、およびデバイスパターン形成装置
JP2009125968A (ja) * 2007-11-20 2009-06-11 Seiko Epson Corp ノズル基板の製造方法、および液体噴射装置
CN102202797A (zh) * 2008-10-31 2011-09-28 富士胶卷迪马蒂克斯股份有限公司 成形喷嘴出口
JP2010214923A (ja) * 2009-03-19 2010-09-30 Seiko Epson Corp ノズル基板の製造方法、その製造方法で製造されたノズル基板、液滴吐出ヘッドの製造方法、その製造方法で製造された液滴吐出ヘッド及び液滴吐出装置

Also Published As

Publication number Publication date
US20150158300A1 (en) 2015-06-11
EP2879879B1 (en) 2024-01-17
KR101690893B1 (ko) 2016-12-28
CN104507686A (zh) 2015-04-08
WO2014021200A1 (en) 2014-02-06
TWI592312B (zh) 2017-07-21
US9481173B2 (en) 2016-11-01
EP2879879A1 (en) 2015-06-10
JP6048794B2 (ja) 2016-12-21
KR20150033704A (ko) 2015-04-01
EP2879879A4 (en) 2017-03-15
JP2014028351A (ja) 2014-02-13
TW201408498A (zh) 2014-03-01
IN2014KN02996A (enExample) 2015-05-08

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